本人的主要研究领域为高精度微惯性传感器及其系统：单轴/多轴微机电加速度传感器、微机电陀螺、微惯性测量单元等。研究内容涉及：新型惯性传感原理、器件设计优化、微加工工艺兼容性、低噪声前端电路设计和传感器集成等方面。

同时，课题组面向协同任务下的机器人自主定位与导航技术，开展基于多源传感信息融合的微型PNT（定位-导航-授时）系统研究，主要包括基于广义视觉（Visual）与惯性测量（IMU）的VIO技术，基于无线信道的多节点高精度时频同步技术，适用于嵌入式平台的高能效融合SLAM技术等。

本人的研究兴趣还包括：耦合微机电谐振器、非线性微机电谐振器与振荡器、谐振式微机电传感器以及环境自供能微传感器集成等。

研究主要针对战略及工业生产领域对微型化高精度惯性测量技术的迫切需求，同时面向机器人、物联网以及智能城市，智能基础设施对新一代微传感器的应用需求。

研究组每年招收3-4名硕士或直博研究生，欢迎具备微电子、微加工、模/数混合电路设计等相关背景以及自动化、测控、机械等专业并对微机电传感器，特别是惯性传感器研究以及微传感系统集成感兴趣的同学报考

080903-微电子学与固体电子学

微机电惯性传感器，多传感融合PNT系统
微机电谐振器，滤波器
三维异质异构集成技术

2009-10--2014-01   剑桥大学   哲学博士
2005-09--2009-07   北京大学   理学学士

2009.10 至 2014.01 英国剑桥大学工程系 微系统专业 博士研究生 
2005.09 至 2009.07 中国北京大学元培计划试验班（元培学院）微电子学专业 本科

2014年 获 剑桥大学 哲学博士 学位
2009年 获 北京大学 理学学士 学位

邹旭东，博士，国家高层次人才青年项目入选者。现任中国科学院空天信息创新研究院研究员，“传感技术国家重点实验室（北方基地）”固定人员，中国科学院大学电子电气与通讯工程学院岗位教授、博士生导师，中国科学技术大学国家示范性微电子学院兼职博士生导师，中国电子学会“传感与微系统”分会青年副主任委员，中国微米纳米技术学会国际合作交流委员会委员。本科毕业于北京大学元培计划实验班，获微电子专业理学学士学位，研究生毕业于剑桥大学工程系，获微系统专业博士学位。曾在剑桥大学纳米科学中心从事研究工作并当选剑桥大学丘吉尔学院Research Fellow，2016回国加入中国科学院电子学研究所，任研究员。邹旭东研究员长期从事微机电系统（MEMS）、微机械谐振器与传感器，高精度微惯性传感器，分布式传感微系统，定位-导航-授时微系统以及微纳加工技术开发等研究工作。自2014年至今，主持或共同主持Innovate UK、 UK NERC以及国家自然科学基金、国家重点研发计划、XX科技创新特区、中科院“从0到1”颠覆性前沿项目、重点部署项目等科研项目10余项。研究成果在MEMS以及传感器、人工智能领域内著名期刊及国际会议上共发表论文50余篇，多次获得会议优秀论文奖，合著英文专著1部、合作翻译英文专著1部；申请发明专利20余项，其中国际发明专利6项，授权专利4项。曾获国家优秀自费留学生奖，中国电子教育学会优秀博士生论文指导教师奖等荣誉。

2016-03~现在, 中国科学院电子学研究所, 研究员
2014-10~2016-03,剑桥大学丘吉尔学院, Postdoc Fellow
2014-02~2016-02,剑桥大学纳米科学中心, Research Associate

2019-07-01-今,中国电子学会所传感与微系统分会, 副主任委员
2016-07-31-今,中国微米纳米技术学会, 国际合作委员会委员
2011-08-31-2013-08-30,全英中国学生学者联谊会执委会, 执行委员、创业与发展部部长
2010-10-31-2016-03-01,全英北京大学校友会理事会, 执行理事

微机电系统基础一班
综合电子学研究
微机电系统基础二班
微机电系统基础
前沿电子学研究
本科生毕业设计（电子信息工程）
科研实践Ⅰ
科研实践Ⅱ

   

