基本信息
彭炜 男 硕导 中国科学院上海微系统与信息技术研究所
电子邮件： wpeng@mail.sim.ac.cn
通信地址： 上海市长宁路865号
邮政编码： 200050
研究领域
超导电子学，微纳加工工艺
招生信息
招生专业
080903-微电子学与固体电子学
0805J1-纳米科学与技术
0805J1-纳米科学与技术
招生方向
超导器件基础工艺与集成技术
微纳器件与精细加工技术
超导电子学
微纳器件与精细加工技术
超导电子学
教育背景
2000-09--2004-06 中国科学院物理研究所超导国家重点实验室 博士
1997-09--2000-07 湖北大学 硕士
1993-09--1997-07 湖北大学 学士
1997-09--2000-07 湖北大学 硕士
1993-09--1997-07 湖北大学 学士
工作经历
工作简历
2010-11~现在, 中国科学院上海微系统与信息技术研究所, 研究员
2009-11~2010-10,Max-planck Institut für Mikrostrukturphysik, Halle, GERMANY, 博士后
2007-09~2009-10,Laboratoire de Physique de la Matière Condensée, Université de Picardie Jules Verne, Amiens, FRANCE, 博士后
2006-09~2007-08,Unité Science chimiques de Rennes, UMR CNRS6226, Université de Rennes1, Rennes, FRANCE, 博士后
2004-09~2006-07,清华大学材料科学与工程系, 博士后
2009-11~2010-10,Max-planck Institut für Mikrostrukturphysik, Halle, GERMANY, 博士后
2007-09~2009-10,Laboratoire de Physique de la Matière Condensée, Université de Picardie Jules Verne, Amiens, FRANCE, 博士后
2006-09~2007-08,Unité Science chimiques de Rennes, UMR CNRS6226, Université de Rennes1, Rennes, FRANCE, 博士后
2004-09~2006-07,清华大学材料科学与工程系, 博士后
社会兼职
2020-05-25-2025-05-31,全国半导体设备和材料标准化技术委员会微光刻分技术委员会, 委员
专利与奖励
专利成果
[1] 周健, 王娟, 王永良, 彭炜. 一种无磁屏蔽环境无并联电阻低温超导约瑟夫森结电流测试方法. 202311206205.0, 2023-10-11.
[2] 谢辉, 何桂香, 应利良, 彭炜, 王镇. 超导集成电路及其制备方法. CN: CN116568123A, 2023-08-08.
[3] 周健, 王娟, 王永良, 彭炜. 一种无并联电阻低温超导约瑟夫森结电流测量系统及方法. CN: CN115951108A, 2023-04-11.
[4] 彭炜, 胡宇心, 张露, 陈垒, 王镇. 一种超导磁通量子存储单元结构及其制备方法. CN 115768247 A, 2023-03-07.
[5] 应利良, 唐瑀锶, 彭炜, 任洁, 王镇. 一种分步刻蚀的约瑟夫森结制备方法. 202211209042.7, 2022-09-30.
[6] 彭炜, 李有金, 刘晓宇. 一种胶型侧壁形貌表征方法. CN: CN115015309A, 2022-09-06.
[7] 彭炜, 李有金, 刘晓宇. 一种胶型侧壁形貌表征方法. CN 115015309 A, 2022-09-06.
[8] 刘晓宇, 江文兵, 林志荣, 彭炜. 基于电子束曝光的高性能高频声表面波器件的制备方法. CN 114759894 A, 2022-07-15.
[9] 刘晓宇, 江文兵, 林志荣, 彭炜. 基于电子束曝光的高性能高频声表面波器件的制备方法. CN: CN114759894A, 2022-07-15.
[10] 彭炜, 李有金, 刘晓宇. 拐弯区加厚型SNSPD器件的制备方法. CN 114899302 A, 2022-08-12.
[11] 彭炜, 李有金, 刘晓宇. 拐弯区加厚型SNSPD器件的制备方法. CN: CN114899302A, 2022-08-12.
