短波红外InGaAs焦平面探测器，集成微纳结构的InGaAs焦平面探测器

080903-微电子学与固体电子学

短波红外InGaAs焦平面探测器
集成微纳结构的InGaAs焦平面探测器

2009-09--2014-06   中国科学院上海技术物理研究所   博士
2005-09--2009-06   中国科学技术大学   学士

研究生

博士

   

2017-10~现在, 中国科学院上海技术物理研究所, 副研究员
2014-06~2017-09,中国科学院上海技术物理研究所, 助理研究员

   

（ 1 ） 一种高增益紫外至近红外InGaAs探测器芯片, 发明, 2017, 第 4 作者, 专利号: 201711275111.3
（ 2 ） 一种单片集成长线列金属偏振光栅的InGaAs焦平面探测器, 发明, 2018, 第 2 作者, 专利号: 201811176474.6
（ 3 ） 用于高长宽比红外焦平面探测器的减薄抛光模具及方法, 发明, 2018, 第 4 作者, 专利号: 201811176473.1

   

[1] 程吉凤, 李雪, 邵秀梅, 李淘, 王红真, 马英杰, 杨波, 龚海梅. 截止波长2.2μm的平面型延伸波长InGaAs探测器. 红外与毫米波学报[J]. 2022, 41(5): 804-809, http://lib.cqvip.com/Qikan/Article/Detail?id=7108228869.
[2] 于春蕾, 龚海梅, 李雪, 黄松垒, 杨波, 朱宪亮, 邵秀梅, 李淘, 顾溢. 2560×2048元短波红外InGaAs焦平面探测器（特邀）. 红外与激光工程[J]. 2022, 51(3): 1-10, http://lib.cqvip.com/Qikan/Article/Detail?id=7107100667.
[3] Sun, Chaoyi, Sun, Duo, Bo, Yang, Li, Tao, Shao, Xiumei, Li, Xue, Gong, Haimei. Fabrication and performance analysis of infrared InGaAs polarimetric detector with complete coverage of superpixel-structured grating. INFRARED PHYSICS & TECHNOLOGY[J]. 2022, 123: http://dx.doi.org/10.1016/j.infrared.2022.104066.
[4] Feng, Bo, Chen, Yifang, Sun, Duo, Yang, Zongyao, Yang, Bo, Li, Xue, Li, Tao. Precision integration of grating-based polarizers onto focal plane arrays of near-infrared photovoltaic detectors for enhanced contrast polarimetric imaging. INTERNATIONAL JOURNAL OF EXTREME MANUFACTURING[J]. 2021, 3(3): 95-102, http://dx.doi.org/10.1088/2631-7990/abf5c8.
[5] Wang, Hongzhen, Gu, Yi, Yu, Chunlei, Zhu, Shalu, Zhu, Yicheng, Chen, Pingping, Cao, Jiasheng, Yang, Bo, Li, Tao, Shao, Xiumei, Li, Xue, Gong, Haimei. Direct correlation of defects and dark currents of InGaAs/InP photodetectors. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING[J]. 2021, 123: http://dx.doi.org/10.1016/j.mssp.2020.105540.
[6] Ma, Yingjie, Zhu, Xianliang, Yang, Bo, Cheng, Jifeng, Gu, Yi, Li, Tao, Shao, Xiumei, Li, Xue, Gong, Haimei, Gong, H, Lu, J. Fabrication of highly-uniform indium ball bumps for small unit-cell infrared focal plane arrays. AOPC 2020: INFRARED DEVICE AND INFRARED TECHNOLOGYnull. 2020, 11563: [7] Yu, Yizhen, Ma, Yingjie, Gu, Yi, Chen, Yu, Yang, Bo, Cheng, Jifeng, Li, Tao, Li, Xue, Shao, Xiumei, Gong, Haimei. Mie-Type Surface Texture-Integrated Visible and Short-Wave Infrared InGaAs/InP Focal Plane Arrays. ACS APPLIED ELECTRONIC MATERIALS[J]. 2020, 2(8): 2558-2564, https://www.webofscience.com/wos/woscc/full-record/WOS:000566338100029.
[8] Wang, Hongzhen, Zhu, Yicheng, Gu, Yi, Chen, Pingping, Wang, Wei, Chen, Xiren, Yang, Bo, Li, Tao, Shao, Xiumei, Li, Xue, Gong, Haimei. High electron mobility InP grown by solid source molecular beam epitaxy. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING[J]. 2020, 112: http://dx.doi.org/10.1016/j.mssp.2020.105012.
[9] 李雪, 邵秀梅, 李淘, 程吉凤, 黄张成, 黄松垒, 杨波, 顾溢, 马英杰, 龚海梅, 方家熊. 短波红外InGaAs焦平面探测器研究进展. 红外与激光工程[J]. 2020, 49(1): 56-63, http://lib.cqvip.com/Qikan/Article/Detail?id=7101214945.
[10] He, Wei, Shao, Xiumei, Ma, Yingjie, Gu, Yi, Li, Tao, Yang, Bo, Li, Xue, Gong, Haimei. Ultra-low spectral reflectances of InP Mie resonators on an InGaAs/InP focal plane array. AIP ADVANCES[J]. 2020, 10(6): https://doaj.org/article/1caa9b06a8f24e068b7504d2fff99041.
