基本信息

张志宇  男  研究员  博士生导师  

中科院长春光机所
电子邮件: zhangzhiyu@ciomp.ac.cn
通信地址: 长春市东南湖大路3888号
邮政编码: Tel:13514498767      光学技术中心

研究领域

  • --超精密切削

  • --超精密磨削

  • --无掩膜激光直写

  • --高品质离子束刻蚀加工

  • --超快激光制造

  • --空间制造新模式


招生信息

招生专业
080201-机械制造及其自动化
招生方向
超精密加工与微纳加工
衍射成像原理与元件加工
激光制造原理与应用

教育背景

2007-10--2010-09   日本东北大学   博士
2004-09--2007-01   吉林大学   硕士
2000-09--2004-07   吉林大学   本科

工作经历

   
工作简历
2020-09~现在, 中国科学院长春光学精密机械与物理研究所, 研究员
2013-09~2020-09,中国科学院长春光学精密机械与物理研究所, 副研究员
2011-12~2013-09,中国科学院长春光学精密机械与物理研究所, 助理研究员
2007-06~2007-09,日本东北大学, 研究支援者
社会兼职
2020-05-31-今,中国光学工程学会青年专家委员会, 委员
2020-05-25-2025-05-25,全国半导体设备和材料标准化技术委员会微光刻分技术委员会, 委员

专利与奖励

   
奖励信息
(1) 指导的学生获得2021年博士研究生国家奖学金, , 国家级, 2021
(2) 大口径SiC非球面高精度制造技术, 一等奖, 省级, 2018
专利成果
[1] 王若秋, 张志宇, 尹小林, 薛栋林, 张学军. 一种振幅/位相混合型计算全息板及其制备方法. CN: CN111103758B, 2022-01-28.

[2] 张斌智, 王若秋, 尹小林, 张志宇, 薛栋林, 张学军. 一种衍射元件衍射效率的测量装置及测量方法. CN: CN111060292B, 2021-05-14.

[3] 王若秋, 尹小林, 张志宇, 李兴昶, 薛栋林, 张学军. 一种基于衍射原理的平行光管结构及设计方法. CN: CN110954979B, 2021-04-13.

[4] 张志宇, 王若秋, 薛栋林, 张学军. 一种辊筒表面微结构制作设备、系统及方法. CN: CN110919172B, 2021-04-02.

[5] 曾雪锋, 陈天宝, 张学军, 白莹莹, 张峰, 张志宇. 多孔径干涉成像方法. CN: CN112284288A, 2021-01-29.

[6] 张志宇, 王凤, 王若秋, 薛栋林, 张学军, 张峰. 一种光学系统畸变测量方法及设备. CN: CN110879136A, 2020-03-13.

[7] 张志宇, 王凤, 王若秋, 薛栋林, 张学军, 张峰. 一种激光分束器分束角度测量方法、装置、设备及系统. CN: CN110864647A, 2020-03-06.

[8] 张学军, 张志宇, 薛栋林, 王孝坤, 程强. 一种半导体器件及其制作方法. CN: CN107665807B, 2020-02-11.

[9] 王若秋, 国成立, 张志宇, 薛栋林, 张学军. 一种变台阶衍射元件及其制备方法. CN: CN107976732B, 2019-11-05.

[10] 张志宇, 李兴昶, 王若秋, 薛栋林, 张学军. 基于微织构刀具的切削装置及方法. CN: CN108044138B, 2019-05-14.

[11] 王东方, 夏操, 杜旭, 郑果文, 万胜来, 冯昊楠, 滕浩, 安临君, 杨旭, 刘欣, 殷志富, 王昕, 张志宇. 一种基于BET重量法的多孔颗粒比表面积表征传感器. CN: CN208818603U, 2019-05-03.

[12] 姚鹏, 牛佳慧, 黄传真, 张志宇, 薛栋林, 朱洪涛, 王冲. 反应烧结碳化硅表面残留物的磨料水射流选择性去除方法. CN: CN106625282B, 2019-02-22.

[13] 陶小平, 张学军, 张志宇. 一种反射镜面形的在线检测方法. CN: CN108286950A, 2018-07-17.