[12] 应利良, 张雪, 何桂香, 任洁, 彭炜. 具有大电感层的超导电路及其制备方法. CN 114188472 A, 2022-03-15.
[13] 江文兵, 林志荣, 陈俊锋, 彭炜, 王镇. 一种基于压电薄膜的声表面波与超导量子比特耦合器件. CN113839644A, 2021-12-24.
[14] 江文兵, 林志荣, 陈俊锋, 彭炜, 王镇. 一种基于压电薄膜的声表面波与超导量子比特耦合器件. CN: CN113839644B, 2023-08-18.
[15] 彭炜, 陶元鹤, 张露, 陈垒, 王镇. 亚微米堆栈结构约瑟夫森结器件及其制备方法. CN: CN113437209A, 2021-09-24.
[16] 伍文涛, 梁恬恬, 张国峰, 应利良, 王永良, 高波, 彭炜, 王镇. 一种约瑟夫森结及超导量子干涉器件的制备方法. CN: CN111244259A, 2020-06-05.
[17] 伍文涛, 梁恬恬, 张国峰, 应利良, 王永良, 高波, 彭炜, 王镇. 一种约瑟夫森结及超导量子干涉器件的制备方法. CN: CN111244259B, 2023-07-25.
[18] 冯嘉鑫, 王玲玲, 李卓君, 宋叶凯, 彭炜, 牟刚, 谢晓明. 一种钛氧化物超导薄膜的制备方法. CN: CN112824555A, 2021-05-21.
[19] 李卓君, 牟刚, 徐丽璇, 季秋骋, 宋叶凯, 彭炜. 一种面外高度取向CuFeSb薄膜制备方法. 201910687680.1, 2019-07-29.
[20] 唐鑫, 王会武, 张栖瑜, 石炜峰, 应利良, 公凯轩, 彭炜, 王镇. 约瑟夫森结的制备方法. CN: CN110148664A, 2019-08-20.
[21] 李峰, 彭炜, 王镇. 约瑟夫森结结构、存储单元、存储单元阵列及制备方法. CN: CN108364951A, 2018-08-03.
[22] 孔祥燕, 杨康, 王佳磊, 陈威, 彭炜. 一种基于超导连接的轴向梯度计的制造装置及方法. CN: CN107919433A, 2018-04-17.
[2] 谢辉, 何桂香, 应利良, 彭炜, 王镇. 超导集成电路及其制备方法. CN: CN116568123A, 2023-08-08.
[3] 周健, 王娟, 王永良, 彭炜. 一种无并联电阻低温超导约瑟夫森结电流测量系统及方法. CN: CN115951108A, 2023-04-11.
[4] 彭炜, 胡宇心, 张露, 陈垒, 王镇. 一种超导磁通量子存储单元结构及其制备方法. CN 115768247 A, 2023-03-07.
[5] 应利良, 唐瑀锶, 彭炜, 任洁, 王镇. 一种分步刻蚀的约瑟夫森结制备方法. 202211209042.7, 2022-09-30.
[6] 彭炜, 李有金, 刘晓宇. 一种胶型侧壁形貌表征方法. CN: CN115015309A, 2022-09-06.
[7] 彭炜, 李有金, 刘晓宇. 一种胶型侧壁形貌表征方法. CN 115015309 A, 2022-09-06.
[8] 刘晓宇, 江文兵, 林志荣, 彭炜. 基于电子束曝光的高性能高频声表面波器件的制备方法. CN 114759894 A, 2022-07-15.
[9] 刘晓宇, 江文兵, 林志荣, 彭炜. 基于电子束曝光的高性能高频声表面波器件的制备方法. CN: CN114759894A, 2022-07-15.
[10] 彭炜, 李有金, 刘晓宇. 拐弯区加厚型SNSPD器件的制备方法. CN 114899302 A, 2022-08-12.
[11] 彭炜, 李有金, 刘晓宇. 拐弯区加厚型SNSPD器件的制备方法. CN: CN114899302A, 2022-08-12.
[12] 应利良, 张雪, 何桂香, 任洁, 彭炜. 具有大电感层的超导电路及其制备方法. CN 114188472 A, 2022-03-15.