[11] Sun, Duo, Feng, Bo, Yang, Bo, Li, Tao, Shao, Xiumei, Li, Xue, Chen, Yifang. Design and fabrication of an InGaAs focal plane array integrated with linear-array polarization grating. OPTICS LETTERS[J]. 2020, 45(6): 1559-1562, https://www.webofscience.com/wos/woscc/full-record/WOS:000522846400070.
[12] 景松, 杨波, 黄张成, 龚海梅, 高海军. 超高增益低噪声红外焦平面读出电路研究. 红外技术[J]. 2019, 41(12): 1117-1123, http://lib.cqvip.com/Qikan/Article/Detail?id=7100616374.
[13] 贺香荣, 李淘, 徐勤飞, 杨波. 结电容对不同光敏元尺寸InGaAs探测器I-V特性测试的影响. 光电子[J]. 2019, 9(1): 6-12, http://lib.cqvip.com/Qikan/Article/Detail?id=HS724642019001002.
[14] Sun, Duo, Li, Tao, Yang, Bo, Shao, Xiumei, Li, Xue, Chen, Yifang. Research on polarization performance of InGaAs focal plane array integrated with superpixel-structured subwavelength grating. OPTICS EXPRESS[J]. 2019, 27(7): 9447-9458, [15] 何玮, 李平, 邵秀梅, 曹高奇, 于一榛, 张亚光, 邓双燕, 杨波, 李雪, 李淘, 龚海梅. 中心距10μm截止波长2.6μm的延伸波长InGaAs焦平面探测器. 红外与毫米波学报[J]. 2018, 37(6): 649-652, http://lib.cqvip.com/Qikan/Article/Detail?id=7000993145.
[16] 龚海梅, 邓洪海, 杨波, 夏辉, 邵海宝, 王强, 王志亮, 朱友华, 黄静, 李雪, 邵秀梅. InGaAs探测器的盲元分析及P电极优化. 光子学报[J]. 2018, 47(3): 0304001-1, http://lib.cqvip.com/Qikan/Article/Detail?id=674549574.
[17] 邓洪海, 杨波, 邵海宝, 王志亮, 黄静, 李雪, 龚海梅. 正照射延伸波长In0.8Ga0.2As红外焦平面探测器. 红外与激光工程[J]. 2018, 47(5): 0504004-1, http://lib.cqvip.com/Qikan/Article/Detail?id=675275071.
[18] 何玮, 李平, 邵秀梅, 曹高奇, 于一榛, 张亚光, 邓双燕, 杨波, 李雪, 李淘, 龚海梅. 中心距10μm截止波长2.6μm的延伸波长InGaAs焦平面探测器. 红外与毫米波学报[J]. 2018, 37(6): 649-652, http://lib.cqvip.com/Qikan/Article/Detail?id=7000993145.
[19] He Wei, Li Ping, Shao XiuMei, Cao GaoQi, Yu YiZhen, Zhang YaGuang, Deng ShuangYan, Yang Bo, Li Xue, Li Tao, Gong HaiMei. InGaAs focal plane array with the sub-10 mu m pixel pitch and 2.6 mu m cut-off wavelength. JOURNAL OF INFRARED AND MILLIMETER WAVES[J]. 2018, 37(6): 649-652, https://www.webofscience.com/wos/woscc/full-record/WOS:000455098300001.
[20] Bo Yang. 640×512 pixel InGaAs FPAs for shortwave infrared and visible light imaging. Pro. Of SPIE. 2017, [21] Yu Chunlei, Li Xue, Yang Bo, Huang Songlei, Shao Xiumei, Zhang Yaguang, Gong Haimei. Noise characteristics analysis of short wave infrared InGaAs focal plane arrays. INFRARED PHYSICS AND TECHNOLOGY[J]. 2017, 85: 74-80, http://dx.doi.org/10.1016/j.infrared.2017.05.017.
[22] Yu, Chunlei, Li, Xue, Yang, Bo, Huang, Songlei, Shao, Xiumei, Zhang, Yaguang, Gong, Haimei. Noise characteristics analysis of short wave infrared InGaAs focal plane arrays. INFRARED PHYSICS & TECHNOLOGY[J]. 2017, 85: 74-80, http://dx.doi.org/10.1016/j.infrared.2017.05.017.
[23] 杨波, 邵秀梅, 唐恒敬, 邓洪海, 李雪, 魏鹏, 王云姬, 李淘, 龚海梅. 可见增强的32×32元平面型InGaAs/InP面阵探测器. 红外与毫米波学报[J]. 2015, 286-290, http://lib.cqvip.com/Qikan/Article/Detail?id=72878972504849534851484854.
[24] Wang Yunji, Tang Hengjing, Li Xue, 邵秀梅, Yang Bo, Deng Shuangyan, Gong Haimei. 不同扩散掩膜方式对InGaAs平面探测器性能影响研究. 红外与毫米波学报[J]. 2014, 33(4): 333-336, http://lib.cqvip.com/Qikan/Article/Detail?id=662071582.
[25] 王云姬, 唐恒敬, 李雪, 邵秀梅, 杨波, 邓双燕, 龚海梅. 不同扩散掩膜方式对InGaAs平面探测器性能影响研究. 红外与毫米波学报[J]. 2014, 33(4): 333-336, http://lib.cqvip.com/Qikan/Article/Detail?id=662071582.
[26] Wang YunJi, Tang HengJing, Li Xue, Shao XiuMei, Yang Bo, Deng ShuangYan, Gong HaiMei. Performance of InGaAs detector with SiN diffusion mask. JOURNAL OF INFRARED AND MILLIMETER WAVES[J]. 2014, 33(4): 333-336, https://www.webofscience.com/wos/woscc/full-record/WOS:000341123900001.

   

（ 1 ） 基于金属表面等离子体滤光微结构的新型近红外多光谱探测器及其光电耦合机理, 主持, 国家级, 2018-01--2020-12