基本信息
王军波 男 博导 中国科学院空天信息创新研究院
国家杰出青年科学基金获得者
中国科学院大学优秀导师
中国科学院空天信息创新研究院学术委员会委员
中国科学院空天信息创新研究院学位委员会委员
九室主任
传感技术联合国家重点实验室副主任
电子邮件: jbwang@mail.ie.ac.cn
通信地址: 北京市北四环西路19号
邮政编码: 100190
研究领域
微纳传感器与系统,微流控芯片系统,MEMS加工工艺与传感器封装,微弱信号检测与仪表技术
招生信息
每年招生硕士和直博生4-5名
招生专业
080903-微电子学与固体电子学
080920-生物电子学
085208-电子与通信工程
080920-生物电子学
085208-电子与通信工程
招生方向
1. 基于微纳米技术的传感器、执行器与系统
2. MEMS加工技术与封装
3. 微流控芯片系统
4. 信号检测与仪表技术
教育背景
1998-03--2002-11 清华大学 博士1995-09--1998-03 吉林大学 硕士1991-09--1995-07 吉林大学 学士
出国学习工作
2006年在英国皇家学会资助下,赴英国卢瑟福国家实验室和牛津大学工程系开展有关微流体芯片的合作研究;
2009年在院高级访问学者的资助下,赴美国加州大学伯克利(Berkeley)分校传感器与执行器中心(BSAC)从事有关纳米发电机的合作研究。
2009年在院高级访问学者的资助下,赴美国加州大学伯克利(Berkeley)分校传感器与执行器中心(BSAC)从事有关纳米发电机的合作研究。
教授课程
科学前沿进展名家系列讲座III前沿电子学研究微流控芯片系统本科生毕业设计(电子信息工程)科研实践Ⅰ科研实践Ⅱ射频集成电路设计与分析CMOS模拟集成电路设计与分析MEMS接口电路传感器网络与模式识别系列讲座传感器网络系列讲座物联网系列讲座
专利与奖励
专利成果
[1] 陈德勇, 秦佳新, 谢波, 王军波, 鲁毓岚. 弱耦合谐振式传感器宽温区线性工作补偿方法. CN: CN118362153A, 2024-07-19.[2] 陈德勇, 秦佳新, 夏文良, 王军波, 谢波, 鲁毓岚. 一种双模式谐振压力传感器. CN: CN117928811A, 2024-04-26.[3] 李楠, 周天平, 王军波, 陈德勇. 试管的制备方法和试管的使用方法. CN: CN117282482B, 2024-02-13.[4] 李楠, 周天平, 王军波, 陈德勇. 分析试管和分析装置. CN: CN117282483A, 2023-12-26.[5] 李楠, 周天平, 王军波, 陈德勇. 检测卡盒及其使用方法. CN: CN117264750A, 2023-12-22.[6] 李楠, 周天平, 王军波, 陈德勇. 多指标检测装置及其使用方法. CN: CN117264749B, 2024-02-02.[7] 李楠, 周天平, 王军波, 陈德勇. 检测卡盒及其使用方法. CN: CN117264750B, 2024-01-30.[8] 李楠, 周天平, 王军波, 陈德勇. 试管的制备方法和试管的使用方法. CN: CN117282482A, 2023-12-26.[9] 李楠, 周天平, 王军波, 陈德勇. 分析试管和分析装置. CN: CN117282483B, 2024-02-02.[10] 李楠, 周天平, 王军波, 陈德勇. 多指标检测装置及其使用方法. CN: CN117264749A, 2023-12-22.[11] 王军波, 胡林涛, 陈德勇, 鲁毓岚, 刘青华. 一种反馈式电化学声压水听器. CN: CN117516697A, 2024-02-06.[12] 王军波, 胡林涛, 陈德勇, 鲁毓岚, 刘青华. 一种透声式电化学矢量水听器. CN: CN117516696A, 2024-02-06.[13] 鲁毓岚, 薛涵, 王军波, 陈德勇, 谢波. 一种可实现静压测量的谐振式差压传感器及制备方法. CN: CN117346947A, 2024-01-05.[14] 王军波, 朱茂琦, 陈德勇, 梁天, 鲁毓岚. 基于阳极键合的一体化MEMS电化学角加速度传感器及制造方法. CN: CN117269534A, 2023-12-22.[15] 王军波, 张明博, 陈德勇, 朱茂琦, 鲁毓岚. 硅导电四电极电化学角振动传感器敏感电极及其制造方法. CN: CN117228621A, 2023-12-15.[16] 谢波, 秦佳新, 李楠, 鲁毓兰, 陈德勇, 王军波. 一种MEMS谐振阻尼式高真空压力传感器及其测量方法. CN: CN117213710A, 2023-12-12.[17] 周梦杨, 王军波, 鲁毓岚, 陈德勇, 谢波, 陈健, 姚佳辉. 一种谐振式压力传感器的正交锁相闭环系统及其实现方法. CN: CN117176103A, 2023-12-05.[18] 陈德勇, 秦佳新, 鲁毓岚, 谢波, 王军波. 易调整式弱耦合微压力传感器及闭环控制和温度补偿方法. CN: CN116839763A, 2023-10-03.[19] 周天平, 李楠, 王军波, 陈德勇. 分析卡盒、分析设备及分析方法. CN: CN116376671B, 2023-08-22.[20] 周天平, 李楠, 王军波, 陈德勇. 分析卡盒、分析设备及分析方法. CN: CN116376671A, 2023-07-04.[21] 王军波, 钱攀, 余宗泽, 鲁毓岚, 谢波, 陈德勇. 基于梁膜敏感和体压缩敏感的谐振式高压传感器. CN: CN116539211A, 2023-08-04.[22] 谢波, 李星雨, 鲁毓岚, 姚佳辉, 陈德勇, 王军波. 一种静压补偿硅谐振微差压传感器及其制备方法. CN: CN116465541A, 2023-07-21.[23] 王军波, 孙振宇, 齐文杰, 陈德勇. 单硅片上集成制造四种电化学敏感电极的MEMS芯片及制造方法. CN: CN115947297A, 2023-04-11.[24] 祁志美, 董志飞, 熊林森, 岳研, 蔡宸, 王军波. 一种声学温度传感器及温度测量方法. 202211430631.8, 2022-11-15.[25] 谢波, 余宗泽, 鲁毓岚, 薛涵, 陈德勇, 王军波. 敏感芯体和传感器. CN: CN115389059A, 2022-11-25.[26] 谢波, 余宗泽, 鲁毓岚, 薛涵, 陈德勇, 王军波. 敏感芯体和传感器. 202210974384.1, 2022-08-15.[27] 王军波, 姚佳辉, 程超, 陈德勇, 谢波, 鲁毓岚, 薛涵, 余宗泽. 一种基于共晶键合工艺的谐振式差压传感器的设计制作方法. 202210814306.5, 2022-07-12.[28] 王军波, 姚佳辉, 程超, 陈德勇, 谢波, 鲁毓岚, 薛涵, 余宗泽. 一种基于共晶键合工艺的谐振式差压传感器的设计制作方法. CN: CN115215287A, 2022-10-21.[29] 陈德勇, 谢波, 秦佳新, 鲁毓岚, 尉洁, 王军波. 一种差分刚度扰动模态局域化的高灵敏微压传感器. CN: CN115265850A, 2022-11-01.[30] 陈德勇, 谢波, 秦佳新, 鲁毓岚, 尉洁, 王军波. 一种差分刚度扰动模态局域化的高灵敏微压传感器. 20221075922.6, 2022-06-30.[31] 陈健, 黄旭琨, 刘岩, 梁红雁, 王棵, 陈德勇, 王军波. 基于非压缩通道的单细胞生物物理特性检测装置及方法. 202210321553.1, 2022-03-25.[32] 陈健, 黄旭琨, 刘岩, 梁红雁, 王棵, 陈德勇, 王军波. 基于非压缩通道的单细胞生物物理特性检测装置及方法. CN: CN114659965A, 2022-06-24.