2013-08--2018-05   Case Western Reserve University   电气工程博士
2010-09--2013-01   天津大学   生物医学工程硕士（推免）
2006-09--2010-07   天津大学   生物医学工程/英语双学士

   

2022-01~现在, 中国科学院上海微系统与信息技术研究所, 副研究员
2019-07~2021-12,中国科学院上海微系统与信息技术研究所, 项目副研究员
2018-09~2019-06,Case Western Reserve University, 高级研究助理（博士后）

2019-11-01-今,中国仪器仪表协会微纳器件与系统技术分会理事, 理事

   

（1） 上海市海外高层人才, , 省级, 2022
（2） 上海市浦江人才, 省级, 2020
（3） Outstanding Paper Award Finalist, Transducers 2019, , 其他, 2019
（4） Young Scientist Award Finalist, Microsystems & Nanoengineering Summit 2019, , 其他, 2019
（5） 气湿敏传感技术学术交流会 优秀口头报告奖, 其他, 2019
（6） Best Paper Award, 63rd AVS International Symposium 2016, 其他, 2016
（7） Outstanding Student Paper Award Finalist, 28th IEEE International Conference on MEMS 2015, 其他, 2015

（ 1 ） 一种同步热重-拉曼表征方法, 发明专利, 2021, 第 1 作者, 专利号: 202111499332.5

（ 2 ） 一种浸渍式点样仪及微悬臂梁传感芯片的制备方法, 发明专利, 2021, 第 1 作者, 专利号: CN113189357A

   

