基本信息
贾浩      中国科学院上海微系统与信息技术研究所
电子邮件： hao.jia@mail.sim.ac.cn
通信地址： 上海市长宁路865号
邮政编码： 200050

研究领域

MEMS/NEMS、传感器、仪器技术

招生信息

080903-微电子学与固体电子学

工作背景

2022-01--中国科学院上海微系统与信息技术研究所   副研究员
2019-07--2021-12   中国科学院上海微系统与信息技术研究所   项目副研究员
2018-09--2019-06   Case Western Reserve University   高级研究助理
2013-08--2018-05   Case Western Reserve University   电气工程博士
2010-09--2013-01   天津大学   生物医学工程硕士（推免）
2006-09--2010-07   天津大学   生物医学工程/英语双学士

科研项目

  1. xxxx重点项目,1350万元, 课题负责人, 国家任务, 2023-06--2025-06
  2. 人工智能xxxx, 70万元, 课题负责人, 国家任务, 2024-12--2027-11
  3. 人社部高层次, 48万元, 项目负责人, 国家任务, 2024-12--2027-12
  4. xx集成传感器, 100万元, 项目负责人, 研究所自主部署, 2022-01--2024-12
  5. xxxx方法研究, 30万元, 项目负责人, 国家任务, 2022-07--2024-12
  6. xxxx传感技术, 30万元, 项目负责人, 地方任务, 2020-11--2022-10
  7. 智能传感xxxx, 20万元, 项目负责人, 研究所自主部署, 2025-12--2027-12
  8. xxxx仪器研究, 884万元, 骨干, 国家任务, 2023-01--2027-12
  9. 战略新能源xx, 118.4万元, 骨干, 中国科学院计划, 2022-01--2023-12
  10. 低功耗MEMS, 258万元, 骨干, 国家任务, 2020-11--2023-09

科技奖励

  1. 上海市科学技术奖，技术发明一等奖，2023
  2. 朱良漪分析仪器创新奖，创新成果奖（全国4项），2024
  3. 朱良漪分析仪器创新奖，青年创新入围奖（全国9项），2024
  4. 人社部xx人才计划（全国30人，上海1-2人），2024
  5. 上海市xx人才计划，2022
  6. 上海市xx人才计划，2020
  7. 第四届全国电子信息材料与器件大会，学术新锐奖，2025
  8. 第二届智能材料与光电子器件会议，科学创新奖，2024
  9. Best Paper Award Finalist， Transducers 2025 （国际顶会前2%）
  10. Best Paper Award Finalist， IEEE MEMS 2025（国际顶会前2%）
  11. Best Oral Presentation Award Finalist， IEEE MEMS, 2024 （国际顶会前2%）
  12. Best Oral Presentation Award Finalist， IEEE MEMS, 2024 （国际顶会前2%）
  13. Best Paper Award Finalist， IEEE MEMS, 2023 （国际顶会前2%）
  14. Young Scientist Award Finalist， Microsystems & Nanoengineering Summit, 2019
  15. Outstanding Paper Award Finalist， Transducers 2019 (国际顶会前2%)
  16. 优秀口头报告奖，第十四届气湿敏传感技术学术交流会，2019
  17. Best Paper Award for 63rd AVS International Symposium, 2016 
  18. Outstanding Student Paper Award Finalist， IEEE MEMS, 2015 (国际顶会前2%)

