激光薄膜制备技术

激光与薄膜相互作用研究

短波长薄膜制备技术

   

080300-光学工程

强激光薄膜制备技术
激光薄膜与激光相互作用
短波长薄膜技术

2009-09--2012-06   上海光机所   博士
2003-09--2006-06   上海光机所   硕士
1999-09--2003-06   浙江大学   学士

研究生

博士

2017-10~现在, 上海光机所, 研究员
2012-10~2017-09,上海光机所, 副研究员
2007-10~2012-09,上海光机所, 助理研究员
2006-07~2007-09,上海光机所, 研究实习员

2024-11-11-今,中国光学学会光学薄膜专业委员会, 主任委员会
2022-01-01-今,光学精密工程, 编委
2020-01-15-今,SPIE Laser Damage, 国际组委会委员
2019-03-22-今,光学薄膜标准化技术委员会, 副主任委员

   

(1) 基于复合材料的平板型激光分束膜及其设计方法，ZL202011266263.9。 

(2) 基于类三明治结构界面和复合材料的二向色镜及其制备方法，ZL202010876602.9。

(3) 基于离子束辅助纳米叠层解决电子束沉积薄膜龟裂的方法，ZL202010327812.2。

(4) 基于混合物单层膜的光学镀膜元件面形补偿方法，ZL202010190180.X。

(5) 一种大尺寸光学元件镀膜夹具和装夹方法，ZL202010170308.6。

(6) 渐变界面纳米薄层提升反射膜激光损伤阈值的方法，ZL201910655317.1。 

(7) 提升多层激光薄膜元件环境稳定性的镀膜方法，ZL201810140020.7。 

(8) 综合沉积镀膜设备及综合镀膜方法，ZL201810140027.9。 

(9) 解决电子束沉积多层膜龟裂的临界层应力的调控方法，ZL201710380376.3。

(10) 降低氧化铪-氧化硅多层膜表面粗糙度的方法，ZL201710000723.5。 

(11) 光控-晶控综合膜厚监控方法，ZL201310451684.2。 

(12) 提高薄膜光谱性能的膜厚监控方法，ZL201110094660.7。

(13) 一种用于溶液环境中竖直摆放光学元件的夹具，ZL202021875436.2。

(14) 光学元件透射光谱自动面扫描测量装置，ZL200820155743.6。

(15) 计算机控制镀膜装置，ZL200510026448.1。 

(16) 光学膜厚监控系统，ZL200510024987.1。 

(17) 基于类三明治结构界面和复合材料的二向色镜及其制备方法，PCT/CN2021/110731。

(18) 一种用于溶液环境中竖直摆放光学元件的夹具，CN202010903575.X。

(1)Plasma-enhanced   atomic-layer-deposited HfO2–SiO2 nanolaminates for broadband antireflection   coatings,Optical Materials,2024, 150: 115282.

(2)Comparative Study of   Plasma-Enhanced-Atomic-Layer-Deposited Al2O3/HfO2/SiO2 and HfO2/Al2O3/SiO2   Trilayers for Ultraviolet Laser Applications,ACS Applied Materials &   Interfaces,2024, 16: 31756-31767.

(3)Neural network modeling and prediction   of HfO2 thin film properties tuned by thermal annealing,High Power Laser   Science and Engineering,2024, 12: e21.

(4)Hybrid-material-based mirror coatings   for picosecond laser applications,Optics & Laser Technology,2024, 171:   110466.

(5)Controlling lateral thickness   distributions of magnetron sputtering deposited coatings using shadow   masks,Optical Materials Express,2024, 14(1): 101-115.

(6)Study of short-wavelength pass   dichroic laser mirror coatings with hafnia–silica mixture layers,Optics &   Laser Technology,2024, 170: 110277.

(7)Picosecond laser-induced damage of   HfO2-Al2O3 mixture-based mirror coatings in atmosphere and vacuum   environments,Optical Materials Express,2023, 13(3): 667-677.

(8)Optical and femtosecond laser-induced   damage-related properties of Ta2O5-based oxide mixtures,Journal of Alloys and   Compounds,2023, 957: 170352.

(9)Effect of annealing on the properties   of plasma-enhanced atomic layer deposition grown HfO2 coatings for   ultraviolet laser applications,Journal of Alloys and Compounds,2023, 946:   169443.

