1. 微光机电系统技术

2. MEMS工艺、器件与系统

3. 量子传感技术

发表科研论文目录：https://orcid.org/0000-0002-0025-3521

   

080903-微电子学与固体电子学
085400-电子信息

微光机电系统技术
MEMS工艺、器件与系统
量子传感技术

2006-12--2011-02   德国乌尔姆大学，工程与计算机学院   工学博士
2004-10--2006-11   德国乌尔姆大学，先进材料专业   理学硕士
2000-09--2004-06   山东大学，物理学基地班   理学学士

   

2021-11~现在, 中国科学院上海微系统与信息技术研究所，传感技术实验室, 研究员/主任
2020-05~2021-10,中国科学院上海微系统与信息技术研究所，传感技术实验室, 研究员/副主任
2020-01~2020-04,中国科学院上海微系统与信息技术研究所，传感技术实验室, 研究员
2018-10~2019-12,中国科学院上海微系统与信息技术研究所，传感技术实验室, 副研究员
2011-02~2018-10,德国博世公司，传感技术研发部, 高级工程师/项目经理

微纳信息功能材料与器件

   

[1] 武震宇, 汪洋, 张家昌, 李安娜, 张程. 一种抑制MEMS微镜串扰的方法. CN: CN119224999A, 2024-12-31.
[2] 武震宇, 谢珂, 苏泳全, 王栎皓, 刘艺晨. 一种球形玻璃结构的制备方法. CN: CN119191686A, 2024-12-27.
[3] 陈浩, 刘启慧, 谢非, 彭霄, 程建功, 武震宇. 量子电流传感器及电流测量方法. CN: CN117129738A, 2023-11-28.
[4] 武震宇, 陈浩, 胡宇强, 刘艺晨, 王栎皓. 实现闭环反馈调节的MEMS传感器及激光功率在线测量方法. CN: CN116989890A, 2023-11-03.
[5] 武震宇, 苏泳全, 刘艺晨, 王栎皓. 一种硅基绝缘体上玻璃衬底结构及其制作方法. CN: CN116936460A, 2023-10-24.
[6] 武震宇, 苏泳全, 刘艺晨, 王栎皓. 一种锆钛酸铅薄膜湿法刻蚀方法. CN: CN115376906A, 2022-11-22.
[7] 武震宇, 刘艺晨, 王栎皓, 汪洋, 张玉遥. 大偏转角的光偏转器件. CN: CN116931255A, 2023-10-24.
[8] 武震宇, 刘艺晨, 王栎皓. 聚酰亚胺薄膜被动滤光器件及其制备方法. CN: CN116779207A, 2023-09-19.
[9] 武震宇, 陈浩, 王曹, 刘启慧, 程建功. 高速大动态范围磁场测量系统. CN: CN114442007A, 2022-05-06.
[10] 武震宇, 王栎皓, 刘艺晨, 汪洋, 余子昊. MEMS光学偏转器件. CN: CN114415365A, 2022-04-29.
[11] 武震宇, 陈浩, 王曹, 刘启慧, 程建功. 高速大动态范围磁场测量系统. CN: CN114442007A, 2022-05-06.
[12] 汪洋, 武震宇, 程建功. 一种高空间分辨率的多光谱舌象采集系统. CN: CN113425259A, 2021-09-24.
[13] 汪洋, 武震宇, 程建功. 一种数据采集方法、装置、终端及存储介质. CN: CN113392345A, 2021-09-14.
[14] 武震宇, 汪洋, 张浩, 王栎皓, 姜新泉. MEMS微镜单元及MEMS微镜阵列. CN: CN113281898A, 2021-08-20.
[15] 武震宇, 陈浩, 姜新泉, 程建功, 谢非. 钻石NV色心磁场传感器探头器件及传感器. CN: CN112903688A, 2021-06-04.
[16] 武震宇, 汪洋, 陈浩, 程建功. 一种光学反射镜及激光扫描共聚焦显微镜. CN: CN111722387A, 2020-09-29.
[17] 汪洋, 武震宇, 程建功. 一种数据采集方法、装置、终端及存储介质. CN: CN111724894B, 2023-08-11.
[18] 欧欣, 伊艾伦, 武震宇. 一种异质集成单晶钻石薄膜的制备方法. CN: CN110970363A, 2020-04-07.
[19] 王诗男, 武震宇. 一种光波导结构及其制造方法. CN: CN112014922A, 2020-12-01.

