080501-材料物理与化学
080903-微电子学与固体电子学
085208-电子与通信工程

   

[1] 王晓东, 马哲, 张明亮, 魏江涛, 杨亮亮, 杨富华. 一种基于声子晶体的MEMS热电器件制备方法. CN: CN113363375A, 2021-09-07.

[2] 张明亮, 秦源浩, 王晓东, 杨富华. 硒化亚铜薄膜的制备方法和表征方法. CN: CN113270533A, 2021-08-17.

[3] 张明亮, 王晓东, 杨富华. 谐振式MEMS差压压力传感器及其制备方法. CN: CN111579147B, 2021-07-06.

[4] 张明亮, 杨富华, 李兆峰, 王晓东. 无掩膜按需掺杂的离子注入设备及方法. CN: CN109920713A, 2019-06-21.

[5] 张明亮, 季安, 王晓东, 杨富华. 一种硅硅玻璃硅四层结构谐振式MEMS压力传感器制备方法. CN: CN108254106A, 2018-07-06.

[6] 张明亮, 季安, 王晓东, 杨富华. 基于硅玻璃阳极键合的圆片级高真空无引线封装方法. CN: CN108217579A, 2018-06-29.

[7] 张明亮, 季安, 王晓东, 杨富华. 基于离子注入石墨烯谐振式MEMS压力传感器的制备方法. CN: CN108190829A, 2018-06-22.

[8] 张明亮, 季安, 王晓东, 杨富华. 浓硼掺杂硅纳米线压阻式MEMS压力传感器的制备方法. CN: CN108147361A, 2018-06-12.

[9] 张明亮, 季安, 王晓东, 杨富华. 基于浓硼掺杂硅的可动微纳结构的制备方法. CN: CN108117041A, 2018-06-05.

[10] 张明亮, 季安, 王晓东, 杨富华. 基于二维电子气的MEMS高温压力传感器及其制备方法. CN: CN107957304A, 2018-04-24.

[11] 刘杨, 张明亮, 王晓东, 杨富华. 高频谐振子的谐振频率及品质因子快速测量. CN: CN105258786A, 2016-01-20.

[12] 赵永梅, 何志, 季安, 刘胜北, 黄亚军, 杨香, 段瑞飞, 张明亮, 王晓东, 杨富华. 材料扩散互溶实现碳化硅键合的方法. CN: CN104876180A, 2015-09-02.

[13] 祁洋洋, 张明亮, 王珍, 王晓东, 杨富华. 基于纳米线的平面热电器件的制备方法. CN: CN103904209A, 2014-07-02.

[14] 赵永梅, 季安, 张明亮, 杨香, 宁瑾, 王晓东, 杨富华. 一种低量程高灵敏度MEMS压力传感器及其制作方法. CN: CN103644999A, 2014-03-19.

[15] 赵永梅, 杨香, 季安, 张明亮, 韩国威, 宁瑾, 王晓东, 杨富华. 一种制备图形化多孔硅结构的方法. CN: CN103641063A, 2014-03-19.

[16] 王珍, 祁洋洋, 张明亮, 王晓东, 季安, 杨富华. 基于核壳结构的热电器件制备方法. CN: CN103647016A, 2014-03-19.

[17] 王珍, 祁洋洋, 张明亮, 杨富华, 王晓东. 面向片上集成的热电器件制备方法. CN: CN103515524A, 2014-01-15.

   

