毛海央-中国科学院大学-UCAS

研究领域

微机电系统（MEMS）技术；纳机电系统（NEMS）技术；微纳加工技术；红外传感器；表面增强拉曼散射（SERS）技术；微流控；太阳能电池；光吸收纳米结构

招生信息

硕士研究生2名，研究方向为光学纳米材料与结构

招生专业

080903-微电子学与固体电子学
085400-电子信息
085400-电子信息

招生方向

集成电路先导工艺技术
物联网和传感器技术
电子与通信工程

教育背景

2007-09--2011-07   北京大学   信息科学与技术学院微电子学系，研究生/博士学位
2004-09--2007-07   中北大学   电子科学与技术系，研究生/硕士学位
2000-09--2004-07   中北大学   电子工程系，本科/学士学位

专利与奖励

2014.01 中国科学院微电子研究所“年度十佳先进工作者”；

2014.01 中国科学院微电子器件与集成技术重点实验室“年度先进工作者”；

2014.01 江苏物联网研究发展中心“年度先进工作者”；

2015.01 中国科学院微电子器件与集成技术重点实验室“年度先进工作者”；

2015.01 江苏物联网研究发展中心“年度先进工作者”。

2016.07 中国科学院微电子研究所“优秀共产党员”

奖励信息

（1）产学研合作创新成果奖, 一等奖, 其他, 2021
（2）山西省技术发明奖, 二等奖, 省级, 2020

奖励与荣誉

（1）产学研合作创新成果奖, 一等奖, 其他, 2021
（2）山西省技术发明奖, 二等奖, 省级, 2020

专利成果

（ 1 ）一种集成纳米森林的皮拉尼传感器及其制备方法, 发明专利, 2022, 第 1 作者, 专利号: 202211441892.X

（ 2 ）适用于热电堆的塞贝克系数测量结构及其制备方法, 发明专利, 2022, 第 2 作者, 专利号: CN114199934A

（ 3 ）一种三维SERS基底及其制备方法和应用, 发明专利, 2022, 第 2 作者, 专利号: CN114113031A

（ 4 ）一种湿度传感器及其制备方法, 发明专利, 2022, 第 2 作者, 专利号: CN114018991A

（ 5 ）一种低噪声热电堆器件的制作方法, 发明专利, 2021, 第 2 作者, 专利号: CN112563403A

（ 6 ）一种悬桥结构热电堆器件的制作方法, 发明专利, 2021, 第 2 作者, 专利号: CN112563402A

（ 7 ）一种纳米森林结构的制备方法, 发明专利, 2021, 第 2 作者, 专利号: CN112520688A

（ 8 ）高吸收热电堆及其制作方法, 发明专利, 2020, 第 2 作者, 专利号: CN111969098A

（ 9 ）高吸收纳米结构热电堆及其制作方法, 发明专利, 2020, 第 2 作者, 专利号: CN111964794A

（ 10 ）热电堆及其制作方法, 发明专利, 2020, 第 3 作者, 专利号: CN111540824A

（ 11 ） SERS活性基底及其制备方法以及痕量被测试剂分子富集方法, 发明专利, 2020, 第 1 作者, 专利号: CN110940656A

（ 12 ）纳米森林结构的制备方法及纳米森林结构的调控方法, 发明专利, 2019, 第 2 作者, 专利号: CN109987580A

（ 13 ）一种可扩展倍比稀释微流控芯片、制备方法和稀释方法, 发明专利, 2019, 第 2 作者, 专利号: CN109847815A

（ 14 ）表面增强拉曼散射基底、制备方法及3D富集与检测方法, 专利授权, 2019, 第 2 作者, 专利号: CN109650325A

（ 15 ） MEMS光学器件、光吸收纳米结构及其制备方法, 发明专利, 2018, 第 2 作者, 专利号: CN107991768A

（ 16 ）黑硅、制备工艺及基于黑硅的MEMS器件制备方法, 专利授权, 2018, 第 1 作者, 专利号: CN107799392A

（ 17 ）一种微流道结构及其制备方法, 专利授权, 2017, 第 1 作者, 专利号: CN107497507A

（ 18 ）一种MEMS红外光源及其制作方法, 专利授权, 2017, 第 4 作者, 专利号: CN106629577A

（ 19 ）悬浮结构的MEMS红外光源, 实用新型, 2017, 第 4 作者, 专利号: CN206014405U

（ 20 ）悬浮结构的MEMS红外光源及其制备方法, 发明专利, 2017, 第 4 作者, 专利号: CN106276773A

（ 21 ）一种内嵌式纳米森林结构及其制备方法, 发明专利, 2016, 第 1 作者, 专利号: CN105384145A

（ 22 ）一种纳米结构及其制备方法, 发明专利, 2015, 第 1 作者, 专利号: CN105084305A

（ 23 ）基于红外气体传感器的水果成熟度检测系统, 发明专利, 2014, 第 1 作者, 专利号: CN103575690A

出版信息

发表论文

[1] Jin, Yuankai, Xu, Wanghuai, Zhang, Huanhuan, Li, Ruirui, Sun, Jing, Yang, Siyan, Liu, Minjie, Mao, Haiyang, Wang, Zuankai. Electrostatic tweezer for droplet manipulation. PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA[J]. 2022, 119(2): http://dx.doi.org/10.1073/pnas.2105459119.
[2] Shaohang Xu, Meng Shi, Na Zhou, Yaqian Zhao, Haiyang Mao, 黄成军. A Performance Enhancement Method for MEMS Thermopile Pirani Sensors Through In-Situ Integration of Nanoforests. IEEE Electron Device Letter[J]. 2022, 43(10): 1752-1755, [3] Liu, Yang, Li, Ruirui, Zhou, Na, Li, Mao, Huang, Chengjun, Mao, Haiyang. Recyclable 3D SERS devices based on ZnO nanorod-grafted nanowire forests for biochemical sensing. APPLIED SURFACE SCIENCE[J]. 2022, 582: http://dx.doi.org/10.1016/j.apsusc.2021.152336.
[4] Zeqing Xiang, Meng Shi, Na Zhou, Chenchen Zhang, Xuefeng Ding, Yue Ni, Dapeng Chen, Haiyang Mao. A Highly Accurate Method for Measuring Response Time of MEMS Thermopiles. MICROMACHINES[J]. 2022, 13: https://doaj.org/article/6a368647f6bb49c38d4fed39aad93001.
[5] Xu, Shaohang, Zhou, Na, Shi, Meng, Zhang, Chenchen, Chen, Dapeng, Mao, Haiyang. Overview of the MEMS Pirani Sensors. MICROMACHINES[J]. 2022, 13(6): http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000816140800001.
[6] Li, Hongbo, Zhang, Chenchen, Xu, Gaobo, Ding, Xuefeng, Ni, Yue, Chen, Guidong, Chen, Dapeng, Zhou, Na, Mao, Haiyang. A Thermopile Infrared Sensor Array Pixel Monolithically Integrated with an NMOS Switch. MICROMACHINES[J]. 2022, 13(2): http://dx.doi.org/10.3390/mi13020258.
[7] Chen, Guidong, Guan, Ruofei, Shi, Meng, Dai, Xin, Li, Hongbo, Zhou, Na, Chen, Dapeng, Mao, Haiyang. A nanoforest-based humidity sensor for respiration monitoring. MICROSYSTEMS & NANOENGINEERING[J]. 2022, 8(1): http://dx.doi.org/10.1038/s41378-022-00372-4.
[8] Jin, Yuankai, Xu, Wanghuai, Zhang, Huanhuan, Li, Ruirui, Sun, Jing, Yang, Siyan, Liu, Minjie, Mao, Haiyang, Wang, Zuankai. Electrostatic tweezer for droplet manipulation. PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA[J]. 2022, 119(2): http://dx.doi.org/10.1073/pnas.2105459119.
[9] Shaohang Xu, Meng Shi, Na Zhou, Yaqian Zhao, Haiyang Mao, 黄成军. A Performance Enhancement Method for MEMS Thermopile Pirani Sensors Through In-Situ Integration of Nanoforests. IEEE Electron Device Letter[J]. 2022, 43(10): 1752-1755, [10] Liu, Yang, Li, Ruirui, Zhou, Na, Li, Mao, Huang, Chengjun, Mao, Haiyang. Recyclable 3D SERS devices based on ZnO nanorod-grafted nanowire forests for biochemical sensing. APPLIED SURFACE SCIENCE[J]. 2022, 582: http://dx.doi.org/10.1016/j.apsusc.2021.152336.