（1） 中国电子教育学会优秀博士生论文指导教师, 一等奖, 省级, 2021
（2） 中国发明协会发明创新奖, 二等奖, 部委级, 2021
（3） 国家优秀自费留学生奖学金, 一等奖, 国家级, 2012
（4） 光华奖学金, 一等奖, 院级, 2009

[1] 邹旭东, 刘云飞, 李志天, 肖麟慧, 蔡朋成. 一种惯性测量单元参数的标定方法、装置. CN: CN114018291A, 2022-02-08.
[2] 邹旭东, 刘振溪, 陈嘉民, 李志天, 杨伍昊, 熊兴崟, 汪政. 一种MEMS磁阻传感器. CN: CN215340279U, 2021-12-28.
[3] 熊兴崟, 王坤锋, 邹旭东, 汪政. 一种弱耦合谐振式加速度传感器. CN: CN113740560A, 2021-12-03.
[4] 郑帅康, 邹旭东, 李志天, 熊兴崟, 杨伍昊. 一种基于UWB和VIO融合的多运动节点定位方法及系统. CN: CN113721189A, 2021-11-30.
[5] 邹旭东, 王佳伟, 熊兴崟, 李志天, 杨伍昊, 汪政. 一种MEMS谐振式加速度传感器. CN: CN113702663A, 2021-11-26.
[6] 李志天, 张海峰, 邹旭东, 郑帅康. 协同定位方法及定位系统. CN: CN113670318A, 2021-11-19.
[7] 邹旭东, 刘振溪, 陈嘉民, 李志天, 杨伍昊, 熊兴崟, 汪政. 一种磁阻运动调制的低频MEMS磁阻传感器制作方法. CN: CN113562687A, 2021-10-29.
[8] 邹旭东, 刘振溪, 陈嘉民, 李志天, 杨伍昊, 熊兴崟, 汪政. 一种磁阻运动调制的低频MEMS磁阻传感器. CN: CN113567898A, 2021-10-29.
[9] 邹旭东, 刘泽畅, 熊兴崟, 蔡朋成. 加速度计及加速度计的温度自补偿方法. CN: CN113358899A, 2021-09-07.
[10] 邹旭东, 刘振溪, 陈嘉民, 李志天, 杨伍昊, 熊兴崟, 汪政. 一种提高低频磁场分辨率的MEMS谐振式磁阻传感器. CN: CN111007442B, 2021-04-09.
[11] 李志天, 郑帅康, 邹旭东, 熊兴崟, 杨伍昊. 基于图优化算法超宽带惯性导航融合位姿估计方法. CN: CN112525197A, 2021-03-19.
[12] 邹旭东, 刘梦瑶, 李志天, 熊兴崟, 杨伍昊, 汪政. 植入式微功耗多生理参量记录装置. CN: CN112315457A, 2021-02-05.
[13] 邹旭东, 汪政, 熊兴崟, 王坤锋, 李志天, 杨伍昊. 弱耦合式MEMS加速度传感器. CN: CN112230017A, 2021-01-15.
[14] 邹旭东, 孙杰, 杨伍昊, 郑天依, 熊兴崟, 汪政, 李志天. 基于耦合MEMS谐振器的储备池计算硬件的实现方法及装置. CN: CN112163358A, 2021-01-01.
[15] 李志天, 薛博, 邹旭东, 熊兴崟, 杨伍昊, 汪政. 基于脉冲调制信道的时频同步系统与方法. CN: CN112134640A, 2020-12-25.
[16] 熊兴崟, 邹旭东, 汪政, 李志天, 杨伍昊. 高灵敏度MEMS谐振式加速度传感器. CN: CN111721971A, 2020-09-29.
[17] 李志天, 邹旭东, 熊兴崟, 杨伍昊, 汪政. 基于相干光视觉光流检测的加速度计标定方法及装置. CN: CN111679099A, 2020-09-18.
[18] 陈嘉民, 邹旭东, 薛宁, 祁志美. 钴基Heusler合金结构及提升其有序化的制备方法. CN: CN111549317A, 2020-08-18.
[19] 邹旭东, 肖麟慧, 李志天, 杨伍昊, 熊兴崟, 刘云飞. 单目视觉信息和IMU信息相融合的尺度估计系统及方法. CN: CN110617813A, 2019-12-27.
[20] 邹旭东, 肖麟慧, 李志天, 杨伍昊, 熊兴崟, 刘云飞. 单目视觉和惯性传感器融合的远距离测距系统及方法. CN: CN110617814A, 2019-12-27.