[14] 张学军, 李英杰, 薛栋林, 张志宇, 殷龙海. 基于刀具磨损补偿的迭代式超大口径反射镜铣磨加工方法. CN: CN106271966B, 2018-05-29.

[15] 张志宇, 李兴昶, 熊玲, 罗霄, 李锐钢, 薛栋林, 张学军. 一种工件面形测量系统及方法. CN: CN108037730A, 2018-05-15.

[16] 张志宇, 薛栋林, 张学军, 郑立功, 张峰. 一种提高大口径菲涅耳波带片衍射效率的方法. CN: CN106842396A, 2017-06-13.

[17] 张志宇, 郑立功. 离轴非球面反射镜的砂轮原位自动整形铣磨加工方法. CN: CN103737451A, 2014-04-23.

[18] 张志宇, 郑立功. 大口径离轴非球面反射镜的五轴精密超声铣磨加工方法. CN: CN103056731A, 2013-04-24.

[19] 张志宇, 郑立功. 铣磨加工前离轴非球面反射镜镜面CAD模型的建立方法. CN: CN103034767A, 2013-04-10.

出版信息

发表论文
[1] Wang, Chao, Huang, Hu, Qian, Yongfeng, Zhang, Zhiyu, Huang, Weihai, Yan, Jiwang. Nitrogen assisted formation of large-area ripples on Ti6Al4V surface by nanosecond pulse laser irradiation. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY[J]. 2022, 73: 244-256, http://dx.doi.org/10.1016/j.precisioneng.2021.09.012.
[2] Kalkhoran, Seyed Nader Ameli, Vandati, Mehrdad, Zhang, Zhiyu, Yan, Jiwang. Influence of Wax Lubrication on Cutting Performance of Single-Crystal Silicon in Ultraprecision Microgrooving. INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING-GREEN TECHNOLOGY[J]. 2021, 8(2): 611-624, https://www.webofscience.com/wos/woscc/full-record/WOS:000516957100001.
[3] Wang, Ruoqiu, Zhang, Zhiyu, Bai, Yingying, Wang, Yanchao, Yin, Xiaolin, Kong, Lingsheng, Deng, Weijie, Xue, Donglin, Zhang, Xuejun. Scanning ion beam etching: A method for the fabrication of computer-generated hologram with nanometric accuracy for aspherical testing. OPTICS AND LASERS IN ENGINEERING[J]. 2021, 139: http://dx.doi.org/10.1016/j.optlaseng.2020.106503.
[4] Ren, Yingming, Zhang, Zhiyu. Influences of Initial Surface Conditions on Response Characteristics of Amorphous Silicon Films to Nanosecond Laser Irradiation. MICROMACHINES[J]. 2021, 12(7): http://dx.doi.org/10.3390/mi12070807.
[5] Zhang Zhiyu. Perspectives of 2D materials for optoelectronic integration. Advanced Functional materials. 2021, [6] Yingying Bai, Zhiyu Zhang, Ruoqiu Wang, Tianbao Chen, Xu Wang, Xuejun Zhang. Imperfections of Scalar Approximation in Calibration of Computer-Generated Holograms for Optical Surface Measurements. Applied Sciences[J]. 2021, 11: https://doaj.org/article/b7f08e0f17cd4874a9dfa07abd8eade0.
[7] Chen, TianBao, Zeng, XueFeng, Zhang, ZhiYu, Zhang, Feng, Bai, YingYing, Zhang, XueJun. REM: A simplified revised entropy image reconstruction for photonics integrated interference imaging system. OPTICS COMMUNICATIONS[J]. 2021, 501: http://dx.doi.org/10.1016/j.optcom.2021.127341.
[8] Qian, Yongfeng, Jiang, Minqiang, Zhang, Zhiyu, Huang, Hu, Yan, Jiwang. On the transformation between micro-concave and micro-convex in nanosecond laser ablation of a Zr-based metallic glass. JOURNAL OF MANUFACTURING PROCESSES[J]. 2021, 68: 1114-1122, http://dx.doi.org/10.1016/j.jmapro.2021.06.034.
[9] Wang, Qingwei, Yang, Ye, Yao, Peng, Zhang, Zhiyu, Yu, Shimeng, Zhu, Hongtao, Huang, Chuanzhen. Friction and cutting characteristics of micro-textured diamond tools fabricated with femtosecond laser. TRIBOLOGY INTERNATIONAL[J]. 2021, 154: http://dx.doi.org/10.1016/j.triboint.2020.106720.
[10] Ren, Yingming, Zhang, Zhiyu. Formation mechanism of nanosecond-laser-induced microstructures on amorphous silicon film surfaces. OPTICS EXPRESS[J]. 2021, 29(21): 33804-33817, http://dx.doi.org/10.1364/OE.434313.