[11] Zeqing Xiang, Meng Shi, Na Zhou, Chenchen Zhang, Xuefeng Ding, Yue Ni, Dapeng Chen, Haiyang Mao. A Highly Accurate Method for Measuring Response Time of MEMS Thermopiles. MICROMACHINES[J]. 2022, 13: https://doaj.org/article/6a368647f6bb49c38d4fed39aad93001.
[12] Xu, Shaohang, Zhou, Na, Shi, Meng, Zhang, Chenchen, Chen, Dapeng, Mao, Haiyang. Overview of the MEMS Pirani Sensors. MICROMACHINES[J]. 2022, 13(6): http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000816140800001.
[13] Li, Hongbo, Zhang, Chenchen, Xu, Gaobo, Ding, Xuefeng, Ni, Yue, Chen, Guidong, Chen, Dapeng, Zhou, Na, Mao, Haiyang. A Thermopile Infrared Sensor Array Pixel Monolithically Integrated with an NMOS Switch. MICROMACHINES[J]. 2022, 13(2): http://dx.doi.org/10.3390/mi13020258.
[14] Chen, Guidong, Guan, Ruofei, Shi, Meng, Dai, Xin, Li, Hongbo, Zhou, Na, Chen, Dapeng, Mao, Haiyang. A nanoforest-based humidity sensor for respiration monitoring. MICROSYSTEMS & NANOENGINEERING[J]. 2022, 8(1): http://dx.doi.org/10.1038/s41378-022-00372-4.
[15] Na Zhou, Xuefeng Ding, Hongbo Li, Yue Ni, Yonglong Pu, Haiyang Mao. A Thermopile Detector Based on Micro-Bridges for Heat Transfer. MICROMACHINES[J]. 2021, 12: [16] Shi Meng, Dai Xin, Liu Yang, Zhou Na, zhang chenchen, Mao haiyang, chen dapeng. Infrared thermopile sensors with in-situ integration of composite nanoforests for enhanced optical. IEEE MEMS[J]. 2021, [17] 刘洋, 唐嫒尧, 毛海央, 周娜, 黄成军. Hierarchical ZnO Nanospikes on Rough Nanopillars for Gas Sensing with Self-Cleaning Properties. 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)[J]. 2021, [18] Du, Xiangbin, Kong, Jinlong, Liu, Yang, Xu, Qianmin, Wang, Kaiqun, Huang, Di, Wei, Yan, Chen, Weiyi, Mao, Haiyang. The Measurement and Analysis of Impedance Response of HeLa Cells to Distinct Chemotherapy Drugs. MICROMACHINES[J]. 2021, 12(2): https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7920318/.
[19] 秦冲, 毛海央, 陈险峰, 李义. 28nm WLP封装中PBO结构对CPI可靠性的影响. 微电子学[J]. 2021, 51(1): 126-131, https://kns.cnki.net/KCMS/detail/detail.aspx?dbcode=CJFQ&dbname=CJFDLAST2021&filename=MINI202101024&v=MjI1NzNvOUhZSVI4ZVgxTHV4WVM3RGgxVDNxVHJXTTFGckNVUjd1ZlllZG5GeURrVTdyTktDVEZaN0c0SE5ETXI=.
[20] Li, Mao, Shi, Meng, Wang, Bin, Zhang, Chenchen, Yang, Shuai, Yang, Yudong, Zhou, Na, Guo, Xin, Chen, Dapeng, Li, Shaojuan, Mao, Haiyang, Xiong, Jijun. Quasi-Ordered Nanoforests with Hybrid Plasmon Resonances for Broadband Absorption and Photodetection. ADVANCED FUNCTIONAL MATERIALS[J]. 2021, 31(38): http://dx.doi.org/10.1002/adfm.202102840.
[21] Li, Hongbo, Xu, Gaobo, Zhang, Chenchen, Mao, Haiyang, Zhou, Na, Chen, Dapeng. A Sensitivity Controllable Thermopile Infrared Sensor by Monolithic Integration of a N-channel Metal Oxide Semiconductor. ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY[J]. 2021, 10(9): http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000701305300001.
[22] Chen, Guidong, Liu, Yang, Shi, Meng, Zhou, Na, Dai, Xin, Mao, Haiyang, Chen, Dapeng. Performance Enhanced Humidity Sensor by In-Situ Integration of Nanoforests. IEEE ELECTRON DEVICE LETTERS[J]. 2021, 42(4): 585-588, http://dx.doi.org/10.1109/LED.2021.3062063.
[23] 王新泽, 毛海央, 金海波, 龙克文. 静电注入对55nm MV/HV GGNMOS ESD性能的影响. 微电子学[J]. 2021, 51(1): 132-136, http://lib.cqvip.com/Qikan/Article/Detail?id=7104323976.
[24] Kong, Jinlong, Liu, Yang, Du, Xiangbin, Wang, Kaiqun, Chen, Weiyi, Huang, Di, Wei, Yan, Mao, Haiyang. Effect of cell-nanostructured substrate interactions on the capture efficiency of HeLa cells. BIOMEDICAL MATERIALS[J]. 2021, 16(3): https://www.webofscience.com/wos/woscc/full-record/WOS:000623857100001.
[25] Liu, Yang, Li, Xin, Cheng, Jie, Zhou, Na, Zhang, Lingqian, Mao, Haiyang, Huang, Chengjun. SERS devices with "hedgehog-like" nanosphere arrays for detection of trace pesticides. JOURNAL OF INNOVATIVE OPTICAL HEALTH SCIENCES[J]. 2021, 14(4): 72-81, http://dx.doi.org/10.1142/S1793545821410054.
[26] Na Zhou, Xuefeng Ding, Hongbo Li, Yue Ni, Yonglong Pu, Haiyang Mao. A Thermopile Detector Based on Micro-Bridges for Heat Transfer. MICROMACHINES[J]. 2021, 12: [27] Shi Meng, Dai Xin, Liu Yang, Zhou Na, zhang chenchen, Mao haiyang, chen dapeng. Infrared thermopile sensors with in-situ integration of composite nanoforests for enhanced optical. IEEE MEMS[J]. 2021, [28] 刘洋, 唐嫒尧, 毛海央, 周娜, 黄成军. Hierarchical ZnO Nanospikes on Rough Nanopillars for Gas Sensing with Self-Cleaning Properties. 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)[J]. 2021, [29] Du, Xiangbin, Kong, Jinlong, Liu, Yang, Xu, Qianmin, Wang, Kaiqun, Huang, Di, Wei, Yan, Chen, Weiyi, Mao, Haiyang. The Measurement and Analysis of Impedance Response of HeLa Cells to Distinct Chemotherapy Drugs. MICROMACHINES[J]. 2021, 12(2): https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7920318/.