   

[1] 马良博, 邹旭东. An Intrinsically Temperature-Drift Suppression Phase-Locked Loop With MEMS Voltage Controlled Oscillator for Micromechanical Resonant Accelerometer. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS[J]. 2022, [2] Haoqi Lyu, Zheng Wang, Wuhao Yang, Xingyin Xiong, Zhenxi Liu, 邹旭东. Modeling and Parameter Sensitivity Improvement in ΔE-Effect Magnetic Sensor Based on Mode Localization Effect. Micromachines[J]. 2022, 13(5): https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9145385/.
[3] Zheng, Shuaikang, Li, Zhitian, Liu, Yunfei, Zhang, Haifeng, Zou, Xudong. An Optimization-Based UWB-IMU Fusion Framework for UGV. IEEE SENSORS JOURNAL[J]. 2022, 22(5): 4369-4377, http://dx.doi.org/10.1109/JSEN.2022.3144660.
[4] Lyu, Haoqi, Wang, Zheng, Yang, Wuhao, Xiong, Xingyin, Liu, Zhenxi, Zou, Xudong. Modeling and Parameter Sensitivity Improvement in Delta E-Effect Magnetic Sensor Based on Mode Localization Effect. MICROMACHINES[J]. 2022, 13(5): http://dx.doi.org/10.3390/mi13050674.
[5] 张海峰, 李志天, 郑帅康, 刘云飞, 郑鹏程, 邹旭东. UWB/INS-based robust anchor-freerelative positioning scheme for UGVs. Measurement Science and Technology[J]. 2022, [6] Liu, Zhenxi, Chen, Jiamin, Zou, Xudong. Magnetic Flux Synchronous Motion Modulation for Improving the Low-Frequency Magnetic Field Detection Limit of Magnetoresistive Sensor Using MEMS Resonators. IEEE TRANSACTIONS ON MAGNETICS[J]. 2022, 58(2): http://dx.doi.org/10.1109/TMAG.2021.3092404.
[7] 马良博, 邹旭东. An Intrinsically Temperature-Drift Suppression Phase-Locked Loop With MEMS Voltage Controlled Oscillator for Micromechanical Resonant Accelerometer. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS[J]. 2022, [8] Haoqi Lyu, Zheng Wang, Wuhao Yang, Xingyin Xiong, Zhenxi Liu, 邹旭东. Modeling and Parameter Sensitivity Improvement in ΔE-Effect Magnetic Sensor Based on Mode Localization Effect. Micromachines[J]. 2022, 13(5): https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9145385/.
[9] Zheng, Shuaikang, Li, Zhitian, Liu, Yunfei, Zhang, Haifeng, Zou, Xudong. An Optimization-Based UWB-IMU Fusion Framework for UGV. IEEE SENSORS JOURNAL[J]. 2022, 22(5): 4369-4377, http://dx.doi.org/10.1109/JSEN.2022.3144660.
[10] Lyu, Haoqi, Wang, Zheng, Yang, Wuhao, Xiong, Xingyin, Liu, Zhenxi, Zou, Xudong. Modeling and Parameter Sensitivity Improvement in Delta E-Effect Magnetic Sensor Based on Mode Localization Effect. MICROMACHINES[J]. 2022, 13(5): http://dx.doi.org/10.3390/mi13050674.
[11] 张海峰, 李志天, 郑帅康, 刘云飞, 郑鹏程, 邹旭东. UWB/INS-based robust anchor-freerelative positioning scheme for UGVs. Measurement Science and Technology[J]. 2022, [12] Liu, Zhenxi, Chen, Jiamin, Zou, Xudong. Magnetic Flux Synchronous Motion Modulation for Improving the Low-Frequency Magnetic Field Detection Limit of Magnetoresistive Sensor Using MEMS Resonators. IEEE TRANSACTIONS ON MAGNETICS[J]. 2022, 58(2): http://dx.doi.org/10.1109/TMAG.2021.3092404.
[13] 邹旭东. Dynamic behaviours of double-end tuning fork based comb driven microelectromechanical resonators for modulating magnetic flux synchronously. Journal of Micromechanics and Microengineering. 2021, [14] Sun, Jie, Yang, Wuhao, Zheng, Tianyi, Xiong, Xingyin, Liu, Yunfei, Wang, Zheng, Li, Zhitian, Zou, Xudong. Novel nondelay-based reservoir computing with a single micromechanical nonlinear resonator for high-efficiency information processing. MICROSYSTEMS & NANOENGINEERING[J]. 2021, 7(1): http://dx.doi.org/10.1038/s41378-021-00313-7.
[15] T Y Zheng, W H Yang, J Sun, X Y Xiong, Z T Li, X D Zou. Parameters optimization method for the time-delayed reservoir computing with a nonlinear duffing mechanical oscillator. SCIENTIFIC REPORTS[J]. 2021, 11(1): https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7806606/.
[16] Liu, Zhenxi, Chen, Jiamin, Zou, Xudong. Modeling the Piezoelectric Cantilever Resonator with Different Width Layers. SENSORS[J]. 2021, 21(1): https://doaj.org/article/aa2df6a80f6c4738b0daeeb84a7c790d.