[1] ZhiWei You, Lei Wei, Mingliang Zhang, Fuhua Yang, Xiaodong Wang. Hermetic and Bioresorbable Packaging Materials for MEMS Implantable Pressure Sensors: A Review. IEEE SENSORS JOURNAL[J]. 2022, 22(24): 23633-23648, [2] Wei, Lei, Wei, Jiangtao, Kuai, Xuebao, You, Zhiwei, Zhang, Mingliang, Liu, Wen, Yang, Fuhua, Wang, Xiaodong. Optimization and Fabrication of MEMS suspended structures for nanoscale thermoelectric devices. NANOTECHNOLOGY[J]. 2022, 33(32): http://dx.doi.org/10.1088/1361-6528/ac667a.
[3] Wei, Lei, You, Zhiwei, Kuai, Xuebao, Zhang, Mingliang, Yang, Fuhua, Wang, Xiaodong. MEMS thermal-piezoresistive resonators, thermal-piezoresistive oscillators, and sensors. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS[J]. 2022, [4] ZhiWei You, Lei Wei, Mingliang Zhang, Fuhua Yang, Xiaodong Wang. Hermetic and Bioresorbable Packaging Materials for MEMS Implantable Pressure Sensors: A Review. IEEE SENSORS JOURNAL[J]. 2022, 22(24): 23633-23648, [5] Wei, Lei, Wei, Jiangtao, Kuai, Xuebao, You, Zhiwei, Zhang, Mingliang, Liu, Wen, Yang, Fuhua, Wang, Xiaodong. Optimization and Fabrication of MEMS suspended structures for nanoscale thermoelectric devices. NANOTECHNOLOGY[J]. 2022, 33(32): http://dx.doi.org/10.1088/1361-6528/ac667a.
[6] Wei, Lei, You, Zhiwei, Kuai, Xuebao, Zhang, Mingliang, Yang, Fuhua, Wang, Xiaodong. MEMS thermal-piezoresistive resonators, thermal-piezoresistive oscillators, and sensors. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS[J]. 2022, [7] 魏江涛, 杨亮亮, 魏磊, 秦源浩, 宋培帅, 张明亮, 杨富华, 王晓东. Si微/纳米带的制备与热电性能. 物理学报[J]. 2021, 70(18): 295-304, [8] Wei JiangTao, Yang LiangLiang, Wei Lei, Qin YuanHao, Song PeiShuai, Zhang MingLiang, Yang FuHua, Wang XiaoDong. Fabrication and thermoelectric properties of Si micro/nanobelts. ACTA PHYSICA SINICA[J]. 2021, 70(18): http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000699752400033.
[9] Wei JiangTao, Yang LiangLiang, Qin YuanHao, Song PeiShuai, Zhang MingLiang, Yang FuHua, Wang XiaoDong. Methodology of teasting thermoelectric properties of low-dimensional nanomaterials. ACTA PHYSICA SINICA[J]. 2021, 70(4): http://dx.doi.org/10.7498/aps.70.20201175.
[10] Yang LiangLiang, Qin YuanHao, Wei JiangTao, Song PeiShuai, Zhang MingLiang, Yang FuHua, Wang XiaoDong. Research progress of Cu2Se thin film thermoelectric properties. ACTA PHYSICA SINICA[J]. 2021, 70(7): http://dx.doi.org/10.7498/aps.70.20201677.
[11] Wei, Lei, Kuai, Xuebao, Bao, Yidi, Wei, Jiangtao, Yang, Liangliang, Song, Peishuai, Zhang, Mingliang, Yang, Fuhua, Wang, Xiaodong. The Recent Progress of MEMS/NEMS Resonators. MICROMACHINES[J]. 2021, 12(6): http://dx.doi.org/10.3390/mi12060724.
[12] 杨亮亮, 秦源浩, 魏江涛, 宋培帅, 张明亮, 杨富华, 王晓东. 硒化亚铜薄膜热电性能研究进展. 物理学报[J]. 2021, 70(7): 1-14, http://lib.cqvip.com/Qikan/Article/Detail?id=7104297750.
[13] Ma, Zhe, Wei, Jiangtao, Song, Peishuai, Zhang, Mingliang, Yang, Liangliang, Ma, Jing, Liu, Wen, Yang, Fuhua, Wang, Xiaodong. Review of experimental approaches for improving zT of thermoelectric materials. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSINGnull. 2021, 121: http://dx.doi.org/10.1016/j.mssp.2020.105303.
