基本信息
宁瑾 女 硕导 半导体研究所
电子邮件:ningjin@semi.ac.cn
通信地址:北京市清华东路甲35号集成技术中心
邮政编码:100083

招生信息

   
招生专业
080903-微电子学与固体电子学
招生方向
MEMS器件与系统

教育背景

2000-09--2003-07 中国科学院半导体研究所 博士
1997-09--2000-07 航天部兰州物理研究所 硕士
1991-09--1995-07 郑州大学 学士
学历
半导体所 --20030630 博士
学位
-- 工学博士学位

工作经历

   
工作简历
2003-07--今 中国科学院半导体研究所 任职
1995-07--1997-09 河南省民权县电信局 工作

专利与奖励

   
专利成果
[1] 杨帆, 司朝伟, 韩国威, 杨富华, 宁瑾. 谐振结构及其制作方法. CN: CN111865249A, 2020-10-30.

[2] 节俊尧, 魏清泉, 刘文文, 宁瑾, 俞育德. 温度控制芯片、其制备方法及包含其的温度控制芯片系统. CN: CN109189124B, 2020-10-23.

[3] 杨健, 韩国威, 司朝伟, 王晓东, 宁瑾, 颜伟, 刘雯, 杨富华. 压电MEMS解耦结构及MEMS陀螺仪. CN: CN109682364B, 2020-10-20.

[4] 童鑫, 刘楠, 苏言, 韩国威, 司朝伟, 宁瑾, 杨富华. 一种实现指向控制功能的无线人机交互设备和方法. CN: CN107688348B, 2020-10-20.

[5] 张萌, 司朝伟, 韩国威, 宁瑾, 杨富华, 刘雯, 颜伟. 盖板结构及其制作方法、电容式传感器. CN: CN109626318B, 2020-09-15.

[6] 张萌, 韩国威, 司朝伟, 宁瑾, 杨富华. 电容式微纳超声换能器及其制备方法. CN: CN110773408A, 2020-02-11.

[7] 王小青, 宁瑾, 徐团伟, 俞育德, 魏清泉, 刘文文, 蒋莉娟. 一种超声波触觉反馈系统及其制造方法. 中国: CN104866098B, 2018-10-09.

[8] 司朝伟, 韩国威, 赵永梅, 宁瑾, 杨富华. 压电执行梁结构. 中国: CN105810813B, 2018-06-29.

[9] 王小青, 宁瑾, 徐团伟, 俞育德, 魏清泉, 刘文文, 蒋莉娟. 一种驻极体电容式超声传感器及其制作方法. 中国: CN105025423B, 2018-04-20.

[10] 张萌, 宁瑾, 司朝伟, 韩国威, 赵永梅. 环形检测电极面内伸缩谐振器设计及其制备方法. 中国: CN105306003B, 2017.12.22.

[11] 司朝伟, 韩国威, 宁瑾, 赵永梅, 杨富华. 应用在MEMS器件中的弱耦合弹性梁结构. 中国: CN104482930B, 2017-09-29.

[12] 司朝伟, 韩国威, 赵永梅, 宁瑾, 杨富华. 双自由度MEMS压电梁结构. 中国: CN105823904A, 2016-08-03.

[13] 王小青, 宁瑾, 俞育德, 魏清泉, 刘文文, 刘元杰, 蒋莉娟. 驻极体电容式超声传感器及其制备方法. 中国: CN105578368A, 2016-05-11.

[14] 王小青, 宁瑾, 俞育德, 魏清泉, 刘文文, 刘元杰, 蒋莉娟. MEMS电容式超声波传感器及其制备方法. 中国: CN105540528A, 2016-05-04.

[15] 王小青, 孙英男, 宁瑾, 俞育德. 一种电容式超声传感器及其制作方法. 中国: CN104655261A, 2015-05-27.

[16] 杨健, 司朝伟, 韩国威, 宁瑾, 赵永梅, 梁秀琴, 王晓东, 杨富华. 在衬底上制备多级台阶的方法. 中国: CN104445051A, 2015-03-25.

[17] 司朝伟, 韩国威, 宁瑾, 赵永梅, 杨富华. 采用晶圆级封装的MEMS器件. 中国: CN104401930A, 2015-03-11.

[18] 杨健, 司朝伟, 韩国威, 宁瑾, 赵永梅, 梁秀琴. 利用相对易腐蚀的金属制备另一种金属图形的剥离方法. 中国: CN104377117A, 2015-02-25.