(10)Effect of subsurface impurity defects   on laser damage resistance of beam splitter coatings,High Power Laser Science   and Engineering,2023, 11: e61.

(11)Effect of annealing on the properties   of HfO2-Al2O3 mixture coatings for picosecond laser applications, Applied   Surface Science, 2022, 579: 152192.

(12)Effects of film thickness and   annealing temperature on the properties of molybdenum carbide films prepared   using pulsed direct-current magnetron sputtering, Materials Research Express,   2022. 9(2): 026403.

(13)Plate laser beam splitter with   mixture-based quarter-wave coating design,Optics & Laser Technology,2022,   155: 108399.

(14)激光薄膜吸收损耗控制研究进展,光学学报,2022, 42(7):   0700001.

(15)A nodule dome removal strategy to   improve the laser-induced damage threshold of coatings,High Power Laser   Science and Engineering,2022, 10: e30.

(16)Dichroic laser mirrors with mixture   layers and sandwich-like-structure interfaces, Photonics Research, 2021,   9(2): 229-236 (Editor’s Pick).

(17)HfO2/SiO2 anti-reflection films for   UV lasers via plasma-enhanced atomic layer deposition, Journal of Alloys and   Compounds, 2021, 859: 157875.

(18)Research to improve the optical   performance and laser-induced damage threshold of hafnium oxide/silica   dichroic coatings, Optical Materials, 2021, 113: 110890.

(19)Al2O3 anti-reflection coatings with   graded-refractive index profile for laser applications, Optical Materials   Express, 2021. 11(3): 875-883.

(20)Nanolaminate-based design for UV   laser mirror coatings, Light: Science & Applications, 2020, 9: 20.

(21)Strategy to improve the long-term   stability of low-stress e-beam coatings. Optical Materials Express, 2020.   10(11): 2738-2748.

(22)Effects of water adsorption on   properties of electron-beam HfO2/SiO2 high-reflection coatings, Thin Solid   Films, 2020, 697(1): 137826.

(23)Laser resistance dependence of   interface for high-reflective coatings studied by capacitance-voltage and   absorption measurement, Optics Letters, 2018, 43(18): 4538-4541.

(24)Influence of deposition temperature   and SiO2 overcoat layer on laser resistance of 532-nm high-reflection   coating, Optical Engineering, 2018, 57(12): 0-121902.

(25)Environmental stability investigation   on electron-beam deposited coatings with dense capping layer, Optical   Engineering, 2018, 57(8): 0-086114.

(26)Study on Brewster angle thin film   polarizer using hafnia-silica mixture as high-refractive-index material,   Optical Engineering, 2018, 57(2): 0-025101.

(27)Improving the laser-induced damage   threshold of 532-nm antireflection coating using plasma ion cleaning, Optical   Engineering, 2017, 56(1): 0-011003.

(28)Multilayer deformation planarization   by substrate pit suturing, Optics Letters, 2016, 41(15): 3403-3406.

(29)Improving laser damage resistance of   355 nm high-reflective coatings by co-evaporated interfaces, Optics Letters,   2016, 41(6): 1253-1256.

(30)Laser advances drive development of   specialized optical coatings, Laser Focus World, 2016, 52(7): 39-42.

(31)Laser-resistance sensitivity to   substrate pit size of multilayer coatings, Scientific Reports, 2016, 6:   27076.

(32)Impact of substrate pits on   laser-induced damage performance of 1064-nm high-reflective coatings, Optics   Letters, 2015, 40(7): 1330-1333.

(33)Experimental demonstration of laser   damage caused by interface coupling effects of substrate surface and coating   layers, Optics Letters, 2015, 40(16): 3731-3734.

(34)Influence of SiO2 overcoat layer and   electric field distribution on laser damage threshold and damage morphology   of transport mirror coatings, Optics Communications, 2014, 319: 75-79.

(35)Study on high-reflective coatings of   different designs at 532 nm, Chinese Optics Letters, 2014, 12(8): 0-083101.

(36)Effect of Advanced Plasma Source bias   voltage on properties of HfO2 films prepared by plasma ion assisted electron   evaporation from metal hafnium, Thin Solid Films, 2013, 540: 17-22.

(37)Reduction in thickness error of   optical coatings by dividing thick layers and monitoring with multiple   witness glasses, Vacuum, 2013, 97: 44-48.

