Professor Zhenyu WU received his B.S. degree in 2004 from School of Physics, Shandong University, Jinan, China. He received his M.Sc. degree in 2006 and Ph.D. degree in 2011 from Institute of Functional Nanosystems, School of Engineering and Computer Sciences, Ulm University, Ulm, Germany. During 2011 – 2018, he was a senior engineer and project leader of MEMS technology at the Sensor Technology Center, Robert Bosch GmbH, Reutlingen, Germany. He was designated in 2018 as an associate professor at Shanghai Institute of Microsystem and Information Technology (SIMIT), Chinese Academy of Sciences, China, where he became a full professor in 2020 and led the research group for MEMS technology and advanced sensors. Since 2021, he serves as director of Laboratory of Transducer Technology, and since 2025, he serves as director of State Key Laboratory of Transducer Technology.

His research interest is new MEMS (Micro Electro Mechanical Systems) process technologies, new sensor devices and integrated optical microsystems, including piezoelectric MEMS mirrors, quantum photonic magnetic sensors, high temperature vibration and acceleration sensors, etc. Beside research and innovation, he focuses on the transfer of new sensor technologies to practical applications and scalable productions as well.

• Sep 2000 – Jul 2004 Bachelor of Science in Physics, Shandong University, Jinan, China
• Oct 2004 – Nov 2006 Master of Science in Advanced Materials, Ulm University, Ulm, Germany
• Dec 2006 – Jan 2011 PhD of Engineering (Dr.-Ing.), Ulm University, Ulm, Germany

• Feb 2011 – Oct 2018 Senior Engineer in Sensor Technology, Robert Bosch GmbH, Reutlingen, Germany
• Oct 2018 – Present Professor in State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China

Google Scholar:  https://scholar.google.com/citations?user=ZAHalVIAAAAJ&hl=zh-CN

ORCID: https://orcid.org/0000-0002-0025-3521

SIMIT: http://www.sim.cas.cn/