[33] 陈德勇, 尉洁, 王军波, 鲁毓岚, 谢波. 一种具有高Q值的硅谐振式高压传感器及其制备方法. 202210224116.8, 2022-03-09.[34] 陈德勇, 尉洁, 王军波, 鲁毓岚, 谢波. 一种具有高Q值的硅谐振式高压传感器及其制造方法. CN: CN114593846A, 2022-06-07.[35] 陈德勇, 尉洁, 王军波, 鲁毓岚, 谢波. 一种具有高Q值的硅谐振式高压传感器及其制造方法. CN: CN114593846B, 2024-03-15.[36] 陈健, 梁红雁, 陈骁, 陈德勇, 王军波. 一种基于阻抗信号及荧光成像的细胞特征检测方法和装置. 20211010815.7, 2022-01-28.[37] 陈健, 梁红雁, 陈骁, 陈德勇, 王军波. 一种基于阻抗信号及荧光成像的细胞特征检测方法和装置. CN: CN114518316A, 2022-05-20.[38] 陈健, 梁红雁, 张毅, 谭惠文, 陈德勇, 王军波. 基于电学及荧光信号的微流控芯片和血细胞分析装置. CN202010226537.5, 2021-10-26.[39] 陈健, 梁红雁, 张毅, 谭惠文, 陈德勇, 王军波. 细胞核电学性能检测装置及方法. CN202010073004.8, 2021-10-12.[40] 陈德勇, 陈明惟, 王军波, 钟安详, 段语默, 刘博文, 梁天, 齐文杰. 一种电化学角加速度传感器的封装方法. CN: CN113687102B, 2022-07-08.[41] 陈德勇, 陈明惟, 王军波, 钟安详, 段语默, 刘博文, 梁天, 齐文杰. 一种电化学角加速度传感器的封装方法. CN: CN113687102A, 2021-11-23.[42] 陈德勇, 陈明惟, 王军波, 钟安详, 段语默, 刘博文, 梁天, 齐文杰. 一种电化学角加速度传感器的封装方法. CN: CN113687102A, 2021-11-23.[43] 陈德勇, 陈明惟, 王军波, 刘博文, 梁天, 齐文杰, 钟安详, 段语默. 一种基于硅导电的MEMS电化学振动传感器敏感电极及其制造方法. CN: CN113671213B, 2022-12-27.[44] 陈德勇, 陈明惟, 王军波, 刘博文, 梁天, 齐文杰, 钟安详, 段语默. 一种基于硅导电的MEMS电化学振动传感器敏感电极及其制造方法. CN: CN113671213A, 2021-11-19.[45] 陈德勇, 陈明惟, 王军波, 刘博文, 梁天, 齐文杰, 钟安详, 段语默. 一种基于硅导电的MEMS电化学振动传感器敏感电极及其制造方法. CN: CN113671213A, 2021-11-19.[46] 王军波, 程超, 姚佳辉, 陈德勇, 鲁毓岚. 一种集成温度传感器的谐振式差压传感器及其制备方法. CN: CN113686483A, 2021-11-23.[47] 王军波, 段语默, 陈德勇, 许超, 齐文杰. MEMS电化学振动传感器四电极一体化敏感电极及其制造方法. CN: CN113739901A, 2021-12-03.[48] 王军波, 程超, 姚佳辉, 陈德勇, 鲁毓岚. 一种集成温度传感器的谐振式差压传感器及其制备方法. CN: CN113686483B, 2023-07-25.[49] 王军波, 孟庆港, 陈德勇, 鲁毓岚, 谢波. 基于SOI的电阻中心放置的压阻式压力传感器. CN: CN113758613A, 2021-12-07.[50] 王军波, 孟庆港, 陈德勇, 鲁毓岚, 谢波. 基于SOI的电阻中心放置的压阻式压力传感器. CN: CN113758613A, 2021-12-07.[51] 王军波, 梁天, 陈德勇, 刘博文, 许超, 齐文杰, 佘旭. 一种电化学敏感电极、制作方法及应用其的角加速度传感器. CN: CN113687101A, 2021-11-23.[52] 王军波, 孟庆港, 陈德勇, 鲁毓岚, 谢波. 基于SOI的电阻中心放置的压阻式压力传感器. CN: CN113758613B, 2022-12-27.[53] 王军波, 梁天, 陈德勇, 刘博文, 许超, 齐文杰, 佘旭. 一种电化学敏感电极、制作方法及应用其的角加速度传感器. CN: CN113687101B, 2023-07-25.[54] 王军波, 段语默, 陈德勇, 许超, 齐文杰. MEMS电化学振动传感器四电极一体化敏感电极及其制造方法. CN: CN113739901B, 2022-12-23.[55] 王军波, 段语默, 陈德勇, 许超, 齐文杰. MEMS电化学振动传感器四电极一体化敏感电极及其制造方法. CN: CN113739901A, 2021-12-03.[56] 王军波, 程超, 姚佳辉, 陈德勇, 鲁毓岚. 一种集成温度传感器的谐振式差压传感器及其制备方法. CN: CN113686483A, 2021-11-23.[57] 王军波, 梁天, 陈德勇, 刘博文, 许超, 齐文杰, 佘旭. 一种电化学敏感电极、制作方法及应用其的角加速度传感器. CN: CN113687101A, 2021-11-23.[58] 王军波, 钟安祥, 陈健, 陈德勇, 段语默, 陈明惟, 梁天, 刘博文, 许超, 齐文杰, 佘旭. 一种敏感器件、电化学矢量水听器. CN: CN113654644A, 2021-11-16.[59] 王军波, 钟安祥, 陈健, 陈德勇, 段语默, 陈明惟, 梁天, 刘博文, 许超, 齐文杰, 佘旭. 一种敏感器件、电化学矢量水听器. CN: CN113654644A, 2021-11-16.[60] 王军波, 钟安祥, 陈健, 陈德勇, 段语默, 陈明惟, 梁天, 刘博文, 许超, 齐文杰, 佘旭. 一种敏感器件、电化学矢量水听器. CN: CN113654644B, 2023-01-24.[61] 陈健, 张婷, 陈德勇, 王军波. 基于光源调制的高分辨率单细胞蛋白定量检测方法. CN: CN113670874A, 2021-11-19.[62] 陈健, 张婷, 陈德勇, 王军波. 基于光源调制的高分辨率单细胞蛋白定量检测方法. CN: CN113670874A, 2021-11-19.[63] 陈健, 张婷, 陈德勇, 王军波. 基于光源调制的高分辨率单细胞蛋白定量检测装置及方法. CN202110952702.X, 2021-08-19.[64] 陈健, 梁红雁, 张毅, 谭惠文, 陈德勇, 王军波. 一种细胞及细胞核生物电学特性检测装置及方法. CN202110198721.8, 2021-06-25.[65] 陈健, 梁红雁, 张毅, 谭惠文, 陈德勇, 王军波. 基于电学信号的微流控芯片和血细胞分析装置及方法. CN202010226539.4, 2021-05-15.[66] 王军波, 张森, 陈德勇, 鲁毓岚, 谢波, 郑宇. 谐振式微压传感器及其制备方法. CN: CN113091989A, 2021-07-09.[67] 陈德勇, 尉洁, 王军波, 鲁毓岚, 谢波, 项超. 一种谐振式高压传感器及其制作方法. CN: CN113091984A, 2021-07-09.[68] 杜利东, 许立锐, 陈贤祥, 王鹏, 方震, 王军波, 太惠玲, 蒋亚东. 复合柔性三维压力监测阵列的柔性超声换能阵列及装置. CN: CN113092595B, 2022-09-30.[69] 杜利东, 许立锐, 陈贤祥, 王鹏, 方震, 王军波, 太惠玲, 蒋亚东. 复合柔性三维压力监测阵列的柔性超声换能阵列及装置. CN: CN113092595A, 2021-07-09.[70] 陈德勇, 尉洁, 王军波, 鲁毓岚, 谢波. 