   

[1] Qihui Liu, Shaoxiong Nie, Xiao Peng, Yaochen Zhu, Nan Wang, Yuqiang Hu, Xin Luo, Chun li, Maoheng Jing, Chunji Zhang, Wei Liu, Hao Chen, Jiangong Cheng, Zhenyu Wu. Fiber‐Integrated Diamond Quantum Sensor for High‐Voltage Current Measurements. ADVANCED SENSOR RESEARCH[J]. 2025, 第 14 作者  通讯作者  4(1): n/a-n/a, https://doaj.org/article/c2aab3f1f99742e3884c280098adf592.
[2] Zhu, Weihong, Su, Yongquan, Gao, Shiyuan, Li, Xiaodong, Zhang, Yonggui, Wang, Lihao, Liu, Yichen, Wang, Yang, Wu, Zhenyu. Electrical aging of a piezoelectric MEMS fast steering mirror and its impact on reliability. SENSORS AND ACTUATORS A-PHYSICAL[J]. 2024, 第 9 作者  通讯作者  376: http://dx.doi.org/10.1016/j.sna.2024.115589.
[3] Yang, Yi, Liu, Yichen, Su, Yongquan, Wang, Yang, Zhang, Yonggui, Chen, Hao, Wang, Lihao, Wu, Zhenyu. Water-Immersible MEMS Mirror with a Large Optical Aperture. MICROMACHINES[J]. 2024, 第 8 作者  通讯作者  15(2): http://dx.doi.org/10.3390/mi15020235.
[4] Yang, Yi, Liu, Yichen, Su, Yongquan, Weng, Zhichao, Sun, Qianying, Qiao, Qifeng, Xue, Wenli, Zhang, Yonggui, Wang, Yang, Wang, Lihao, Wu, Zhenyu. MEMS fast steering mirror with a large optical aperture and high surface quality for free-space optical communication. OPTICS EXPRESS[J]. 2024, 第 11 作者  通讯作者  32(22): 37932-37945, http://dx.doi.org/10.1364/OE.525126.
[5] Liu, Yichen, Su, Yongquan, Weng, Zhichao, Yang, Yi, Wang, Yang, Wang, Lihao, Wu, Zhenyu, IEEE. A MEMS FAST STEERING MIRROR WITH 10 MM APERTURE FOR FREE-SPACE OPTICAL COMMUNICATION. 2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS. 2024, 第 7 作者  通讯作者  1011-1014, http://dx.doi.org/10.1109/MEMS58180.2024.10439423.
[6] Hu, Yuqiang, Cao, Lu, Nie, Shaoxiong, Liu, Qihui, Xie, Fei, Peng, Xiao, Zhu, Yaochen, Han, Jiachen, Chen, Xin, Wang, Lihao, Liu, Yichen, Liu, Tongyu, Chen, Hao, Wu, Zhenyu. MEMS Fabry-Perot sensor for accurate high pressure measurement up to 10 MPa. OPTICS EXPRESS[J]. 2024, 第 14 作者32(21): http://dx.doi.org/10.1364/OE.534552.
[7] Su, Yongquan, Liu, Yichen, Wang, Yang, Sun, Qianying, Qiao, Qifeng, Weng, Zhichao, Wang, Lihao, Wu, Zhenyu. A novel quasi-static MEMS piezoelectric micromirror array with a high fill factor and three degrees of freedom. SENSORS AND ACTUATORS A-PHYSICAL[J]. 2024, 第 8 作者  通讯作者  376: http://dx.doi.org/10.1016/j.sna.2024.115597.
[8] Liu, Qihui, Xie, Fei, Peng, Xiao, Zhang, Yonggui, Wang, Nan, Hu, Yuqiang, Wang, Lihao, Liu, Yichen, Wang, Yang, Nie, Shaoxiong, Chen, Hao, Cheng, Jiangong, Wu, Zhenyu. Closed-Loop Diamond Quantum Sensor for Large Range and High Precision Current Measurement. IEEE SENSORS JOURNAL[J]. 2024, 第 13 作者  通讯作者  24(4): 4356-4364, http://dx.doi.org/10.1109/JSEN.2023.3348161.
[9] Huang, Hao, Wang, Lihao, Wang, Yang, Liu, Yichen, Su, Yongquan, Zhu, Weihong, Zhang, Yonggui, Wu, Zhenyu, IEEE. BIAXIAL LISSAJOUS SCANNING PIEZOELECTRIC MEMS MIRROR BASED ON HIGH FILL FACTOR AND LARGE OPTICAL APERTURE. 2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS. 2024, 第 8 作者  通讯作者  166-169, http://dx.doi.org/10.1109/MEMS58180.2024.10439316.
[10] Xie, Fei, Chen, Zhichao, Peng, Xiao, Liu, Qihui, Li, Lingyun, Wang, Nan, Hu, Yuqiang, Liu, Yichen, Wang, Lihao, Chen, Hao, Cheng, Jiangong, Wu, Zhenyu, IEEE. MINIATURIZED DIAMOND QUANTUM MAGNETOMETER WITH INTEGRATED LASER SOURCE AND ALL ELECTRICAL I/OS. 2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS. 2024, 第 12 作者  通讯作者  577-580, http://dx.doi.org/10.1109/MEMS58180.2024.10439546.