[11] Chen, TianBao, Zeng, XueFeng, Bai, YingYing, Zhang, Zhiyu, Wang, YongJin, Zhang, Feng, Zhang, XueJun. Sparse-aperture photonics-integrated interferometer (SPIN) imaging system: structural design and imaging quality analysis. OPTICS EXPRESS[J]. 2021, 29(24): 39256-39270, [12] Wang, Chao, Huang, Hu, Qian, Yongfeng, Zhang, Zhiyu, Yan, Jiwang. One-step fabrication of regular hierarchical micro/nano-structures on glassy carbon by nanosecond pulsed laser irradiation. JOURNAL OF MANUFACTURING PROCESSES[J]. 2021, 62: 108-118, http://dx.doi.org/10.1016/j.jmapro.2020.12.043.
[13] Yi, Liqi, Zhang, Xuejun, Hu, Haifei, Zhang, Zhiyu, Hai, Kuo, Luo, Xiao, Xue, Donglin. Comprehensive study of the rapid stressed mirror polishing method for off-axis aspheric SiC thin-plate mirrors. OPTICS EXPRESS[J]. 2020, 28(22): 32802-32818, http://dx.doi.org/10.1364/OE.405389.
[14] Yi, Liqi, Zhang, Xuejun, Hu, Haifei, Zhang, Zhiyu, Zeng, Xuefeng, Luo, Xiao, Xue, Donglin, Zhang, Ge. Equivalent thin-plate method for stressed mirror polishing of an off-axis aspheric silicon carbide lightweight mirror. OPTICS EXPRESS[J]. 2020, 28(24): 36413-36431, http://dx.doi.org/10.1364/OE.410759.
[15] Hai, Kuo, Li, Longxiang, Hu, Haixiang, Zhang, Zhiyu, Bai, Yang, Luo, Xiao, Yi, Liqi, Yang, Xi, Xue, Donglin, Zhang, Xuejun. Distribution model of the surface roughness in magnetorheological jet polishing. APPLIED OPTICS[J]. 2020, 59(28): 8740-8750, https://www.webofscience.com/wos/woscc/full-record/WOS:000577161400028.
[16] Zou Tingting, Zhao Bo, Xin Wei, Wang Ye, Wang Bin, Zheng Xin, Xie Hongbo, Zhang Zhiyu, Yang Jianjun, Guo, ChunLei. High-speed femtosecond laser plasmonic lithography and reduction of graphene oxide for anisotropic photoresponse. LIGHT-SCIENCE & APPLICATIONS[J]. 2020, 9(1): http://dx.doi.org/10.1038/s41377-020-0311-2.
[17] Zhiyu Zhang, Jiwang Yan, Tsunemoto Kuriyagawa. Manufacturing technologies toward extreme precision. 极端制造(英文). 2019, 1(2): 11-32, http://lib.cqvip.com/Qikan/Article/Detail?id=7102250080.
[18] Zhang, Zhenzhong, Yao, Peng, Huang, Chuanzhen, Wang, Jun, Xue, Donglin, Deng, Weijie, Zhang, Zhiyu. Investigation and modeling of microgrooves generated on diamond grinding wheel by abrasive waterjet based on Box-Behnken experimental design. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY[J]. 2019, 100(1-4): 321-332, https://www.webofscience.com/wos/woscc/full-record/WOS:000455946000028.
[19] Wang, Feng, Zhang, Zhiyu, Wang, Ruoqiu, Zeng, Xuefeng, Yang, Xu, Lv, Shiliang, Zhang, Feng, Xue, Donglin, Yan, Jiwang, Zhang, Xuejun. Distortion measurement of optical system using phase diffractive beam splitter. OPTICS EXPRESS[J]. 2019, 27(21): 29803-29816, [20] Li, Xingchang, Zhang, Zhiyu, Hu, Haifei, Li, Yingjie, Xiang, Ling, Zhang, Xuejun, Yan, Jiwang. Noncontact on-machine measurement system based on capacitive displacement sensors for single-point diamond turning. OPTICAL ENGINEERING[J]. 2018, 57(4): https://www.webofscience.com/wos/woscc/full-record/WOS:000435435600036.
[21] Yang, Yongchao, Shi, Zheng, Zhu, Bingcheng, Yuan, Jialei, Zhu, Guixia, Gao, Xumin, Li, Yuanhang, Zhang, Zhiyu, Liu, Yuhuai, Wang, Yongjin. Spatiotemporal Summation and Recognition Effects for a Dual-Emitter Light-Induced Neuromorphic Device. IEEE TRANSACTIONS ON ELECTRON DEVICES[J]. 2018, 65(1): 308-313, https://www.webofscience.com/wos/woscc/full-record/WOS:000418753200045.
