基本信息
宋源 男 硕导 中国科学院长春光学精密机械与物理研究所
电子邮件: songyuan@ciomp.ac.cn
通信地址: 中国科学院长春光学精密机械与物理研究所
邮政编码:
电子邮件: songyuan@ciomp.ac.cn
通信地址: 中国科学院长春光学精密机械与物理研究所
邮政编码:
招生信息
招生专业
080300-光学工程
招生方向
EUV 多层膜光学元件表面污染清洗技术同步辐射光束线关键技术
教育背景
2014-01--2017-01 中国科学院长春光学精密机械与物理研究所 博士研究生2011-09--2014-01 中国科学院长春光学精密机械与物理研究所 硕士研究生
工作经历
工作简历
2022-10~现在, 中国科学院长春光学精密机械与物理研究所, 副研究员2017-04~2022-10,中国科学院长春光学精密机械与物理研究所, 助理研究员2014-01~2017-01,中国科学院长春光学精密机械与物理研究所, 博士研究生2011-09~2014-01,中国科学院长春光学精密机械与物理研究所, 硕士研究生
出版信息
发表论文
(1) Application of adaptive filtering algorithm to the stability problem for double crystal monochromator. Part I: Typical filtering algorithms, NUCLEAR INST. AND METHODS IN PHYSICS RESEARCH, A, 2023, 第 4 作者(2) A new active vibration control method of double crystal monochromator based on FuLMS-ADRC hybrid algorithm, Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2022, 第 4 作者(3) Study on the characteristics of atomic hydrogen cleaning carbon contamination on multilayers, VACUUM, 2022, 第 1 作者(4) 波长漂移对近红外光谱PLSR分析模型的影响, Effect of Wavelength Drift on PLSR Calibration Model of Near-Infrared Spectroscopy, 光谱学与光谱分析, 2022, 第 3 作者(5) Improvement of the performance of a cryo-cooled monochromator at SSRF. Part II: Angular stability of the exit beam, NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2021, 第 3 作者(6) Active vibration control method of double crystal monochromator of P2 protein crystallography beam line at SSRF, NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2021, 第 4 作者(7) Improvement of the performance of a cryo-cooled monochromator at SSRF. PartI: Double-crystal parallelism, NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2021, 第 3 作者(8) 自由电子激光光束线反射镜无应力夹持设计与分析, Design and analysis of stress-free clamping of mirrors used in free-electron laser beamlines, 中国光学, 2020, 第 3 作者(9) Enhanced removal of X-ray-induced carbon contamination using radio-frequency Ar/H_2 plasma, NUCLEAR SCIENCE AND TECHNIQUES, 2019, 第 5 作者(10) Enhanced removal of X-ray-induced carbon contamination using radio-frequency Ar/H2 plasma, Enhanced removal of X-ray-induced carbon contamination using radio-frequency Ar/H_2 plasma, 核技术:英文版, 2019, 第 5 作者(11) Mechanical design and finite element analyses of surface bending mechanism for X-ray optics, PRECISION ENGINEERING, 2018, 第 4 作者(12) Mechanical design and finite element analyses of surface bending mechanism for X-ray optics, PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2018, 第 4 作者(13) 基于双直角分束器的反射式静态傅里叶光谱仪光学系统, 光学学报, 2017, 第 3 作者(14) 极紫外光刻机多层膜反射镜表面碳污染的清洗, Cleaning of carbon contamination on multilayer optics of EUVL, 光学精密工程, 2017, 第 1 作者(15) 极高分辨变包含角平面光栅单色器关键技术及检测方法研究, Key technologies and the performance measuring methods in variable included angle plane grating monochromator, 中国光学, 2016, 第 2 作者(16) Mechanism and model of atomic hydrogen cleaning for different types of carbon contamination on extreme ultraviolet multilayers, THIN SOLID FILMS, 2016, 第 1 作者(17) 前置平面镜热负载对变包含角平面光栅单色器分辨率的影响, Effects of plane mirror thermal load on variable included angle plane-grating monochromator resolution, 中国光学, 2014, 第 1 作者
科研活动
科研项目
( 1 ) 基于原子氢的极紫外多层膜表面碳污染原位高效清洗方法研究, 负责人, 国家任务, 2022-01--2024-12( 2 ) E-lineSM7 偏转镜系统, 负责人, 境内委托项目, 2020-04--2024-12( 3 ) SX-700 光栅单色器, 参与, 境内委托项目, 2021-11--2023-05( 4 ) 基于 X 射线诱发激进粒子反应机制的短波增反膜, 参与, 国家任务, 2020-01--2023-12( 5 ) 镜箱系统, 参与, 境内委托项目, 2022-11--2024-02