基本信息
严伟 男 博导 中国科学院光电技术研究所
电子邮件： yanwei@ioe.ac.cn
通信地址： 四川成都双流350信箱
邮政编码： 610209
个人信息
严伟，男，1977年2月生，研究员，博士生导师，四川省杰青，国家科技专家库专家，西部之光联合学者，首届青促会会员，中国科学院光电所青年创新人才。2000年至今一直在中国科学院光电技术研究所“微电子装备总体研究室”工作，主要研究集中于微电子装备研制，以及相关微纳光学、光学测量的关键技术研究工作。
近5年承担的科研任务包括：作为总师完成国家科技重大专项课题“下一代193nm光子筛聚焦无掩模光刻关键技术”；主持国家自然科学基金面上项目、中国科学院国防科技创新基金项目、四川省杰青基金、西部之光项目、院装备项目等科研任务。获中国半导体行业协会半导体创新产品和技术奖1项、四川省科技进步二等奖和三等奖各1项、中国烟草总公司科学技术发明奖三等奖1项。发表科技论文40余篇（第1作者10篇），发明专利16项，软件版权2项（第一申请人8项，授权发明专利11项），培养研究生15名（独立执导硕士3名，博士6名）。
研究领域
本专业主要研究光(电磁波)的行为和性质,以及光与物质、微纳结构的相互作用的物理学科，包括微纳结构光调制机理、变换光学、3D光场控制等。
招生专业
081002-信号与信息处理
招生方向
检测技术，信号处理，控制技术
教育背景
2004-09--2007-07 中国科学院研究生院 博士
2000-09--2004-07 中国科学院研究生院 硕士
1996-09--2000-07 四川大学 学士
2000-09--2004-07 中国科学院研究生院 硕士
1996-09--2000-07 四川大学 学士
学历
研究生
学位
博士
学习经历
1996年—2000年，四川大学，学士 机械制造及其自动化2001年—2004年，中科院光电技术研究所，硕士， 光学工程2004年—2007年，中科院光电技术研究所，博士， 信号与信息处理 工作经历： 自2000年7月起，一直在“中科院光电所微电子装备研究室”工作
工作经历
目前在国家科技重大专项工程项目中的重点工程中担任主任设计师、仪器专项工程项目主任设计师，正在开展整机测控系统的研制工作。作为项目总师和项目负责人承担过十余项国家及中科院重点重大项目：国家重大科技专项（总师）“下一代193nm光子筛聚焦直写关键技术研究”；国家重大仪器专项（副总师）“表面等离子体超分辨光刻装备研制”。中国科学院知识创新工程重大交叉项目（分系统负责人）“激光共聚焦扫描仪研制”，此外还主持承担国家863计划、国家自然科学基金、四川省杰青基金、院国防创新基金、中科院重大装备、西部之光、院创新人才基金等多个项目。
在重大科研任务的牵引下，依托微电子装备总体实验室，组建一支多学科交叉融合，极具创新能力和基础研究实力的青年人才队伍，团队突破了各种复合光场调控下的特种微纳加工与成像检测技术，结合纳米定位工件台技术、大面积扫描拼接技术等形成了系列微电子装备：首台数字掩模光刻机、首台光子筛激光直写光刻机、大面积干涉光刻机、微透镜制备专用掩模移动光刻机、同轴全息微纳结构3D成像仪、线宽测量仪、激光共聚焦扫描成像仪、高精度轮廓测量仪、精密气浮定位工件台，截至目前推广600余台。设备目前广泛应用于微电子器件、声表面器件、红外探测器、衍射光学元件、微光机电系统、太阳能薄膜等微纳系统的加工与检测，并为发现微纳结构在纳米尺度下可能存在的新现象与新效应、探索基于纳米结构的新原理器件，提供实用化专用设备。
专利与奖励
一直从事微电子装备、新型微纳器件及微细加工技术领域的研究工作，2009年获中科院光电所青年创新科技人才，2010年入选西部之光联合学者，
2011年入选中科院青年创新促进会，2014年被评为四川省杰青，2014年被评为中科院光电技术研究所先进工作者、创新标兵，2015年入选为国家科技专家库专家/四川省科技专家库专家/四川省国防科工办专家，2016年被评为中科院光电技术研究所优秀共产党员，2016年授予四川省省直机关共产党员示范岗，2016年入选微电子装备四川省青年科技创新研究团队（团队负责人）。2017年入选“中国科学院微纳加工技术及装备研究团队”。获中国半导体行业协会半导体创新产品和技术奖1项，四川省科技进步二等、三等奖各1项，组织编写了生物芯片检测仪器医疗器械标准，获得生物芯片检测系统分析软件版权2项，获授权发明专利40余项，发表学术论文60余篇。
出版信息
发表论文
[1] Xia, Anjie, Yong, Xihao, Zhang, Changbin, Lin, Guifeng, Jia, Guowen, Zhao, Chang, Wang, Xin, Hao, Yize, Wang, Yifei, Zhou, Pei, Yang, Xin, Deng, Yue, Wu, Chao, Chen, Yujiao, Zhu, Jiawei, Tang, Xiaodi, Liu, Jingming, Zhang, Shiyu, Zhang, Jiahao, Xu, Zheng, Hu, Qian, Zhao, Jinlong, Yue, Yuting, Yan, Wei, Su, Zhaoming, Wei, Yuquan, Zhou, Rongbin, Dong, Haohao, Shao, Zhenhua, Yang, Shengyong. Cryo- EM structures of human GPR34 enable the identification of selective antagonists. PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA[J]. 2023, 第 24 作者120(39): http://dx.doi.org/10.1073/pnas.2308435120.