[13] 江文兵, 林志荣, 陈俊锋, 彭炜, 王镇. 一种基于压电薄膜的声表面波与超导量子比特耦合器件. CN113839644A, 2021-12-24.
[14] 江文兵, 林志荣, 陈俊锋, 彭炜, 王镇. 一种基于压电薄膜的声表面波与超导量子比特耦合器件. CN: CN113839644B, 2023-08-18.
[15] 彭炜, 陶元鹤, 张露, 陈垒, 王镇. 亚微米堆栈结构约瑟夫森结器件及其制备方法. CN: CN113437209A, 2021-09-24.
[16] 伍文涛, 梁恬恬, 张国峰, 应利良, 王永良, 高波, 彭炜, 王镇. 一种约瑟夫森结及超导量子干涉器件的制备方法. CN: CN111244259A, 2020-06-05.
[17] 伍文涛, 梁恬恬, 张国峰, 应利良, 王永良, 高波, 彭炜, 王镇. 一种约瑟夫森结及超导量子干涉器件的制备方法. CN: CN111244259B, 2023-07-25.
[18] 冯嘉鑫, 王玲玲, 李卓君, 宋叶凯, 彭炜, 牟刚, 谢晓明. 一种钛氧化物超导薄膜的制备方法. CN: CN112824555A, 2021-05-21.
[19] 李卓君, 牟刚, 徐丽璇, 季秋骋, 宋叶凯, 彭炜. 一种面外高度取向CuFeSb薄膜制备方法. 201910687680.1, 2019-07-29.
[20] 唐鑫, 王会武, 张栖瑜, 石炜峰, 应利良, 公凯轩, 彭炜, 王镇. 约瑟夫森结的制备方法. CN: CN110148664A, 2019-08-20.
[21] 李峰, 彭炜, 王镇. 约瑟夫森结结构、存储单元、存储单元阵列及制备方法. CN: CN108364951A, 2018-08-03.
[22] 孔祥燕, 杨康, 王佳磊, 陈威, 彭炜. 一种基于超导连接的轴向梯度计的制造装置及方法. CN: CN107919433A, 2018-04-17.
出版信息
发表论文
[1] ACS Applied Energy Materials. 2024, 第 5 作者
[2] Journal of Solid State Chemistry. 2024, 第 5 作者
[3] Physica C: Superconductivity and its applications. 2024, 第 7 作者
[4] Physica C: Superconductivity and its applications. 2024, 第 3 作者
[5] Journal of Low Temperature Physics. 2024, 第 8 作者
[6] Superconductor Science and Technology. 2024, 第 4 作者
[7] Appl. Phys. Lett.. 2024, 第 9 作者
[8] Superconductor Science and Technology. 2024, 第 9 作者
[9] Appl. Phys. Lett.. 2024, 第 9 作者
[10] Xiaoni Wang, Lijie Wang, Yixin Liu, Wanpeng Gao, Yu Wu, Zulei Xu, Hua Jin, Lu Zhang, Wei Peng, Zhen Wang, Wei Li, Gang Mu, Zhirong Lin. Investigation of the Pauli paramagnetic effect in systematically tuned NbN thin films. PHYSICA C: SUPERCONDUCTIVITY AND ITS APPLICATIONS[J]. 2023, 第 9 作者606: http://dx.doi.org/10.1016/j.physc.2023.1354223.
