基本信息

陈星  男  研究员 博导  中国科学院长春光学精密机械与物理研究所
电子邮件: chenxing@ciomp.ac.cn
通信地址: 吉林省长春市东南湖大路3888号长春光机所
邮政编码:

研究领域

半导体光电材料,光电探测器,纳米材料

招生信息

微电子学与固体电子学专业,硕士研究生2名

微电子学与固体电子学专业,博士研究生1名

招生专业
080903-微电子学与固体电子学
招生方向
半导体光电材料
光电探测器
纳米材料

教育背景

2006-08--2012-05   中国科学院大连化学物理研究所   博士
2002-09--2006-07   中国科学技术大学   学士

工作经历

   
工作简历
2022-09~现在, 中国科学院长春光学精密机械与物理研究所, 任职 研究员
2017-09~2022-09,中国科学院长春光学精密机械与物理研究所, 任职 副研究员
2012-07~2017-09,中国科学院长春光学精密机械与物理研究所, 任职 助理研究员
社会兼职
2019-08-30-2023-08-30,中国物理学会发光分会, 副秘书长

专利与奖励

   
奖励信息
(1) 宽禁带氧化物半导体载流子分离调控新策略及其应用, 一等奖, 省级, 2019
专利成果
[1] 陈星, 周畅, 申德振, 刘可为, 郑智遥. 氧化镓微米线制备方法、日盲紫外探测器及其制备方法. CN: CN115108580A, 2022-09-27.

[2] 刘可为, 黄小茜, 申德振, 陈星, 李炳辉, 艾秋. 镓酸锌薄膜及制备方法、紫外探测器及制备方法. CN: CN114657637A, 2022-06-24.

[3] 刘可为, 陈星, 申德振. 一种紫外探测器及其制备方法. CN: CN113066876A, 2021-07-02.

[4] 刘可为, 陈星, 申德振. 一种半导体薄膜复合结构件的制备方法. CN: CN113192992A, 2021-07-30.

[5] 张振中, 乔宝石, 申德振, 刘可为, 陈星, 李炳辉, 谢修华. 一种退火后的氧化物半导体薄膜和改善氧化物半导体薄膜结晶质量的两步退火法. CN: CN112962143A, 2021-06-15.

[6] 刘可为, 张超, 陈星, 申德振, 李炳辉, 艾秋, 张振中. 一种异质结紫外探测器及其制备方法. CN: CN112563353B, 2023-01-03.

[7] 刘可为, 张超, 陈星, 申德振, 李炳辉, 艾秋, 张振中. 一种异质结紫外探测器及其制备方法. CN: CN112563353A, 2021-03-26.

[8] 刘可为, 韩无双, 申德振, 陈星, 张振中, 李炳辉. 一种薄膜紫外探测器及其制备方法. CN: CN112490309A, 2021-03-12.

[9] 陈星, 刘可为, 申德振, 张振中, 李炳辉. 一种氧化锌纳米线阵列紫外探测器及其制备方法. CN: CN111816715A, 2020-10-23.

[10] 陈星, 刘可为, 申德振, 张振中, 李炳辉. 一种氧化锌微米线紫外探测器及其制备方法. CN: CN111952376A, 2020-11-17.

[11] 王春锐, 陈星, 邵俊峰, 陈飞. 一种激光防护设备及防护系统. CN: CN111929758A, 2020-11-13.

[12] 刘可为, 侯其超, 申德振, 陈星, 张振中, 李炳辉. ZnMgGaO紫外探测器及其制备方法. CN: CN111785795A, 2020-10-16.

[13] 刘可为, 侯其超, 申德振, 陈星, 张振中, 李炳辉. MgGa 2 O 4 紫外探测器及其制备方法. CN: CN111816720A, 2020-10-23.

[14] 刘可为, 侯其超, 申德振, 陈星, 张振中, 李炳辉. ZnMgO紫外探测器及其制备方法. CN: CN111785793A, 2020-10-16.

[15] 刘可为, 陈星, 申德振, 杨佳霖. 一种MOCVD装置及半导体材料生产设备. CN: CN111876752A, 2020-11-03.

[16] 刘可为, 陈星, 申德振, 杨佳霖. 一种MOCVD组合喷淋头及MOCVD设备. CN: CN111778552B, 2021-10-08.

[17] 陈星, 刘可为, 申德振, 李炳辉, 张振中. 一种Ga2O3紫外探测器及其制备方法. CN: CN111628018B, 2022-02-08.