[30] 秦冲, 毛海央, 陈险峰, 李义. 28nm WLP封装中PBO结构对CPI可靠性的影响. 微电子学[J]. 2021, 51(1): 126-131, https://kns.cnki.net/KCMS/detail/detail.aspx?dbcode=CJFQ&dbname=CJFDLAST2021&filename=MINI202101024&v=MjI1NzNvOUhZSVI4ZVgxTHV4WVM3RGgxVDNxVHJXTTFGckNVUjd1ZlllZG5GeURrVTdyTktDVEZaN0c0SE5ETXI=.
[31] Li, Mao, Shi, Meng, Wang, Bin, Zhang, Chenchen, Yang, Shuai, Yang, Yudong, Zhou, Na, Guo, Xin, Chen, Dapeng, Li, Shaojuan, Mao, Haiyang, Xiong, Jijun. Quasi-Ordered Nanoforests with Hybrid Plasmon Resonances for Broadband Absorption and Photodetection. ADVANCED FUNCTIONAL MATERIALS[J]. 2021, 31(38): http://dx.doi.org/10.1002/adfm.202102840.
[32] Li, Hongbo, Xu, Gaobo, Zhang, Chenchen, Mao, Haiyang, Zhou, Na, Chen, Dapeng. A Sensitivity Controllable Thermopile Infrared Sensor by Monolithic Integration of a N-channel Metal Oxide Semiconductor. ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY[J]. 2021, 10(9): http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000701305300001.
[33] Chen, Guidong, Liu, Yang, Shi, Meng, Zhou, Na, Dai, Xin, Mao, Haiyang, Chen, Dapeng. Performance Enhanced Humidity Sensor by In-Situ Integration of Nanoforests. IEEE ELECTRON DEVICE LETTERS[J]. 2021, 42(4): 585-588, http://dx.doi.org/10.1109/LED.2021.3062063.
[34] 王新泽, 毛海央, 金海波, 龙克文. 静电注入对55nm MV/HV GGNMOS ESD性能的影响. 微电子学[J]. 2021, 51(1): 132-136, http://lib.cqvip.com/Qikan/Article/Detail?id=7104323976.
[35] Kong, Jinlong, Liu, Yang, Du, Xiangbin, Wang, Kaiqun, Chen, Weiyi, Huang, Di, Wei, Yan, Mao, Haiyang. Effect of cell-nanostructured substrate interactions on the capture efficiency of HeLa cells. BIOMEDICAL MATERIALS[J]. 2021, 16(3): https://www.webofscience.com/wos/woscc/full-record/WOS:000623857100001.
[36] Liu, Yang, Li, Xin, Cheng, Jie, Zhou, Na, Zhang, Lingqian, Mao, Haiyang, Huang, Chengjun. SERS devices with "hedgehog-like" nanosphere arrays for detection of trace pesticides. JOURNAL OF INNOVATIVE OPTICAL HEALTH SCIENCES[J]. 2021, 14(4): 72-81, http://dx.doi.org/10.1142/S1793545821410054.
[37] Cheng, Jie, Liu, Yang, Mao, Haiyang, Zhao, Wenjie, Ye, Yifei, Zhao, Yang, Zhang, Lingqian, Li, Mingxiao, Huang, Chengjun. Wafer-level fabrication of 3D nanoparticles assembled nanopillars and click chemistry modification for sensitive SERS detection of trace carbonyl compounds. NANOTECHNOLOGY[J]. 2020, 31(26): https://www.webofscience.com/wos/woscc/full-record/WOS:000529405300001.
[38] Gui, Bo, Shi, Meng, Yang, Yudong, Mao, Haiyang, Long, Kewen, Chen, Dapeng, IEEE. A DROPLET PLATFORM BASED ON PARAHYDROPHOBIC NANOFORESTS FOR ON-SITE ION DETECTIONS. 2020 33RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2020)null. 2020, 1118-1121, [39] Cheng, Jie, Liu, Yang, Zhao, Yang, Zhang, Lina, Zhang, Lingqian, Mao, Haiyang, Huang, Chengjun. Nanotechnology-Assisted Isolation and Analysis of Circulating Tumor Cells on Microfluidic Devices. MICROMACHINES[J]. 2020, 11(8): https://doaj.org/article/25e25953f19b4f16a46d0f4ac2721c82.
[40] 赵倩, 杨宇东, 桂博, 毛海央, 李锐锐, 陈大鹏. 基于纳米锥森林结构的表面增强拉曼散射透明器件研究. 光谱学与光谱分析[J]. 2020, 40(4): 1168-1173, http://lib.cqvip.com/Qikan/Article/Detail?id=7101516471.
[41] 毛海央. 基于烛灰纳米颗粒层的高性能MEMS湿度传感器. 微纳电子技术. 2020, [42] 巩晨, 王新泽, 张荣跻, 刘敏, 马一楠, 刘轩, 阎海涛, 毛海央. 湿法刻蚀调节分裂栅存储器的浮栅层形貌研究. 微电子学[J]. 2020, 50(4): 574-578, http://lib.cqvip.com/Qikan/Article/Detail?id=7102817773.
[43] Li, Ruirui, Gui, Bo, Mao, Haiyang, Yang, Yudong, Chen, Dapeng, Xiong, Jijun. Self-Concentrated Surface-Enhanced Raman Scattering-Active Droplet Sensor with Three-Dimensional Hot Spots for Highly Sensitive Molecular Detection in Complex Liquid Environments. ACS SENSORS[J]. 2020, 5(11): 3420-3431, https://www.webofscience.com/wos/woscc/full-record/WOS:000595550100012.
[44] 陈贵东, 石梦, 毛海央, 熊继军, 陈大鹏. 基于纳米森林的电容式湿度传感器. 微纳电子技术[J]. 2020, 57(6): 462-467, http://lib.cqvip.com/Qikan/Article/Detail?id=7102102772.
[45] Ruirui Li, Haiyang Mao, Meng Shi, Qian Zhao, Dapeng Chen, Jijun Xiong. Parahydrophobic 3D nanohybrid substrates with two pathways of molecular enrichment and multilevel plasmon hybridization. SENSORS AND ACTUATORS: B. CHEMICAL. 2020, 320: [46] Zhao Qian, Yang Yudong, Gui Bo, Mao Haiyang, Li Ruirui, Chen Dapeng. Surface-Enhanced Raman Scattering Transparent Devices Based on Nanocone Forests. SPECTROSCOPY AND SPECTRAL ANALYSIS[J]. 2020, 40(4): 1168-1173, https://www.webofscience.com/wos/woscc/full-record/WOS:000534352300030.