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[12] Kuang Liu, He, Xiaoliang, Zhengqi Niu, Xue Hang, Wenbing Jiang, Liliang Ying, Wei Peng, Masaaki Maezawa, Zhirong Lin, Xiaoming Xie, Zhen Wang. Quasiparticle dynamics in superconducting quantum-classical hybrid circuits. PHYSICAL REVIEW B[J]. 2023, 第 7 作者
[13] Qiaohong Yan, Haobin Gao, Wei Peng, Zhu, Xiaohong. A comparative study of superconductivity at LaAlO3/SrTiO3 and BaTiO3/LaAlO3/SrTiO3 heterointerfaces. AIP Advances[J]. 2023, 第 3 作者 通讯作者 13: 065112,
[14] Yu, Aobo, Zhang, Tianzhu, Fan, Donghui, Yuan, Pusheng, Peng, Wei, Li, Hao, Lin, Chengtian, Mu, Gang, Zhang, Xiaofu, You, Lixing. Vortex glass phase transition in two-dimensional Bi2Sr2Ca2Cu3O 10+d sub-microbridge. SUPERCONDUCTOR SCIENCE & TECHNOLOGY[J]. 2023, 第 5 作者36(3): 035008,
[15] Si, Mengting, Zhou, Liping, Peng, Wei, Zhang, Xingyu, Yi, Ailun, Wang, Chengli, Zhou, Hourong, Wang, Zhen, Ou, Xin, You, Lixing. Superconducting nanowire single photon detector on 4H-SiC substrates with saturated quantum efficiency. APPLIED PHYSICS LETTERS[J]. 2023, 第 3 作者123(13): http://dx.doi.org/10.1063/5.0164368.
[16] Zhou, Jian, Wang, Juan, Yao, Yewen, Wang, Yongliang, Wang, Man, Peng, Wei. A Measurement Method of Critical Current of Un-Shunted Josephson Junction. IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY[J]. 2023, 第 6 作者33(8): http://dx.doi.org/10.1109/TASC.2023.3314855.
[17] Pan, Yinping, Zhang, Denghui, Yang, Ruoting, Wu, Guangting, Zeng, Junwen, Peng, Wei, Wang, Zhen, Ren, Jie, Chen, Lei. Influence of surrounding vortices on critical current of a Nb/Al-AlO (x) /Nb Josephson junction. SUPERCONDUCTOR SCIENCE & TECHNOLOGY[J]. 2023, 第 6 作者36(8): http://dx.doi.org/10.1088/1361-6668/acd7ad.
[18] Zhang, Denghui, Pan, Yinping, Wu, Guangting, Yu, Shujie, Zhong, Xianghai, Wang, Yue, Liu, Xiaoyu, Wu, Ling, Peng, Wei, Zhang, Lu, Chen, Lei, Wang, Zhen. The on-chip scanning probe with dual niobium nitride nanoscale superconducting quantum interference devices for magnetic imaging at the high temperature. SUPERCONDUCTOR SCIENCE & TECHNOLOGY[J]. 2023, 第 9 作者36(12): http://dx.doi.org/10.1088/1361-6668/ad0182.
[19] Liu, Yixin, Wang, Teng, Xu, Zulei, Hong, Wenshan, Peng, Wei, Lin, ZhiRong, Luo, Huiqian, Mu, Gang. Influences of quenching treatment and cobalt-doping on the thermally activated flux-flow behavior in KCa2(Fe(1-x)C(o)x)(4)As4F2. SUPERCONDUCTOR SCIENCE & TECHNOLOGY[J]. 2023, 第 5 作者36(9): http://dx.doi.org/10.1088/1361-6668/ace661.
[20] Jiang, Wenbing, Chen, Junfeng, Liu, Xiaoyu, Niu, Zhengqi, Liu, Kuang, Peng, Wei, Wang, Zhen, Lin, ZhiRong. Thin film aluminum nitride surface acoustic wave resonators for quantum acoustodynamics. APPLIED PHYSICS LETTERS[J]. 2023, 第 6 作者123(2): http://dx.doi.org/10.1063/5.0158083.
[21] Yu, A B, Huang, Z, Wei Peng, Li, H, Lin, C T, Zhang, X F, You, L X. Fabrication and transport properties of two dimensional Bi2Sr2Ca2Cu3O10+delta micro-bridge. APPLIED PHYSICS LETTERS[J]. 2022, 第 3 作者120(7): http://dx.doi.org/10.1063/5.0075947.
