精密位移测量

   

070207-光学

精密位移测量

2012-09--2017-06   中国科学院大学   博士
2006-09--2010-06   哈尔滨工业大学   学士

研究生

博士

   

2025-09~现在, 中国科学院长春光学精密机械与物理研究所, 研究员
2020-09~2025-09,中国科学院长春光学精密机械与物理研究所, 副研究员
2017-07~2020-09,中国科学院长春光学精密机械与物理研究所, 助理研究员

已指导学生

滕海瑞  硕士研究生  070207-光学  

曾鹏  硕士研究生  085400-电子信息  

现指导学生

包文荣  硕士研究生  070207-光学  

陈丹怡  博士研究生  070207-光学  

张国林  硕士研究生  070207-光学  

尹超凡  硕士研究生  085400-电子信息  

1.​      Song Ying*, Liu Yujuan, Jiang Shan, Zhu Yang, Zhang Liu, Liu Zhaowu, Method for exposure dose monitoring and control in scanning beam interference lithography[J]. Applied Optics, 2021, 60(10): 2767-2774.

2.      Yin Yunfei, Liu Lin, Bai Yu, Jirigalantu, Yu Hongzhu,  Bayanheshig, Liu Zhaowu*, Li Wenhao. Littrow 3D measurement based on 2D grating dual-channel equal-optical path interference[J]. Optics Express, 2022, 30(23): 41671-41684.

3.      Yin Yunfei; Liu Zhaowu; Jiang Shan; Wang Wei; Yu Hongzhu; Jiri Galantu; Hao Qun; Li Wenhao*. High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving[J]. Optics and Lasers in Engineering, 2022, 158: 107167. 

4.      Liu Lin; Liu Zhaowu; Jiang Shan; Wang Wei; Yu Hongzhu; Jiang Yanxiu; Li Wenhao *. Polarization-modulated grating interferometer by conical diffraction[J]. Optics Express, 2022, 30(2): 689-699.

5.      Liu Zhaowu*; Yang Hang; Li Yubo; Jiang Shan; Wang Wei; Song Ying; Bayanheshig; Li Wenhao*. Active control technology of a diffraction grating wavefront by scanning beam interference lithography[J]. Optics Express, 2021, 29(23): 37066-37074. 

6.      Yin Yunfei, Liu Zhaowu, Jiang Shan, Wang Wei, Yu Hongzhu, Li Wenhao, Jirigalantu*, Grating-based 2D displacement measurement with quadruple optical subdivision of a single incident beam[J]. Optics express, 2021, 29(15): 24169-24181

7.      尹云飞; 刘兆武; 吉日嘎兰图; 于宏柱; 王玮; 李晓天; 鲍赫; 李文昊*; 郝群*. 二维光栅位移测量技术综述[J]. 中国光学, 2020, 13(6): 1224.

8.      吕强，王玮，刘兆武，宋莹，姜珊，刘林，巴音贺希格，李文昊. 五维自由度衍射光栅精密测量系统[J].中国光学，2020, 13(11):189-202

9.      Lv Qiang, Liu Zhaowu, Wang Wei, Jiang Shan, Bayanheshig, Li Wenhao*. Fast method to detect and calculate displacement errors in Littrow grating-based interferometer[J]. Applied Optics: 2019,58(12):3193-3199

10.   Lv Qiang, Liu Zhaowu, Wang Wei, Li Xiaotian, Li Shuo, Song Ying, Yu Hongzhu, Bayanheshig, Li Wenhao^*. Simple and compact grating-based heterodyne interferometer with the Littrow configuration for high-accuracy and long-range measurement of two-dimensional displacement[J]. Applied Optics: 2018,57(31):9455-9463

11.   Zhaowu Liu, Wenhao Li^*, Bayanheshig, Xiaotian Li, Shan Jiang, Ying Song, and Qiang Lv. Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances[J]. Scientific Reports, 2017, 7(1): 8173

12.   Zhaowu Liu, Shan Jiang, Xiaotian Li, Ying Song, Wenhao Li^*, and Bayanheshig^*. Precision measurement of X-axis stage mirror profile in scanning beam interference lithography by three-probe system based on bidirectional integration model[J]. Optics Express, 2017, 25 (9) :10312-21

13.   刘兆武，李文昊^*，巴音贺希格，宋莹，姜珊，李晓天，吕强. 扫描曝光系统中二维工作台x轴测量镜的面形在线检测[J]. 中国激光， 2017 (1) :225-230

14.   吕强，李文昊^*，巴音贺希格，柏杨，刘兆武，王玮. 基于衍射光栅的干涉式精密位移测量系统[J]. 中国光学，2017 , 10 (1) :39-50

15.   刘兆武，李文昊，王敬开，姜珊，宋莹，潘明忠，巴音贺希格. 纳米精度二维工作台测量镜的面形误差在线检测[J]. 光学精密工程，2016,24 (9):2134-2141