[47] Qin, Chong, Li, Yi, Mao, Haiyang. Effect of Different PBO-Based RDL Structures on Chip-Package Interaction Reliability of Wafer Level Package. IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY[J]. 2020, 20(3): 524-529, https://www.webofscience.com/wos/woscc/full-record/WOS:000567396800008.
[48] 毛海央. 基于纳米锥森林结构的表面增强拉曼散射透明器件研. 光谱学与光谱分析. 2020, [49] 陈贵东, 毛海央, 熊继军, 王玮冰, 陈大鹏. 基于烛灰纳米颗粒层的高灵敏度MEMS湿度传感器. 微纳电子技术[J]. 2020, 36-40, http://lib.cqvip.com/Qikan/Article/Detail?id=00002HGNKH5G7JP0MPDO8JP1MDR.
[50] Cheng, Jie, Liu, Yang, Mao, Haiyang, Zhao, Wenjie, Ye, Yifei, Zhao, Yang, Zhang, Lingqian, Li, Mingxiao, Huang, Chengjun. Wafer-level fabrication of 3D nanoparticles assembled nanopillars and click chemistry modification for sensitive SERS detection of trace carbonyl compounds. NANOTECHNOLOGY[J]. 2020, 31(26): https://www.webofscience.com/wos/woscc/full-record/WOS:000529405300001.
[51] Gui, Bo, Shi, Meng, Yang, Yudong, Mao, Haiyang, Long, Kewen, Chen, Dapeng, IEEE. A DROPLET PLATFORM BASED ON PARAHYDROPHOBIC NANOFORESTS FOR ON-SITE ION DETECTIONS. 2020 33RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2020)null. 2020, 1118-1121, [52] Cheng, Jie, Liu, Yang, Zhao, Yang, Zhang, Lina, Zhang, Lingqian, Mao, Haiyang, Huang, Chengjun. Nanotechnology-Assisted Isolation and Analysis of Circulating Tumor Cells on Microfluidic Devices. MICROMACHINES[J]. 2020, 11(8): https://doaj.org/article/25e25953f19b4f16a46d0f4ac2721c82.
[53] 赵倩, 杨宇东, 桂博, 毛海央, 李锐锐, 陈大鹏. 基于纳米锥森林结构的表面增强拉曼散射透明器件研究. 光谱学与光谱分析[J]. 2020, 40(4): 1168-1173, http://lib.cqvip.com/Qikan/Article/Detail?id=7101516471.
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[115] Haiyang Mao. Nanofiber Forests as A Humidity-Sensitive Material,. IEEE MEMS 2015. 2015, [116] Weibing Wang. Fabrication of Patternable Nanopillars for Microfluidic SERS Devices based on Gap-Induced Uneven Etching. IEEE MEMS 2015. 2015, [117] Wu, Meng, Ou, Yi, Mao, Haiyang, Li, Zhigang, Liu, Ruiwen, Ming, Anjie, Ou, Wen. Multi-resonant wideband energy harvester based on a folded asymmetric M-shaped cantilever. AIP ADVANCES[J]. 2015, 5(7): https://doaj.org/article/17748bb981494cda9699576c5d686a3f.
[118] Tang L C, Mao H Y, Wang Y, Ou W, Wu W G, Tan Q L, Xiong J J, IEEE. FABRICATION OF NANOWIRES FROM POLYIMIDE FOR TRANSPARENT SERS DEVICES. 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)null. 2015, 1397-1400, http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000380461400348.
[119] 毛海央. 基于双层多晶硅材料的MEMS热电偶真空度传感器研究. 微纳电子技术. 2015, [120] Haiyang Mao. Fabrication of Transparent SERS Devices for Pesticide Detection. IEEE NEMS 2015. 2015, [121] Haiyang Mao. Nanofiber Forests as A Humidity-Sensitive Material,. IEEE MEMS 2015. 2015, [122] Weibing Wang. Fabrication of Patternable Nanopillars for Microfluidic SERS Devices based on Gap-Induced Uneven Etching. IEEE MEMS 2015. 2015, [123] Wu, Meng, Ou, Yi, Mao, Haiyang, Li, Zhigang, Liu, Ruiwen, Ming, Anjie, Ou, Wen. Multi-resonant wideband energy harvester based on a folded asymmetric M-shaped cantilever. AIP ADVANCES[J]. 2015, 5(7): https://doaj.org/article/17748bb981494cda9699576c5d686a3f.
[124] Tang L C, Mao H Y, Wang Y, Ou W, Wu W G, Tan Q L, Xiong J J, IEEE. FABRICATION OF NANOWIRES FROM POLYIMIDE FOR TRANSPARENT SERS DEVICES. 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)null. 2015, 1397-1400, http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000380461400348.
[125] 毛海央. 基于双层多晶硅材料的MEMS热电偶真空度传感器研究. 微纳电子技术. 2015, [126] Haiyang Mao. Fabrication of Transparent SERS Devices for Pesticide Detection. IEEE NEMS 2015. 2015, [127] 欧文. Design of thermopile-based infrared detectors with suspended absorber-thermopile bi-layers. Chinese Journal of Sensors and Actuators. 2014, [128] Bao AiDa, Mao HaiYang, Xiong JiJun, Chen ZhuoJie, Ou Wen, Chen DaPeng. Nanopillar-forest based surface-enhanced Raman scattering substrates. SCIENCE CHINA-INFORMATION SCIENCES[J]. 2014, 57(8): https://www.webofscience.com/wos/woscc/full-record/WOS:000339365500021.
[129] 陈媛婧, 毛海央, 谭秋林, 薛晨阳, 欧文, 陈大鹏, 熊继军. 一种基于悬浮吸收层的双层结构的热电堆红外探测器. 传感技术学报[J]. 2014, 27(6): 730-735, http://lib.cqvip.com/Qikan/Article/Detail?id=662065813.
[130] 欧文. Fabrication of polyimide sacrificial layers with inclined sidewalls based on RIE technology. AIP Advances. 2014, [131] Mao, Haiyang, Wu, Wengang, She, Didi, Sun, Gongchen, Lv, Pengpeng, Xu, Jun. Microfluidic Surface-Enhanced Raman Scattering Sensors Based on Nanopillar Forests Realized by an Oxygen-Plasma-Stripping-of-Photoresist Technique. SMALL[J]. 2014, 10(1): 127-134, https://www.webofscience.com/wos/woscc/full-record/WOS:000330624400015.