[22] Si, Mengting, Wang, Chengli, Yang, Can, Peng, Wei, You, Lixing, Li, Zhongxu, Zhang, Hui, Huang, Jia, Xiao, You, Xiong, Jiamin, Zhang, Lu, Pan, Yiming, Ou, Xin, Wang, Zhen. Superconducting NbN thin films on various (X/Y/Z-cut) lithium niobate substrates. SUPERCONDUCTOR SCIENCE & TECHNOLOGY[J]. 2022, 第 4 作者35(2): http://dx.doi.org/10.1088/1361-6668/ac459e.
[23] Zhang, Lu, You, Lixing, Chen, Lei, Peng, Wei, Wang, Zhen. Superconductivity of disordered NbN films deposited on magnesium oxide and oxidized silicon substrates. SUPERCONDUCTOR SCIENCE & TECHNOLOGY[J]. 2022, 第 4 作者35(10):
[24] Zhang, Lu, Yan, Kaixin, Tao, Yuanhe, Zhong, Yulong, Shi, Jiasheng, Zeng, Junwen, Shi, Weifeng, Wu, Ling, Wang, Huiwu, Peng, Wei, Chen, Lei, Wang, Zhen. Electrical properties of NbN/NbN (x) /NbN Josephson junctions. SUPERCONDUCTOR SCIENCE & TECHNOLOGY[J]. 2022, 第 10 作者35(2):
[25] Liu, Yixin, Zhang, Han, Han, Xiaowen, Wang, Lingling, Wang, Teng, Niu, Zhengqi, Pan, Jie, Lin, Zhirong, Peng, Wei, 李卓君, Mu, Gang, Di, Zengfeng, Huang, Fuqiang, Xie, Xiaoming. Evolution of the upper critical field and superconducting vortex phase with thickness in PLD-grown Ta films. Superconductor Science and Technology[J]. 2022, 第 9 作者35(5): 055010,
[26] Xue, Huanyi, Wang, Lijie, Wang, Zhongjie, Zhang, Guanqun, Peng, Wei, Wu, Shiwei, Gao, ChunLei, An, Zhenghua, Chen, Yan, Li, Wei. Fourfold Symmetric Superconductivity in Spinel Oxide LiTi2O4(001) Thin Films. ACS NANO[J]. 2022, 第 5 作者16(11): 19464-19471, http://dx.doi.org/10.1021/acsnano.2c09338.
[27] Zeng, Junwen, Chen, Lei, Zhong, Xianghai, Wang, Yue, Pan, Yinping, Zhang, Denghui, Yu, Shujie, Wu, Ling, Zhang, Lu, Peng, Wei, Wang, Zhen. Nonvolatile memory cell using a superconducting-ferromagnetic pi Josephson junction. SUPERCONDUCTOR SCIENCE & TECHNOLOGY[J]. 2022, 第 10 作者35(10):
[28] Yuan, Kaidi, Xie, Miao, Dong, Wujie, Zhao, Pei, Pan, Jun, Liu, Zhanqiang, Xie, Xiaoming, Peng, Wei, Huang, Fuqiang. High-Speed and One-Step Deposition of a LiCoO2 Thin-Film Electrode by a High-Repetition 1064 nm Nd:YAG Fiber Laser. ACS APPLIED ENERGY MATERIALS[J]. 2022, 第 8 作者5(12): 15483-15490, http://dx.doi.org/10.1021/acsaem.2c02826.
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[30] Yan, Kaixin, Zhang, Lu, Zhong, Yulong, Shi, Jiasheng, Shi, Weifeng, Wu, Ling, Wang, Huiwu, Chen, Lei, Ren, Jie, Peng, Wei, Wang, Zhen. Intrinsically shunted NbN/TaN/NbN Josephson junctions on Si substrates for large-scale integrated circuits applications. SUPERCONDUCTOR SCIENCE & TECHNOLOGY[J]. 2022, 第 10 作者35(6): http://dx.doi.org/10.1088/1361-6668/ac591d.