基于谐振器的真空度检测方法、系统及装置. CN: CN113008453A, 2021-06-22.[71] 陈德勇, 尉洁, 王军波, 鲁毓岚, 谢波. 基于谐振器的真空度检测方法、系统及装置. CN: CN113008453A, 2021-06-22.[72] 陈健, 梁红雁, 张毅, 谭惠文, 陈德勇, 王军波. 一种细胞及细胞核生物电学特性检测装置及方法. CN: CN113029917B, 2022-11-29.[73] 陈健, 梁红雁, 张毅, 谭惠文, 陈德勇, 王军波. 一种细胞及细胞核生物电学特性检测装置及方法. CN: CN113029917A, 2021-06-25.[74] 王军波, 刘博文, 陈德勇, 许超, 梁天, 齐文杰, 佘旭. 基于小型化平面电极的电化学角加速度传感器. CN: CN112986619A, 2021-06-18.[75] 王军波, 刘博文, 陈德勇, 许超, 梁天, 齐文杰, 佘旭. 基于小型化平面电极的电化学角加速度传感器. CN: CN112986619A, 2021-06-18.[76] 王军波, 梁天, 陈德勇, 刘博文, 许超, 齐文杰, 佘旭. 一种基于磁流体反馈的MEMS电化学角加速度传感器及方法. CN: CN112666367A, 2021-04-16.[77] 王军波, 梁天, 陈德勇, 刘博文, 许超, 齐文杰, 佘旭. 一种基于磁流体反馈的MEMS电化学角加速度传感器及方法. CN: CN112666367B, 2022-10-11.[78] 王军波, 程超, 李亚东, 陈德勇, 鲁毓岚. 一种谐振式差压传感器和补偿方法. CN: CN112611501A, 2021-04-06.[79] 王军波, 程超, 李亚东, 陈德勇, 鲁毓岚. 一种谐振式差压传感器和补偿方法. CN: CN112611501B, 2022-03-04.[80] 陈德勇, 李亚东, 程超, 谢波, 王军波. 高灵敏度谐振式差压传感器及其制备方法. CN: CN112461438A, 2021-03-09.[81] 陈健, 张毅, 谭惠文, 梁红雁, 陈德勇, 王军波. 检测细胞膜电势的装置及其检测方法. CN: CN112683950A, 2021-04-20.[82] 杜利东, 许立锐, 陈贤祥, 王鹏, 方震, 王军波, 太惠玲, 蒋亚东. 基于超声探头与皮肤相对位移的自适应超声波束合成方法. CN: CN112515702A, 2021-03-19.[83] 杜利东, 许立锐, 陈贤祥, 王鹏, 方震, 王军波, 太惠玲, 蒋亚东. 基于超声探头与皮肤相对位移的自适应超声波束合成方法. CN: CN112515702B, 2022-06-10.[84] 太惠玲, 段再华, 蒋亚东, 方震, 王军波, 黄琦. 基于双面微结构电极和纸张的柔性压力传感器及制备方法. CN: CN112179530A, 2021-01-05.[85] 太惠玲, 段再华, 蒋亚东, 方震, 王军波, 黄琦. 基于双面微结构电极和纸张的柔性压力传感器及制备方法. CN: CN112179530B, 2021-09-28.[86] 陈健, 张毅, 谭惠文, 梁红雁, 陈德勇, 王军波. 基于压缩通道的单细胞生物电参量检测装置及检测方法. CN: CN111596134B, 2022-06-14.[87] 陈健, 张毅, 谭惠文, 梁红雁, 陈德勇, 王军波. 基于压缩通道的单细胞生物电参量检测装置及检测方法. CN: CN111596134A, 2020-08-28.[88] 王军波, 刘博文, 陈德勇, 许超, 梁天, 齐文杰, 郑希宸, 佘旭. MEMS一体化平面电极及含其的电化学角加速度传感器. CN: CN111474575B, 2022-10-18.[89] 王军波, 刘博文, 陈德勇, 许超, 梁天, 齐文杰, 郑希宸, 佘旭. MEMS一体化平面电极及含其的电化学角加速度传感器. CN: CN111474575A, 2020-07-31.[90] 陈健, 梁红雁, 张毅, 谭惠文, 陈德勇, 王军波. 基于电学及荧光信号的微流控芯片和血细胞分析装置. CN: CN111359687B, 2021-10-26.[91] 陈健, 刘力行, 张婷, 杨泓雨, 陈德勇, 王军波. 基于立体均匀聚焦激光的单细胞蛋白定量检测系统及方法. CN: CN111323403B, 2023-09-12.[92] 陈健, 刘力行, 张婷, 杨泓雨, 陈德勇, 王军波. 基于立体均匀聚焦激光的单细胞蛋白定量检测系统及方法. CN: CN111323403A, 2020-06-23.[93] 陈健, 梁红雁, 张毅, 谭惠文, 陈德勇, 王军波. 基于电学信号的微流控芯片和血细胞分析装置及方法. CN: CN111330659B, 2021-10-12.[94] 王军波, 朱林, 陈德勇, 谢波. 一种硅谐振压力传感器的补偿方法. CN: CN106932125A, 2017-07-07.[95] 王军波, 朱林, 陈德勇, 谢波. 一种硅谐振压力传感器的补偿方法. CN: CN106932125B, 2020-03-17.[96] 王军波, 魏秋旭, 赵明, 陈德勇, 陈健. 一种植入式无线无源颅内压监测系统. CN: CN105832327A, 2016-08-10.[97] 王军波, 魏秋旭, 赵明, 陈德勇, 陈健. 一种植入式无线无源颅内压监测系统. CN: CN105832327B, 2019-05-31.
奖励信息
2008年入选北京市科技新星计划(A类)
2015年“高性能MEMS电化学地震检波器”获第十七届中国国际工业博览会创新奖(第1完成人)
2017年“高精度硅谐振压力传感器关键技术及应用”获得中国电子学会技术发明二等奖(第1完成人)
2017年“基于微流控芯片的单细胞电学特性高通量检测技术及应用”获得中国分析测试技术协会科学技术(CAIA)三等奖(第1完成人)
2017年“高精度硅基MEMS谐振式压力传感器”入选第12届中国半导体创新产品与技术(第1完成人)
2018年 获得国家杰出青年科学基金
2018年 获得中国科学院优秀导师奖
2020年 获得中国仪器仪表学会技术发明二等奖
2022年 获得中国产业发展促进会杰出贡献奖
出版信息
发表论文
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A Magnetofluidic Nucleic Acid Cartridge for Multiplexed Detection of Respiratory Pathogens. IEEE Sensors 2024. 2024, 第 5 作者null(null): [6] 孙振宇, 王军波, 陈德勇, 陈健. Electrochemical Seismometers Using a SOI Chip with Four Micro-electrodes. Eurosensors 2024. 2024, 第 2 作者null(null): [7] 张洪浩, 胡林涛, 刘青华, 孙振宇, 朱茂琦, 陈德勇, 陈健, 王军波, 鲁毓岚. Co-oscillating electrochemical vector hydrophone based on microelectrodes with deep micro-channels. CSMNT 2024. 2024, 第 8 作者null(null): [8] Lu, Yulan, Xie, Bo, Chen, Deyong, Wang, Junbo, Chen, Jian, IOP Publishing Ltd. Stress isolations for resonant pressure micro sensors. 