[17] Cai, Pengcheng, Xiong, Xingyin, Wang, Kunfeng, Wang, Jiawei, Zou, Xudong. An Improved Difference Temperature Compensation Method for MEMS Resonant Accelerometers. MICROMACHINES[J]. 2021, 12(9): http://dx.doi.org/10.3390/mi12091022.
[18] Zheng, Tianyi, Yang, Wuhao, Sun, Jie, Xiong, Xingyin, Wang, Zheng, Li, Zhitian, Zou, Xudong. Enhancing Performance of Reservoir Computing System Based on Coupled MEMS Resonators. SENSORS[J]. 2021, 21(9): https://doaj.org/article/c43bfc6d702c41799b9ebf8e86d4a226.
[19] Xiong, Xingyin, Zou, Xudong, Wang, Zheng, Wang, Kunfeng, Li, Zhitian, Yang, Wuhao. Using Electrostatic Spring Softening Effect to Enhance Sensitivity of MEMS Resonant Accelerometers. IEEE SENSORS JOURNAL[J]. 2021, 21(5): 5819-5827, https://www.webofscience.com/wos/woscc/full-record/WOS:000616329300025.
[20] Lei, Pengyu, Li, Zhitian, Xue, Bo, Zhang, Haifeng, Zou, Xudong. Hybsync: Nanosecond Wireless Position and Clock Synchronization Based on UWB Communication with Multisensors. JOURNAL OF SENSORS[J]. 2021, 2021: http://dx.doi.org/10.1155/2021/9920567.
[21] 邹旭东. Magnetic Flux Synchronous Motion Modulation for Improving the Low-frequency Magnetic Field Detection Limit of Magnetoresistive Sensor Using MEMS Resonators. IEEE Transactions on Magnetics. 2021, [22] Zhou, Liling, Wang, Yingzi, Liu, Yunfei, Zhang, Haifeng, Zheng, Shuaikang, Zou, Xudong, Li, Zhitian. A Tightly-Coupled Positioning System of Online Calibrated RGB-D Camera and Wheel Odometry Based on SE(2) Plane Constraints. ELECTRONICS[J]. 2021, 10(8): https://doaj.org/article/fa69575d8ece46378e2f9d7e771d5280.
[23] 邹旭东. Dynamic behaviours of double-end tuning fork based comb driven microelectromechanical resonators for modulating magnetic flux synchronously. Journal of Micromechanics and Microengineering. 2021, [24] Sun, Jie, Yang, Wuhao, Zheng, Tianyi, Xiong, Xingyin, Liu, Yunfei, Wang, Zheng, Li, Zhitian, Zou, Xudong. Novel nondelay-based reservoir computing with a single micromechanical nonlinear resonator for high-efficiency information processing. MICROSYSTEMS & NANOENGINEERING[J]. 2021, 7(1): http://dx.doi.org/10.1038/s41378-021-00313-7.
[25] T Y Zheng, W H Yang, J Sun, X Y Xiong, Z T Li, X D Zou. Parameters optimization method for the time-delayed reservoir computing with a nonlinear duffing mechanical oscillator. SCIENTIFIC REPORTS[J]. 2021, 11(1): https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7806606/.
[26] Liu, Zhenxi, Chen, Jiamin, Zou, Xudong. Modeling the Piezoelectric Cantilever Resonator with Different Width Layers. SENSORS[J]. 2021, 21(1): https://doaj.org/article/aa2df6a80f6c4738b0daeeb84a7c790d.
[27] Cai, Pengcheng, Xiong, Xingyin, Wang, Kunfeng, Wang, Jiawei, Zou, Xudong. An Improved Difference Temperature Compensation Method for MEMS Resonant Accelerometers. MICROMACHINES[J]. 2021, 12(9): http://dx.doi.org/10.3390/mi12091022.
[28] Zheng, Tianyi, Yang, Wuhao, Sun, Jie, Xiong, Xingyin, Wang, Zheng, Li, Zhitian, Zou, Xudong. Enhancing Performance of Reservoir Computing System Based on Coupled MEMS Resonators. SENSORS[J]. 2021, 21(9): https://doaj.org/article/c43bfc6d702c41799b9ebf8e86d4a226.
[29] Xiong, Xingyin, Zou, Xudong, Wang, Zheng, Wang, Kunfeng, Li, Zhitian, Yang, Wuhao. Using Electrostatic Spring Softening Effect to Enhance Sensitivity of MEMS Resonant Accelerometers. IEEE SENSORS JOURNAL[J]. 2021, 21(5): 5819-5827, https://www.webofscience.com/wos/woscc/full-record/WOS:000616329300025.
[30] Lei, Pengyu, Li, Zhitian, Xue, Bo, Zhang, Haifeng, Zou, Xudong. Hybsync: Nanosecond Wireless Position and Clock Synchronization Based on UWB Communication with Multisensors. JOURNAL OF SENSORS[J]. 2021, 2021: http://dx.doi.org/10.1155/2021/9920567.
[31] 邹旭东. Magnetic Flux Synchronous Motion Modulation for Improving the Low-frequency Magnetic Field Detection Limit of Magnetoresistive Sensor Using MEMS Resonators. IEEE Transactions on Magnetics. 2021, [32] Zhou, Liling, Wang, Yingzi, Liu, Yunfei, Zhang, Haifeng, Zheng, Shuaikang, Zou, Xudong, Li, Zhitian. A Tightly-Coupled Positioning System of Online Calibrated RGB-D Camera and Wheel Odometry Based on SE(2) Plane Constraints. ELECTRONICS[J]. 2021, 10(8): https://doaj.org/article/fa69575d8ece46378e2f9d7e771d5280.