[18] 刘可为, 孙璇, 申德振, 陈星, 张振中, 李炳辉. 一种Ga 2 O 3 :Zn薄膜及其制备方法. CN: CN111710593A, 2020-09-25.

[19] 刘可为, 孙璇, 申德振, 陈星, 张振中, 李炳辉. 一种三氧化二镓日盲紫外探测器及其制备方法. CN: CN111628019A, 2020-09-04.

[20] 陈星, 刘可为, 申德振, 李炳辉, 张振中. 一种Ga 2 O 3 紫外探测器及其制备方法. CN: CN111628018B, 2022-02-08.

[21] 王春锐, 陈星, 邵俊峰, 陈飞. 一种薄膜制备设备及方法. CN: CN113818005A, 2021-12-21.

[22] 陈星, 刘可为, 张振中, 李炳辉, 申德振. 一种氧化锌基合金薄膜、紫外探测器及其制备方法. CN: CN111211185B, 2022-02-08.

[23] 刘可为, 侯其超, 陈星, 张振中, 李炳辉, 申德振. 一种ZnMgO紫外探测器及其制备方法. CN: CN111244202A, 2020-06-05.

[24] 刘可为, 韩冬阳, 陈星, 张振中, 李炳辉, 申德振. 一种ZnMgO薄膜、紫外探测器及其制备方法. CN: CN111261735A, 2020-06-09.

[25] 陈星, 刘可为, 张振中, 李炳辉, 申德振. 一种氧化锌基合金紫外探测器及其制备方法. CN: CN111370507A, 2020-07-03.

[26] 刘可为, 朱勇学, 申德振, 陈星, 张振中, 李炳辉. AlN或AlGaN薄膜材料的制备方法及应用. CN: CN111415858A, 2020-07-14.

[27] 刘可为, 郑智遥, 陈星, 申德振, 张振中, 李炳辉. 一种柔性自支撑ZnO紫外探测器及其制备方法. CN: CN111244201B, 2021-12-17.

[28] 李炳辉, 申德振, 谢修华, 张振中, 刘可为, 陈星, 刘雷, 李衍爽. 一种利用分子束外延技术制备P型氧化锌薄膜的方法. CN: CN111128683A, 2020-05-08.

[29] 刘可为, 韩冬阳, 申德振, 陈星, 张振中, 李炳辉. 一种锌镓氧紫外探测器及其制备方法. CN: CN111081799A, 2020-04-28.

[30] 陈星, 刘可为, 申德振, 张振中, 李炳辉. 一种ZnGaO紫外探测器及其制备方法. CN: CN111029435A, 2020-04-17.

[31] 陈星, 刘可为, 申德振, 张振中, 李炳辉. 一种ZnGaO紫外探测器及其制备方法. CN: CN110797422A, 2020-02-14.

[32] 陈星, 刘可为, 申德振, 韩冬阳, 张振中, 李炳辉. 一种锌镓氧材料薄膜及其制备方法. CN: CN110923666B, 2021-04-06.

[33] 陈星, 刘可为, 申德振, 韩冬阳, 张振中, 李炳辉. 一种锌镓氧材料薄膜及其制备方法. CN: CN110923666B, 2021-04-06.

[34] 刘可为, 韩冬阳, 申德振, 陈星, 张振中, 李炳辉. 一种单一取向锌镓氧薄膜及其制备方法. CN: CN111081533A, 2020-04-28.

[35] 陈星, 刘可为, 张振中, 李炳辉, 申德振. 紫外探测系统及紫外探测方法. CN: CN111006760B, 2021-07-06.

[36] 刘可为, 侯其超, 陈星, 申德振, 张振中, 李炳辉. 一种稼酸镁薄膜的制备方法及稼酸镁薄膜. CN: CN111020529A, 2020-04-17.

[37] 刘可为, 侯其超, 申德振, 陈星, 张振中, 李炳辉. 一种高性能混相ZnMgO薄膜的制备方法及ZnMgO薄膜. CN: CN110970529A, 2020-04-07.

[38] 刘可为, 侯其超, 陈星, 申德振, 张振中, 李炳辉. 一种ZnMgGaO四元合金薄膜的制备方法及ZnMgGaO四元合金薄膜. CN: CN110970528A, 2020-04-07.

[39] 王春锐, 陈星, 邵俊峰, 陈飞. 一种石墨烯酞菁复合材料及其制备方法. CN: CN110554546A, 2019-12-10.

[40] 王春锐, 陈星, 邵俊峰, 陈飞. 一种具有规则排布孔结构的石墨烯材料及其制备方法. CN: CN110877907A, 2020-03-13.