（1） Ultra-Responsive MEMS Sensing Chip for Differential Thermal Analysis (DTA), SENSORS, 2023, 第 2 作者
（2） Large-Scale Arrays of Tunable Monolayer MoS2 Nanoelectromechanical Resonators, 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), 2023, 第 7 作者
（3） [最佳论文提名]MEMS Differential Thermopiles for High-Sensitivity Hydrogen Gas Detection, IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), 2023, 通讯作者
（4） Cooperative Characterization of In Situ TEM and Cantilever-TGA to Optimize Calcination Conditions of MnO2 Nanowire Precursors, Nano Letters, 2023, 第 6 作者
（5） Controlling Particle Aggregation and Separation in Liquid on Membrane Resonators, 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), 2023, 通讯作者
（6） Thermogravimetric Analysis on a Resonant Microcantilever, Analytical Chemistry, 2022, 第 3 作者
（7） Nanomechanical Resonators: Toward Atomic Scale, ACS NANO, 2022, 其他（合作组作者）
（8） 基于一种多功能系统的二维纳米器件高效制备, Fast prototyping of nanodevices based on two dimensional materials using a multifunctional fabrication system, 中国科学:信息科学, 2022, 第11作者
（9） Microreactor-based TG−TEM synchronous analysis, Analytical Chemistry, 2022, 第 5 作者
（10） In Situ Hydrogen Temperature-Programmed Reduction Technology Based on the Integrated Microcantilever for Metal Oxide Catalyst Analysis, Analytical Chemistry, 2022, 第 5 作者
（11） Structure and Phase Evolution Characterization of Advanced Materials by Using Temperature-Programmable Resonant Microcantilever in Combination with Raman Spectroscopy, 35th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS), 2022, 第 2 作者
（12） Toward Smart Sensing by MXene, Small, 2022, 第 4 作者
（13） In-Plane Mode Encased Cantilevers for Cancer Cell Detection in Liquid, 2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2021, 第 1 作者
（14） Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid, MICROMACHINES, 2021, 第 1 作者
（15） Determination of Elastic Modulus of Silicon Carbide (SiC) Thin Diaphragms via Mode-Dependent Duffing Nonlinear Resonances, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2020, 第 2 作者
（16） Design of Integrated Photonic Devices on SiC-on-Insulator (SiCOI) Platform for Quantum Applications, Frontiers in Optics / Laser Science, 2020, 第 2 作者
（17） [最佳论文提名]Imaging Multimode Vibrations in High-Frequency Aluminum Nitride Piezoelectric Nanomembrane Resonators, 20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2019, 第 1 作者
（18） Probing Heavy Ion Radiation Effects in Silicon Carbide (SiC) via 3D Integrated Multimode Resonating Diaphragms, APPLIED PHYSICS LETTERS, 2019, 第 2 作者
（19） Mode-Dependent Anchor Loss in Silicon Carbide Micromechanical Disk Resonators, 2019 IEEE International Frequency Control Symposium (IFCS), 2019, 第 1 作者
（20） Very High-Frequency Silicon Carbide Microdisk Resonators With Multimode Responses in Water for Particle Sensing, JOURNALOFMICROELECTROMECHANICALSYSTEMS, 2019, 第 1 作者
（21） Probing Ion Radiation Effects in Silicon Crystal by 3D Integrated Resonating Thin Diaphragms, 2019 Government Microcircuit Applications and Critical Technology Conference (GOMACTech), 2019, 第 2 作者
（22） Tracing and Resolving Microparticle Aquatic Mass Motion and Distribution on Multimode Silicon Carbide (SiC) Microdisk Resonators, 32nd International Conference on Micro Electro Mechanical Systems (IEEE MEMS), 2019, 第 1 作者
（23） Frequency Tuning of Two-Dimensional Nanoelectromechanical Resonators via Comb-Drive MEMS Actuators, 20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2019, 第 3 作者