[33] 汪政, 熊兴崟, 李志天, 王坤锋, 杨伍昊, 邹旭东. 谐振式加速度计动态特性研究. 传感器与微系统[J]. 2020, 39(6): 8-11, http://lib.cqvip.com/Qikan/Article/Detail?id=7101796356.
[34] Li, Zhitian, Yang, Wuhao, Xiong, Xingyin, Wang, Zheng, Zou, Xudong. Viaxl: A Solution of a Low-Cost Real-Time Visual Accelerometer Based on Laser Speckle Optical Flow Detection. SENSORS[J]. 2020, 20(24): https://doaj.org/article/49ef72b270dd49c08d66f9df317e5a2f.
[35] 汪政, 熊兴崟, 李志天, 王坤锋, 杨伍昊, 邹旭东. 谐振式加速度计动态特性研究. 传感器与微系统[J]. 2020, 39(6): 8-11, http://lib.cqvip.com/Qikan/Article/Detail?id=7101796356.
[36] Li, Zhitian, Yang, Wuhao, Xiong, Xingyin, Wang, Zheng, Zou, Xudong. Viaxl: A Solution of a Low-Cost Real-Time Visual Accelerometer Based on Laser Speckle Optical Flow Detection. SENSORS[J]. 2020, 20(24): https://doaj.org/article/49ef72b270dd49c08d66f9df317e5a2f.
[37] 王金戈, 邹旭东, 仇晓松, 蔡浩原. 动态环境下结合语义的鲁棒视觉SLAM. 传感器与微系统[J]. 2019, 125-128,132, http://lib.cqvip.com/Qikan/Article/Detail?id=67718174504849574853485154.
[38] 仇晓松, 邹旭东, 王金戈, 展扬. 基于卷积神经网络的视觉位置识别方法. 计算机工程与设计[J]. 2019, 40(1): 223-229, http://lib.cqvip.com/Qikan/Article/Detail?id=7001132800.
[39] 张易凡, 刘梦瑶, 邹旭东. 低功耗鸟类穿戴生理信息采集系统设计. 国外电子测量技术[J]. 2019, 38(9): 60-65, http://lib.cqvip.com/Qikan/Article/Detail?id=7100213875.
[40] Pandit, Milind, Zhao, Chun, Sobreviela, Guillermo, Du, Sijun, Zou, Xudong, Seshia, Ashwin. Utilizing Energy Localization in Weakly Coupled Nonlinear Resonators for Sensing Applications. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS[J]. 2019, 28(2): 182-188, [41] Xiao, Linhui, Wang, Jinge, Qiu, Xiaosong, Rong, Zheng, Zou, Xudong. Dynamic-SLAM: Semantic monocular visual localization and mapping based on deep learning in dynamic environment. ROBOTICS AND AUTONOMOUS SYSTEMS[J]. 2019, 117: 1-16, http://dx.doi.org/10.1016/j.robot.2019.03.012.
[42] 王金戈, 邹旭东, 仇晓松, 蔡浩原. 动态环境下结合语义的鲁棒视觉SLAM. 传感器与微系统[J]. 2019, 125-128,132, http://lib.cqvip.com/Qikan/Article/Detail?id=67718174504849574853485154.
[43] 仇晓松, 邹旭东, 王金戈, 展扬. 基于卷积神经网络的视觉位置识别方法. 计算机工程与设计[J]. 2019, 40(1): 223-229, http://lib.cqvip.com/Qikan/Article/Detail?id=7001132800.
[44] 张易凡, 刘梦瑶, 邹旭东. 低功耗鸟类穿戴生理信息采集系统设计. 国外电子测量技术[J]. 2019, 38(9): 60-65, http://lib.cqvip.com/Qikan/Article/Detail?id=7100213875.
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[62] Zhao, Chun, Pandit, Milind, Sun, Boqian, Sobreviela, Guillermo, Zou, Xudong, Seshia, Ashwin. A Closed-Loop Readout Configuration for Mode-Localized Resonant MEMS Sensors. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS[J]. 2017, 26(3): 501-503, https://www.webofscience.com/wos/woscc/full-record/WOS:000402736900002.
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[67] 邹旭东. The Impact of Damping on the Frequency Stability of Nonlinear MEMS Oscillator. Journal of Microelectromechanical Systems. 2015, [68] Zou Xudong, Seshia Ashwin A, IEEE. A HIGH-RESOLUTION RESONANT MEMS ACCELEROMETER. 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)null. 2015, 1247-1250, http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000380461400310.
[69] Xudong Zou, Pradyumna Thiruvenkatanathan, Ashwin A. Seshia. A high-resolution micro-electro-mechanical resonant tilt sensor. Sensors & Actuators: A. Physical. 2014, 220: 168-177, http://dx.doi.org/10.1016/j.sna.2014.10.004.
[70] Zou, Xudong, Thiruvenkatanathan, Pradyumna, Seshia, Ashwin A. A Seismic-Grade Resonant MEMS Accelerometer. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS[J]. 2014, 23(4): 768-770, https://www.webofscience.com/wos/woscc/full-record/WOS:000341573300003.
[71] Zou, Xudong, Thiruvenkatanathan, Pradyurnna, Seshia, Ashwin A. A high-resolution micro-electro-mechanical resonant tilt sensor. SENSORS AND ACTUATORS A-PHYSICAL[J]. 2014, 220: 168-177, http://dx.doi.org/10.1016/j.sna.2014.10.004.
