基本信息
苏榕  男  博导  中国科学院上海光学精密机械研究所
电子邮件: surong@siom.ac.cn
通信地址: 上海市嘉定区清河路390号
邮政编码: 201800

个人简介

苏榕博士,研究员,博士生导师,中国科学院海外高层次人才引进,上海光学精密机械研究所高端光电装备部副部长。长期致力于超精密光学干涉与散射测量仪器与技术研究,聚焦基础理论、核心算法、校准技术、工业应用及相关国际标准制定。主持多项国家和省部级重点研发项目;发表论文40余篇,书籍章节2章,部分技术被国际顶尖仪器制造商采用。担任期刊《Light: Advanced Manufacturing》和《Nanomanufacturing and Metrology》编委及《激光与光电子学进展》青年编委,SPIE-Photonics Europe和EOSAM技术委员会委员,全国产品几何技术规范标准化技术委员会(SAC/TC240)委员,中国计量测试学会计量仪器专业委员会委员,中国仪器仪表学会显微分会委员,中国仪器仪表学会集成电路测量与仪器分会委员。

招生信息

   
招生专业
080300-光学工程
科研及招生方向
精密光学测量,IC量检测,在线检测,白光干涉仪,光散射仪器,计算干涉/全息显微成像,精密光电仪器设计

教育背景

2010-01--2014-06   KTH Royal Institute of Technology   博士学位(光学测量学)
2007-08--2009-12   KTH Royal Institute of Technology   理学硕士学位(光子学)
2003-09--2007-06   中山大学物理系   理学学士学位(光信息科学与技术)

工作经历

   
工作简历
2021-01~现在, 中国科学院上海光学精密机械研究所, 研究员,博导
2015-04~2020-11,University of Nottingham, 博士后
2015-01~2015-03,KTH Royal Institute of Technology, 博士后
2014-09~2014-12,National Physical Laboratory, UK, 博士后
社会兼职
2024-04-24-今,全国产品几何技术规范标准化技术委员会(SAC/TC240), 委员
2024-04-01-今,中国仪器仪表学会集成电路测量与仪器分会, 委员
2023-08-23-今,中国仪器仪表学会显微分会, 委员
2022-09-01-今,中国计量测试学会计量仪器专业委员会, 委员
2022-08-06-今,《激光与光电子技术进展》, 青年编委
2019-12-30-今,《Light: Advanced Manufacturing》, 编委
2018-05-30-今,《Nanomanufacturing and Metrology》, 编委

专利与奖励

   
专利成果
[1] 苏榕, 刘嘉宇, 张政, 任明俊, 刘世杰. 一种基于相干扫描干涉系统的变焦显微表面重构方法. CN: CN114440788A, 2022-05-06.
[2] 苏榕, 刘嘉宇, 张政, 任明俊, 刘世杰. 一种基于相干扫描干涉系统的变焦显微表面重构方法. CN: CN114440788A, 2022-05-06.
[3] 苏榕, 刘嘉宇, 任明俊. 基于仪器三维传递函数的相干扫描干涉仪表面重构方法. CN: CN114413783A, 2022-04-29.

出版信息

   
发表著作
(1) Micro-scale geometry measurement. In: I. Fassi and D. Shipley, eds., Micro-Manufacturing Technologies and Their Applications: A Theoretical and Practical Guide, Springer, 2017-09, 第 2 作者
(2) Coherence scanning interferometry. In: R. K. Leach ed., Advances in Optical Surface Texture Metrology, IOP Publishing, 2020-12, 第 1 作者
期刊论文

1        Yisha Cao, Yunjun Lu, Peng Feng, Xiaoyue Qiao, Sotero Ordones, Rong Su*, Xiangzhao Wang. Distortion measurement of lithography projection lens based on multichannel grating lateral shearing interferometry. Applied Optics 63, 2056-2064 (2024).

2        杨俊,沈毅君*,刘嘉宇,温荣贤,任明俊*苏榕*. 针对曲面光学元件的五轴表面形貌测量系统结构参数标定[J]. 激光与光电子学进展,已录用,2024.

3        Zihan Chen, Zhenxiong Jian, Cheng Chen, Mingjun Ren, Rong Su*. Portable Angle-Resolved Scattering System to Measure High Spatial Frequency Roughness for Ultra-Smooth Surfaces. Optics and Lasers in Engineering 175 108031 (2024).