[14] Yang, Liangliang, Wei, Jiangtao, Qin, Yuanhao, Wei, Lei, Song, Peishuai, Zhang, Mingliang, Yang, Fuhua, Wang, Xiaodong. Thermoelectric Properties of Cu2Se Nano-Thin Film by Magnetron Sputtering. MATERIALS[J]. 2021, 14(8): https://www.webofscience.com/wos/woscc/full-record/WOS:000644517300001.
[15] 魏江涛, 杨亮亮, 魏磊, 秦源浩, 宋培帅, 张明亮, 杨富华, 王晓东. Si微/纳米带的制备与热电性能. 物理学报[J]. 2021, 70(18): 295-304, [16] Wei JiangTao, Yang LiangLiang, Wei Lei, Qin YuanHao, Song PeiShuai, Zhang MingLiang, Yang FuHua, Wang XiaoDong. Fabrication and thermoelectric properties of Si micro/nanobelts. ACTA PHYSICA SINICA[J]. 2021, 70(18): http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000699752400033.
[17] Wei JiangTao, Yang LiangLiang, Qin YuanHao, Song PeiShuai, Zhang MingLiang, Yang FuHua, Wang XiaoDong. Methodology of teasting thermoelectric properties of low-dimensional nanomaterials. ACTA PHYSICA SINICA[J]. 2021, 70(4): http://dx.doi.org/10.7498/aps.70.20201175.
[18] Yang LiangLiang, Qin YuanHao, Wei JiangTao, Song PeiShuai, Zhang MingLiang, Yang FuHua, Wang XiaoDong. Research progress of Cu2Se thin film thermoelectric properties. ACTA PHYSICA SINICA[J]. 2021, 70(7): http://dx.doi.org/10.7498/aps.70.20201677.
[19] Wei, Lei, Kuai, Xuebao, Bao, Yidi, Wei, Jiangtao, Yang, Liangliang, Song, Peishuai, Zhang, Mingliang, Yang, Fuhua, Wang, Xiaodong. The Recent Progress of MEMS/NEMS Resonators. MICROMACHINES[J]. 2021, 12(6): http://dx.doi.org/10.3390/mi12060724.
[20] 杨亮亮, 秦源浩, 魏江涛, 宋培帅, 张明亮, 杨富华, 王晓东. 硒化亚铜薄膜热电性能研究进展. 物理学报[J]. 2021, 70(7): 1-14, http://lib.cqvip.com/Qikan/Article/Detail?id=7104297750.
[21] Ma, Zhe, Wei, Jiangtao, Song, Peishuai, Zhang, Mingliang, Yang, Liangliang, Ma, Jing, Liu, Wen, Yang, Fuhua, Wang, Xiaodong. Review of experimental approaches for improving zT of thermoelectric materials. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSINGnull. 2021, 121: http://dx.doi.org/10.1016/j.mssp.2020.105303.
[22] Yang, Liangliang, Wei, Jiangtao, Qin, Yuanhao, Wei, Lei, Song, Peishuai, Zhang, Mingliang, Yang, Fuhua, Wang, Xiaodong. Thermoelectric Properties of Cu2Se Nano-Thin Film by Magnetron Sputtering. MATERIALS[J]. 2021, 14(8): https://www.webofscience.com/wos/woscc/full-record/WOS:000644517300001.
[23] Song, Peishuai, Ma, Zhe, Ma, Jing, Yang, Liangliang, Wei, Jiangtao, Zhao, Yongmei, Zhang, Mingliang, Yang, Fuhua, Wang, Xiaodong. Recent Progress of Miniature MEMS Pressure Sensors. MICROMACHINES[J]. 2020, 11(1): https://doaj.org/article/dbf010df9b1a44b9a7db7badd8deea42.
[24] 张明亮, 韩国威, 刘庆, 李艳, 杨富华, 王晓东. 瓦里安300XP离子注入机改造及功能开发. 分析测试技术与仪器[J]. 2020, 26(3): 151-159, http://lib.cqvip.com/Qikan/Article/Detail?id=7102930393.
[25] 王晓东. 瓦里安３００ＸＰ离子注入机改造及功能开发. 分析测试技术与仪器. 2020, [26] Qin, Yuanhao, Yang, Liangliang, Wei, Jiangtao, Yang, Shuqi, Zhang, Mingliang, Wang, Xiaodong, Yang, Fuhua. Doping Effect on Cu2Se Thermoelectric Performance: A Review. MATERIALS[J]. 2020, 13(24): http://dx.doi.org/10.3390/ma13245704.
[27] Song, Peishuai, Si, Chaowei, Zhang, Mingliang, Zhao, Yongmei, He, Yurong, Liu, Wen, Wang, Xiaodong. A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology. SENSORS[J]. 2020, 20(2): https://doaj.org/article/56695bdf9480490db099d233b2748a27.