[41] 陈星, 刘可为, 李炳辉, 张振中, 申德振. 一种紫外探测器及其制备方法. CN: CN110544731A, 2019-12-06.

[42] 陈星, 刘可为, 刘雷, 张振中, 李炳辉, 申德振. 一种表面无序的纳米材料及其制备方法. CN: CN110342468A, 2019-10-18.

[43] 刘可为, 周长祺, 陈星, 李炳辉, 张振中, 申德振. 一种日盲紫外探测器及其制备方法. CN: CN110212040A, 2019-09-06.

[44] 刘可为, 程祯, 陈星, 李炳辉, 张振中, 申德振. 一种CH 3 NH 3 PbCl 3 钙钛矿单晶的制备方法与紫外探测器. CN: CN110176540B, 2021-04-06.

[45] 刘可为, 周长祺, 陈星, 李炳辉, 张振中, 申德振. 一种日盲紫外探测器及其制备方法. CN: CN110212040A, 2019-09-06.

[46] 刘可为, 程祯, 陈星, 李炳辉, 张振中, 申德振. 一种CH3NH3PbCl3钙钛矿单晶的制备方法与紫外探测器. CN: CN110176540A, 2019-08-27.

[47] 刘可为, 朱勇学, 陈星, 张振中, 李炳辉, 申德振. 一种紫外波段多波长探测器及其制备方法. CN: CN110164993A, 2019-08-23.

[48] 陈星, 刘可为, 李炳辉, 张振中, 申德振. 一种ZnMgO紫外探测器. CN: CN108922930A, 2018-11-30.

[49] 陈星, 刘可为, 李炳辉, 张振中, 申德振. 一种ZnMgO薄膜及其制备方法. CN: CN108962732B, 2020-05-12.

[50] 陈星, 刘可为, 李炳辉, 张振中, 申德振. 一种氧化锌紫外探测器的封装方法及封装结构. CN: CN108155108A, 2018-06-12.

[51] 陈星, 刘可为, 李炳辉, 张振中, 申德振. 一种ZnMgO日盲紫外探测器的封装方法及封装结构. CN: CN108172663A, 2018-06-15.

[52] 刘可为, 王潇, 陈星, 李炳辉, 张振中, 申德振. 一种紫外探测器及其制备方法. CN: CN107706253A, 2018-02-16.

[53] 陈星, 刘可为, 李炳辉, 张振中, 申德振. 一种紫外探测器及其制作方法. CN: CN107579127A, 2018-01-12.

[54] 刘可为, 王潇, 陈星. 一种紫外探测器及其制备方法. CN: CN106784061B, 2019-01-08.

[55] 陈星, 刘可为, 李炳辉, 张振中, 王潇, 杨佳霖, 申德振. 一种氧化镓日盲紫外探测器及其制备方法. CN: CN105932104A, 2016-09-07.

[56] 陈星, 刘可为, 李炳辉, 张振中, 王潇, 杨佳霖, 申德振. 一种β-氧化镓纳米线阵列薄膜及其制备方法. CN: CN105826433A, 2016-08-03.

[57] 陈星, 刘雷, 赵东旭, 刘可为, 申德振. 具有可见光催化活性的TiO 2 纳米材料、应用及其制备方法. 中国: CN105363427A, 2016-03-02.

[58] 陈星, 刘雷, 赵东旭, 刘可为, 申德振. 具有可见光催化活性的TiO 2 纳米材料、应用及其制备方法. CN: CN105363427A, 2016-03-02.

[59] 陈星, 刘可为, 李炳辉, 张振中, 申德振. 一种紫外探测器及其制作方法. CN: CN104810425A, 2015-07-29.