[132] Haiyang Mao. Nanofiber Forests with High Infrared Absorptance. IEEEMEMS2014. 2014, [133] 欧文. Design of thermopile-based infrared detectors with suspended absorber-thermopile bi-layers. Chinese Journal of Sensors and Actuators. 2014, [134] Bao AiDa, Mao HaiYang, Xiong JiJun, Chen ZhuoJie, Ou Wen, Chen DaPeng. Nanopillar-forest based surface-enhanced Raman scattering substrates. SCIENCE CHINA-INFORMATION SCIENCES[J]. 2014, 57(8): https://www.webofscience.com/wos/woscc/full-record/WOS:000339365500021.
[135] 陈媛婧, 毛海央, 谭秋林, 薛晨阳, 欧文, 陈大鹏, 熊继军. 一种基于悬浮吸收层的双层结构的热电堆红外探测器. 传感技术学报[J]. 2014, 27(6): 730-735, http://lib.cqvip.com/Qikan/Article/Detail?id=662065813.
[136] 欧文. Fabrication of polyimide sacrificial layers with inclined sidewalls based on RIE technology. AIP Advances. 2014, [137] Mao, Haiyang, Wu, Wengang, She, Didi, Sun, Gongchen, Lv, Pengpeng, Xu, Jun. Microfluidic Surface-Enhanced Raman Scattering Sensors Based on Nanopillar Forests Realized by an Oxygen-Plasma-Stripping-of-Photoresist Technique. SMALL[J]. 2014, 10(1): 127-134, https://www.webofscience.com/wos/woscc/full-record/WOS:000330624400015.
[138] Haiyang Mao. Nanofiber Forests with High Infrared Absorptance. IEEEMEMS2014. 2014, [139] Mao, Haiyang, Chen, Yuanjing, Ou, Yi, Ou, Wen, Xiong, Jijun, You, Chunjuan, Tan, Qiulin, Chen, Dapeng. Fabrication of nanopillar forests with high infrared absorptance based on rough poly-Si and spacer technology. JOURNAL OF MICROMECHANICS AND MICROENGINEERING[J]. 2013, 23(9): https://www.webofscience.com/wos/woscc/full-record/WOS:000323814100034.
[140] Mao, Haiyang, Chen, Yuanjing, Ou, Yi, Ou, Wen, Xiong, Jijun, You, Chunjuan, Tan, Qiulin, Chen, Dapeng. Fabrication of nanopillar forests with high infrared absorptance based on rough poly-Si and spacer technology. JOURNAL OF MICROMECHANICS AND MICROENGINEERING[J]. 2013, 23(9): https://www.webofscience.com/wos/woscc/full-record/WOS:000323814100034.
[141] Mao, Haiyang, Zhang, Yulong, Wu, Wengang, Sun, Gongchen, Xu, Jun. Realization of cylindrical submicron shell arrays by diffraction-introduced photolithography. JOURNALOFMICROMECHANICSANDMICROENGINEERING[J]. 2011, 21(8): https://www.webofscience.com/wos/woscc/full-record/WOS:000293163700004.
[142] Mao, Haiyang, Zhang, Yulong, Wu, Wengang, Sun, Gongchen, Xu, Jun. Realization of cylindrical submicron shell arrays by diffraction-introduced photolithography. JOURNALOFMICROMECHANICSANDMICROENGINEERING[J]. 2011, 21(8): https://www.webofscience.com/wos/woscc/full-record/WOS:000293163700004.
[143] Mao, Haiyang, Wu, Wengang, Zhang, Yulong, Zhai, Ge, Xu, Jun. Fabrication of high-compact nanowires using alternating photoresist ashing and spacer technology. JOURNAL OF MICROMECHANICS AND MICROENGINEERING[J]. 2010, 20(8): https://www.webofscience.com/wos/woscc/full-record/WOS:000280560600029.
[144] Mao, Haiyang, Wu, Wengang, Zhang, Yulong, Zhai, Ge, Xu, Jun. Fabrication of high-compact nanowires using alternating photoresist ashing and spacer technology. JOURNAL OF MICROMECHANICS AND MICROENGINEERING[J]. 2010, 20(8): https://www.webofscience.com/wos/woscc/full-record/WOS:000280560600029.
[145] Haiyang Mao. A novel micro- accelerometer with adjustable sensitivity based on resonant tunneling diodes. Chinese Physics B. 2009, [146] Jijun Xiong, Wendong Zhang, Haiyang Mao, Kaiqun Wang. Research on double-barrier resonant tunneling effect based stress measurement methods. SENSORS & ACTUATORS: A. PHYSICAL. 2009, 150(2): 169-174, http://dx.doi.org/10.1016/j.sna.2008.12.015.
[147] Mao, Haiyang, Wu, Di, Wu, Wengang, Xu, Jun, Hao, Yilong. The fabrication of diversiform nanostructure forests based on residue nanomasks synthesized by oxygen plasma removal of photoresist. NANOTECHNOLOGY[J]. 2009, 20(44): https://www.webofscience.com/wos/woscc/full-record/WOS:000270562900010.
[148] 熊继军, 毛海央, 张文栋, 王楷群. A novel micro-accelerometer with adjustable sensitivity based on resonant tunnelling diodes. 中国物理：英文版[J]. 2009, 1242-1247, http://lib.cqvip.com/Qikan/Article/Detail?id=29794244.
[149] Haiyang Mao. A novel micro- accelerometer with adjustable sensitivity based on resonant tunneling diodes. Chinese Physics B. 2009, [150] Jijun Xiong, Wendong Zhang, Haiyang Mao, Kaiqun Wang. Research on double-barrier resonant tunneling effect based stress measurement methods. SENSORS & ACTUATORS: A. PHYSICAL. 2009, 150(2): 169-174, http://dx.doi.org/10.1016/j.sna.2008.12.015.
[151] Mao, Haiyang, Wu, Di, Wu, Wengang, Xu, Jun, Hao, Yilong. The fabrication of diversiform nanostructure forests based on residue nanomasks synthesized by oxygen plasma removal of photoresist. NANOTECHNOLOGY[J]. 2009, 20(44): https://www.webofscience.com/wos/woscc/full-record/WOS:000270562900010.
[152] 熊继军, 毛海央, 张文栋, 王楷群. A novel micro-accelerometer with adjustable sensitivity based on resonant tunnelling diodes. 中国物理：英文版[J]. 2009, 1242-1247, http://lib.cqvip.com/Qikan/Article/Detail?id=29794244.