发明专利

  1. [授权]一种MEMS热堆阵列芯片及多组分气体检测装置, 发明专利, 2025, 第 1 作者, 专利号: 202510660819.9
  2. 基于深度学习的数字嗅觉分析方法, 发明专利, 2025, 第 1 作者, 专利号: 2025117157060
  3. 二维原子层的纳米图案化方法, 发明专利, 2025, 第 1 作者, 专利号: CN2025115298261
  4. 介电层的纳米图案化方法, 发明专利, 2025, 第 1 作者, 专利号: 2025115298204
  5. 一种基于薄膜谐振器的细胞操纵方法及微芯片, 发明专利, 2025, 第 1 作者, 专利号: CN119639731A
  6. [授权]一种浸渍式点样仪及微悬臂梁传感芯片的制备方法, 发明授权, 2024, 第 1 作者, 专利号: CN113189357B
  7. [授权]一种差分量热式MEMS气体传感器及气体检测方法, 发明授权, 2023, 第 3 作者, 专利号: CN115876835B
  8.  一种MEMS热电堆器件及其制作方法, 发明专利, 2023, 第 3 作者, 专利号: CN115955902A
  9.  一种芯片制样装置及方法, 发明专利, 2023, 第 1 作者, 专利号: CN202310004190.3
  10. [授权]一种MEMS差热分析传感器及DTA/DSC测试方法, 发明专利, 2022, 第 1 作者, 专利号: 202211574791.X
  11. [授权]一种同步热重-拉曼表征方法, 发明专利, 2022, 第 1 作者, 专利号: CN114184596A