[22] Guo, Chengli, Zhang, Zhiyu, Xue, Donglin, Li, Longxiang, Wang, Ruoqiu, Zhou, Xiaoguang, Zhang, Feng, Zhang, Xuejun. High-performance etching of multilevel phase-type Fresnel zone plates with large apertures. OPTICS COMMUNICATIONS[J]. 2018, 407: 227-233, http://dx.doi.org/10.1016/j.optcom.2017.09.006.
[23] Zhang, Zhiyu, Wang, Ruoqiu, Hao, Teng, Guo, Chengli, Xue, Donglin, Zhang, Xuejun. Fabrication of a high-accuracy phase-type computer-generated hologram by physical vapor deposition. APPLIED OPTICS[J]. 2018, 57(34): F31-F36, https://www.webofscience.com/wos/woscc/full-record/WOS:000451780900006.
[24] Bai, Yang, Zhang, Zhiyu, Xue, Donglin, Zhang, Xuejun. Ultra-precision fabrication of a nickel-phosphorus layer on aluminum substrate by SPDT and MRF. APPLIED OPTICS[J]. 2018, 57(34): F62-F67, https://www.webofscience.com/wos/woscc/full-record/WOS:000451780900011.
[25] Zeng, Xuefeng, Zhang, Xuejun, Xue, Donglin, Zhang, Zhiyu, Jiao, Jian. Mapping distortion correction in freeform mirror testing by computer-generated hologram. APPLIED OPTICS[J]. 2018, 57(34): F56-F61, [26] Zhang, Zhenzhong, Yao, Peng, Zhang, Zhiyu, Xue, Donglin, Wang, Chong, Huang, Chuanzhen, Zhu, Hongtao. A novel technique for dressing metal-bonded diamond grinding wheel with abrasive waterjet and touch truing. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY[J]. 2017, 93(9-12): 3063-3073, [27] Yang, Yongchao, Gao, Xumin, Yuan, Jialei, Li, Yuanhang, Zhang, Zhiyu, Wang, Yongjin. On-Chip Integration Operating Under the Extraordinary Light Detection Mode of an InGaN/GaN Diode. IEEE PHOTONICS TECHNOLOGY LETTERS[J]. 2017, 29(5): 446-449, https://www.webofscience.com/wos/woscc/full-record/WOS:000395744200008.
[28] 王若秋, 张志宇, 薛栋林, 张学军. 用于空间望远镜的大口径高衍射效率薄膜菲涅尔衍射元件. 红外与激光工程. 2017, 46(9): 115-122, http://lib.cqvip.com/Qikan/Article/Detail?id=673255867.
[29] Xiong, Ling, Luo, Xiao, Hu, Haixiang, Zhang, Zhiyu, Zhang, Feng, Zheng, Ligong, Zhang, Xuejun. Swing arm profilometer: high accuracy testing for large reaction-bonded silicon carbide optics with a capacitive probe. OPTICAL ENGINEERING[J]. 2017, 56(8): https://www.webofscience.com/wos/woscc/full-record/WOS:000410906100026.
[30] Yuan, Jialei, Gao, Xumin, Yang, Yongchao, Zhu, Guixia, Yuan, Wei, Choi, Hoi Wai, Zhang, Zhiyu, Wang, Yongjin. GaN directional couplers for on-chip optical interconnect. SEMICONDUCTOR SCIENCE AND TECHNOLOGY[J]. 2017, 32(4): https://www.webofscience.com/wos/woscc/full-record/WOS:000413490300001.
[31] Zhang, Zhiyu, Guo, Chengli, Wang, Ruoqiu, Hu, Haixiang, Zhou, Xiaoguang, Liu, Tao, Xue, Donglin, Zhang, Xing, Zhang, Feng, Zhang, Xuejun. Hybrid-level Fresnel zone plate for diffraction efficiency enhancement. OPTICS EXPRESS[J]. 2017, 25(26): 33676-33687, https://www.webofscience.com/wos/woscc/full-record/WOS:000418893200133.
[32] Zhu, Guixia, Gao, Xumin, Li, Yuanhang, Yuan, Jialei, Yuan, Wei, Yang, Yongchao, Zhang, Zhiyu, Wang, Yongjin. Saturation Behavior for a Comb-Like Light-Induced Synaptic Transistor. IEEE ELECTRON DEVICE LETTERS[J]. 2017, 38(1): 71-74, https://www.webofscience.com/wos/woscc/full-record/WOS:000393765800018.