出版信息

发表论文

[1] Jin, Yuankai, Xu, Wanghuai, Zhang, Huanhuan, Li, Ruirui, Sun, Jing, Yang, Siyan, Liu, Minjie, Mao, Haiyang, Wang, Zuankai. Electrostatic tweezer for droplet manipulation. PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA[J]. 2022, 119(2): http://dx.doi.org/10.1073/pnas.2105459119.
[2] Shaohang Xu, Meng Shi, Na Zhou, Yaqian Zhao, Haiyang Mao, 黄成军. A Performance Enhancement Method for MEMS Thermopile Pirani Sensors Through In-Situ Integration of Nanoforests. IEEE Electron Device Letter[J]. 2022, 43(10): 1752-1755, [3] Liu, Yang, Li, Ruirui, Zhou, Na, Li, Mao, Huang, Chengjun, Mao, Haiyang. Recyclable 3D SERS devices based on ZnO nanorod-grafted nanowire forests for biochemical sensing. APPLIED SURFACE SCIENCE[J]. 2022, 582: http://dx.doi.org/10.1016/j.apsusc.2021.152336.
[4] Zeqing Xiang, Meng Shi, Na Zhou, Chenchen Zhang, Xuefeng Ding, Yue Ni, Dapeng Chen, Haiyang Mao. A Highly Accurate Method for Measuring Response Time of MEMS Thermopiles. MICROMACHINES[J]. 2022, 13: https://doaj.org/article/6a368647f6bb49c38d4fed39aad93001.
[5] Xu, Shaohang, Zhou, Na, Shi, Meng, Zhang, Chenchen, Chen, Dapeng, Mao, Haiyang. Overview of the MEMS Pirani Sensors. MICROMACHINES[J]. 2022, 13(6): http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000816140800001.
[6] Li, Hongbo, Zhang, Chenchen, Xu, Gaobo, Ding, Xuefeng, Ni, Yue, Chen, Guidong, Chen, Dapeng, Zhou, Na, Mao, Haiyang. A Thermopile Infrared Sensor Array Pixel Monolithically Integrated with an NMOS Switch. MICROMACHINES[J]. 2022, 13(2): http://dx.doi.org/10.3390/mi13020258.
[7] Chen, Guidong, Guan, Ruofei, Shi, Meng, Dai, Xin, Li, Hongbo, Zhou, Na, Chen, Dapeng, Mao, Haiyang. A nanoforest-based humidity sensor for respiration monitoring. MICROSYSTEMS & NANOENGINEERING[J]. 2022, 8(1): http://dx.doi.org/10.1038/s41378-022-00372-4.
[8] Jin, Yuankai, Xu, Wanghuai, Zhang, Huanhuan, Li, Ruirui, Sun, Jing, Yang, Siyan, Liu, Minjie, Mao, Haiyang, Wang, Zuankai. Electrostatic tweezer for droplet manipulation. PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA[J]. 2022, 119(2): http://dx.doi.org/10.1073/pnas.2105459119.
[9] Shaohang Xu, Meng Shi, Na Zhou, Yaqian Zhao, Haiyang Mao, 黄成军. A Performance Enhancement Method for MEMS Thermopile Pirani Sensors Through In-Situ Integration of Nanoforests. IEEE Electron Device Letter[J]. 2022, 43(10): 1752-1755, [10] Liu, Yang, Li, Ruirui, Zhou, Na, Li, Mao, Huang, Chengjun, Mao, Haiyang. Recyclable 3D SERS devices based on ZnO nanorod-grafted nanowire forests for biochemical sensing. APPLIED SURFACE SCIENCE[J]. 2022, 582: http://dx.doi.org/10.1016/j.apsusc.2021.152336.
[11] Zeqing Xiang, Meng Shi, Na Zhou, Chenchen Zhang, Xuefeng Ding, Yue Ni, Dapeng Chen, Haiyang Mao. A Highly Accurate Method for Measuring Response Time of MEMS Thermopiles. MICROMACHINES[J]. 2022, 13: https://doaj.org/article/6a368647f6bb49c38d4fed39aad93001.
[12] Xu, Shaohang, Zhou, Na, Shi, Meng, Zhang, Chenchen, Chen, Dapeng, Mao, Haiyang. Overview of the MEMS Pirani Sensors. MICROMACHINES[J]. 2022, 13(6): http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000816140800001.
[13] Li, Hongbo, Zhang, Chenchen, Xu, Gaobo, Ding, Xuefeng, Ni, Yue, Chen, Guidong, Chen, Dapeng, Zhou, Na, Mao, Haiyang. A Thermopile Infrared Sensor Array Pixel Monolithically Integrated with an NMOS Switch. MICROMACHINES[J]. 2022, 13(2): http://dx.doi.org/10.3390/mi13020258.
[14] Chen, Guidong, Guan, Ruofei, Shi, Meng, Dai, Xin, Li, Hongbo, Zhou, Na, Chen, Dapeng, Mao, Haiyang. A nanoforest-based humidity sensor for respiration monitoring. MICROSYSTEMS & NANOENGINEERING[J]. 2022, 8(1): http://dx.doi.org/10.1038/s41378-022-00372-4.
[15] Na Zhou, Xuefeng Ding, Hongbo Li, Yue Ni, Yonglong Pu, Haiyang Mao. A Thermopile Detector Based on Micro-Bridges for Heat Transfer. MICROMACHINES[J]. 2021, 12: [16] Shi Meng, Dai Xin, Liu Yang, Zhou Na, zhang chenchen, Mao haiyang, chen dapeng. Infrared thermopile sensors with in-situ integration of composite nanoforests for enhanced optical. IEEE MEMS[J]. 2021, [17] 刘洋, 唐嫒尧, 毛海央, 周娜, 黄成军. Hierarchical ZnO Nanospikes on Rough Nanopillars for Gas Sensing with Self-Cleaning Properties. 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)[J]. 2021, [18] Du, Xiangbin, Kong, Jinlong, Liu, Yang, Xu, Qianmin, Wang, Kaiqun, Huang, Di, Wei, Yan, Chen, Weiyi, Mao, Haiyang. The Measurement and Analysis of Impedance Response of HeLa Cells to Distinct Chemotherapy Drugs. MICROMACHINES[J]. 2021, 12(2): https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7920318/.