[72] Xudong Zou, Pradyumna Thiruvenkatanathan, Ashwin A. Seshia. A high-resolution micro-electro-mechanical resonant tilt sensor. Sensors & Actuators: A. Physical. 2014, 220: 168-177, http://dx.doi.org/10.1016/j.sna.2014.10.004.
[73] Zou, Xudong, Thiruvenkatanathan, Pradyumna, Seshia, Ashwin A. A Seismic-Grade Resonant MEMS Accelerometer. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS[J]. 2014, 23(4): 768-770, https://www.webofscience.com/wos/woscc/full-record/WOS:000341573300003.
[74] Zou, Xudong, Thiruvenkatanathan, Pradyurnna, Seshia, Ashwin A. A high-resolution micro-electro-mechanical resonant tilt sensor. SENSORS AND ACTUATORS A-PHYSICAL[J]. 2014, 220: 168-177, http://dx.doi.org/10.1016/j.sna.2014.10.004.
[75] 邹旭东. Micro-Electro-Mechanical Resonant Tilt Sensor with 250 Nano-Radian Resolution. Proceedings of Joint EFTF-IFC 2013. 2013, [76] 邹旭东. Micro-Electro-Mechanical Resonant Tilt Sensor with 250 Nano-Radian Resolution. Proceedings of Joint EFTF-IFC 2013. 2013, [77] Zhang, Jinwen, Zou, Xudong, Zhang, Yaping. Improvement of the Performance of the PECVD SiO2/Si3N4 Double-layer Electrets. IEEE TRANSACTIONS ON DIELECTRICS AND ELECTRICAL INSULATION[J]. 2011, 18(2): 456-462, https://www.webofscience.com/wos/woscc/full-record/WOS:000289159200012.
[78] 邹旭东. Voltage programmable dual-band bandpass/bandstop filter response in a single micro-electro-mechanical device. Proceedings of Transducers 2011. 2011, [79] Zou XuDong, Zhang JinWen. Study on PECVD SiO2/Si3N4 double-layer electrets with different thicknesses. SCIENCE CHINA-TECHNOLOGICAL SCIENCES[J]. 2011, 54(8): 2123-2129, http://lib.cqvip.com/Qikan/Article/Detail?id=38450017.
[80] Zhang, Jinwen, Zou, Xudong, Zhang, Yaping. Improvement of the Performance of the PECVD SiO2/Si3N4 Double-layer Electrets. IEEE TRANSACTIONS ON DIELECTRICS AND ELECTRICAL INSULATION[J]. 2011, 18(2): 456-462, https://www.webofscience.com/wos/woscc/full-record/WOS:000289159200012.
[81] 邹旭东. Voltage programmable dual-band bandpass/bandstop filter response in a single micro-electro-mechanical device. Proceedings of Transducers 2011. 2011, [82] Zou XuDong, Zhang JinWen. Study on PECVD SiO2/Si3N4 double-layer electrets with different thicknesses. SCIENCE CHINA-TECHNOLOGICAL SCIENCES[J]. 2011, 54(8): 2123-2129, http://lib.cqvip.com/Qikan/Article/Detail?id=38450017.
[83] Zou X, Yan J, Seshia A A, Jakoby B, Vellekoop MJ. A novel tuneable band-pass filter based on a single square-ring MEMS resonator. EUROSENSORS XXIV CONFERENCEnull. 2010, 5: 1446-1449, [84] Zou X, Yan J, Seshia A A, Jakoby B, Vellekoop MJ. A novel tuneable band-pass filter based on a single square-ring MEMS resonator. EUROSENSORS XXIV CONFERENCEnull. 2010, 5: 1446-1449, [85] Zou, Xudong, Chen, Kenle, Zhang, Hualiang, Zhang, Jinwen, IEEE. Design and Simulation of 4-Bit 10-14GHz RF MEMS Tunable Filter. 2009 4TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1 AND 2null. 2009, 21-+, [86] Chen, Kenle, Dai, Yueyang, Zou, Xudong, Zhang, Jinwen, IEEE. A low-loss RF MEMS switch with dielectric layer on the lower surface of the bridge. 2009 4TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1 AND 2null. 2009, 152-+, [87] Zou, Xudong, Chen, Kenle, Zhang, Hualiang, Zhang, Jinwen, IEEE. Design and Simulation of 4-Bit 10-14GHz RF MEMS Tunable Filter. 2009 4TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1 AND 2null. 2009, 21-+, [88] Chen, Kenle, Dai, Yueyang, Zou, Xudong, Zhang, Jinwen, IEEE. A low-loss RF MEMS switch with dielectric layer on the lower surface of the bridge. 2009 4TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1 AND 2null. 2009, 152-+, [89] Chen Zhiyu, Zou Xudong, Zhang Jinwen, Huang R, Yu M, An X. Effects of Different Si3N4 Thicknesses on the Performance of PECVD SiO2/Si3N4 Double Layers Electrets. 2008 9TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1-4null. 2008, 2404-2407, http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000265971003126.
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（1） MEMS Silicon Oscillating Accelerometers and Readout CircuitsRiver Publishers, River Publisher, 2019-03, 第 3 作者