[28] Wei, Jiangtao, Yang, Liangliang, Ma, Zhe, Song, Peishuai, Zhang, Mingliang, Ma, Jing, Yang, Fuhua, Wang, Xiaodong. Review of current high-ZT thermoelectric materials. JOURNAL OF MATERIALS SCIENCE[J]. 2020, 55(27): 12642-12704, https://www.webofscience.com/wos/woscc/full-record/WOS:000542110300010.
[29] Song, Peishuai, Ma, Zhe, Ma, Jing, Yang, Liangliang, Wei, Jiangtao, Zhao, Yongmei, Zhang, Mingliang, Yang, Fuhua, Wang, Xiaodong. Recent Progress of Miniature MEMS Pressure Sensors. MICROMACHINES[J]. 2020, 11(1): https://doaj.org/article/dbf010df9b1a44b9a7db7badd8deea42.
[30] 张明亮, 韩国威, 刘庆, 李艳, 杨富华, 王晓东. 瓦里安300XP离子注入机改造及功能开发. 分析测试技术与仪器[J]. 2020, 26(3): 151-159, http://lib.cqvip.com/Qikan/Article/Detail?id=7102930393.
[31] 王晓东. 瓦里安３００ＸＰ离子注入机改造及功能开发. 分析测试技术与仪器. 2020, [32] Qin, Yuanhao, Yang, Liangliang, Wei, Jiangtao, Yang, Shuqi, Zhang, Mingliang, Wang, Xiaodong, Yang, Fuhua. Doping Effect on Cu2Se Thermoelectric Performance: A Review. MATERIALS[J]. 2020, 13(24): http://dx.doi.org/10.3390/ma13245704.
[33] Song, Peishuai, Si, Chaowei, Zhang, Mingliang, Zhao, Yongmei, He, Yurong, Liu, Wen, Wang, Xiaodong. A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology. SENSORS[J]. 2020, 20(2): https://doaj.org/article/56695bdf9480490db099d233b2748a27.
[34] Wei, Jiangtao, Yang, Liangliang, Ma, Zhe, Song, Peishuai, Zhang, Mingliang, Ma, Jing, Yang, Fuhua, Wang, Xiaodong. Review of current high-ZT thermoelectric materials. JOURNAL OF MATERIALS SCIENCE[J]. 2020, 55(27): 12642-12704, https://www.webofscience.com/wos/woscc/full-record/WOS:000542110300010.
[35] Yang, Liangliang, Wei, Jiangtao, Ma, Zhe, Song, Peishuai, Ma, Jing, Zhao, Yongqiang, Huang, Zhen, Zhang, Mingliang, Yang, Fuhua, Wang, Xiaodong. The Fabrication of Micro/Nano Structures by Laser Machining. NANOMATERIALS[J]. 2019, 9(12): http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000506675800144.
[36] Yang, Liangliang, Wei, Jiangtao, Ma, Zhe, Song, Peishuai, Ma, Jing, Zhao, Yongqiang, Huang, Zhen, Zhang, Mingliang, Yang, Fuhua, Wang, Xiaodong. The Fabrication of Micro/Nano Structures by Laser Machining. NANOMATERIALS[J]. 2019, 9(12): http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000506675800144.
[37] Zhang, Dan, Wang, Qinqin, Fan, Xia, Zhang, Mingliang, Zhai, Jin, Jiang, Lei. An Effective Dark-Vis-UV Ternary Biomimetic Switching Based on N3/Spiropyran-Modified Nanochannels. ADVANCED MATERIALS[J]. 2018, 30(46): https://www.webofscience.com/wos/woscc/full-record/WOS:000453355300023.
[38] Ma, Zhe, Liu, Yang, Deng, Lingxiao, Zhang, Mingliang, Zhang, Shuyuan, Ma, Jing, Song, Peishuai, Liu, Qing, Ji, An, Yang, Fuhua, Wang, Xiaodong. Heavily Boron-Doped Silicon Layer for the Fabrication of Nanoscale Thermoelectric Devices. NANOMATERIALS[J]. 2018, 8(2): https://doaj.org/article/bc7246e8bf53410f906af1bcb9f9c790.
[39] Zhang, Dan, Wang, Qinqin, Fan, Xia, Zhang, Mingliang, Zhai, Jin, Jiang, Lei. An Effective Dark-Vis-UV Ternary Biomimetic Switching Based on N3/Spiropyran-Modified Nanochannels. ADVANCED MATERIALS[J]. 2018, 30(46): https://www.webofscience.com/wos/woscc/full-record/WOS:000453355300023.
[40] Ma, Zhe, Liu, Yang, Deng, Lingxiao, Zhang, Mingliang, Zhang, Shuyuan, Ma, Jing, Song, Peishuai, Liu, Qing, Ji, An, Yang, Fuhua, Wang, Xiaodong. Heavily Boron-Doped Silicon Layer for the Fabrication of Nanoscale Thermoelectric Devices. NANOMATERIALS[J]. 2018, 8(2): https://doaj.org/article/bc7246e8bf53410f906af1bcb9f9c790.