[11] Li, Anna, Huang, Hao, Zhang, Pengcheng, Su, Yongquan, Zhang, Yonggui, Wang, Lihao, Liu, Yichen, Wang, Yang, Wu, Zhenyu. Determination of Crosstalk in a Dual-Axis Piezoelectric MEMS Mirror and Suppression With Feedforward Algorithms. IEEE SENSORS JOURNAL[J]. 2024, 第 9 作者  通讯作者  24(20): 32272-32282, http://dx.doi.org/10.1109/JSEN.2024.3447905.
[12] 张浩, 汪洋, 武震宇. 高频压电MEMS微镜设计与仿真. 传感器与微系统. 2024, 第 3 作者43(2): 76-80, http://lib.cqvip.com/Qikan/Article/Detail?id=7111327768.
[13] Feng, Liuhaodong, Zeng, Shuwen, Su, Yongquan, Wang, Lihao, Xu, Yang, Guo, Song, Chen, Shuo, Ji, Yucheng, Peng, Xinlin, Wu, Zhenyu, Wang, Shinan. Process Optimization and Performance Evaluation of TSV Arrays for High Voltage Application. MICROMACHINES[J]. 2023, 第 10 作者14(1): http://dx.doi.org/10.3390/mi14010102.
[14] []. Control of a MEMS Fast Steering Mirror With Improved Quasi-Static Performance. IEEE Access[J]. 2023, 
[15] Shuo Chen, Liuhaodong Feng, Song Guo, Yucheng Ji, Shuwen Zeng, Xinlin Peng, Yang Xu, Tianbao Hu, Zhenyu Wu, Shinan Wang, Antonio Lzaro, Pengcheng Xu. A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy. SENSORS (BASEL, SWITZERLAND). 2023, 第 9 作者23(3): https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9921686/.
[16] Liu, Qihui, Xie, Fei, Peng, Xiao, Hu, Yuqiang, Wang, Nan, Zhang, Yonggui, Wang, Yang, Li, Lingyun, Chen, Hao, Cheng, Jiangong, Wu, Zhenyu. Millimeter-Scale Temperature Self-Calibrated Diamond-Based Quantum Sensor for High-Precision Current Sensing. ADVANCED QUANTUM TECHNOLOGIES. 2023, 第 11 作者  通讯作者  http://dx.doi.org/10.1002/qute.202300210.
[17] Wang, Cao, Liu, Qihui, Hu, Yuqiang, Xie, Fei, Krishna, Krishangi, Wang, Nan, Wang, Lihao, Wang, Yang, Toussaint Jr, Kimani C, Cheng, Jiangong, Chen, Hao, Wu, Zhenyu, Wu, Zhenyu. Realization of high-dynamic-range broadband magnetic-field sensing with ensemble nitrogen-vacancy centers in diamond. REVIEW OF SCIENTIFIC INSTRUMENTS[J]. 2023, 第 12 作者  通讯作者  94(1): http://dx.doi.org/10.1063/5.0089908.
[18] 余子昊, 王栎皓, 汪洋, 刘艺晨, 武震宇. 卫星激光通信快速反射镜研究进展及发展趋势. 激光与光电子学进展. 2023, 第 5 作者60(15): 33-42, http://lib.cqvip.com/Qikan/Article/Detail?id=7110606842.
[19] Jiewei Cao, Tianxiang Chen, Huilin He, Yupeng Xu, Yong Chen, Na Gao, Yuanyuan Du, Zhenyu Wu, Yichen Liu. Visible light performance of x-ray filters for Einstein probe. Optical Engineering[J]. 2023, 第 8 作者62(4): 044103-1, https://www.spiedigitallibrary.org/journals/optical-engineering/volume-62/issue-04/044103/Visible-light-performance-of-x-ray-filters-for-Einstein-probe/10.1117/1.OE.62.4.044103.full.
[20] Yuqiang Hu, Fei Xie, Qihui Liu, Nan Wang, Jin Zhang, Yichen Liu, Yongquan Su, Yang Wang, Hao Chen, Zhenyu Wu. Microfabricated sensor device for CW and pulsed laser power measurements. Optics Express[J]. 2023, 第 10 作者  通讯作者  2(16): 2330, 
[21] Su, Yongquan, Liu, Yichen, Fei, Yue, Wang, Lihao, Cai, Jindong, Chen, Siqi, Wu, Zhenyu. A two-step wet etching process of PZT thin film with ultra-low undercut for MEMS applications. SENSORS AND ACTUATORS A-PHYSICAL[J]. 2023, 第 7 作者  通讯作者  349: http://dx.doi.org/10.1016/j.sna.2022.114014.
[22] Yuyao Zhang, Yichen Liu, Lihao Wang, Yongquan Su, Yonggui Zhang, Weihong Zhu, Yang Wang, Zhenyu Wu. Resolution adjustable Lissajous scanning with piezoelectric MEMS mirrors. Optics Express[J]. 2023, 第 8 作者  通讯作者  31(2): 2846, 
[23] Chen, Shuo, Feng, Liuhaodong, Guo, Song, Ji, Yucheng, Zeng, Shuwen, Peng, Xinlin, Xu, Yang, Hu, Tianbao, Wu, Zhenyu, Wang, Shinan. A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy. SENSORS[J]. 2023, 第 9 作者23(3): http://dx.doi.org/10.3390/s23031276.