[2] Li, Jingchen, Zhang, Kun, Du, Jialin, Li, Fanxing, Yang, Fan, Yan, Wei. Double-sided telecentric zoom optical system using adaptive liquid lenses. OPTICS EXPRESS[J]. 2023, 第 6 作者 通讯作者 31(2): 2508-2522, http://dx.doi.org/10.1364/OE.479809.
[3] Du, Dan, Li, Xiaoxue, Wang, Lian, Hao, Dan, Yan, Wei, Wang, Lin. Chronic active Epstein-Barr virus infection mimicking dermatomyositis. INDIAN JOURNAL OF DERMATOLOGY VENEREOLOGY & LEPROLOGY. 2023, 第 5 作者 通讯作者 89(1): 94-99, http://dx.doi.org/10.25259/IJDVL_485_2021.
[4] Yang, Ruoting, Yang, Shucheng, Ren, Jie, Gao, Xiaoping, Yan, Wei, Wang, Zhen. A Local Optimization Method for Single Flux Quantum Logic Circuits Design Utilizing Synchronizer IPs. IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY[J]. 2023, 第 5 作者33(3): http://dx.doi.org/10.1109/TASC.2023.3242084.
[5] Du, Jialin, Sun, Si, Li, Fanxing, Jiang, Jixin, Yan, Wei, Wang, Simo, Tian, Peng. Large range nano autofocus method based on differential centroid technique. OPTICS AND LASER TECHNOLOGY[J]. 2023, 第 5 作者 通讯作者 159: http://dx.doi.org/10.1016/j.optlastec.2022.109015.
[6] Guo, Wen, Yan, Wei, Jing, Chuanyong. Production of reactive oxygen species from oxygenation of Fe(II)-carbonate complexes: The critical roles of carbonate. JOURNAL OF HAZARDOUS MATERIALS[J]. 2023, 第 2 作者 通讯作者 454(null):
[7] Li, Jingchen, Zhang, Kun, Du, Jialin, Chen, Qingrong, Zhang, Xi, Sun, Si, Zhong, Jie, Yang, Fan, Yan, Wei. A method for converting the existing mechanical zoom optical system to the focus tunable lens zoom optical system. OPTICS AND LASERS IN ENGINEERING[J]. 2023, 第 9 作者 通讯作者 169: http://dx.doi.org/10.1016/j.optlaseng.2023.107746.
[8] Zhao, Chang, Wang, Heli, Liu, Ying, Cheng, Lin, Wang, Bo, Tian, Xiaowen, Fu, Hong, Wu, Chao, Li, Ziyan, Shen, Chenglong, Yu, Jingjing, Yang, Shengyong, Hu, Hongbo, Fu, Ping, Ma, Liang, Wang, Chuanxin, Yan, Wei, Shao, Zhenhua. Biased allosteric activation of ketone body receptor HCAR2 suppresses inflammation. MOLECULAR CELL[J]. 2023, 第 17 作者 通讯作者 83(17): 3171-+, http://dx.doi.org/10.1016/j.molcel.2023.07.030.