[19] 赵永梅, 季安, 张明亮, 杨香, 宁瑾, 王晓东, 杨富华. 一种低量程高灵敏度MEMS压力传感器及其制作方法. 中国: CN103644999A, 2014-03-19.

[20] 赵永梅, 杨香, 季安, 张明亮, 韩国威, 宁瑾, 王晓东, 杨富华. 一种制备图形化多孔硅结构的方法. 中国: CN103641063A, 2014-03-19.

[21] 钟卫威, 司朝伟, 韩国威, 宁瑾, 杨富华. 谐振式微机电系统机翼风力传感器及其制作方法. 中国: CN103115719A, 2013-05-22.

[22] 康中波, 司朝伟, 宁瑾, 韩国威. 采用压电材料制备的阵列结构微机电谐振器. 中国: CN103023454A, 2013-04-03.

[23] 司朝伟, 韩国威, 宁瑾, 刘晓东. 采用窄脉冲激励MEMS谐振器的振荡器电路. 中国: CN102594290A, 2012-07-18.

[24] 司朝伟, 韩国威, 宁瑾, 刘晓东. 基于寄生电容调节的高精度温度补偿MEMS振荡器. 中国: CN102594260A, 2012-07-18.

[25] 韩国威, 宁瑾, 孙国胜, 赵永梅, 杨富华. 基于差分方法的MEMS器件信号检测电路. 中国: CN102062826A, 2011-05-18.

[26] 宁瑾, 李永梅, 韩国威, 杨富华. 基于谐振原理工作的MEMS滤波器模块. 中国: CN101984557A, 2011-03-09.