25TH ANNUAL CONFERENCE & 14TH INTERNATIONAL CONFERENCE OF THE CHINESE SOCIETY OF MICRO-NANO TECHNOLOGY, CSMNT 2023. 2024, 第 4 作者2740: http://dx.doi.org/10.1088/1742-6596/2740/1/012049.[9] Yu, Hengshu, Wang, Junbo, Lu, Yulan, Xie, Bo, Shang, Yanlong, Liu, Zhao, IOP Publishing Ltd. A silicon resonant pressure sensor based on thermal stresses matched structures. 25TH ANNUAL CONFERENCE & 14TH INTERNATIONAL CONFERENCE OF THE CHINESE SOCIETY OF MICRO-NANO TECHNOLOGY, CSMNT 2023. 2024, 第 2 作者2740: http://dx.doi.org/10.1088/1742-6596/2740/1/012041.[10] Lu, Yulan, Yu, Zongze, Xie, Bo, Chen, Deyong, Wang, Junbo. A pressure- temperature microsensor based on synergistical sensing of dual resonators. MEASUREMENT[J]. 2024, 第 5 作者224: http://dx.doi.org/10.1016/j.measurement.2023.113946.[11] Fang, Tingxuan, Huang, Xukun, Chen, Xiao, Chen, Deyong, Wang, Junbo, Chen, Jian. Segmentation, feature extraction and classification of leukocytes leveraging neural networks, a comparative study. CYTOMETRY PART A[J]. 2024, 第 5 作者 通讯作者 105(7): 536-546, http://dx.doi.org/10.1002/cyto.a.24832.[12] 夏文良, 周梦杨, 谢波, 鲁毓岚, 王军波, 陈德勇. MEMS Resonant Pressure Sensor with Double Closed-loop Control Based on Parametric Pump. APCOT 2024. 2024, 第 5 作者null(null): [13] 高驰远, 范龙, 杨光, 王军波, 赵晓甦, 霍晓叶, 陈健. A Quantitative Microfluidic Flow Cytometer Based on Spaced Uniform Optical Fields. IEEE Sensors 2024. 2024, 第 4 作者null(null): [14] Zhu, Maoqi, Wang, Junbo, Chen, Deyong, Chen, Jian, Lu, Yulan, IOP Publishing Ltd. A Miniaturized Electrochemical Angular Accelerometer with the Integration of Microelectrodes and Channel. 25TH ANNUAL CONFERENCE & 14TH INTERNATIONAL CONFERENCE OF THE CHINESE SOCIETY OF MICRO-NANO TECHNOLOGY, CSMNT 2023. 2024, 第 2 作者2740: http://dx.doi.org/10.1088/1742-6596/2740/1/012053.[15] 陈骁, 李益民, 王闵瑞虹, 秦绪珍, 王军波, 霍晓叶, 陈健. evelopment of Microfluidic Impedance Flow Cytometry Based on Three-Dimensional Hydrodynamic Focusing. IEEE Sensors 2024. 2024, 第 5 作者null(null): [16] 秦佳新, 谢波, 陈德勇, 王军波, 鲁毓岚. A High-Performance Mode-Localized Vacuum Gauge Based on T-Typed Piezoresistive Pickup. Eurosensors 2024. 2024, 第 4 作者null(null): [17] 秦佳新, 周梦杨, 王军波, 陈德勇, 谢波, 鲁毓岚, 李楠, 谭棹元, 陈健. A High-Performance Mode-Localized Vacuum Gauge Based on FPGA Closed-Loop Control. 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Low Temperature Wafer Level Adhesive Bonding Using BCB for Resonant Pressure Sensor. KEY ENGINEERING MATERIALS. 2012, 第 3 作者1663: [220] Liu, Jili, Chen, Deyong, Wang, Junbo. Regulating parameters of electromagnetic micromachined vibrating ring gyroscope by feedback control. MICRONANOLETTERS[J]. 2012, 第 3 作者7(12): 1234-1236, [221] Shang, Yanlong, Wang, Junbo, Tu, Sheng, Liu, Lei, Chen, Deyong. Z-axis differential silicon-on-insulator resonant accelerometer with high sensitivity. MICRO & NANO LETTERS[J]. 2011, 第 2 作者6(7): 519-522, http://ir.sim.ac.cn/handle/331004/109051.[222] Li, H, Wang, J, Li, X, Chen, D. Viscosity-density sensor with resonant torsional paddle for direct detection in liquid. IET NANOBIOTECHNOLOGY[J]. 2011, 5(4): 121-125, https://www.webofscience.com/wos/woscc/full-record/WOS:000298136700004.[223] Yang, Dongfang, Li, Wenlian, Chu, Bei, Su, Zisheng, Wang, Junbo, Zhang, Guang, Zhang, Feng. Enhancement of photovoltaic efficiency of phosphor doped organic solar cell by energy and electron transfer from the phosphor to C-60 acceptor. APPLIED PHYSICS LETTERS[J]. 