4        Zhenxiong Jian, Xi Wang, Xinquan Zhang, Rong Su, Mingjun Ren* and Limin Zhu. Task-Specific Near-Field Photometric Stereo for Measuring Metal Surface Texture. IEEE Transactions on Industrial Informatics (Early Access) (2023). doi: 10.1109/TII.2023.3342478.

5        Y. Zhu, D. Yang, J. Qiu, R. Su*, Y. Shi. Simulation-driven machine learning approach for high-speed correcting slope- and curvature-dependent errors in coherence scanning interferometry. Optics Express 31 36048-36060 (2023).

6        苏榕, 刘嘉宇, 乔潇悦, 简振雄, 张政, 温荣贤, 陈成, 任明俊, 朱利民. 用于表面形貌测量的扫描白光干涉技术进展[J]. 激光与光电子学进展, 2023, 60(3): 0312005. Rong Su, Jiayu Liu, Xiaoyue Qiao, Zhenxiong Jian, Zheng Zhang, Rongxian Wen, Cheng Chen, Mingjun Ren, Limin Zhu. Advances in Scanning White Light Interferometry for Surface Topography Measurement[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312005.

7        Z. Zhang, X. Qiao, S. Han, S. Liu, R. Su*. Quality inspection of cube beamsplitter by white light interferometric approach. Applied Optics, 62 1076-1081 (2023).

8        Y. Liu, F. Tang, S. Li, X. Wang, R. Su. Effects of illumination non-uniformity on double-Ronchi lateral shearing interference field. Applied Optics 61 10299-10308 (2022).

9        X. Qiao, Y. Bai, G. Ding, W. Wang, S. Liu, P. Cai, X. Chen, R. Su*. Measurement and correction of lateral distortion in a Fizeau interferometer based on the self-calibration technique, Optics Express 30 36134-36143 (2022).

10     Y. Lu, F. Tang, R. Su*, Z. Li, F. Guo, P. Feng, X. Wang. (3N+1)-frame phase retrieval for double-grating Ronchi lateral shearing interferometry. Optics and Lasers in Engineering 158 107139 (2022).

11     M. Liu, N. Senin, R. Su, R. K. Leach. Measurement of laser powder bed fusion surfaces with light scattering and unsupervised machine learning. Measurement Science and Technology 33 074006 (2022).

12     P. de Groot, L. L. Deck, R. Su, W. Osten. Contributions of holography to the advancement of interferometric measurements of surface topography. Light: Advanced Manufacturing 3 7 (2022).

13     P. de Groot, X. Colonna de Lega, R. Su, J. M. Coupland, R. K. Leach. Modeling of coherence scanning interferometry using classical Fourier optics. Optical Engineering 6 104106 (2021).

14     M. Thomas, R. Su*, P. de Groot, J. M. Coupland, R. K. Leach. Surface measuring coherence scanning interferometry beyond the specular reflection limit. Optics Express 29 36121-36131 (2021).

15     S. Shabbir, S. Garvey, S. Dakka, B. Rothwell, R. Su, R. K. Leach, N. Weston. Analysis of the tribological interaction of a polytetrafluoroethylene-lined radial lip oil seal, shaft and lubricant sample. Journal of Engineering Tribology, March (2021). https://doi.org/10.1177/13506501211005876

16     R. Su*, R. K. Leach. Physics-based virtual coherence scanning interferometer for surface measurement. Light: Advanced Manufacturing 2 120-135 (2021).

17     R. Su*, J. M. Coupland, C. J. R. Sheppard, R. K. Leach. Scattering and three-dimensional imaging in surface topography measuring interference microscopy. Journal of the Optical Society of America A 38 A27-A42 (2021).

18     Y. Arezki, R. Su, V. Heikkinen, F. Leprete, P. Posta, Y. Bitou, C. Schober, C. Mehdi-Souzani, B. A. M. Alzahrani, X. Zhang, Y. Kondo, C. Pruss, V. Ledl, N. Anwer, M. L. Bouazizi, R. K. Leach, H. Nouira. Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level. Sensors 21 1103 (2021).

19     D. Mabwa, T. Kubiena, H. Parnell, R. Su, D. Furniss, Z. Tang, R. K. Leach, T. M. Benson, C. A. Scotchford, A. B. Seddon. Evaluating the cytotoxicity of Ge-Sb-Se chalcogenide glass optical fibres on 3T3 mouse fibroblasts. RSC Advances 11 8682-8693 (2021).