[9] Feng, Yuying, Zhao, Chang, Deng, Yue, Wang, Heli, Ma, Liang, Liu, Sicen, Tian, Xiaowen, Wang, Bo, Bin, Yan, Chen, Peipei, Yan, Wei, Fu, Ping, Shao, Zhenhua. Mechanism of activation and biased signaling in complement receptor C5aR1. CELL RESEARCH[J]. 2023, 第 11 作者 通讯作者 33(4): 312-324, http://lib.cqvip.com/Qikan/Article/Detail?id=7109618232.
[10] Sun, Mengfei, Liu, Li, Yan, Wei, Liu, Jian, Liu, Tong, Xu, Guochang. Performance analysis of BDS B1C/B2a PPP using different models and MGEX products. SURVEY REVIEW[J]. 2023, 第 3 作者55(389): 192-203, http://dx.doi.org/10.1080/00396265.2022.2081013.
[11] Li, Jingchen, Zhang, Kun, Du, Jialin, Li, Fanxing, Yang, Fan, Yan, Wei. Design and theoretical analysis of the image-side telecentric zoom system using focus tunable lenses based on Gaussian brackets and lens modules. OPTICS AND LASERS IN ENGINEERING[J]. 2023, 第 6 作者 通讯作者 164: http://dx.doi.org/10.1016/j.optlaseng.2023.107494.
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[15] Li, Jingchen, Zhang, Kun, Yang, Fan, Yu, Siyang, Zhang, Xi, Sun, Si, Chen, Qingrong, Yan, Wei. Design of the dual-band shared-aperture asynchronous zoom optical system using focus tunable lenses. OPTICS EXPRESS[J]. 2023, 第 8 作者 通讯作者 31(19): 30710-30722, http://dx.doi.org/10.1364/OE.496963.
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[20] Kuai, Xuebao, Wei, Lei, Yang, Fuhua, Yan, Wei, Li, Zhaofeng, Wang, Xiaodong. Suppression Method of Optical Noises in Resonator-Integrated Optic Gyroscopes. SENSORS[J]. 2022, 第 4 作者22(8): 2889, http://dx.doi.org/10.3390/s22082889.
[21] Xu, Zuben, Yu, Yaqin, Yan, Li, Yan, Wei, Jing, Chuanyong. Asenic removal from groundwater using granular chitosan-titanium adsorbent. JOURNALOFENVIRONMENTALSCIENCES[J]. 2022, 第 4 作者112(2): 202-209, http://dx.doi.org/10.1016/j.jes.2021.05.028.
[22] Mou, Lixian, Hu, Pingdong, Cao, Xiao, Chen, Yue, Xu, Yong, He, Tao, Wei, Yan, He, Rongqiao. Comparison of bovine serum albumin glycation by ribose and fructose in vitro and in vivo. BIOCHIMICA ET BIOPHYSICA ACTA-MOLECULAR BASIS OF DISEASE[J]. 2022, 第 7 作者 通讯作者 1868(1): http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000710122800006.
[23] Liu, Jixiao, Yang, Jupu, Li, Jingchen, Du, Jialin, Yu, Siyang, Li, Fanxing, Wang, Jian, Zhang, Xi, Sun, Si, Yan, Wei. High-precision calibration to zoom lens of optical measurement machine based on FNN. OPTICS EXPRESS[J]. 2022, 第 10 作者 通讯作者 30(13): 23511-23530,
[24] Zhang, Shuai, Hou, Xi, Yan, Wei, Zhang, Changrui, Qin, Die, Hu, Xiaochuan, Li, Mengfan, Quan, Haiyang. Stitching method based on dual quaternion for cylindrical mirrors. OPTICS EXPRESS[J]. 2022, 第 3 作者30(12): 21568-21581, http://dx.doi.org/10.1364/OE.455391.
[25] Yang, Xin, Wang, Xuehui, Xu, Zheng, Wu, Chao, Zhou, Yangli, Wang, Yifei, Lin, Guifeng, Li, Kan, Wu, Ming, Xia, Anjie, Liu, Jingming, Cheng, Lin, Zou, Jun, Yan, Wei, Shao, Zhenhua, Yang, Shengyong. Molecular mechanism of allosteric modulation for the cannabinoid receptor CB1. NATURE CHEMICAL BIOLOGY[J]. 2022, 第 14 作者18(8): 831-+, http://dx.doi.org/10.1038/s41589-022-01038-y.