2011, 第 5 作者99(19): http://dx.doi.org/10.1063/1.3658875.[224] 涂晟, 王军波, 商艳龙, 陈德勇. 高灵敏度谐振式微加速度传感器的设计与制作. 传感技术学报[J]. 2011, 第 2 作者24(8): 1114-1117, http://lib.cqvip.com/Qikan/Article/Detail?id=39136833.[225] 王军波. MEMS应变式结冰传感器及其检测方法. 传感技术学报. 2011, 第 1 作者[226] 王军波. Z-axis Differential SOI-resonant accelerometer with high sensitivity. Micro and Nano Letters. 2011, 第 1 作者 通讯作者 [227] Wu, Shuanghong, Li, Wenlian, Chu, Bei, Lee, C S, Su, Zisheng, Wang, Junbo, Ren, Qingjiang, Hu, Zhizhi, Zhang, Zhiqiang. Visible-blind ultraviolet sensitive photodiode with high responsivity and long term stability. APPLIED PHYSICS LETTERS[J]. 2010, 第 6 作者97(2): http://ir.ciomp.ac.cn/handle/181722/26209.[228] Zhu, Jianzhuo, Li, Wenlian, Chu, Bei, Yan, Fei, Yang, Dongfang, Liu, Huihui, Wang, Junbo. Non-doped-type white organic light-emitting diodes for lighting purpose. JOURNAL OF LUMINESCENCE[J]. 2010, 第 7 作者130(5): 865-868, http://dx.doi.org/10.1016/j.jlumin.2009.12.015.[229] Zhu, Jianzhuo, Li, Wenlian, Chu, Bei, Yang, Dongfang, Zhang, Guang, Yan, Fei, Liu, Huihui, Wang, Junbo, Wu, Shuanghong. Improved electrophosphorescence efficiency for organic light-emitting diodes using the cohost with stepwise blending profile. DISPLAYS[J]. 2010, 第 8 作者31(3): 128-131, http://dx.doi.org/10.1016/j.displa.2010.03.002.[230] 王军波. Direct-Write Piezoelectric Polymeric Nanogenerator with High Energy Conversion Efficiency. NANO LETTER[J]. 2010, 第 1 作者10(10): 726-731, http://ir.sim.ac.cn/handle/331004/108822.[231] 张明, 陈德勇, 王军波. 单晶硅振动环陀螺仪的制作. 光学精密工程[J]. 2010, 第 3 作者18(11): 2454-2460, https://doi.org/10.3788/OPE.20101811.2454.[232] 刘猛, 王军波, 李玉欣. 电磁激励谐振式MEMS压力传感器闭环控制研究. 传感技术学报[J]. 2010, 第 2 作者23(8): 1066-1069, http://lib.cqvip.com/Qikan/Article/Detail?id=35760628.[233] Liu, Huihui, Yan, Fei, Li, Wenlian, Chu, Bei, Su, Wenming, Su, Zisheng, Wang, Junbo, Hu, Zhizhi, Zhang, Zhiqiang. Remarkable increase in the efficiency of N,N-'-dimethylquinacridone dye heavily doped organic light emitting diodes under high current density. APPLIEDPHYSICSLETTERS[J]. 2010, 第 7 作者96(8): http://ir.ciomp.ac.cn/handle/181722/24749.[234] Wu, Shuanghong, Li, Wenlian, Chu, Bei, Lee, C S, Su, Zisheng, Wang, Junbo, Yan, Fei, Zhang, Guang, Hu, Zhizhi, Zhang, Zhiqiang. High response deep ultraviolet organic photodetector with spectrum peak focused on 280 nm. APPLIED PHYSICS LETTERS[J]. 2010, 第 6 作者96(9): http://ir.ciomp.ac.cn/handle/181722/26210.[235] Zhu, Jianzhuo, Li, Wenlian, Chu, Bei, Yang, Dongfang, Zhang, Guang, Liu, Huihui, Chen, Yiren, Su, Zisheng, Wang, Junbo, Wu, Shuanghong. Improved efficiency for green and red emitting electroluminescent devices using the same cohost composed of 9,10-di(2-naphthyl) anthracene and tris-(8-hydroxyquinolinato) aluminum. PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES[J]. 2009, 第 9 作者42(2): 158-161, http://ir.ciomp.ac.cn/handle/181722/26235.[236] Zhu, Jianzhuo, Li, Wenlian, Han, Liangliang, Chu, Bei, Zhang, Guang, Yang, Dongfang, Chen, Yiren, Su, Zisheng, Wang, Junbo, Wu, Shuanghong, Tsuboi, Taiju. Very broad white-emission spectrum based organic light-emitting diodes by four exciplex emission bands. OPTICS LETTERS[J]. 2009, 第 9 作者34(19): 2946-2948, http://ir.ciomp.ac.cn/handle/181722/24788.