学术论文

  1. Gigahertz Multimode Vibrations in Graphene and MoS2 Nanomechanical Resonators at Room Temperature, Science Advances, 2026, 第 1 作者 通讯作者
  2. Unveiling the tradeoff between device scale and surface nonidealities for an optimized quality factor at room temperature in 2D MoS 2 nanomechanical resonators, Microsystems & Nanoengineering, 2024, 通讯作者
  3. Thermocouple-Integrated Resonant Microcantilever for On-chip Thermogravimetric and Differential Thermal Analysis Dual Characterization Applications, Microsystems & Nanoengineering, 2025.
  4. Frequency Scaling and Elastic Transition in HF-VHF WS2 NEMS Resonators”, SCIENCE CHINA-Information Sciences, 2025, 通讯作者
  5.  [最佳论文提名]Thermogravimetric Analysis of Molybdenum Ditelluride Nanoflake Using Integrated Resonant Microcantilevers, Proc. 38th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2025), 2025, 通讯作者
  6.  [最佳论文提名] MEMS Resonant Sensors for Characterizing Molybdenum Ditelluride Decomposition, Proc. 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2025), 2025, 通讯作者
  7.  Boosting flexible electronics with integration of two-dimensional materials, InfoMat, 2024.
  8. [最佳论文提名] Thermogravimetric Analysis above 200°C/min Using Integrated Resonant Microcantilevers, Proc.37th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2024), 2024, 通讯作者
  9. MEMS Resonant Beam with Outstanding Uniformity of Sensitivity and Temperature Distribution for Accurate Gas Sensing and On-Chip TGA, Sensors, 2024.
  10. Modulating p-type doping of two-dimensional material palladium diselenide, Nano Research, 2024.
  11. Deforming Single Soft Microparticles in Liquid Using Membrane Resonators, Proc.37th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2024), 2024, 第 1 作者  通讯作者
  12. [最佳论文提名] Integrated Resonant Cantilever with Dual Thermoanalytical Functions of Thermogravimetric Analysis and Differential Thermal Analysis, Proc.37th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2024), 2024, 第一作者
  13. Polymethyl Methacrylate (PMMA) Pyrolysis Assisted Transfer of 2D Materials for Large-Scale Molybdenum Disulfide NEMS Resonator Arrays, Proc.37th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2024), 2024, 通讯作者
  14. [最佳论文提名] Power-Compensated Single-Crystal Silicon Thermopiles for Differential Scanning Calorimetry, Proc.37th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2024), 2024, 第 1 作者  通讯作者
  15. Ultra-Responsive MEMS Sensing Chip for Differential Thermal Analysis (DTA), Sensors, 2023, 第 1 作者
  16. High-Responsivity Single-Crystal Silicon MEMS Thermopiles for Differential Thermal Analysis, 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023), 2023,  通讯作者
  17. Controlling Particle Aggregation and Separation in Liquid on Membrane Resonators, Proc.36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2023), 2023, 通讯作者
  18. Ultra-Responsive MEMS Sensing Chip for Differential Thermal Analysis (DTA), Sensors, 2023, 第一作者
  19. [最佳论文提名] MEMS Differential Thermopiles for High-Sensitivity Hydrogen Gas Detection, IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), 2023,  通讯作者
  20. Toward Smart Sensing by MXene, Small, 2023.
  21. Microcantilever-Based In Situ Temperature-Programmed Desorption (TPD) Technique, Journal of Physical Chemistry C, 2023.
  22. MEMS Resonant Cantilevers for High-Performance Thermogravimetric Analysis of Chemical Decomposition, Sensors, 2023, 通讯作者
  23. Functionally Collaborative Nanostructure for Direct Monitoring of Neurotransmitter Exocytosis in Living Cells, Nano Letters, 2023.
  24. Probing Linear to Nonlinear Damping in 2D Semiconductor Nanoelectromechanical Resonators toward a Unified Quality Factor Model, Nano Letters, 2023.
  25. Cooperative Characterization of In Situ TEM and Cantilever-TGA to Optimize Calcination Conditions of MnO2 Nanowire Precursors, Nano Letters, 2023
  26. Rapid Thermogravimetric Analysis based on MEMS Resonant Cantilever, 2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2023, 通讯作者
  27. Proton radiation effects on optically transduced silicon carbide microdisk resonators, Optical Materials Express, 2023, 第 1 作者
  28. 1ppm-detectable hydrogen gas sensors by using highly sensitive P+/N+ single-crystalline silicon thermopiles, Microsystems & Nanoengineering, 2023.
  29. Identifying, Resolving, and Quantifying Anisotropy in ReS2 Nanomechanical Resonators, Small, 2022.
  30. Thermogravimetric Analysis on a Resonant Microcantilever, Analytical Chemistry, 2022.
  31. Nanomechanical Resonators: Toward Atomic Scale, ACS Nano, 2022.
  32. 基于一种多功能系统的二维纳米器件高效制备, Fast prototyping of nanodevices based on two dimensional materials using a multifunctional fabrication system, 中国科学:信息科学, 2022.
  33. Microreactor-based TG−TEM synchronous analysis, Analytical Chemistry, 2022.
  34. In Situ Hydrogen Temperature-Programmed Reduction Technology Based on the Integrated Microcantilever for Metal Oxide Catalyst Analysis, Analytical Chemistry, 2022.