[24] Xie, Fei, Hu, Yuqiang, Li, Lingyun, Wang, Cao, Liu, Qihui, Wang, Nan, Wang, Lihao, Wang, Shuna, Cheng, Jiangong, Chen, Hao, Wu, Zhenyu. A microfabricated fiber-integrated diamond magnetometer with ensemble nitrogen-vacancy centers. APPLIED PHYSICS LETTERS[J]. 2022, 第 11 作者  通讯作者  120(19): http://dx.doi.org/10.1063/5.0089732.
[25] Hao Zhang, Yang Wang, Lihao Wang, Yichen Liu, Hao Chen, Zhenyu Wu. Process Control Monitor (PCM) for Simultaneous Determination of the Piezoelectric Coefficients d31 and d33 of AlN and AlScN Thin Films. Micromachines[J]. 2022, 第 6 作者  通讯作者  13(4): 
[26] Liuhaodong Feng, Shuwen Zeng, Yongquan Su, Lihao Wang, Yang Xu, Song Guo, Shuo Chen, Yucheng Ji, Xinlin Peng, Zhenyu Wu, Shinan Wang, Nan Wang, Tao Wu, Jicong Zhao, Chen Liu. Process Optimization and Performance Evaluation of TSV Arrays for High Voltage Application. MICROMACHINES[J]. 2022, 第 10 作者14(1): https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9863637/.
[27] Wang, Cao, Liu, Qihui, Hu, Yuqiang, Xie, Fei, Krishna, Krishangi, Wang, Nan, Wang, Lihao, Wang, Yang, Toussaint Jr, Kimani C, Cheng, Jiangong, Chen, Hao, Wu, Zhenyu. Realization of high-dynamic-range broadband magnetic-field sensing with ensemble nitrogen-vacancy centers in diamond. 2022, 第 12 作者http://arxiv.org/abs/2209.11360.
[28] Yichen Liu, Lihao Wang, Yongquan Su, Yuyao Zhang, Yang Wang, Zhenyu Wu. AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application. MICROMACHINES[J]. 2022, 第 6 作者  通讯作者  13(9): https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9504672/.
[29] 王曹, 刘启慧, 程建功, 陈浩, 武震宇. 基于金刚石量子色心的温度磁场同步测量技术. 微纳电子技术. 2022, 第 5 作者59(11): 1226-1233, http://lib.cqvip.com/Qikan/Article/Detail?id=7108862318.
[30] 刘启慧, 汪洋, 李凌云, 武震宇. 用于钻石磁传感器量子态操控的微波谐振器. 功能材料与器件学报[J]. 2021, 第 4 作者  通讯作者  153-164, https://kns.cnki.net/KCMS/detail/detail.aspx?dbcode=CJFQ&dbname=CJFDAUTODAY&filename=GNCQ202103002&v=MTU2NDNVUjd1ZlllVnZGeUhoV3J2T0lpUElmN0c0SE5ETXJJOUZab1I4ZVgxTHV4WVM3RGgxVDNxVHJXTTFGckM=.
[31] Cao, Zhihai, Walter, Constanze, Landfester, Katharina, Wu, Zhenyu, Ziener, Ulrich. Synthesis of Silver/Poly(2-hydroxyethyl methacrylate) Particles via a Combination of Inverse Miniemulsion and Silver Ion Reduction in a "Nanoreactor". LANGMUIR[J]. 2011, 第 4 作者27(16): 9849-9859, https://www.webofscience.com/wos/woscc/full-record/WOS:000293662800026.
[32] Zierold, Robert, Wu, Zhenyu, Biskupek, Johannes, Kaiser, Ute, Bachmann, Julien, Krill, Carl E, III, Nielsch, Kornelius. Magnetic, Multilayered Nanotubes of Low Aspect Ratios for Liquid Suspensions. ADVANCED FUNCTIONAL MATERIALS[J]. 2011, 第 2 作者21(2): 226-232, http://dx.doi.org/10.1002/adfm.201001395.
[33] Wu, Zhenyu, Mueller, Anna, Degenhard, Sven, Ruff, S Emil, Geiger, Fania, Bittner, Alexander M, Wege, Christina, Krill, Carl E, III. Enhancing the Magnetoviscosity of Ferrofluids by the Addition of Biological Nanotubes. ACS NANO[J]. 2010, 第 1 作者4(8): 4531-4538, https://www.webofscience.com/wos/woscc/full-record/WOS:000281052700025.
[34] Wu, Zhenyu, Zierold, Robert, Mueller, Anna, Ruff, S Emil, Ma, Chenchen, Khan, Abid A, Geiger, Fania, Sommer, Bernd A, Knez, Mato, Nielsch, Kornelius, Bittner, Alexander M, Wege, Christina, Krill, Carl E, III. Preparation and magnetoviscosity of nanotube ferrofluids by viral scaffolding and ALD on porous templates. PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS[J]. 2010, 第 1 作者247(10): 2412-2423, https://www.doi.org/10.1002/pssb.201046208.