[237] Han, Liangliang, Yang, Dongfang, Li, Wenlian, Chu, Bei, Chen, Yiren, Su, Zisheng, Zhang, Dongyu, Yan, Fei, Wu, Shuanghong, Wang, Junbo, Hu, Zhizhi, Zhang, Zhiqiang. Intramolecular energy transfer between the triplet of ancillary ligand and the metal to ligand charge transfer state existed in heterocyclometalated iridium (III) complexes. APPLIEDPHYSICSLETTERS[J]. 2009, 第 10 作者94(16): http://ir.ciomp.ac.cn/handle/181722/26312.[238] Qinggang Meng, Junbo Wang, Deyong Chen, Jian Chen, Bo Xie, Yulan Lu. A piezoresistive pressure sensor with centralized piezoresistors and a diamond-shape composite diaphragm. SENSORS AND ACTUATORS: A. PHYSICAL. 第 2 作者http://dx.doi.org/10.1016/j.sna.2024.115134.
发表著作
(1) 英文专著一章节, Mechanical Properties of Single Cells: Label Free Biomarkers for Evaluation of Cell Status, Springer-Verlag GmbH., 2015-07, 第 5 作者(2) 英文专著一章节, Micro Electro Mechanical Systems: A micromachined silicon resonant pressure sensor, Springer, 2017-08, 第 1 作者(3) 英文专著1章节, Methods in Molecular Biology : Single-Cell Protein Assays--A Review, Springer International Publishing, 2017-08, 第 2 作者
科研活动
科研项目
( 1 ) 电化学地震检波器研制, 负责人, 国家任务, 2011-08--2014-12( 2 ) 无线无源胃肠压力传感器, 负责人, 国家任务, 2012-01--2014-12( 3 ) 骨细胞在基于微流控技术重建的体外微环境中的代谢和功能研究, 负责人, 国家任务, 2013-01--2015-12( 4 ) 基于细胞机械/电子特性高通量同时表征的肿瘤细胞检测研究, 参与, 国家任务, 2013-01--2015-12( 5 ) MicroCare, 负责人, 其他任务, 2010-07--2014-07( 6 ) 面向潜在抑郁风险预警的生物、心理信息获取方法及关键技术, 负责人, 国家任务, 2014-01--2018-09( 7 ) 基于MEMS技术的宽带电化学地震检波器研制, 负责人, 国家任务, 2013-09--2018-09( 8 ) 海底地震仪MEMS电化学宽带地震检波器研制, 参与, 国家任务, 2014-01--2016-12( 9 ) 非侵入式无线无源MEMS 眼压传感器研究, 参与, 国家任务, 2014-01--2017-12( 10 ) 肿瘤细胞生物物理/化学特性高通量综合检测方法研究, 负责人, 国家任务, 2015-01--2019-12( 11 ) 单细胞固有电学/力学特性高通量检测分析仪研制, 负责人, 中国科学院计划, 2015-01--2016-12( 12 ) 电化学地震动传感器研究, 负责人, 国家任务, 2015-01--2016-12( 13 ) 基于柔性衬底的无线无源腹主动脉瘤MEMS压力传感器研究, 参与, 地方任务, 2015-01--2017-12( 14 ) 硅谐振压力传感器, 负责人, 企业委托, 2016-01--2017-12( 15 ) 高精度压力传感器, 负责人, 国家任务, 2017-01--2018-12( 16 ) 低频地震检波器, 负责人, 国家任务, 2017-01--2018-12( 17 ) 深海甚宽频带MEMS电化学地震检波器, 参与, 国家任务, 2016-09--2020-08( 18 ) 面向肿瘤异质性的单细胞蛋白检测新方法研究, 参与, 中国科学院计划, 2016-08--2020-12( 19 ) 高精度硅谐振压力传感器批量化制造技术, 负责人, 中国科学院计划, 2018-01--2019-12( 20 ) MEMS传感器, 负责人, 国家任务, 2019-01--2023-12( 21 ) 甚低频新型微纳传感器, 负责人, 国家任务, 2018-10--2019-12( 22 ) 地震检波器, 负责人, 中国科学院计划, 2019-01--2023-12( 23 ) 高精度硅基谐振式压力传感器, 参与, 国家任务, 2019-06--2022-07( 24 ) 压力传感器批量化自动标定系统, 负责人, 中国科学院计划, 2019-01--2019-12( 25 ) 压力传感器, 负责人, 国家任务, 2020-01--2021-12( 26 ) 装备健康状态监测复合集成微传感器系统研究, 负责人, 国家任务, 2020-01--2023-12( 27 ) 数字压力传感器, 负责人, 国家任务, 2020-11--2022-12( 28 ) 深海新型微纳传感器技术, 负责人, 国家任务, 2020-08--2021-12( 29 ) 高端MEMS传感器关键技术, 负责人, 中国科学院计划, 2021-01--2023-12( 30 ) 微纳传感技术, 参与, 国家任务, 2022-01--2026-12( 31 ) 工业测控高精度硅基压力传感器关键技术, 负责人, 国家任务, 2021-11--2024-10
参与会议
(1)谐振式微压传感器的过载保护设计 2021大气/气象测量及传感器论坛 王军波 2021-09-15(2)一种低应力组装的谐振式差压传感器 2021大气/气象测量及传感器论坛 2021-09-15(3)一种基于梳齿音叉结构的硅谐振式高压传感器设计 2021大气/气象测量及传感器论坛 王军波 2021-09-15(4)高精度气压传感器及其在气象监测中的应用 2021大气/气象测量及传感器论坛 2021-09-15(5)基于三传感器冗余优选算法的高精度气压计 2021大气/气象测量及传感器论坛 2021-09-15(6)高精度硅谐振压力传感器关键技术及应用 2021大气/气象测量及传感器论坛 2021-09-15(7)A Piezoresistive Pressure Microsensor Based on Simplified Fabrication Processes 2021-06-21(8)A Resonant Differential Pressure Microsensor With a Stress Isolation Layer 2021-06-21(9)A Resonant High Pressure Sensor Based on Dual Cavities Design 王军波 2021-06-21(10)A Resonant Differential Pressure Sensor Based on Bulk Silicon Technology 2021-06-21(11)A