[31] WentaoWu, ZhirongLin, ZhiNi, PeizhanLi, TiantianLiang, GuofengZhang, YongliangWang, LiliangYing, WeiPeng, WenZhang, ShengcaiShi, LixingYou, ZhenWang. Development of series SQUID array with on-chip filter for TES detector. Chinese Physics B[J]. 2022, 第 9 作者31(2): 28504-028504, https://cpb.iphy.ac.cn/EN/10.1088/1674-1056/ac2b91.
[32] Xue Hang, Zhirong Lin, Wenbing Jiang, Zhengqi Niu, Kuang Liu, Wei Peng, Zhen Wang. Fabrication and characterization of all-Nb lumped-element Josephson parametric amplifier. Chinese Physics B[J]. 2021, 第 6 作者30(6): 068503,
[33] Xue Zhang, Liliang Ying, Minghui Niu, Hui Zhang, Huanli Liu, Yu Wu, Wanning Xu, Liyun Chen, Yingyi Shao, Tiantian Liang, Linxian Ma, Hua Jin, Hui Xie, Yang Gao, Hao Sun, Jie Ren, Wei Peng, Masaaki Maezawa, Zhen Wang. Process Control Monitoring for Fabrication Technology of Superconducting Integrated Circuits. IEEE Transactions on Applied Superconductivity[J]. 2021, 第 17 作者31(5):
[34] Yan, Kaixin, Zhang, Lu, Wang, Huiwu, Tao, Yuanhe, Shi, Jiasheng, Zhong, Yulong, Jin, Hua, Shi, Weifeng, Chen, Lei, Peng, Wei, You, Lixing, Wang, Zhen. Intrinsically shunted Josephson junctions with high characteristic voltage based on epitaxial NbN/TaN/NbN trilayer. APPLIED PHYSICS LETTERS[J]. 2021, 第 10 作者119(15): http://dx.doi.org/10.1063/5.0064733.
[35] Wentao Wu, Tiantian Liang, Zhirong Lin, Yongliang Wang, Guofeng Zhang, Liliang Ying, Wei Peng, Peizhan Li, Wen Zhang, Shengcai Shi, Shuo Zhang, Zhi Liu, Lixing You, Zhen Wang. Resonance analysis using a high frequency simulation method for dc-SQUID amplifiers. Physica C: Superconductivity and its Applications[J]. 2021, 第 7 作者591: 1353976,
[36] 梁恬恬, 张国峰, 伍文涛, 倪志, 王永良, 应利良, 伍俊, 荣亮亮, 彭炜, 高波. 串联超导量子干涉器件阵列制备与测试分析. 物理学报[J]. 2021, 第 9 作者70(17): 318-323, https://wulixb.iphy.ac.cn/cn/article/doi/10.7498/aps.70.20210467.
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科研活动
科研项目
（ 1 ） 超导量子器件柔性中试平台, 参与, 省级, 2015-10--2017-09
（ 2 ） 大规模超导集成电路工艺研发, 主持, 部委级, 2018-02--2023-12
（ 3 ） 超导微纳器件基础工艺研究, 主持, 部委级, 2012-07--2017-06
（ 2 ） 大规模超导集成电路工艺研发, 主持, 部委级, 2018-02--2023-12
（ 3 ） 超导微纳器件基础工艺研究, 主持, 部委级, 2012-07--2017-06
参与会议
（1）Magnetic Josephson Junction Based on NbN/NiCu/NbN Trilayer 2016-09-04
（2）NbN/NiCu/NbN约瑟夫森结的制备与研究 第十四届全国超导薄膜和超导电子器件学术研讨会 2016-08-25
（3）超导/铁磁/超导约瑟夫森结的制备与表征 第十三届全国超导学术研讨会 2015-10-27
（4）Growth and characterization of NiCu ferromagnetic films and superconductor/ferromagnet bilayers 2015-09-10
（2）NbN/NiCu/NbN约瑟夫森结的制备与研究 第十四届全国超导薄膜和超导电子器件学术研讨会 2016-08-25
（3）超导/铁磁/超导约瑟夫森结的制备与表征 第十三届全国超导学术研讨会 2015-10-27
（4）Growth and characterization of NiCu ferromagnetic films and superconductor/ferromagnet bilayers 2015-09-10