材料化学方向：先进光刻胶材料；光敏聚酰亚胺材料；半导体制造相关膜层材料；量子点功能材料；原子/分子自组装材料

微纳技术方向：高分辨干涉光刻技术；表面成像技术；化学成键粘附光刻技术

   

140100-集成电路科学与工程
080501-材料物理与化学
080502-材料学

光刻胶材料，光刻工艺，电子束与离子束光刻
量子点材料及其在光场调控领域应用
自组装材料与工艺

2011-09--2016-07   伯明翰大学   博士
2007-09--2011-07   四川大学   学士

   

2024-04~现在, 中科院光电所, 研究员
2021-04~2024-03,中科院光电所, 副研究员
2018-06~2021-03,电子科技大学, 博士后
2016-12~2018-05,中芯国际, 研发工程师

   

（1） Large-Scale Fabrication of 5 nm Plasmonic Hybrid Nanoslit Arrays, Nano Letters, 2025, 第 8 作者  通讯作者
（2） Self-assembly and energy storage potentials of biphasic phase change azobenzene liquid crystalline block copolymers, POLYMER, 2024, 第 6 作者  通讯作者
（3） Controllable Regulation of Diesel Oil-in-Water Pickering Emulsion Stability by Multiresponsive Recyclable Magnetic Polymer Brush Microvessels, ACS APPLIED MATERIALS & INTERFACES, 2024, 第 3 作者  通讯作者
（4） Octaphenyl-POSS nanoparticles dispersed thickpolyvinyl alcohol/acrylamide photopolymer withlow volumetric shrinkage and high diffractionefficiency, OPTICS EXPRESS, 2024, 第 3 作者  通讯作者
（5） Self-reconstruction of a MOF-derived chromium-doped nickel disulfide in electrocatalytic water oxidation, CHEMICAL ENGINEERING JOURNAL, 2022, 第 1 作者
（6） A Fullerene-Platinum Complex for Direct Functional Patterning of Single Metal Atom-Embedded Carbon Nanostructures, JOURNAL OF PHYSICAL CHEMISTRY LETTERS, 2022, 第 1 作者
（7） Heterostructural CoFe2O4/CoO nanoparticles-embedded carbon nanotubes network for boosted overall water-splitting performance, ELECTROCHIMICA ACTA, 2022, 第 9 作者  通讯作者
（8） Cobalt phosphide nanoparticles supported within network of N-doped carbon nanotubes as a multifunctional and scalable electrocatalyst for water splitting, JOURNAL OF ENERGY CHEMISTRY, 2021, 第 1 作者
（9） Electronic Modulation of Hierarchical Spongy Nanosheets toward Efficient and Stable Water Electrolysis, SMALL, 2021, 第 1 作者
（10） NiP2/FeP heterostructural nanoflowers interwoven by carbon nanotubes as highly efficient electrocatalyst for oxygen evolution reaction, JOURNAL OF MATERIALS SCIENCE, 2021, 第 7 作者  通讯作者
（11） Carbon nanotubes-interconnected heterostructural FeP/Ni2P nanospindles as efficient and stable electrocatalysts for oxygen evolution reaction, JOURNAL OF ALLOYS AND COMPOUNDS, 2021, 第 7 作者  通讯作者
（12） Organic carboxylate-based MOFs and derivatives for electrocatalytic water oxidation, COORDINATION CHEMISTRY REVIEWS, 2021, 第 1 作者
（13） Double-shelled hollow bimetallic phosphide nanospheres anchored on nitrogen-doped graphene for boosting water electrolysis, JOURNAL OF MATERIALS CHEMISTRY A, 2020, 第 1 作者
（14） NiSe2 nanocrystals anchored graphene nanosheets as highly efficient and stable electrocatalyst for hydrogen evolution reaction in alkaline medium, JOURNAL OF ALLOYS AND COMPOUNDS, 2019, 第 1 作者
（15） Scalable synthesis of self-assembled bimetallic phosphide/N-doped graphene nanoflakes as an efficient electrocatalyst for overall water splitting, NANOSCALE, 2019, 第 1 作者
（16） Scalable Synthesis of Bimetallic Phosphide Decorated in Carbon Nanotube Network as Multifunctional Electrocatalyst for Water Splitting, ACS SUSTAINABLE CHEMISTRY & ENGINEERING, 2019, 第 1 作者
（17） Performance of a high resolution chemically amplified electron beam resist at various beam energies, MICROELECTRONIC ENGINEERING, 2016, 
（18） Chemically amplified phenolic fullerene electron beam resist, JOURNAL OF MATERIALS CHEMISTRY C, 2014, 

（1） Materials and Processes for Next Generation Lithography, Elsevier, 2016-01, 第 其他 作者
（2） 衍射极限附近的光刻工艺, 清华大学出版社, 2020-02, 第 其他 作者

已指导学生

赵佳栋  硕士研究生  080300-光学工程  

杨根森  博士研究生  080402-测试计量技术及仪器  

现指导学生

王擎天  硕士研究生  080402-测试计量技术及仪器  

王鑫龙  硕士研究生  085400-电子信息  

袁檬  硕士研究生  140100-集成电路科学与工程