MICROFLUIDIC FLOW CYTOMETER COMPOSED OF DOUBLE T-TYPE CONSTRICTION CHANNEL WITH PREDEFINED FLUORESCENCE DETECTION WINDOW, ENABLING HIGH-THROUGHPUT CHARACTERIZATION OF INTRINSIC SINGLE-CELL STRUCTURAL AND ELECTRICAL PARAMETERS 2021-06-20(12)A Micromachined Resonant Low-Pressure Sensor Using an Island-Diaphragm Structure 2021-06-06(13)A Resoant Micro-Pressure With Glass-on-Silicon Wafer Packaging 2021-06-06(14)A RESONANT DIFFERENTIAL PRESSURE MICROSENSOR WITH COMPENSATIONS OF TEMPERATURE AND STATIC PRESSURE 2021-06-06(15)A RESONANT HIGH-PRESSURE SENSOR WITH HIGH STRENGTH DESIGN 2021-06-06(16)The Design and Fabrication of the High Integrated Sensitive Electrodes by Adopting the Anodic Bonding Technology for the Electrochemical Seismic Sensors 2021-03-15(17) A MEMS Based Electrochemical Angular Vibration Sensor 2020-10-16(18)MEMS Based Triaxial Electrochemical Seismometer 2020-10-16(19)Constriction Channel Based Microfluidic System of Quantifying Single-Cell Cytoplasmic Viscosity, Cytoplasmic Conductivity and Specific Membrane Capacitance 2020-10-04(20)High-Throughput Quantification of Single-Cell Cortical Tension Using Mutiple Constriction Channels 2020-10-04(21)一种基于共晶键合的谐振式差压传感器 第十六届全国敏感元件与传感器学术会议 2020-09-19(22)A constriction channel based microfluidic flow cytometry enabling highthroughput quantification of multiple types of intracellular proteins in single cells 2019-06-28(23)An electrochemical microseismometer based on a new electrolyte system to improve the low-frequency performances 2019-06-28(24)The electrochemical seismometer based on a novel designed sensing electrode for undersea exploration 2019-06-28(25)Development of a crossing constriction channel based microfluidic cytometry enabling the high-throughput quantification of single-cell electrical phenotypes 2019-06-28(26) A resonant pressure micro sensor based on suspended assembly 2019-06-28(27)Development of Micro-machined Seismic Sensor and Its Application 2019-05-05(28)高性能MEMS电化学地震检波器 鳌山海洋传感器论坛 2019-01-17(29)基于微流控芯片的单细胞电学特性高通量检测技术及应用 中国微米纳米技术学会首届微流控技术应用创新论坛 2018-12-09(30)高精度硅谐振MEMS压力传感器关键技术 中国机械工程学会微纳制造分会年会 2018-11-09(31)Numerical Study of the Frequency Charateristics of the Electrochemical Seismometer 2018-10-30(32)高精度硅基谐振式压力传感器关键技术 中国微米纳米技术2018年学术年会 2018-10-21(33)An Analytical Method for Modelling Pull-in Effect during Anodic Bonding 2018-09-08(34)A Double-Ended Tuning Fork Based Resonant Pressure Micro-sensor Relying on Electrostatic Excitation and Piezoresistive Detection 2018-09-08(35)The development of micromachined electrochmeical seismometer 2018-07-15(36)The Development of Micro-machined Based Electrochemical Seismic Sensor 2017-11-21(37)A Force-balanced Negative Feedback Method for MEMS Based Electrochemical Seismic Sensor 2017-10-30(38)A Monolithic Three Axial Electrochemical Seismic Sensor Based on MEMS Technology 2017-10-30(39)Development of micromachined molecular seismometer 2017-07-18(40)A Monolithic Three Axial Electrochemical Seismic Sensor Based on MEMS Technology 2017-06-21(41)A high-quality resonant pressure micro sensor withthrough-silicon-via electrical interconnections 2017-06-21(42)单细胞生物物理特性高通量检测技术 第二届“微纳传感器与系统集成技术”青年学者论坛 2017-06-17(43)High-sensitivity Electrochemical Seismometers Relying on Parylene-based Microelectrodes 2017-04-12(44)Reduction of the Temperature