[26] Yingying Chen, Yueyue Xi, Milu Li, Yaling Wu, Wei Yan, Jun Dai, Mingfu Wu, Wenjun Ding, Jinjin Zhang, Fang Zhang, Su Zhou, Shixuan Wang. Maternal exposure to PM2.5 decreases ovarian reserve in neonatal offspring mice through activating PI3K/AKT/FoxO3a pathway and ROS-dependent NF-κB pathway. TOXICOLOGY. 2022, 第 5 作者481: http://dx.doi.org/10.1016/j.tox.2022.153352.
[27] Wang, Simo, Zhang, Jiangyong, Li, Fanxing, Yang, Jupu, Liu, Jixiao, Yan, Wei. Deep Learning: A Rapid and Efficient Adaptive Design Approach for Phase-Type Optical Needle Modulators. IEEE PHOTONICS JOURNAL[J]. 2022, 第 6 作者 通讯作者 14(4):
[28] Wang, Simo, Zhang, Jiangyong, Li, Fanxing, Yan, Wei. Generation of soft annular beams with high uniformity, low ring width increment, and a smooth edge. OPTICS EXPRESS[J]. 2022, 第 4 作者 通讯作者 30(15): 27439-27452,
[29] Yu, Siyang, Sun, Si, Yan, Wei, Liu, Guangshuai, Li, Xurui. A Method Based on Curvature and Hierarchical Strategy for Dynamic Point Cloud Compression in Augmented and Virtual Reality System. SENSORS[J]. 2022, 第 3 作者 通讯作者 22(3): http://dx.doi.org/10.3390/s22031262.
[30] 张莹, 李俞锋, 严伟. 4f光学系统制造理论高相似度无衍射光的参数研究. 激光杂志[J]. 2021, 第 3 作者42(1): 11-16, https://kns.cnki.net/KCMS/detail/detail.aspx?dbcode=CJFQ&dbname=CJFDLAST2021&filename=JGZZ202101003&v=MjY3MTk4ZVgxTHV4WVM3RGgxVDNxVHJXTTFGckNVUjd1ZlllZG5GaURtVkx2Qkx5clJkTEc0SE5ETXJvOUZaNFI=.
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[32] He, Yuming, Lu, Ziqing, Kuai, Xuebao, Feng, Zuo, Han, Weihua, Li, Zhaofeng, Yan, Wei, Yang, Fuhua. Heterogeneous integration of InP and Si3N4 waveguides based on interlayer coupling for an integrated optical gyroscope. APPLIED OPTICS[J]. 2021, 第 7 作者60(3): 662-669, https://www.webofscience.com/wos/woscc/full-record/WOS:000609948100023.
[33] Yuan, Yuan, Jia, Guowen, Wu, Chao, Wang, Wei, Cheng, Lin, Li, Qian, Li, Ziyan, Luo, Kaidong, Yang, Shengyong, Yan, Wei, Su, Zhaoming, Shao, Zhenhua. Structures of signaling complexes of lipid receptors S1PR1 and S1PR5 reveal mechanisms of activation and drug recognition. CELL RESEARCH[J]. 2021, 第 10 作者 通讯作者 31(12): 1263-1274, http://dx.doi.org/10.1038/s41422-021-00566-x.
[34] Lin Song, Wei Yan, Hailong Wang, Jianhua Zhao, Xinhui Zhang. Resonant enhancement of magnetic damping driven by coherent acoustic phonons in thin Co_(2)FeAl film epitaxied on GaAs. 半导体学报：英文版[J]. 2021, 第 2 作者42(3): 66-72, http://lib.cqvip.com/Qikan/Article/Detail?id=7104115306.
[35] Liu, Liwei, Shi, Lifang, Li, Fanxing, Yu, Siyang, Wang, Simo, Du, Jialin, Liu, Min, Qi, Bo, Yan, Wei. Generation of an Ultra-Long Optical Needle Induced by an Azimuthally Polarized Beam. IEEE PHOTONICS JOURNAL[J]. 2021, 第 9 作者13(1): https://doaj.org/article/8b3d30338091400f88785b60ce1ff599.