   

（ 1 ） 中国科学院****匹配支持项目, 负责人, 中国科学院计划, 2017-01--2017-12
（ 2 ） 高精度MEMS陀螺基础研究, 负责人, 研究所自选, 2016-07--2019-06
（ 3 ） 大带宽硅振梁加速度计, 负责人, 国家任务, 2017-07--2020-12
（ 4 ） 国家“****”青年项目专项, 负责人, 国家任务, 2017-12--2020-12
（ 5 ） 硅微谐振器非线性效应及调控方法, 负责人, 国家任务, 2019-07--2022-06
（ 6 ） 系统硬件与定位导航架构方案研究, 负责人, 国家任务, 2018-11--2019-08
（ 7 ） 基于非线性微纳谐振器的智能传感技术研究, 负责人, 中国科学院计划, 2019-09--2024-08
（ 8 ） 面向边缘计算的MEMS耦合谐振器储备池计算单元基础研究, 负责人, 国家任务, 2020-01--2023-12
（ 9 ） 无线系统时空频联合估计方法与实现, 负责人, 国家任务, 2019-10--2020-11

（1）A High Resolution Resonant MEMS Accelerometer    Zou,Xudong   2015-06-21
（2）Micro-Electro-Mechanical Resonant Tilt Sensor with 250 Nano-Radian Resolution    Zou, Xudong; Thiruvenkatanathan, Pradyumna; Seshia, Ashwin A.   2013-07-21
（3）Micro-Electro-Mechanical Resonant Tilt Sensor    Zou, Xudong; Thiruvenkatanathan, Pradyumna; Seshia, Ashwin A.   2013-05-21
（4）Voltage programmable dual-band bandpass/bandstop filter response in a single micro-electro-mechanical device   Zou, Xu Dong; Yan, Ji Ze; Seshia, A. Ashwin   2011-06-05
（5）A novel tuneable band-pass filter based on a single square-ring MEMS resonator    Zou, Xu Dong; Yan, Ji Ze; Seshia, A. Ashwin   2010-09-05
（6）Design and Simulation of 4-Bit 10-14GHz RF MEMS Tunable Filter    Zou, Xudong; Chen, Kenle; Zhang, Hualiang; *Zhang, Jinwen   2009-01-05
（7）Effects of Different Si(3)N(4) Thicknesses on the Performance of PECVD SiO(2)/Si(3)N(4) Double Layers Electrets    Chen, Zhiyu; Zou, Xudong; *Zhang, Jinwen   2008-10-20