出版信息

   
发表论文
[1] Xu, Pengfei, Wei, Zhenyu, Guo, Zhiyu, Jia, Lu, Han, Guowei, Si, Chaowei, Ning, Jin, Yang, Fuhua. A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes. MICROMACHINES[J]. 2021, 12(5): http://dx.doi.org/10.3390/mi12050506.
[2] He, Yurong, Si, Chaowei, Han, Guowei, Zhao, Yongmei, Ning, Jin, Yang, Fuhua. A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass-Silicon Composite Wafers. MICROMACHINES[J]. 2021, 12(2): https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7911678/.
[3] Tong, Xin, Su, Yan, Li, Zhaofeng, Si, Chaowei, Han, Guowei, Ning, Jin, Yang, Fuhua. A Double-Step Unscented Kalman Filter and HMM-Based Zero-Velocity Update for Pedestrian Dead Reckoning Using MEMS Sensors. IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS[J]. 2020, 67(1): 581-591, https://www.webofscience.com/wos/woscc/full-record/WOS:000490858500053.
[4] Su, Yan, Xu, Pengfei, Han, Guowei, Si, Chaowei, Ning, Jin, Yang, Fuhua. The Characteristics and Locking Process of Nonlinear MEMS Gyroscopes. Micromachines[J]. 2020, 11(2): https://doaj.org/article/6f2b7bd1fc2d4168ab81d4459c0fe20a.
[5] 蔡萌, 司朝伟, 韩国威, 宁瑾, 杨富华. 基于ITO掩膜的键合片深硅刻蚀. 微纳电子技术. 2020, 57(11): 905-910, http://lib.cqvip.com/Qikan/Article/Detail?id=7103234546.
[6] Yang, Jian, Zhang, Meng, Si, Chaowei, Han, Guowei, Ning, Jin, Yang, Fuhua, Wang, Xiaodong. A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS[J]. 2019, 28(5): 776-781, https://www.webofscience.com/wos/woscc/full-record/WOS:000489837100005.
[7] Zhang, Meng, Yang, Jian, He, Yurong, Yang, Fan, Yang, Fuhua, Han, Guowei, Si, Chaowei, Ning, Jin. Research on a 3D Encapsulation Technique for Capacitive MEMS Sensors Based on Through Silicon Via. SENSORS[J]. 2019, 19(1): [8] Yang, Jian, Si, Chaowei, Han, Guowei, Zhang, Meng, Ning, Jin, Zhao, Yongmei, Yang, Fuhua, Wang, Xiaodong. A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope. MICROMACHINES[J]. 2019, 10(4): https://doaj.org/article/dd019418f58043d6ab2c981f59ae68ae.
[9] Zhang, Meng, Yang, Jian, He, Yurong, Yang, Fan, Zhao, Yongmei, Xue, Fen, Han, Guowei, Si, Chaowei, Ning, Jin. Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication. MICROMACHINES[J]. 2019, 10(6): https://doaj.org/article/2e29fd17e7e54fac99a7fc415ef50e18.
[10] Yang, Jian, Zhang, Meng, He, Yurong, Su, Yan, Han, Guowei, Si, Chaowei, Ning, Jin, Yang, Fuhua, Wang, Xiaodong. A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer. MICROMACHINES[J]. 2019, 10(9): https://doaj.org/article/e410aaefa6f5426aa4bd87b33d9bc3f8.
[11] Su, Yan, Tong, Xin, Liu, Nan, Han, Guowei, Si, Chaowei, Ning, Jin, Li, Zhaofeng, Yang, Fuhua. PSPICE Hybrid Modeling and Simulation of Capacitive Micro-Gyroscopes. SENSORS[J]. 2018, 18(4): https://doaj.org/article/3a3c644075e94cc3ada5b133add9b49d.
[12] Nan Liu, Yan Su, Xin Tong, Guowei Han, Chaowei Si, Zhaofeng Li, Jin Ning. The effect of parasitic charge on the output stability of MEMS gyroscopes. JOURNAL OF SEMICONDUCTORS[J]. 2018, 39(8): 47-52, http://lib.cqvip.com/Qikan/Article/Detail?id=675938423.
[13] Tong, Xin, Li, Zhaofeng, Han, Guowei, Liu, Nan, Su, Yan, Ning, Jin, Yang, Fuhua. Adaptive EKF Based on HMM Recognizer for Attitude Estimation Using MEMS MARG Sensors. IEEE SENSORS JOURNAL[J]. 2018, 18(8): 3299-3310, https://www.webofscience.com/wos/woscc/full-record/WOS:000428585900027.
[14] 宋培帅, 马静, 马哲, 张淑媛, 司朝伟, 韩国威, 宁瑾, 杨富华, 王晓东. 量子定位导航技术研究与发展现状. 激光与光电子学进展[J]. 2018, 55(9): 090003-1, http://lib.cqvip.com/Qikan/Article/Detail?id=676432093.
[15] Yan Su, Xin Tong, Nan Liu, Guowei Han, Chaowei Si, Jin Ning, Zhaofeng Li, Fuhua Yang. PSPICE Hybrid Modeling and Simulation of Capacitive Micro-Gyroscopes. Sensors (Basel, Switzerland). 2018, 18(4): https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5948506/.