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[38] Zhang, XinYan, Li, Qing, Dong, Ye, Yan, Wei, Song, Kun, Lin, YongQin, Sun, YanGang. Mu-Opioid Receptors Expressed in Glutamatergic Neurons are Essential for Morphine Withdrawal. NEUROSCIENCE BULLETIN[J]. 2020, 第 4 作者36(10): 1095-1106, http://sciencechina.cn/gw.jsp?action=detail.jsp&internal_id=6827811&detailType=1.
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[42] Jiang, Yuxuan, Yan, Li, Nie, Xiao, Yan, Wei. Remediation of antimony-contaminated tap water using granular TiO(2)column. ENVIRONMENTAL CHEMISTRY[J]. 2020, 第 4 作者17(4): 323-331, https://www.webofscience.com/wos/woscc/full-record/WOS:000541646800004.
[43] Meng, Di, Zhu, Qian, Wei, Yan, Zhen, Shengli, Duan, Ran, Chen, Chuncheng, Song, Wenjing, Zhao, Jincai. Light-driven activation of carbon-halogen bonds by readily available amines for photocatalytic hydrodehalogenation. CHINESE JOURNAL OF CATALYSIS[J]. 2020, 第 3 作者41(10): 1474-1479, http://sciencechina.cn/gw.jsp?action=detail.jsp&internal_id=6837695&detailType=1.
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[143] 严伟, 佟军民, 陈大鹏, 胡松, 赵立新, 杨勇, 蒋文波, 周绍林, 陈旺富. 微悬臂梁阵列成像系统光学特性分析. 四川大学学报：自然科学版[J]. 2009, 第 1 作者988-992, http://lib.cqvip.com/Qikan/Article/Detail?id=31027506.
[144] Wei, Yan, Chen, Lan, Chen, Ji, Ge, Lin, He, Rong Qiao. Rapid glycation with D-ribose induces globular amyloid-like aggregations of BSA with high cytotoxicity to SH-SY5Y cells. BMC CELL BIOLOGY[J]. 2009, 第 1 作者10(1): 10-10, http://www.irgrid.ac.cn/handle/1471x/757918.
[145] 周绍林, 唐小萍, 胡松, 马平, 陈旺富, 严伟. 纳米光刻双光栅对准莫尔条纹分析. 微细加工技术[J]. 2008, 第 6 作者13-17, http://lib.cqvip.com/Qikan/Article/Detail?id=28226150.
[146] 律睿慜, 杨勇, 王淑蓉, 唐小萍, 严伟. 基于细胞神经网络的生物芯片图像实时处理. 电子技术应用[J]. 2008, 第 5 作者34(5): 127-129, http://lib.cqvip.com/Qikan/Article/Detail?id=27153768.
[147] 严伟, 胡松, 唐小萍, 赵立新, 杨勇, 蒋文波, 周绍林, 陈旺富. 基于DMD的步进式无掩模数字曝光方法及装置. 电子工业专用设备[J]. 2008, 第 1 作者37(10): 14-19, http://lib.cqvip.com/Qikan/Article/Detail?id=28525896.
[148] 胡翔宇, 唐小萍, 严伟, 罗正全. 嵌入式生物芯片检测分析系统设计. 计算机应用研究[J]. 2008, 第 3 作者25(4): 1254-1256, http://lib.cqvip.com/Qikan/Article/Detail?id=26924794.
[149] 周绍林, 陈旺富, 杨勇, 唐小萍, 胡松, 马平, 严伟, 张幼麟. 纳米光刻中奠尔对准模型与应用. 光电工程[J]. 2008, 第 7 作者35(9): 27-31, http://lib.cqvip.com/Qikan/Article/Detail?id=28204404.
[150] Chen, Xianchun, Wei, Yan, Huang, Zhongbing, Kang, Yunqing, Yin, Guangfu. Synthesis and characterization of multiphase bioactive glass-ceramics in the CaO-MgO-SO2 system with B2O3 additive. JOURNAL OF MATERIALS RESEARCH[J]. 2008, 第 2 作者23(11): 2873-2879, https://www.webofscience.com/wos/woscc/full-record/WOS:000260944200005.