20     N. Flay, S. Brown, W. Sun, T. Blumensath, R. Su. Effects of off-focal radiation on dimensional measurements in industrial cone-beam micro-focus X-ray computed tomography systems. Precision Engineering 66 472-481 (2020).

21     C. Gomez, C. Campanelli, R. Su, R. K. Leach. Surface-process correlation for an ink-jet printed transparent fluoroplastic. Surface Topography: Metrology and Properties 8 034002 (2020).

22     R. Leach, H. Haitjema, R. Su, A. Thompson. Metrological characteristics for the calibration of surface topography measuring instruments: a review. Measurement Science and Technology, 32 032001 (2020).

23     M. Liu, C. Cheung, N. Senin, S. Wang, R. Su, R. K. Leach. On-machine surface defect detection using light scattering and deep learning. Journal of the Optical Society of America A 37 B53-B59 (2020).

24     I. Zorin, R. Su, B. Heise, B. Lendl, M. Brandstetter. Correlative infrared optical coherence tomography and hyperspectral chemical imaging. Journal of the Optical Society of America A 37 B19-B26 (2020).

25     M. Thomas, R. Su*, N. Nikolaev, J. M. Coupland, R. K. Leach. Modelling of interference microscopy beyond the linear regime. Optical Engineering, 59 034110 (2020).

26     C. Gomez, R. Su*, P. de Groot, R. K. Leach. Noise reduction in coherence scanning interferometry for surface topography measurement. Nanomanufacturing and Metrology, 3 68-76 (2020).

27     R. Su*, M. Thomas, M. Liu, S. Benketaf, J. Drs, Y. Bellouard, C. Pruss, J. M. Coupland, R. K. Leach. Lens aberration compensation in interference microscopy. Optics and Lasers in Engineering 128 106015 (2020).

28     X. Feng, N. Senin, R. Su, S. Ramasamy, R. K. Leach. Optical measurement of surface topographies with transparent coatings. Optics and Lasers in Engineering 121 261-270 (2019).

29     G. Maculotti, X. Feng, R. Su, M. Galetto, R. K. Leach. Residual flatness and scale calibration for a point autofocus surface topography measuring instrument. Measurement Science and Technology 30 075005 (2019).

30     J. Wang, R. Su, R. K. Leach, W. Lu, L. Zhou, X. Jiang. Resolution enhancement for topography measurement of high-dynamic-range surfaces via image fusion. Optics Express 26(26) 34805-34819 (2018).

31     I. Zorin, R. Su, A. Prylepa, J. Kilgus, M. Brandstetter, B. Heise. Mid-infrared Fourier-domain optical coherence tomography with a pyroelectric linear array. Optics Express 26(25) 33428-33439 (2018).

32     A. Speidel, R. Su, J. Mitchell-Smith, P. Dryburgh, I. Bisterov, D. Pieris, W. Li, M. Clark, A. T. Clare. Crystallographic texture can be rapidly determined by electrochemical surface analytics. Acta Materialia 159 89-101 (2018).

33     X. Feng, R. Su*, T. Happonen, J. Liu, R. K. Leach. Fast and cost-effective in-process defect inspection for printed electronics based on coherent optical processing. Optics Express 26(11) 13927-13937 (2018). (Co-first author)

34     R. K. Leach, D. Sims-Waterhouse, F. Medeossi, E. Savio, S. Carmignato, R. Su. Fusion of photogrammetry and coherence scanning interferometry data for all-optical coordinate measurement. CIRP Annals Manufacturing Technology, 67(1) 599-602 (2018).

35     R. Su*, M. Thomas, J. M. Coupland, R. K. Leach. Effects of defocus on transfer function of coherence scanning interferometry. Optics Letters 43(1) 82-85 (2018).

36     P. Ekberg, R. Su*, R. K. Leach. High-precision lateral distortion measurement and correction in coherence scanning interferometry using an arbitrary surface. Optics Express 25(16) 18703-18712 (2017).

37     C. Gomez, R. Su*, A. Thompson, J. DiSciacca, S. Lawes, R. Leach. Optimisation of surface measurement for metal additive manufacturing using coherence scanning interferometry. Optical Engineering 56(11) 111714 (2017).

38     M. Liu, C. Cheung, C. Cheng, R. Su, R. K. Leach. A Gaussian process and image registration based stitching method for high dynamic range measurement of precision surfaces. Precision Engineering 50 99-106 (2017).