[16] Meng Zhang, Jian Yang, Yurong He, Fan Yang, Fuhua Yang, Guowei Han, Chaowei Si, Jin Ning. Research on a 3D Encapsulation Technique for Capacitive MEMS Sensors Based on Through Silicon Via †. Sensors (Basel, Switzerland). 2018, 19(1): https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6339255/.
[17] Yang, Jian, Si, Chaowei, Yang, Fan, Han, Guowei, Ning, Jin, Yang, Fuhua, Wang, Xiaodong. Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope. MICROMACHINES[J]. 2018, 9(2): https://doaj.org/article/c6c3d859cffe463a834d9858071dfdd5.
[18] 宁瑾. 寄生电荷对MEMS陀螺仪输出稳定性的影响. Journal of Semiconductors. 2018, [19] 宁瑾. Research on wafer-level MEMS packaging with through-glass visa. Micromachines. 2018, [20] 宁瑾. 硅微机械陀螺仪温度补偿方法的研究现状. 微纳电子技术. 2017, [21] Zheng, Zhongshan, Ning, Jin, Zhang, Baiqiang, Liu, Zhongli, Luo, Jiajun, Han, Zhengsheng. The radiation hardness of the nitrogen-fluorine implanted buried oxide layer in silicon-on-insulator materials against higher total dose irradiation. SCIENCE CHINA-MATERIALS[J]. 2016, 59(8): 657-664, http://159.226.55.106/handle/172511/16154.
[22] Hou Yunhong, Zhang Meng, Han Guowei, Si Chaowei, Zhao Yongmei, Ning Jin. A review: aluminum nitride MEMS contour-mode resonator. JOURNAL OF SEMICONDUCTORSnull. 2016, 37(10): [23] Ning Jin, Bo Tao, Wei Ren, Meichen Feng, Rui Sun, Liang He, Wei Zhuang, Qiang Yu. Mapping Irrigated and Rainfed Wheat Areas Using Multi-Temporal Satellite Data. REMOTE SENSING[J]. 2016, 8(3): https://doaj.org/article/1e7656de3e8e413a80275bc36d2e31b4.
[24] Wang Xiaoqing, Yu Yude, Ning Jin. Researching the silicon direct wafer bonding with interfacial SiO2 layer. JOURNAL OF SEMICONDUCTORS[J]. 2016, 37(5): 56001-1-56001-4, http://ir.semi.ac.cn/handle/172111/27853.
[25] 宁瑾. 综述:氮化铝MEMS伸缩模态谐振器. Journal of Semiconductors. 2016, [26] Wang, Xiaoqing, Yu, Yude, Ning, Jin. Fabrication and Characterization of Capacitive Micromachined Ultrasonic Transducers with Low-Temperature Wafer Direct Bonding. MICROMACHINES[J]. 2016, 7(12): https://doaj.org/article/2b76c110171d4145bf4e80a4cf9940d1.
[27] 宁瑾. Research on the piezoelectric properties of AlN thin films for MEMS application. Micromachines. 2015, [28] Xiaodong Wang, Shengcheng Mao, Peng Chen, Yinong Liu, Jin Ning, Haixin Li, Ketao Zang, Ze Zhang, Xiaodong Han. Evolution of microstructure and mechanical properties of a dissimilar aluminum alloy weldment. Materials and design[J]. 2015, 90: 230-237, http://ir.semi.ac.cn/handle/172111/26999.
[29] Yang, Jian, Si, Chaowei, Han, Guowei, Zhang, Meng, Ma, Liuhong, Zhao, Yongmei, Ning, Jin. Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators. MICROMACHINES[J]. 2015, 6(2): 281-290, https://doaj.org/article/94c1d8df237e4a97a00ca16d322f1119.
[30] Si, Chaowei, Han, Guowei, Ning, Jin, Yang, Fuhua. Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope. SENSORS[J]. 2013, 13(8): 10550-10560, http://ir.semi.ac.cn/handle/172111/24729.
[31] 宁瑾. Fabrication and Characterization of a SOI MEMS Gyroscope. Jounal of semiconductors. 2013, [32] Han Guowei, Si Chaowei, Ning Jin, Zhong Weiwei, Sun Guosheng, Zhao Yongmei, Yang Fuhua. Feed-through cancellation of a MEMS filter using the difference method and analysis of the induced notch. JOURNAL OF SEMICONDUCTORS[J]. 2013, 34(4): 045006-, http://ir.semi.ac.cn/handle/172111/24810.
[33] 张百强, 郑中山, 于芳, 宁瑾, 唐海马, 杨志安. 氮氟复合注入对注氧隔离 SOI 材料埋氧层内固定正电荷密度的影响. 物理学报[J]. 2013, 62(11): 117303-1, http://www.irgrid.ac.cn/handle/1471x/1089302.
[34] Han, Guowei, Si, Chaowei, Ning, Jing, Zhao, Yongmei, Sun, Guosheng, Yang, Fuhua. Optimization for MEMS filter to reduce feed-through and an analysis method based on polar diagram. Advanced materials research[J]. 2013, 677: 74-78, http://ir.semi.ac.cn/handle/172111/24886.