出版信息

   
发表论文
[1] Sun, Xuan, Liu, Kewei, Chen, Xing, Hou, Qichao, Cheng, Zhen, Yang, Jialin, Ai, Qiu, Zhu, Yongxue, Li, Binghui, Liu, Lei, Shen, Dezhen. Structural and optoelectronic characteristics of beta-Ga2O3 epitaxial films with Zn alloying and subsequent oxygen annealing. JOURNAL OF MATERIALS CHEMISTRY C[J]. 2023, 11(9): 3227-3234, http://dx.doi.org/10.1039/d2tc05204k.
[2] 陈星, 程祯, 刘可为, 申德振. 镓基氧化物薄膜日盲紫外探测器研究进展. 发光学报[J]. 2023, 44(7): 1167-1185, http://lib.cqvip.com/Qikan/Article/Detail?id=7110232305.
[3] Chao Zhang, Kewei Liu, Qiu Ai, Xuan Sun, Xing Chen, Jialin Yang, Yongxue Zhu, Zhen Cheng, Binghui Li, Lei Liu, Dezhen Shen. High-performance fully transparent Ga2O3 solar-blind UV photodetector with the embedded indium–tin–oxide electrodes. MATERIALS TODAY PHYSICS[J]. 2023, 33: http://dx.doi.org/10.1016/j.mtphys.2023.101034.
[4] Jialin Yang, Liu, Kewei, Xing Chen, Dezhen Shen. Recent advances in optoelectronic and microelectronic devices based on ultrawide-bandgap semiconductors. PROGRESS IN QUANTUM ELECTRONICS[J]. 2022, 83: [5] Zhang, Peixuan, Liu, Kewei, Zhu, Yongxue, Ai, Qiu, Yang, Jialin, Chen, Xing, Cheng, Zhen, Li, Binghui, Liu, Lei, Shen, Dezhen. Vacuum Ultraviolet Photodetector with Low Dark Current and Fast Response Speed Based on Polycrystalline AlN Thin Film. PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS[J]. 2022, [6] Zheng, Zhiyao, Liu, Kewei, Cheng, Zhen, Qiao, Baoshi, Chen, Xing, Zhou, Chang, Yang, Jialin, Ai, Qiu, Zhu, Yongxue, Li, Binghui, Liu, Lei, Shen, Dezhen. Single beta-Ga2O3 microbelt solar-blind photodetector with high specific detectivity, high rejection ratio and fast speed. JOURNAL OF PHYSICS D-APPLIED PHYSICS[J]. 2022, 55(36): http://dx.doi.org/10.1088/1361-6463/ac77c9.
[7] Hou, Qichao, Liu, Kewei, Chen, Xing, Yang, Jialin, Ai, Qiu, Cheng, Zhen, Zhu, Yongxue, Li, Binghui, Liu, Lei, Shen, Dezhen. Effects of Mg Component Ratio on Photodetection Performance of MgGa2O4 Solar-Blind Ultraviolet Photodetectors. PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS[J]. 2022, 16(8): http://dx.doi.org/10.1002/pssr.202200137.
[8] 陈星, 周畅, 刘可为, 申德振. 基于宽禁带半导体氧化物微纳材料的紫外探测器研究进展. 中国光学(中英文)[J]. 2022, 15(5): 912-928, http://lib.cqvip.com/Qikan/Article/Detail?id=7108076779.
[9] Q. C. Hou, 刘可为, D. Y. Han, Y. X. Zhu, Xing Chen, B. H. Li, Liu L., D. Z. Shen. MOCVD growth of MgGa2O4 thin films for high-performance solar-blind UV photodetectors. Applied Physics Letters[J]. 2022, 120(1): 011101-, [10] Liu, Yinzhe, Liu, Kewei, Yang, Jialin, Cheng, Zhen, Han, Dongyang, Ai, Qiu, Chen, Xing, Zhu, Yongxue, Li, Binghui, Liu, Lei, Shen, Dezhen. Boosting the performance of crossed ZnO microwire UV photodetector by mechanical contact homo-interface barrier. CHINESE PHYSICS B[J]. 2022, 31(10): 256-260, http://dx.doi.org/10.1088/1674-1056/ac80b0.
[11] Zheng, Zhiyao, Qiao, Baoshi, Zhang, Zhenzhong, Huang, Xiaoqian, Xie, Xiuhua, Li, Binghui, Chen, Xing, Liu, Kewei, Liu, Lei, Shen, Dezhen. High Detectivity of Metal-Semiconductor-Metal Ga2O3 Solar-Blind Photodetector Through Thickness-Regulated Gain. IEEE TRANSACTIONS ON ELECTRON DEVICES[J]. 2022, 69(8): 4362-4365, http://dx.doi.org/10.1109/TED.2022.3184277.
[12] Zhang, Chao, Liu, Kewei, Ai, Qiu, Huang, Xiaoqian, Chen, Xing, Zhu, Yongxue, Yang, Jialin, Cheng, Zhen, Li, Binghui, Liu, Lei, Shen, Dezhen. Performance Enhancement of Ga2O3 Solar-Blind UV Photodetector by the Combination of Oxygen Annealing and Plasma Treatment. JOURNAL OF PHYSICAL CHEMISTRY C[J]. 2022, 126(51): 21839-21846, http://dx.doi.org/10.1021/acs.jpcc.2c07141.
[13] Ma, Hongyu, 刘可为, Cheng, Zhen, Zheng, Zhiyao, Liu, Yinzhe, Zhang, Peixuan, Chen, Xing, Liu, Deming, Liu, Lei, Shen, Dezhen. Speed enhancement of ultraviolet photodetector base on ZnO quantum dots by oxygen adsorption on surface defects. JOURNAL OF ALLOYS AND COMPOUNDS[J]. 2021, 868: http://dx.doi.org/10.1016/j.jallcom.2021.159252.
[14] Han, Dongyang, 刘可为, Chen, Xing, Li, Binghui, Zhai, Tianyou, Liu, Lei, Shen, Dezhen. Performance enhancement of a self-powered solar-blind UV photodetector based on ZnGa2O4/Si heterojunction via interface pyroelectric effect. APPLIED PHYSICS LETTERS[J]. 2021, 118(25): [15] Qiao, Baoshi, Zhang, Zhenzhong, Xie, Xiuhua, Li, Binghui, Chen, Xing, Zhao, Haifeng, Liu, Kewei, Liu, Lei, Shen, Dezhen. Quenching of persistent photocurrent in an oxide UV photodetector. JOURNAL OF MATERIALS CHEMISTRY C[J]. 2021, 9(11): 4039-4045, http://dx.doi.org/10.1039/d0tc05997h.
[16] 王丽嫣, 刘可为, 陈星, 朱勇学, 侯其超, 申德振. 基于Ag微孔阵列结构电极的MgZnO紫外探测器制备和特性. 发光学报[J]. 2021, 42(2): 201-207, http://lib.cqvip.com/Qikan/Article/Detail?id=7104231102.
[17] Han, Dongyang, 刘可为, Yang, Jialin, Chen, Xing, Li, Binghui, Liu, Lei, Shen, Dezhen. Performance enhancement of a p-Si/n-ZnGa2O4 heterojunction solar-blind UV photodetector through interface engineering. JOURNAL OF MATERIALS CHEMISTRY C[J]. 2021, 9(31): 10013-10019, http://dx.doi.org/10.1039/d1tc01705e.
[18] Zhou, Changqi, 刘可为, Chen, Xing, Feng, Jiaheng, Yang, Jialin, Zhang, Zhenzhong, Liu, Lei, Xia, Yang, Shen, Dezhen. Performance improvement of amorphous Ga 2 O 3 ultraviolet photodetector by annealing under oxygen atmosphere. JOURNAL OF ALLOYS AND COMPOUNDS[J]. 2020, 840: http://dx.doi.org/10.1016/j.jallcom.2020.155585.
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科研活动