39     R. Su*, Y. Wang, J. M. Coupland, R. K. Leach. On tilt and curvature dependent errors and the calibration of coherence scanning interferometry. Optics Express 25(4) 3297-3310 (2017).

40     R. Su*, M. Kirillin, E. W. Chang, E. Sergeeva, S. H Yun, L. Mattsson. Perspectives of mid-infrared optical coherence tomography for inspection and micrometrology of industrial ceramics. Optics Express 22 15804-15819 (2014).

41     R. Su*, P. Ekberg, M. Leitner, L. Mattsson. Accurate and automated image segmentation of 3D optical coherence tomography data suffering from low signal-to-noise levels. Journal of the Optical Society of America A 31(12) 2551-2560 (2014).

42     P. Ekberg, R. Su*, E. W. Chang, S. H. Yun, L. Mattsson. Fast and accurate metrology of multi-layered ceramic materials by an automated boundary detection algorithm developed for optical coherence tomography data. Journal of the Optical Society of America A 31 217-226 (2014).

43     Y. Li, R. Su, M. Hedlind, P. Ekberg, T. Kjellberg, L. Mattsson. Model based in-process monitoring with optical coherence tomography. Procedia CIRP 2 70-73 (2012).

44   R. Su*, M. Kirillin, P. Ekberg, A. Roos, E. Sergeeva, L. Mattsson. Optical coherence tomography for quality assessment of embedded microchannels in alumina ceramic. Optics Express 20 4603-4618 (2012). 


科研活动

   
科研项目
( 1 ) 超精密光学元件表面形貌测量与微纳尺度缺陷检测, 负责人, 中国科学院计划, 2021-01--2023-12
( 2 ) Optical metrology for precision and additive manufacturing (UK EPSRC), 参与, 其他国际合作项目, 2015-03--2020-10
( 3 ) Calibration and correction of optical topography measuring technology (UK EPSRC), 负责人, 其他国际合作项目, 2019-04--2020-04
( 4 ) Reference algorithms and metrology on aspherical and freeform optical lenses (EU Horizon 2020), 参与, 其他国际合作项目, 2016-06--2019-06
( 5 ) Revisiting optical scattering with machine learning (UK EPSRC), 参与, 其他国际合作项目, 2018-06--2021-06
( 6 ) Metrology for highly-parallel manufacturing (EU Horizon 2020), 参与, 其他国际合作项目, 2015-05--2018-05
( 7 ) Rolled multi material layered 3D shaping technology (EU FP7), 参与, 其他国际合作项目, 2008-10--2012-10
( 8 ) Micro/nano robotics for single cancer cells (EU Horizon 2020), 参与, 其他国际合作项目, 2017-01--2021-12
( 9 ) 激光科学“一带一路”联合实验室建设与超强超快激光科学及先进激光材料联合研究, 负责人, 国家任务, 2022-11--2025-10
( 10 ) 超精密在机测量系统研发, 负责人, 地方任务, 2022-07--2024-06
( 11 ) 曲面基底光学微结构的“5+X”架构六轴联动加工与在机测量技术研究, 参与, 国家任务, 2024-01--2028-12
( 12 ) 像质检测, 负责人, 国家任务, 2017-01--2024-12
( 13 ) 曲面光栅表面形貌光学检测技术, 负责人, 中国科学院计划, 2023-10--2027-07
( 14 ) 超强超快激光科学及先进激光材料联合研究, 负责人, 其他国际合作项目, 2022-08--2025-07

合作情况

     ZYGO | Precision Optical Metrology | Optical Components       Loughborough University - Rankings, Courses, Acceptance Rate


指导学生

已指导学生

魏相宇  硕士研究生  080300-光学工程  

现指导学生

曹译莎  博士研究生  080300-光学工程  

李国利  硕士研究生  080300-光学工程  

荀辉  博士研究生  080300-光学工程  

梅静雯  硕士研究生  080300-光学工程  

温荣贤  博士研究生  080300-光学工程  

指导联培博士生

Matthew Thomas, Univ. of Nottingham, Modelling of coherence scanning interferometry (毕业)

Carlos Gomez, Univ. of Nottingham, Optical surface metrology for 3D printed products (毕业)
George Gayton, Univ. of Nottingham, Fringe projection system and its uncertainty evaluation (毕业)

Mateusz Sosin, CERN, Frequency scanning interferometry

乔潇悦(毕业)

刘嘉宇

简振雄

郭俊

指导联培硕士生

张政

杨俊

徐黎轩