[33] 王若秋, 张志宇, 国成立, 薛栋林, 张学军, 刘华. 高衍射效率衍射望远镜系统的设计/加工及成像性能测试. 光子学报[J]. 2017, 46(3): 120-128, [34] Zhang, Zhiyu, Yang, Xu, Zheng, Ligong, Xue, Donglin. High-performance grinding of a 2-m scale silicon carbide mirror blank for the space-based telescope. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY[J]. 2017, 89(1-4): 463-473, https://www.webofscience.com/wos/woscc/full-record/WOS:000394500300035.
[35] Wang, Ruoqiu, Zhang, Zhiyu, Guo, Chengli, Xue, Donglin, Zhang, Xuejun. Effects of fabrication errors on diffraction efficiency for a diffractive membrane. CHINESE OPTICS LETTERS[J]. 2016, 14(12): http://ir.ciomp.ac.cn/handle/181722/57240.
[36] 张志宇. 激光直写机床导轨正交性误差影响下计算全息图位相分析. 光学学报. 2016, [37] 郝腾, 郑立功, 张志宇, 王若秋, 国成立. 激光直写机床系统正交性误差影响下计算全息图相位分析. 光学学报[J]. 2016, 36(10): 385-392, [38] Li, Yuanhang, Yang, Yongchao, Gao, Xumin, Yuan, Jialei, Zhu, Guixia, Zhang, Zhiyu, Wang, Yongjin. Light Induced Synaptic Transistor With Dual Operation Modes. IEEE ELECTRON DEVICE LETTERS[J]. 2016, 37(11): 1434-1437, http://ir.ciomp.ac.cn/handle/181722/57050.
[39] 殷龙海, 王孝坤, 李龙响, 李丽富, 张志宇, 郑立功, 张学军. 大口径SiC离轴非球面的高效磨削加工. 光学精密工程. 2015, 23(9): 2497-2505, http://lib.cqvip.com/Qikan/Article/Detail?id=666166141.
[40] Zhang, Zhiyu, Zheng, Ligong. Grinding strategies for machining the off-axis aspherical reaction-bonded SiC mirror blank. CHINESE OPTICS LETTERS[J]. 2014, 12: https://www.webofscience.com/wos/woscc/full-record/WOS:000414280500038.
[41] 赵龙波, 张志宇, 朱德燕, 王延超, 郑立功, 张学军. 用于非球面检验的激光直写高精度计算全息图制作. 激光与光电子学进展. 2014, 51(11): 122-128, http://lib.cqvip.com/Qikan/Article/Detail?id=662841226.
[42] Zhiyu Zhang, Huanming Peng, Jiwang Yan. Micro-cutting characteristics of EDM fabricated high-precision polycrystalline diamond tools. International Journal of Machine Tools and Manufacture. 2013, 65: 99-106, http://dx.doi.org/10.1016/j.ijmachtools.2012.10.007.
[43] 郑立功. 离轴非球面SiC反射镜的精密铣磨加工技术. 机械工程学报. 2013, 49(17): 39-45, http://lib.cqvip.com/Qikan/Article/Detail?id=47459193.
[44] Zhang, Zhiyu, Yan, Jiwang, Kuriyagawa, Tsunemoto. Study on tool wear characteristics in diamond turning of reaction-bonded silicon carbide. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY[J]. 2011, 57(1-4): 117-125, https://www.webofscience.com/wos/woscc/full-record/WOS:000295519400009.
[45] Yan, Jiwang, Zhang, Zhiyu, Kuriyagawa, Tsunemoto. Mechanism for material removal in diamond turning of reaction-bonded silicon carbide. INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE[J]. 2009, 49(5): 366-374, http://dx.doi.org/10.1016/j.ijmachtools.2008.12.007.
[46] 肖献强, 张志宇, 张文, 李欣欣. 基于机器视觉的宏/微双驱动与控制系统的研究. 微特电机[J]. 2008, 36(6): 26-29, http://lib.cqvip.com/Qikan/Article/Detail?id=27505254.
[47] 吴博达, 张志宇, 孙晓峰, 杨旭, 程光明, 杨志刚. 流量最佳频率为50 Hz的压电泵特性. 吉林大学学报:工学版. 2008, http://lib.cqvip.com/Qikan/Article/Detail?id=1000557006.
[48] 赵宏伟, 杨志刚, 范尊强, 张志宇, 吴博达, 程光明. 尺蠖型压电驱动器的闭环控制. 光学精密工程[J]. 2008, 16(9): 1727-1731, http://lib.cqvip.com/Qikan/Article/Detail?id=28278691.
[49] 张志宇, 吴博达, 刘建芳. 电流变技术的发展与应用. 机床与液压[J]. 2007, 35(6): 203-207,190, http://lib.cqvip.com/Qikan/Article/Detail?id=24701538.
[50] 吴博达, 张志宇, 杨旭, 赵宏伟, 程光明, 杨志刚. 压电微位移精密驱动器的设计研究. 机械工程师[J]. 2007, 44-46, http://lib.cqvip.com/Qikan/Article/Detail?id=26068823.
发表著作
(1) Microfabrication by Laser Lithography Combined with Ion Etching, Springer, 2018-02, 第 1 作者