已指导学生

仇晓松  硕士研究生  081002-信号与信息处理  

王金戈  硕士研究生  081002-信号与信息处理  

迟程  博士研究生  080903-微电子学与固体电子学  

肖麟慧  硕士研究生  080903-微电子学与固体电子学  

汪政  硕士研究生  080903-微电子学与固体电子学  

张易凡  硕士研究生  0809Z1-生物电子学  

郑天依  博士研究生  080903-微电子学与固体电子学  

孙杰  博士研究生  080903-微电子学与固体电子学  

刘振溪  博士研究生  080903-微电子学与固体电子学  

周莉玲  硕士研究生  080903-微电子学与固体电子学  

薛博  硕士研究生  080903-微电子学与固体电子学  

王佳伟  硕士研究生  080903-微电子学与固体电子学  

雷鹏宇  硕士研究生  085209-集成电路工程  

王媖姿  硕士研究生  080903-微电子学与固体电子学  

刘泽畅  硕士研究生  085208-电子与通信工程  

现指导学生

蔡朋成  博士研究生  080903-微电子学与固体电子学  

王坤锋  博士研究生  080903-微电子学与固体电子学  

刘云飞  博士研究生  080903-微电子学与固体电子学  

吕昊奇  博士研究生  080903-微电子学与固体电子学  

张海峰  博士研究生  080903-微电子学与固体电子学  

马良博  博士研究生  080903-微电子学与固体电子学  

翟朝阳  博士研究生  080903-微电子学与固体电子学  

郭潇威  博士研究生  080903-微电子学与固体电子学  

王博文  博士研究生  080903-微电子学与固体电子学  

郑鹏程  博士研究生  080903-微电子学与固体电子学  

李宇航  博士研究生  080903-微电子学与固体电子学  

綦振翔  博士研究生  080903-微电子学与固体电子学  

张静怡  硕士研究生  085400-电子信息  

史振宇  硕士研究生  080903-微电子学与固体电子学  

谢锦璐  硕士研究生  080903-微电子学与固体电子学