   
科研项目
( 1 ) 通过氟修饰提高氧气吸附脱附性能以获得高性能ZnO纳米线基紫外探测器, 负责人, 国家任务, 2017-01--2019-12
( 2 ) 基于晶体缺陷和载流子陷阱调控的实用化高响应超快ZnO基紫外探测器的研究, 负责人, 国家任务, 2019-01--2022-12
( 3 ) 通过表面修饰获得高响应度和快速响应的ZnO纳米线基紫外探测器, 负责人, 地方任务, 2018-01--2019-12
( 4 ) Optomechanically-enhanced ZnO-based Ultraviolet Photodetectors, 负责人, 其他任务, 2018-03--2020-03
( 5 ) 中国科学院青年创新促进会, 负责人, 中国科学院计划, 2020-01--2023-12
( 6 ) 可用于极弱光探测的高响应高速Ga2O3基日盲紫外探测器的研究, 负责人, 地方任务, 2021-07--2024-06
( 7 ) 旭光人才计划, 负责人, 研究所自选, 2021-07--2024-06
参与会议
(1)ZnMgO紫外探测器的制备和器件封装   第9届全国氧化锌学术会议   2019-04-12
(2)Performance Enhancement of ZnMgO Film UV Photodetector by HF Solution Treatment   第8届全国氧化锌学术会议   2017-10-30
(3)基于立方相ZnMgO薄膜的UVB紫外探测器的制备   第7届全国氧化锌学术会议   2015-08-16
(4)具有可见光催化活性的非掺杂TiO2纳米材料的制备   第6届全国氧化锌学术会议   2013-12-01

指导学生

已指导学生

王丽嫣  硕士研究生  070205-凝聚态物理  

现指导学生

周畅  硕士研究生  085400-电子信息  

王明硕  硕士研究生  085400-电子信息