Sensitivity of Anodic Bonded Resonant Pressure Micro Sensors 2017-04-12(45)基于微流控芯片的单细胞生物物理特性高通量检测技术 第十七届“微言大义”研讨会 王军波 2017-01-22(46)高性能MEMS电化学地震检波器研究 第一届“微纳机械测试理论与技术基础”青年学者论坛 王军波 2016-11-25(47)A Novel Method Based on RF Detection Enabling Wireless and Passive LC Sensing Qiuxu Wei,Yanshuang Wang,Deyong Chen,Jian Chen,Junbo Wang 2016-10-29(48)Effect of the Cathodes on the Characteristics of the MEMS Based Electrochemical Seismometer Zhenyuan Sun,Deyong Chen,Junbo Wang,Jian Chen,Tao Deng,Guanglei Li 2016-10-29(49)无线无源颅内压传感器结构设计与优化 第十四届全国敏感元件与传感器学术会议 魏秋旭(#),王军波(*),陈健,陈德勇,赵明 2016-10-12(50)A System Enabling Isolation and Electrical Property Characterization of Circulating Tumour Cells Tzu-Keng Chiu,Yang Zhao,Deyong Chen,Chia-Hsun Hsieh,Ke Wang,Wen-Pin Chou,Beiyuan Fan,Junbo Wang(*),Jian Chen(*),Min-Hsien Wu(*) 2016-10-09(51)A Microfluidic System Enabling High-Throughput Single-Cell Intracellular Protein Quantification Xiufeng Li,Beiyuan Fan,Deyong Chen,Xiaoting Zhao,Wentao Yue,Junbo Wang(*),Jian Chen(*) 2016-10-09(52)A 96-Well Three-Dimensional Microfluidic Wound-Healing Assay Rui Hao,Yuanchen Wei,Feng Chen,Deyong Chen,Wei Guo(*),Junbo Wang(*),Jian Chen(*) 2016-10-09(53)A MEMS Based Electrochemical Seismometer with Central Working Frequency under 1 Hz and Ultra-low Self-noise Zhenyuan Sun(#),Deyong Chen(*),Jian Chen,Tao Deng,Guanglei Li,Junbo Wang(*),, 2016-07-28(54)The effect of elasticity coefficient on the characteristics of MEMS based electrochemical seismic sensors Guanlei Li(#),Junbo Wang(*),Deyong Chen,Tao Deng,Zhenyuan Sun,Yonghao Xing,Jian Chen, 2016-07-24(55)The Development of Micro-machined Based Electrochemical Seismic Sensor, Junbo Wang 2016-07-24(56)Implantable Wireless Passive Intracranial Pressure Monitoring System Qiuxu Wei(#),Junbo Wang(*),Deyong Chen,Jian Chen,Ming Zhao 2016-06-25(57)基于微流控芯片的单细胞生物物理特性高通量检测技术 王军波 2016-06-16(58)A MEMS based electrochemical seismometer with a novel integrated sensing unit 2016-01-28(59)A MEMS based electrochemical seismometer with a novel integrated sensing unit Zhenyuan Sun(#),Deyong Chen(*),Jian Chen,Tao Deng,Guanglei Li,Junbo Wang(*) 2016-01-24(60)海底地震仪用高性能MEMS 电化学地震检波器研制 第二届全国海洋技术学术会议 2015-11-11(61)An electrochemical seismometer with frequency features under regulation 2015-11-01(62)Electrochemical vibration sensor with force balance feedback system 2015-11-01(63)The effect of electrolyte concentration on the characteristics of MEMS based electrochemical seismic sensors 2015-11-01(64)A 384-well microfluidic wound-healing assay 2015-10-28(65)Classification of mouse tumor samples based on specific membrane capacitance and cytoplasm conductivity of single cells 2015-10-28(66)高精度谐振式MEMS压力传感器 第三届国际(常州)传感器技术与应用高峰论坛 2015-10-22(67)A resonant pressure sensor integrated with self-temperature sensing 2015-10-13(68)A differential resonant pressure micro sensor with identical sensitivity of two resonant beams 2015-10-13(69)Real-time and high-performance blood pressure monitoring system based on LC sensors 2015-10-13(70)The 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合作情况
项目协作单位
与英国卢瑟福国家实验室、德国明斯特大学、法国巴黎高等师范学院合作承担欧盟第七框架人员交换国际合作项目;与台湾长庚大学合作承担院“台湾青年学者计划”项目;与加拿大多伦多大学合作承担国家自然科学基金中加国际合作项目。
指导研究生
已指导硕士研究生和博士研究生50余名,其中多名研究生获中科院百篇优秀博士学位论文、院长特别奖、院长优秀奖、优秀毕业生、国家奖学金、顶秀奖学金、三好学生标兵、三好学生干部、三好学生等奖励。毕业学生就业去向包括出国深造、高等学校、国家机关、国家级研究机构、外企、大型国企等。