[19] 秦冲, 毛海央, 陈险峰, 李义. 28nm WLP封装中PBO结构对CPI可靠性的影响. 微电子学[J]. 2021, 51(1): 126-131, https://kns.cnki.net/KCMS/detail/detail.aspx?dbcode=CJFQ&dbname=CJFDLAST2021&filename=MINI202101024&v=MjI1NzNvOUhZSVI4ZVgxTHV4WVM3RGgxVDNxVHJXTTFGckNVUjd1ZlllZG5GeURrVTdyTktDVEZaN0c0SE5ETXI=.
[20] Li, Mao, Shi, Meng, Wang, Bin, Zhang, Chenchen, Yang, Shuai, Yang, Yudong, Zhou, Na, Guo, Xin, Chen, Dapeng, Li, Shaojuan, Mao, Haiyang, Xiong, Jijun. Quasi-Ordered Nanoforests with Hybrid Plasmon Resonances for Broadband Absorption and Photodetection. ADVANCED FUNCTIONAL MATERIALS[J]. 2021, 31(38): http://dx.doi.org/10.1002/adfm.202102840.
[21] Li, Hongbo, Xu, Gaobo, Zhang, Chenchen, Mao, Haiyang, Zhou, Na, Chen, Dapeng. A Sensitivity Controllable Thermopile Infrared Sensor by Monolithic Integration of a N-channel Metal Oxide Semiconductor. ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY[J]. 2021, 10(9): http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000701305300001.
[22] Chen, Guidong, Liu, Yang, Shi, Meng, Zhou, Na, Dai, Xin, Mao, Haiyang, Chen, Dapeng. Performance Enhanced Humidity Sensor by In-Situ Integration of Nanoforests. IEEE ELECTRON DEVICE LETTERS[J]. 2021, 42(4): 585-588, http://dx.doi.org/10.1109/LED.2021.3062063.
[23] 王新泽, 毛海央, 金海波, 龙克文. 静电注入对55nm MV/HV GGNMOS ESD性能的影响. 微电子学[J]. 2021, 51(1): 132-136, http://lib.cqvip.com/Qikan/Article/Detail?id=7104323976.
[24] Kong, Jinlong, Liu, Yang, Du, Xiangbin, Wang, Kaiqun, Chen, Weiyi, Huang, Di, Wei, Yan, Mao, Haiyang. Effect of cell-nanostructured substrate interactions on the capture efficiency of HeLa cells. BIOMEDICAL MATERIALS[J]. 2021, 16(3): https://www.webofscience.com/wos/woscc/full-record/WOS:000623857100001.
[25] Liu, Yang, Li, Xin, Cheng, Jie, Zhou, Na, Zhang, Lingqian, Mao, Haiyang, Huang, Chengjun. SERS devices with "hedgehog-like" nanosphere arrays for detection of trace pesticides. JOURNAL OF INNOVATIVE OPTICAL HEALTH SCIENCES[J]. 2021, 14(4): 72-81, http://dx.doi.org/10.1142/S1793545821410054.
[26] Na Zhou, Xuefeng Ding, Hongbo Li, Yue Ni, Yonglong Pu, Haiyang Mao. A Thermopile Detector Based on Micro-Bridges for Heat Transfer. MICROMACHINES[J]. 2021, 12: [27] Shi Meng, Dai Xin, Liu Yang, Zhou Na, zhang chenchen, Mao haiyang, chen dapeng. Infrared thermopile sensors with in-situ integration of composite nanoforests for enhanced optical. IEEE MEMS[J]. 2021, [28] 刘洋, 唐嫒尧, 毛海央, 周娜, 黄成军. Hierarchical ZnO Nanospikes on Rough Nanopillars for Gas Sensing with Self-Cleaning Properties. 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)[J]. 2021, [29] Du, Xiangbin, Kong, Jinlong, Liu, Yang, Xu, Qianmin, Wang, Kaiqun, Huang, Di, Wei, Yan, Chen, Weiyi, Mao, Haiyang. The Measurement and Analysis of Impedance Response of HeLa Cells to Distinct Chemotherapy Drugs. MICROMACHINES[J]. 2021, 12(2): https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7920318/.
[30] 秦冲, 毛海央, 陈险峰, 李义. 28nm WLP封装中PBO结构对CPI可靠性的影响. 微电子学[J]. 2021, 51(1): 126-131, https://kns.cnki.net/KCMS/detail/detail.aspx?dbcode=CJFQ&dbname=CJFDLAST2021&filename=MINI202101024&v=MjI1NzNvOUhZSVI4ZVgxTHV4WVM3RGgxVDNxVHJXTTFGckNVUjd1ZlllZG5GeURrVTdyTktDVEZaN0c0SE5ETXI=.
[31] Li, Mao, Shi, Meng, Wang, Bin, Zhang, Chenchen, Yang, Shuai, Yang, Yudong, Zhou, Na, Guo, Xin, Chen, Dapeng, Li, Shaojuan, Mao, Haiyang, Xiong, Jijun. Quasi-Ordered Nanoforests with Hybrid Plasmon Resonances for Broadband Absorption and Photodetection. ADVANCED FUNCTIONAL MATERIALS[J]. 2021, 31(38): http://dx.doi.org/10.1002/adfm.202102840.
[32] Li, Hongbo, Xu, Gaobo, Zhang, Chenchen, Mao, Haiyang, Zhou, Na, Chen, Dapeng. A Sensitivity Controllable Thermopile Infrared Sensor by Monolithic Integration of a N-channel Metal Oxide Semiconductor. ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY[J]. 2021, 10(9): http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000701305300001.