（24） GaN/AlN Heterostructure Micromechanical Self-Sustained Oscillator for Middle Ultraviolet (MUV) Light Detection, 32nd International Conference on Micro Electro Mechanical Systems (IEEE MEMS), 2019, 第 2 作者
（25） Discerning Black Phosphorus Crystal Orientation and Anisotropy by Polarized Reflectance Measurement, ACS APPLIED MATERIALS & INTERFACES, 2018, 第 4 作者
（26） Molybdenum Disulfide (MoS2) Nanoelectromechanical Resonators with On-Chip Aluminum Nitride (AlN) Piezoelectric Excitation, 2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2018, 第 1 作者
（27） Standard and inverse microscale Chladni figures in liquid for dynamic patterning of microparticles on chip, JOURNAL OF APPLIED PHYSICS, 2018, 第 1 作者
（28） Manipulating and Patterning Micro/Nanoparticles in Liquid Using Multimode Membrane Resonators, 2018 IEEE BIOMEDICAL CIRCUITS AND SYSTEMS CONFERENCE (BIOCAS): ADVANCED SYSTEMS FOR ENHANCING HUMAN HEALTH, 2018, 第 1 作者
（29） Dynamic Manipulation and Patterning of Breast Cancer Cells in Biosolution, 30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 2017, 第 1 作者
（30） Energetic Ion Radiation Effects on a Silicon Carbide (SiC) Multimode Resonating Diaphragm, 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2017, 第 5 作者
（31） Resolving and Tuning Mechanical Anisotropy in Black Phosphorus via Nanomechanical Multimode Resonance Spectromicroscopy, NANO LETTERS, 2016, 第 2 作者
（32） Silicon Carbide (SiC) Micromechanical Self-Sustained Oscillator Operating in Liquid, 2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2016, 第 2 作者
（33） Multimode Black Phosphorus Nanomechanical Resonators with Intrinsic Mechanical Anisotropy and Electrical Tunability, Hilton Head, 2016, 第 1 作者
（34） Large-Scale Arrays of Single- and Few-Layer MoS2 Nanomechanical Resonators, NANOSCALE, 2016, 第 1 作者
（35） Single- and Few-Layer Transfer-Printed CVD MoS2 Nanomechanical Resonators with Enhancement by Thermal Annealing, 2016 IEEE International Frequency Control Symposium (IFCS), 2016, 第 1 作者
（36） [最佳论文提名]Culturing and Probing Physical Behavior of Individual Breast Cancer Cells on SiC Microdisk Resonators, Proc of IEEE MEMS 2015, 2015, 第 1 作者
（37） Black phosphorus nanoelectromechanical resonators vibrating at very high frequencies, NANOSCALE, 2015, 第 2 作者
（38） Multimode SiC Trampoline Resonators Manipulate Microspheres to Create Chladni Figures, 2015 JOINT CONFERENCE OF THE IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM & THE EUROPEAN FREQUENCY AND TIME FORUM (FCS), 2015, 第 1 作者
（39） High-Frequency SiC Microdisk Resonators Operating in Water with Responses to H2O2 and NH4OH, 2014 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (FCS), 2014, 第 1 作者
（40） Challenges in the noninvasive detection of body composition using near-infrared spectroscopy, JOURNAL OF INNOVATIVE OPTICAL HEALTH SCIENCES, 2014, 第 2 作者
（41） Micro and Nano-Scale Technologies for Cell Mechanics, NANOBIOMEDICINE, 2014, 第 3 作者
（42） Discussion on the validity of NIR spectral data in non-invasive blood glucose sensing, BIOMEDICAL OPTICS EXPRESS, 2013, 第 4 作者
（43） 数字滤波方法在TDLAS逃逸氨检测中的选用, Selection of Digital Filtering in the Escaping Ammonia Monitoring with TDLAS, SPECTROSCOPY AND SPECTRAL ANALYSIS, 2012, 第 4 作者
（44） Improving Coal Moisture Detection Using Wavelet Transform, SPECTROSCOPY AND SPECTRAL ANALYSIS, 2012, 第 1 作者