[151] Wei, Yan, Qu, MeiHua, Wang, XingSheng, Chen, Lan, Wang, DongLiang, Liu, Ying, Hua, Qian, He, RongQiao. Binding to the Minor Groove of the Double-Strand, Tau Protein Prevents DNA from Damage by Peroxidation. PLOS ONE[J]. 2008, 第 1 作者 通讯作者 3(7): http://www.irgrid.ac.cn/handle/1471x/757644.
[152] 周绍林, 唐小萍, 胡松, 马平, 陈旺富, 杨勇, 严伟. 纳米光刻对准方法及其原理. 微纳电子技术[J]. 2008, 第 7 作者45(4): 222-230, http://lib.cqvip.com/Qikan/Article/Detail?id=26960462.
[153] 佟军民, 宁玉伟, 严伟, 胡松. 接近式光刻机间隙分离机构设计. 机械设计与制造[J]. 2008, 第 3 作者43-44, http://lib.cqvip.com/Qikan/Article/Detail?id=27941970.
[154] 周绍林, 陈旺富, 杨勇, 唐小萍, 胡松, 马平, 严伟, 张幼麟. 纳米光刻中莫尔对准模型与应用. 光电工程[J]. 2008, 第 7 作者35(9): 27-31, http://ir.ioe.ac.cn/handle/181551/1929.
[155] 严伟, 胡松, 吴钦章, 唐小萍, 佟军民. 生物芯片图像微阵列偏转角度计算及样点分割算法. 光电工程[J]. 2007, 第 1 作者34(10): 6-10, http://lib.cqvip.com/Qikan/Article/Detail?id=25720316.
[156] 佟军民, 胡松, 董小春, 严伟, 余国彬. 工件台移动直线性对掩模移动曝光的影响. 光电工程[J]. 2007, 第 4 作者34(11): 55-60, http://lib.cqvip.com/Qikan/Article/Detail?id=25878141.
[157] 严伟, 胡松, 吴钦章, 唐小萍. 便携式生物芯片检测仪嵌入式系统研究. 现代科学仪器[J]. 2007, 第 1 作者46-48, http://lib.cqvip.com/Qikan/Article/Detail?id=26218076.
[158] 严伟, 胡松, 吴钦章, 陈瑛. 基于USB2．0的高速视频采集系统设计. 微纳电子技术[J]. 2007, 第 1 作者44(9): 892-896, http://lib.cqvip.com/Qikan/Article/Detail?id=25450146.
[159] 严伟, 胡松, 吴钦章, 陈瑛. 嵌入式生物芯片扫描仪图像自动定位方法研究. 四川大学学报：工程科学版[J]. 2007, 第 1 作者39(2): 150-155, http://lib.cqvip.com/Qikan/Article/Detail?id=25825053.
[160] 严伟. 高土石坝宽级配砾石土心墙料特性研究及数值模拟. 2006, 第 1 作者http://www.corc.org.cn/handle/1471x/2137869.
[161] 严伟, 徐进, 屈智炯, 柴贺军. 无粘性土石混合料K-G模型参数研究. 东北水利水电[J]. 2006, 第 1 作者24(1): 51-54, http://lib.cqvip.com/Qikan/Article/Detail?id=21039327.
[162] 罗勇, 许向宁, 严伟. 冕宁县、喜德县彝海-小相岭地区地质遗迹景观资源特征及其评价. 地质灾害与环境保护[J]. 2006, 第 3 作者17(2): 23-28, http://sciencechina.cn/gw.jsp?action=detail.jsp&internal_id=2485861&detailType=1.
[163] 赵立新, 胡松, 严伟, 罗正全. 共聚焦成像技术在生物芯片中的应用. 微纳电子技术[J]. 2004, 第 3 作者41(4): 40-41,45, http://ir.ioe.ac.cn/handle/181551/928.
[164] 赵立新, 胡松, 严伟, 罗正全. 共聚焦成像技术在生物芯片检测中的应用. 微纳电子技术[J]. 2004, 第 3 作者41(4): 40-41,45, http://lib.cqvip.com/Qikan/Article/Detail?id=9551564.
[165] 罗先刚, 姚汉民, 严佩英, 胡松, 严伟, 余国彬. 离轴照明空间成像的偏振光影响研究. 微细加工技术[J]. 2003, 第 5 作者22-25, http://lib.cqvip.com/Qikan/Article/Detail?id=8364891.