[41] Xu, Xingliang, Wu, Jiang, Wang, Xiaodong, Zhang, Mingliang, Li, Juntao, Shi, Zhigui, Li, Handong, Zhou, Zhihua, Ji, Haining, Niu, Xiaobin, Wang, Zhiming M. Ion-Beam-Directed Self-Ordering of Ga Nanodroplets on GaAs Surfaces. NANOSCALE RESEARCH LETTERS[J]. 2016, 11(1): http://dx.doi.org/10.1186/s11671-016-1234-y.
[42] Liu, Yang, Zhang, Mingliang, Ji, An, Yang, Fuhua, Wang, Xiaodong. Measuring methods for thermoelectric properties of one-dimensional nanostructural materials. RSC ADVANCESnull. 2016, 6(54): 48933-48961, https://www.webofscience.com/wos/woscc/full-record/WOS:000377257000088.
[43] 邓凌霄, 王晓东, 刘杨, 张明亮, 杨富华. 锑化物二类超晶格热电材料：能带结构、热电性能、制备与测试. 材料导报[J]. 2016, 30(21): 21-26, http://lib.cqvip.com/Qikan/Article/Detail?id=670789742.
[44] 刘杨, 张明亮, 季安, 王晓东, 杨富华. 基于浓硼扩散层的硅纳米线谐振子制备. 影像科学与光化学[J]. 2016, 34(3): 265-272, http://lib.cqvip.com/Qikan/Article/Detail?id=668955327.
[45] Xu, Xingliang, Wu, Jiang, Wang, Xiaodong, Zhang, Mingliang, Li, Juntao, Shi, Zhigui, Li, Handong, Zhou, Zhihua, Ji, Haining, Niu, Xiaobin, Wang, Zhiming M. Ion-Beam-Directed Self-Ordering of Ga Nanodroplets on GaAs Surfaces. NANOSCALE RESEARCH LETTERS[J]. 2016, 11(1): http://dx.doi.org/10.1186/s11671-016-1234-y.
[46] Liu, Yang, Zhang, Mingliang, Ji, An, Yang, Fuhua, Wang, Xiaodong. Measuring methods for thermoelectric properties of one-dimensional nanostructural materials. RSC ADVANCESnull. 2016, 6(54): 48933-48961, https://www.webofscience.com/wos/woscc/full-record/WOS:000377257000088.
[47] 邓凌霄, 王晓东, 刘杨, 张明亮, 杨富华. 锑化物二类超晶格热电材料：能带结构、热电性能、制备与测试. 材料导报[J]. 2016, 30(21): 21-26, http://lib.cqvip.com/Qikan/Article/Detail?id=670789742.
[48] 刘杨, 张明亮, 季安, 王晓东, 杨富华. 基于浓硼扩散层的硅纳米线谐振子制备. 影像科学与光化学[J]. 2016, 34(3): 265-272, http://lib.cqvip.com/Qikan/Article/Detail?id=668955327.
[49] Qi, Yangyang, Wang, Zhen, Zhang, Mingliang, Wang, Xiaodong, Ji, An, Yang, Fuhua. Electron transport characteristics of silicon nanowires by metal-assisted chemical etching. AIP ADVANCES[J]. 2014, 4(3): http://ir.semi.ac.cn/handle/172111/26349.
[50] 张明亮. Thermoelectric Device Based on Vertical Silicon Nanowires for On-Chip Integration. Key Engineering Materials. 2014, [51] Qi, Yangyang, Wang, Zhen, Zhang, Mingliang, Wang, Xiaodong, Ji, An, Yang, Fuhua. Electron transport characteristics of silicon nanowires by metal-assisted chemical etching. AIP ADVANCES[J]. 2014, 4(3): http://ir.semi.ac.cn/handle/172111/26349.
[52] 张明亮. Thermoelectric Device Based on Vertical Silicon Nanowires for On-Chip Integration. Key Engineering Materials. 2014, [53] Fan, Xia, Zhang, Mingliang, Wang, Xiaodong, Yang, Fuhua, Meng, Xiangmin. Recent progress in organic-inorganic hybrid solar cells. Journal of materials chemistry c[J]. 2013, 1(31): 8694-8709, http://ir.semi.ac.cn/handle/172111/24862.
[54] Yangyang Qi , Zhen Wang , Mingliang Zhang , Fuhua Yang , and Xiaodong Wang. A Processing Window for Fabricating Heavily Doped Silicon Nanowires by Metal-Assisted Chemical Etching. J. phys. chem. c[J]. 2013, 117(47): 25090–25096-, http://ir.semi.ac.cn/handle/172111/24720.
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