LIGA和光刻技术

LIGA和光刻技术、高精密X射线光学元件研制

070207-光学

微加工系统,LIGA 技术

2009-09--2014-07   中国科学院大学   博士学位
2005-09--2009-07   河北师范大学   学士学位

研究生

博士

   

（1） Fabrication and photosensitive property of CdS nanorods/ TiO2 nanorods structure grown on silica micropillars array, Fabrication and photosensitive property of CdS nanorods/ TiO2 nanorods structure grown on silica micropillars array, 2026, 第 1 作者  通讯作者
（2） Sub-100 Nanometer Focusing of Hard X-rays Using SU-8 Compound Kinoform Focusing Lenses, Advanced Photonics Research www, 2026, 
（3） Fabrication of the SnO2 nanorods‑Si micropillars tree‑like structure for gas sensor application, J Mater Sci: Mater Electron, 2025, 第 1 作者  通讯作者
（4） PMMA based compound kinoform lenses for sub-150 nm hard x-rays focusing, AIP Advances, 2023, 第 1 作者  通讯作者
（5） Adiabatically focusing X-rays to the nanometer scale by one dimensional long kinoform lenses: comparison between an ideal Cartesian oval refocusing lens and a parabolic lens, Optics Express, 2022, 
（6） Fabrication of TiO2 nanorods on Si pillars surface for photosensitive application, J Mater Sci: Mater Electron, 2022, 
（7） The Influence of Silicon Nanopillars Structure as the Substrate on the SnO2-Based Gas Sensor, CHEMISTRYSELECT, 2021, 第 1 作者  通讯作者
（8） Fabrication and photosensitivity of ZnO/CdS/silica nanopillars based photoresistor, JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2021, 第 1 作者  通讯作者
（9） 镍基棱镜型高能X射线聚焦组合折射透镜的研制, Fabrication of Nickel Prism-Array Combined Refractive Lenses for High-Energy X-Ray Focusing, 电子器件, 2020, 第 1 作者
（10） Fabrication of tree-like CdS nanorods-Si pillars structure for photosensitive application, JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2020, 第 1 作者  通讯作者
（11） Fabrication of CdS Nanorods on Si Pyramid Surfacefor Photosensitive Application, ACS OMEGA, 2020, 第 1 作者  通讯作者
（12） Fabrication and properties of micro-nano structure based heterojunction solar cell and photoresisto, Mater. Res. Express, 2019, 第 1 作者
（13） Preparation of CdS nanorods on silicon nanopillars surface by hydrothermal method, MATERIALS RESEARCH BULLETIN, 2019, 第 1 作者
（14） Fabrication and properties of ZnO nanorods on silicon nanopillar surface for gas sensor application, JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2019, 第 1 作者  通讯作者
（15） Fabrication and photovoltaic effect of ZnO/silicon nanopillars heterojunction solar cel, Microsystem Technologies, 2018, 第 1 作者
（16） Influence of the bridges on prism-array lens focusing for high energy X-rays, NUCLEAR INST. AND METHODS IN PHYSICS RESEARCH, A, 2018, 第 1 作者
（17） Fabrication of microelectrodes on diamond anvil for the resistance measurement in high pressure experiment, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2018, 第 1 作者  通讯作者
（18） Fabrication of high energy X-ray compound kinoform lenses using X-ray lithography, MICROSYSTEM TECHNOLOGIES, 2017, 第 1 作者
（19） Fabrication and photosensitivity of cds/silicon nanoscrew photoresistor, CHEMISTRYSELECT, 2017, 第 1 作者  通讯作者
（20） 聚甲基丙烯酸甲酯材质硬X射线组合Kinoform透镜的制作, Fabrication of PMMA hard X-ray compound Kinoform lenses, 光学精密工程, 2017, 第 1 作者
（21） Nanopillars on unpolished substrates and their application in large-area solar cells, JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2017, 第 1 作者  通讯作者
（22） Fabrication and Photovoltaic Effect of CdS/Silicon Nanopillars Heterojunction Solar Cell, CHEMISTRYSELECT, 2016, 第 1 作者  通讯作者
（23） Gas sensor based on ZnO film/silica pillars, MATERIALS RESEARCH EXPRESS, 2016, 第 1 作者  通讯作者
（24） The Silicon Solar Cell with Selective Nanoscrew Pillars Fabricated by Cesium Chloride Self-Assembly Lithography and Dry Etching, JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2016, 第 1 作者
（25） Overcoming the Problem of Electrical Contact to Solar Cells Fabricated using Selective‐Area Silicon Nanopillars by Cesium Chloride Self‐Assembly Lithography as Antireflective Layer, ENERGY TECHNOLOGY, 2016, 第 1 作者
（26） Fabrication and photosensitivity of CdS photoresistor on silica nanopillars substrate, MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2016, 第 1 作者
（27） Fabrication of inverted pyramid structure by Cesium Chloride self-assembly lithography for silicon solar cell, MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2015, 第 1 作者
（28） Fabrication and Photovoltaic Characteristics of Silicon Nanoscrew and Nanohole Based Solar Cells, JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2015, 第 1 作者

   

（ 1 ） 利用LIGA技术研制SU8基无像差Kinoform面型X射线纳米聚焦透镜, 负责人, 其他, 2023-01--2025-12
（ 2 ） 基于LIGA技术的硬X射线纳米聚焦折射透镜的研制, 负责人, 国家任务, 2017-01--2019-12