  35. Structure and Phase Evolution Characterization of Advanced Materials by Using Temperature-Programmable Resonant Microcantilever in Combination with Raman Spectroscopy, 35th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS), 2022.
  36. Toward Smart Sensing by MXene, Small, 2022.
  37. In-Plane Mode Encased Cantilevers for Cancer Cell Detection in Liquid, 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2021, 第 1 作者
  38. Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid, MICROMACHINES, 2021, 第 1 作者
  39. Determination of Elastic Modulus of Silicon Carbide (SiC) Thin Diaphragms via Mode-Dependent Duffing Nonlinear Resonances, Journal of Microelectromechanical Systems, 2020, 第 1 作者
  40. Design of Integrated Photonic Devices on SiC-on-Insulator (SiCOI) Platform for Quantum Applications, Frontiers in Optics / Laser Science, 2020.
  41. Very High-Frequency Silicon Carbide Microdisk Resonators With Multimode Responses in Water for Particle Sensing, JOURNALOFMICROELECTROMECHANICALSYSTEMS, 2019, 第 1 作者
  42. Probing Ion Radiation Effects in Silicon Crystal by 3D Integrated Resonating Thin Diaphragms, 2019 Government Microcircuit Applications and Critical Technology Conference (GOMACTech), 2019.
  43. Tracing and Resolving Microparticle Aquatic Mass Motion and Distribution on Multimode Silicon Carbide (SiC) Microdisk Resonators, 32nd International Conference on Micro Electro Mechanical Systems (IEEE MEMS), 2019, 第 1 作者
  44. Frequency Tuning of Two-Dimensional Nanoelectromechanical Resonators via Comb-Drive MEMS Actuators, 20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2019.
  45. GaN/AlN Heterostructure Micromechanical Self-Sustained Oscillator for Middle Ultraviolet (MUV) Light Detection, 32nd International Conference on Micro Electro Mechanical Systems (IEEE MEMS), 2019.
  46. [最佳论文提名] Imaging Multimode Vibrations in High-Frequency Aluminum Nitride Piezoelectric Nanomembrane Resonators, 20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2019, 第 1 作者
  47. Mode-Dependent Anchor Loss in Silicon Carbide Micromechanical Disk Resonators, 2019 IEEE International Frequency Control Symposium (IFCS), 2019, 第 1 作者
  48. Probing Heavy Ion Radiation Effects in Silicon Carbide (SiC) via 3D Integrated Multimode Resonating Diaphragms, APPLIED PHYSICS LETTERS, 2019.
  49. Discerning Black Phosphorus Crystal Orientation and Anisotropy by Polarized Reflectance Measurement, ACS APPLIED MATERIALS & INTERFACES, 2018.
  50. Molybdenum Disulfide (MoS2) Nanoelectromechanical Resonators with On-Chip Aluminum Nitride (AlN) Piezoelectric Excitation, 31st IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS), 2018, 第 1 作者
  51. Standard and inverse microscale Chladni figures in liquid for dynamic patterning of microparticles on chip, JOURNAL OF APPLIED PHYSICS, 2018, 第 1 作者
  52. Manipulating and Patterning Micro/Nanoparticles in Liquid Using Multimode Membrane Resonators, 2018 IEEE Biomedical Circuits and Systems Conference (BioCAS), 2018, 第 1 作者
  53. Dynamic Manipulation and Patterning of Breast Cancer Cells in Biosolution, 30th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS), 2017, 第 1 作者
  54. Resolving and Tuning Mechanical Anisotropy in Black Phosphorus via Nanomechanical Multimode Resonance Spectromicroscopy, Nano Letters, 2016, 第 1 作者
  55. Silicon Carbide (SiC) Micromechanical Self-Sustained Oscillator Operating in Liquid, 29th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS), 2016, 第 1 作者
  56. Multimode Black Phosphorus Nanomechanical Resonators with Intrinsic Mechanical Anisotropy and Electrical Tunability, Hilton Head, 2016, 第 1 作者
  57. Large-Scale Arrays of Single- and Few-Layer MoS2 Nanomechanical Resonators, Nanoscale, 2016, 第 1 作者
  58. Single- and Few-Layer Transfer-Printed CVD MoS2 Nanomechanical Resonators with Enhancement by Thermal Annealing, 2016 IEEE International Frequency Control Symposium (IFCS), 2016, 第 1 作者
  59. [最佳论文提名] Culturing and Probing Physical Behavior of Individual Breast Cancer Cells on SiC Microdisk Resonators, 28th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS), 2015, 第 1 作者
  60. Black phosphorus nanoelectromechanical resonators vibrating at very high frequencies, Nanoscale, 2015.
  61. Multimode SiC Trampoline Resonators Manipulate Microspheres to Create Chladni Figures, 2015 IEEE International Frequency Control Symposium (IFCS), 2015, 第 1 作者
  62. High-Frequency SiC Microdisk Resonators Operating in Water with Responses to H2O2 and NH4OH, 2014 IEEE International Frequency Control Symposium (IFCS), 2014, 第 1 作者
  63. Challenges in the noninvasive detection of body composition using near-infrared spectroscopy, JOURNAL OF INNOVATIVE OPTICAL HEALTH SCIENCES, 2014, 第 1 作者
  64. Improving Coal Moisture Detection Using Wavelet Transform, SPECTROSCOPY AND SPECTRAL ANALYSIS, 2012, 第 1 作者

学术兼职

  1. 《Microsystems & Nanoengineering》青年编委，2024.09-2027.09.   
  2. 《Chip》青年编委，2024.08-2027.08.
  3. Non-Linear Resonators Session Chair, Transducers（国际顶会），2023.
  4. 中国仪器仪表学会，微纳器件与系统技术分会理事，2024.8-2028.11
  5. 中国仪器仪表学会，微纳器件与系统技术分会理事，2019.8-2023.11