（1） 汽车电子技术——硬件、软件、系统集成和项目管理, 机械工业出版社, 2014-03, 第 1 作者
（2） 汽车上的测量与自动化手册, 机械工业出版社, 2018-02, 第 5 作者
（3） 微纳机电系统与微纳传感器技术, 科学出版社, 2020-08, 第 其他 作者
（4） 智能传感器导论, Introduction to Intelligent Sensor, 中国科学技术出版社, 2022-09, 第 其他 作者

   

（ 1 ） MEMS工艺与多维感知传感器研究, 负责人, 国家任务, 2020-01--2022-12
（ 2 ） 激光快速扫描共聚焦活体细胞显微成像系统, 负责人, 中国科学院计划, 2020-01--2021-12
（ 3 ） 高精度电磁测量核心技术装备, 参与, 中国科学院计划, 2020-01--2022-12
（ 4 ） 8英寸MEMS传感器加工中试平台, 负责人, 国家任务, 2021-12--2024-11
（ 5 ） 空间激光通信MEMS快速反射镜, 负责人, 地方任务, 2021-09--2023-12

已指导学生

余子昊  硕士研究生  085400-电子信息  

张浩  硕士研究生  085209-集成电路工程  

王曹  硕士研究生  080903-微电子学与固体电子学  

现指导学生

黄昊  博士研究生  080903-微电子学与固体电子学  

谢非  博士研究生  080903-微电子学与固体电子学  

王楠  博士研究生  080903-微电子学与固体电子学  

李安娜  硕士研究生  080903-微电子学与固体电子学  

薛文立  硕士研究生  080903-微电子学与固体电子学  

朱耀晨  硕士研究生  085400-电子信息  

张程  博士研究生  080903-微电子学与固体电子学  

彭霄  博士研究生  080903-微电子学与固体电子学  

刘艺晨  博士研究生  080903-微电子学与固体电子学  

张家昌  硕士研究生  080903-微电子学与固体电子学  

发表科研论文目录（ORCID）：https://orcid.org/0000-0002-0025-3521

中国科学院上海微系统与信息技术研究所：http://www.sim.cas.cn/