   

（1）[最佳论文提名]MEMS Differential Thermopiles for High-Sensitivity Hydrogen Gas Detection   36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2023)   2023-01-15
（2）Controlling Particle Aggregation and Separation in Liquid on Membrane Resonators   36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2023)   2023-01-15
（3）Multimode Resonant Micromechanical Systems in Liquid for Biophysical Studies of Cancer Cells   2022 IEEE Nanotechnology Materials and Devices Conference (NMDC 2022)   Hao Jia   2022-11-18
（4）Structure and Phase Evolution Characterization of Advanced Materials by Using Temperature-Programmable Resonant Microcantilever in Combination with Raman Spectroscopy   35th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2022)   2022-01-09
（5）多模态微谐振器及其在癌细胞检测中的应用   中国微米纳米技术学会第23届学术年会暨第12届国际会议 (CSMNT 2021)   2021-09-24
（6）In-Plane Mode Encased Cantilevers for Cancer Cell Detection in Liquid   21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2021)   2021-06-20
（7）Multimode Resonant Micromechanical Systems in Liquid for Biophysical Studies of Cancer Cells   16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems (IEEE NEMS 2021)   2021-04-25
（8）Design of Integrated Photonic Devices on SiC-on-Insulator (SiCOI) Platform for Quantum Applications   Frontiers in Optics / Laser Science   2020-09-14
（9）[最佳口头报告]一种用于癌细胞聚团控制及转移分析的多模态谐振式传感器   第十四届中国气湿敏传感技术学交流会   2019-11-22
（10）Probing Ion Radiation Effects in Si Crystal by 3D Integrated Resonating Thin Diaphragms   2019 IEEE Nuclear and Apace Radiation Effects Conference (NSREC 2019)   2019-07-08
（11）Multimode Resonant Micromechanical Systems in Liquid for Biophysical Studies of Cancer Cells   Microsystems & Nanoengineering Summit (MINE 2019)   2019-06-07
（12）Mode-Dependent Anchor Loss in Silicon Carbide Micromechanical Disk Resonators   2019 IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCS 2019)   2019-04-14
（13）Probing Ion Radiation Effects in Silicon Crystal by 3D Integrated Resonating Thin Diaphragms   Government Microcircuit Applications and Critical Technology Conference (GOMACTech 2019)    2019-03-25
（14）Tracing and Resolving Microparticle Aquatic Mass Motion and Distribution on Multimode Silicon Carbide (SiC) Microdisk Resonators   32nd IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2019)    2019-01-27
（15）GaN/AlN Heterostructure Micromechanical Self-Sustained Oscillator for Middle Ultraviolet (MUV) Light Detection   32nd IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2019)    2019-01-27
（16）[最佳论文提名]Imaging Multimode Vibrations in High-Frequency Aluminum Nitride Piezoelectric Nanomembrane Resonators   20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2019)   2019-01-23
（17）Probing Ion Radiation Effects in Si Crystals by 3D Integrated Resonating Thin Diaphragm   65th American Vacuum Society International Symposium and Exhibition (AVS 2018)    2018-10-21
（18）Manipulating and Patterning Micro/Nanoparticles in Liquid Using Multimode Membrane Resonators   2018 Biomedical Circuits and Systems Conference (BioCAS 2018)   2018-10-17
（19）Probing Ion Radiation Effects in Si Crystals by 3D Integrated Resonating Thin Diaphragm   2018 IEEE International Frequency Control Symposium (IFCS 2018)   2018-05-21
（20）Molybdenum Disulfide (MoS2) Nanoelectromechanical Resonators with On-Chip Aluminum Nitride (AlN) Piezoelectric Excitation   31st IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2018)    2018-01-21
（21）Micro Chladni Figures and Multimode Manipulation of Breast Cancer Cells in Liquid   64th American Vacuum Society International Symposium and Exhibition (AVS 2017)   2017-10-29
（22）Silicon Carbide (SiC) Materials and Devices for Photonics and Quantum Science   2017 Workshop on Advancing Communication and Quantum Information Research in Engineering (ACQIR 2017)   2017-05-14
（23）Micro Chladni Figures and Multimode Manipulation of Breast Cancer Cells in Liquid   14th International Workshop on Nanomechanical Sensors (NMC 2017)   2017-04-04
（24）Dynamic Manipulation and Patterning of Breast Cancer Cells in Biosolution   30th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2017)   2017-01-22
（25）[最佳论文]Dynamic Patterning of Breast Cancer Cells Using Silicon Nitride Multimode Membrane Resonators   63rd American Vacuum Society International Symposium and Exhibition (AVS 2016)   2016-11-06
（26）Very-High-Frequency (VHF) Molybdenum Disulfide (MoS2) Nanomechanical Resonators Operating in Liquid   63rd American Vacuum Society International Symposium and Exhibition (AVS 2016)    2016-11-06
（27）Multimode Black Phosphorus Nanomechanical Resonators with Intrinsic Mechanical Anisotropy and Electrical Tunability   Hilton Head Solid-State Sensors, Actuators & Microsystems Workshop (HH2016)   2016-06-05
（28）Single- and Few-Layer Transfer-Printed CVD MoS2 Nanomechanical Resonators with Enhancement by Thermal Annealing   2016 IEEE International Frequency Control Symposium (IFCS 2016)   2016-05-09
（29）Silicon Carbide (SiC) Micromechanical Self-Sustained Oscillator Operating in Liquid   29th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2016)   2016-01-24
（30）Microparticle Patterning Using Multimode Silicon Carbide Micromechanical Resonators   62nd American Vacuum Society International Symposium and Exhibition (AVS 2015)   2015-10-18
（31）Measuring Cardiomyocyte Contractions on Silicon Carbide Micromechanical Resonators   62nd American Vacuum Society International Symposium and Exhibition (AVS 2015)   2015-10-18
（32）Multimode SiC Trampoline Resonators Manipulate Microspheres to Create Chladni Figures   2015 IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCS 2015)    2015-04-12
（33）[最佳论文提名]Culturing and Probing Physical Behavior of Individual Breast Cancer Cells on SiC Microdisk Resonators   28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015)   2015-01-18
（34）Multimode Silicon Carbide Microdisk Resonator in Liquid   61st American Vacuum Society International Symposium and Exhibition (AVS 2014)    2014-11-09
（35）High-Frequency SiC Microdisk Resonators Operating in Water with Responses to H2O2 and NH4OH   2014 IEEE International Frequency Control Symposium (IFCS 2014)    2014-05-19

现指导学生

张浩然  硕士研究生  085400-电子信息