[166] 严伟. 成都市保密专用网络安全设计. 2003, 第 1 作者http://www.corc.org.cn/handle/1471x/2145924.
[167] 严伟, 王肇志, 姚汉民. 底面对准曝光机对准系统设计. 微纳电子技术[J]. 2002, 第 1 作者39(10): 40-44, http://lib.cqvip.com/Qikan/Article/Detail?id=6917558.
科研活动
科研项目
（ 1 ） 四川省杰青：同轴全息3D形貌检测方法研究, 主持, 省级, 2015-01--2017-12
（ 2 ） 微分干涉相衬-数字同轴全息3D形貌检测新型系统, 主持, 部委级, 2015-01--2016-12
（ 3 ） 院国防创新基金, 主持, 部委级, 2015-01--2017-12
（ 4 ） 国家863：***视觉技术, 主持, 国家级, 2015-10--2016-06
（ 5 ） 适用于双工件台光刻机的高精度离焦量解耦算法研究, 主持, 国家级, 2013-01--2016-12
（ 6 ） 集成偏振成像系统, 主持, 院级, 2016-01--2017-12
（ 7 ） 精密气浮工件台定位系统技术研发, 主持, 院级, 2015-01--2016-12
（ 2 ） 微分干涉相衬-数字同轴全息3D形貌检测新型系统, 主持, 部委级, 2015-01--2016-12
（ 3 ） 院国防创新基金, 主持, 部委级, 2015-01--2017-12
（ 4 ） 国家863：***视觉技术, 主持, 国家级, 2015-10--2016-06
（ 5 ） 适用于双工件台光刻机的高精度离焦量解耦算法研究, 主持, 国家级, 2013-01--2016-12
（ 6 ） 集成偏振成像系统, 主持, 院级, 2016-01--2017-12
（ 7 ） 精密气浮工件台定位系统技术研发, 主持, 院级, 2015-01--2016-12
指导学生
已指导学生
邸成良 博士研究生 080402-测试计量技术及仪器
马驰飞 硕士研究生 081102-检测技术与自动化装置
汤东亮 博士研究生 080300-光学工程
张伟 博士研究生 080300-光学工程
杨帆 博士研究生 081002-信号与信息处理
田鹏 博士研究生 080402-测试计量技术及仪器
现指导学生
程文播 博士研究生 080300-光学工程
余斯洋 博士研究生 081002-信号与信息处理
吴云飞 博士研究生 081002-信号与信息处理
李凡星 博士研究生 081002-信号与信息处理
张莹 博士研究生 080300-光学工程
杜佳林 博士研究生 081002-信号与信息处理
王思沫 硕士研究生 081002-信号与信息处理
彭伏平 博士研究生 081002-信号与信息处理
学生
1 201518015120003 程文播 男 中国科学院光电技术研究所 光学工程 博士研究生 博士研究生 普通招考 在培养单位
2 201518015121035 田鹏 男 中国科学院光电技术研究所 测试计量技术及仪器 博士研究生 博士研究生 普通招考 在培养单位
3 201618015120029 张莹 女 中国科学院光电技术研究所 光学工程 博士研究生 博士研究生 普通招考 在培养单位
4 201618015127051 吴云飞 女 中国科学院光电技术研究所 信号与信息处理 博士研究生 博士研究生 普通招考 在培养单位
5 201618015127055 杨帆 男 中国科学院光电技术研究所 信号与信息处理 博士研究生 博士研究生 硕博连读 在培养单位
6 201618015127057 余斯洋 男 中国科学院光电技术研究所 信号与信息处理 博士研究生 博士研究生 普通招考 在培养单位
7 201628015127033 彭伏平 男 中国科学院光电技术研究所 信号与信息处理 硕士研究生 硕士研究生 全国统考 在培养单位
8 201718015127041 李凡星 女 中国科学院光电技术研究所 信号与信息处理 博士研究生 博士研究生 硕博连读 在培养单位
9 201718015127043 唐惜 女 中国科学院光电技术研究所 信号与信息处理 博士研究生 博士研究生 硕博连读 在培养单位
10 201718015127046 吴浩然 男 中国科学院光电技术研究所 信号与信息处理 博士研究生 博士研究生 硕博连读 在培养单位