[35] Zhang BaiQiang, Zheng ZhongShan, Yu Fang, Ning Jin, Tang HaiMa, Yang ZhiAn. Effect of co-implantation of nitrogen and fluorine on the fixed positive charge density of the buried oxide layer in SIMOX SOI materials. ACTA PHYSICA SINICA[J]. 2013, 62(11): http://ir.semi.ac.cn/handle/172111/24714.
[36] Zhong Weiwei, Han Guowei, Si Chaowei, Ning Jin, Yang Fuhua. Fabrication and characterization of an SOI MEMS gyroscope. JOURNAL OF SEMICONDUCTORS[J]. 2013, 34(6): 064004-, http://ir.semi.ac.cn/handle/172111/24981.
[37] 宁瑾. 多自由度MEMS陀螺的带宽优化设计. Sensors (Switzerland). 2013, [38] 宁瑾. Quality factor optimization techniques for MEMS gyroscopes of frame structures. Advanced Materials Research. 2012, [39] 宁瑾. Design of a MEMS resonant wind sensor on airplane wing. CSMNT 2012. 2012, [40] 康中波, 韩国威, 司朝伟, 钟卫威, 赵永梅, 宁瑾. 基于谐振原理的RF MEMS滤波器的研制. 微纳电子技术. 2012, 49(7): 467-470, http://lib.cqvip.com/Qikan/Article/Detail?id=42529359.
[41] Zhao, Yongmei, Ning, Jin, Han, Guowei, Si, Chaowei. Fabrication and characterisation of polysilicon-based clamped-clamped filter. Key engineering materials[J]. 2011, 483: 112-116, http://ir.semi.ac.cn/handle/172111/23067.
[42] 杨挺, 孙国胜, 吴海雷, 闫果果, 宁瑾, 赵永梅, 刘兴防, 罗木昌, 王雷, 赵万顺, 曾一平. 立方相SiC MEMS器件研究进展. 微纳电子技术. 2010, 47(7): 415-424, http://lib.cqvip.com/Qikan/Article/Detail?id=34614781.
[43] Zhao Yongmei, Ning Jin, Sun Guosheng, Liu Xingfang, Wang Liang, Ji Gang, Wang Lei, Zhao Wanshun, Li Jinmin, Yang Fuhua, Huang R, Yu M, An X. Simulation and fabrication of the SiC-based clamped-clamped filter. 2008 9TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1-4null. 2008, 2524-+, http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000265971003156.
[44] Zhao YongMei, Sun GuoSheng, Ning Jin, Liu XingFang, Zhao WanShun, Wang Lei, Li JinMin. Doped polycrystalline 3C-SiC films deposited by LPCVD for radio-frequency MEMS applications. CHINESE PHYSICS LETTERS[J]. 2008, 25(6): 2269-2272, http://lib.cqvip.com/Qikan/Article/Detail?id=27438206.
[45] 赵永梅, 孙国胜, 宁瑾, 刘兴昉, 赵万顺, 王雷, 李晋闽. Doped Polycrystalline 3C-SiC Films Deposited by LPCVD for Radio-Frequency MEMS Applications. 中国物理快报:英文版. 2008, 25(6): 2269-2272, http://lib.cqvip.com/Qikan/Article/Detail?id=27438206.
[46] 刘兴昉, 孙国胜, 李晋闽, 赵永梅, 宁瑾, 王雷, 赵万顺, 罗木昌, 李家业, 曾一平. 台面结构对4H-SiC紫外探测器性能的影响. 半导体学报. 2007, 579-582, http://lib.cqvip.com/Qikan/Article/Detail?id=1001096844.
[47] Sun Guosheng, Ning Jin, Liu Xingfang, Zhao Yongmei, Li Jiaye, Wang Lei, Zhao Wanshun, Wang Liang, Wright N, Johnson CM, Vassilevski K, Nikitina I, Horsfall A. Heavily doped polycrystalline 3C-SiC growth on SiO2/Si(100) substrates for resonator applications. SILICON CARBIDE AND RELATED MATERIALS 2006null. 2007, 556-557: 179-182, http://ir.semi.ac.cn/handle/172111/9854.
[48] 宁瑾, 张杨, 刘忠立. 4H-SiC MESFET器件的制备与性能. 半导体学报. 2007, 385-387, http://lib.cqvip.com/Qikan/Article/Detail?id=1001096931.
[49] Sun, G (Sun, Guosheng), Ning, J (Ning, Jin), Liu, X (Liu, Xingfang), Zhao, Y (Zhao, Yongmei), Li, J (Li, Jiaye), Wang, L (Wang, Lei), Zhao, W (Zhao, Wanshun), Wang, L (Wang, Liang). Heavily doped polycrystalline 3C-SiC growth on SiO2/Si(100) substrates for resonator applications. Silicon carbide and related materials 2006丛书标题: materials science forumnull. 2007, 556-557: 179, http://ir.semi.ac.cn/handle/172111/9854.
[50] Sun Guosheng, Ning Jin, Gong Quancheng, Gao Xin, Wang Lei, Liu Xingfang, Zeng Yiping, Li Jinmin, Devaty RP. Homoepitaxial growth and characterization of 4H-SiC epilayers by low-pressure hot-wall chemical vapor deposition. SILICON CARBIDE AND RELATED MATERIALS 2005, PTS 1 AND 2null. 2006, 527-529: 191-+, [51] Ning J (Ning Jin), Gong QC (Gong Quancheng), Sun GS (Sun Guosheng), Liu ZL (Liu Zhongli). The ICP etching technology of 3C-SiC films. International mems conference 2006, 34: 511-515 2006null. 2006, http://ir.semi.ac.cn/handle/172111/21414.
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指导学生

现指导学生

康中波  硕士研究生  080903-微电子学与固体电子学  

钟卫威  硕士研究生  080903-微电子学与固体电子学