科研活动

   
科研项目
( 1 ) 基于砂轮原位自动修整的大型SiC离轴非球面精密铣磨研究, 主持, 国家级, 2014-01--2016-12
( 2 ) 面向高附加值光电产品的气体团簇抛光机理与技术研究, 主持, 省级, 2015-01--2017-12
( 3 ) 聚酰亚胺薄膜超湿滑刀具时变切削的减摩抗粘机理与技术研究, 主持, 国家级, 2018-02--2021-12
( 4 ) 超大口径光学元件超声磨抛加工技术及装备, 主持, 国家级, 2018-01--2020-12
( 5 ) 宽波段平面超表面太阳能聚光器及其集热系统, 主持, 国家级, 2020-07--2025-06
( 6 ) 基于微纳结构的超高集成光电探测关键技术研究, 主持, 国家级, 2021-01--2024-12

合作情况

   
项目协作单位
吉林大学:国家自然科学基金委面上项目

指导学生

已指导学生

国成立  博士研究生  080300-光学工程  

王凤  博士研究生  080300-光学工程  

现指导学生

张海东  博士研究生  070207-光学  

任英明  博士研究生  080201-机械制造及其自动化  

安君儒  博士研究生  080201-机械制造及其自动化  

刘琛  博士研究生  080201-机械制造及其自动化  

徐凯  硕士研究生  080201-机械制造及其自动化