(38)Theoretical and experimental research   on spectral performance and laser induced damage of Brewster's thin film   polarizers, Applied Surface Science, 2011, 257(15): 6884-6888.

(39)Influence of APS bias voltage on   properties of HfO2 and SiO2 single layer deposited by plasma ion-assisted   deposition, Chinese Optics Letters, 2011, 9(2): 0-023101.

(40)Preparation of high performance   thin-film polarizers, Chinese Optics Letters, 2010, 8(6): 624-626.

(41)激光薄膜吸收损耗控制研究进展, 光学学报, 2022,   42(7):  0700001（封面论文）.

(42)惯性约束聚变激光驱动装置用大尺寸偏振薄膜研究综述, 光学学报,   2019, 39(10): 1-12.（封面论文）

(43)高性能偏振膜的研制, 光学精密工程, 2016, 24(12):   2908-2915.

(44)Coupling effect of subsurface defect   and coating layer on the laser induced damage threshold of dielectric   coating, Laser-Induced Damage in Optical Materials: 2014, Colorado, United   States, 2014-9-15至2014-9-17.

(45)Improving the environmental stability   of e-beam coatings by employing a PIAD capping layer, Pacific Rim Laser   Damage 2018, Yokohama, Japan, 2018-4-24至2018-4-27.

(46)Study of hafina-silica mixed coatings   with different compositions prepared by E-beam co-evaporation, Pacific Rim   Laser Damage 2015, Shanghai, China, 2015-5-17至2015-5-20.

(47)Influence of deposition temperature   and precursor pulse time on properties of SiO2, HfO2 monolayers deposited by   PEALD, Pacific Rim Laser Damage 2019 and Thin Film Physics and Applications   2019, Qingdao, China, 2019-5-19至2019-5-22.

(48)Study on the laser-induced damage   performance of HfO2, Sc2O3, Y2O3, Al2O3 and SiO2 monolayer coatings,   Laser-Induced Damage in OpticalMaterials: 2013, Colorado, United States,   2013-9-22至2013-9-25.

(49)Research on the laser damage   performance of high reflection coatings at 355 nm, Pacific Rim Laser Damage   2013, Shanghai, China, 2013-5-19至2013-5-22.  (Invited)

(50)Photo-thermal tomography of optical   coatings based on surface thermal lensing technology, Laser-Induced Damage in   Optical Materials: 2011, Colorado, United States, 2011-9-18至2011-9-21.

(51)Effects of electric field   distribution and pulse duration on the ultra-short pulse laser damage   resistance of laser coatings, Laser-Induced Damage in Optical Materials:   2010, Colorado, United States, 2010-9-27至2010-9-29.

(52)光学薄膜膜厚自动控制系统的研究, 光子学报, 2007,   36(2): 308-311.

(53)膜厚监控误差及监控片不均匀对膜厚监控的影响, 光学学报,   2006, 26(7): 1107-1111.

(54)PDP真空紫外荧光粉余辉测试仪, 光学仪器, 2004,   26(1): 39-43.

   

已指导学生

邢焕彬  硕士研究生  080300-光学工程  

赵泽成  硕士研究生  080502-材料学  

武振清  硕士研究生  085202-光学工程  

杜文云  博士研究生  080300-光学工程  

陈上林  硕士研究生  085400-电子信息  

张雪晨  硕士研究生  085400-电子信息  

刘天宝  博士研究生  080300-光学工程  

赵洋  硕士研究生  085400-电子信息  

郝凌云  硕士研究生  085400-电子信息  

高程  硕士研究生  085400-电子信息  

现指导学生

林泽晟  博士研究生  080300-光学工程  

温家慧  博士研究生  085408-光电信息工程  

宋洪萱  博士研究生  080300-光学工程  

夏鑫涛  硕士研究生  085400-电子信息  

曹隆荀  博士研究生  080300-光学工程  

黄凯  博士研究生  080300-光学工程  

国家技术发明奖二等奖

中国青年科技奖特别奖

全国巾帼建功标兵

中国专利优秀奖

 中国科学院青年科学家奖

上海市技术发明奖一等奖

安徽省科学技术一等奖

上海市巾帼创新奖

上海市三八红旗手标兵

上海市青年五四奖章标兵