[33] Chen, Guidong, Liu, Yang, Shi, Meng, Zhou, Na, Dai, Xin, Mao, Haiyang, Chen, Dapeng. Performance Enhanced Humidity Sensor by In-Situ Integration of Nanoforests. IEEE ELECTRON DEVICE LETTERS[J]. 2021, 42(4): 585-588, http://dx.doi.org/10.1109/LED.2021.3062063.
[34] 王新泽, 毛海央, 金海波, 龙克文. 静电注入对55nm MV/HV GGNMOS ESD性能的影响. 微电子学[J]. 2021, 51(1): 132-136, http://lib.cqvip.com/Qikan/Article/Detail?id=7104323976.
[35] Kong, Jinlong, Liu, Yang, Du, Xiangbin, Wang, Kaiqun, Chen, Weiyi, Huang, Di, Wei, Yan, Mao, Haiyang. Effect of cell-nanostructured substrate interactions on the capture efficiency of HeLa cells. BIOMEDICAL MATERIALS[J]. 2021, 16(3): https://www.webofscience.com/wos/woscc/full-record/WOS:000623857100001.
[36] Liu, Yang, Li, Xin, Cheng, Jie, Zhou, Na, Zhang, Lingqian, Mao, Haiyang, Huang, Chengjun. SERS devices with "hedgehog-like" nanosphere arrays for detection of trace pesticides. JOURNAL OF INNOVATIVE OPTICAL HEALTH SCIENCES[J]. 2021, 14(4): 72-81, http://dx.doi.org/10.1142/S1793545821410054.
[37] Cheng, Jie, Liu, Yang, Mao, Haiyang, Zhao, Wenjie, Ye, Yifei, Zhao, Yang, Zhang, Lingqian, Li, Mingxiao, Huang, Chengjun. Wafer-level fabrication of 3D nanoparticles assembled nanopillars and click chemistry modification for sensitive SERS detection of trace carbonyl compounds. NANOTECHNOLOGY[J]. 2020, 31(26): https://www.webofscience.com/wos/woscc/full-record/WOS:000529405300001.
[38] Gui, Bo, Shi, Meng, Yang, Yudong, Mao, Haiyang, Long, Kewen, Chen, Dapeng, IEEE. A DROPLET PLATFORM BASED ON PARAHYDROPHOBIC NANOFORESTS FOR ON-SITE ION DETECTIONS. 2020 33RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2020)null. 2020, 1118-1121, [39] Cheng, Jie, Liu, Yang, Zhao, Yang, Zhang, Lina, Zhang, Lingqian, Mao, Haiyang, Huang, Chengjun. Nanotechnology-Assisted Isolation and Analysis of Circulating Tumor Cells on Microfluidic Devices. MICROMACHINES[J]. 2020, 11(8): https://doaj.org/article/25e25953f19b4f16a46d0f4ac2721c82.
[40] 赵倩, 杨宇东, 桂博, 毛海央, 李锐锐, 陈大鹏. 基于纳米锥森林结构的表面增强拉曼散射透明器件研究. 光谱学与光谱分析[J]. 2020, 40(4): 1168-1173, http://lib.cqvip.com/Qikan/Article/Detail?id=7101516471.
[41] 毛海央. 基于烛灰纳米颗粒层的高性能MEMS湿度传感器. 微纳电子技术. 2020, [42] 巩晨, 王新泽, 张荣跻, 刘敏, 马一楠, 刘轩, 阎海涛, 毛海央. 湿法刻蚀调节分裂栅存储器的浮栅层形貌研究. 微电子学[J]. 2020, 50(4): 574-578, http://lib.cqvip.com/Qikan/Article/Detail?id=7102817773.
[43] Li, Ruirui, Gui, Bo, Mao, Haiyang, Yang, Yudong, Chen, Dapeng, Xiong, Jijun. Self-Concentrated Surface-Enhanced Raman Scattering-Active Droplet Sensor with Three-Dimensional Hot Spots for Highly Sensitive Molecular Detection in Complex Liquid Environments. ACS SENSORS[J]. 2020, 5(11): 3420-3431, https://www.webofscience.com/wos/woscc/full-record/WOS:000595550100012.
[44] 陈贵东, 石梦, 毛海央, 熊继军, 陈大鹏. 基于纳米森林的电容式湿度传感器. 微纳电子技术[J]. 2020, 57(6): 462-467, http://lib.cqvip.com/Qikan/Article/Detail?id=7102102772.
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[108] Lei, Cheng, Mao, Haiyang, Ou, Wen, Xue, Chenyang, Tang, Licheng, Yang, Tao, Chen, Dapeng, Xiong, Jijun. A CMOS-MEMS IR device based on double-layer thermocouples. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS[J]. 2016, 22(5): 1163-1171, https://www.webofscience.com/wos/woscc/full-record/WOS:000374570300026.
[109] 毛海央, 欧文. 基于纳米化聚酰亚胺材料的MEMS湿度传感器的研究. 仪表技术与传感器[J]. 2016, 7-8,36, http://lib.cqvip.com/Qikan/Article/Detail?id=668373735.
[110] 毛海央, 欧文. Fabrication of Nanocone Forests with High Optical Absorption based on A Plasma Repolymerization Technique. 2016 IEEE 29th international conference on micro electro mechanical systems: MEMS 2016, Shanghai, China, 24-28 January 2016, pages 617-1267, v.2null. 2016, 1185-1188, http://159.226.55.106/handle/172511/16306.
[111] Haiyang Mao. Diversiform nanoforests: fabrication and applications. 2016 IEEE International Nanoelectronics Conference (INEC 2016). 2016, [112] Lei, Cheng, Mao, Haiyang, Yang, Yudong, Ou, Wen, Xue, Chenyang, Yao, Zong, Ming, Anjie, Wang, Weibing, Wang, Ling, Hu, Jiandong, Xiong, Jijun. A double-end-beam based infrared device fabricated using CMOS-MEMS process. SENSOR REVIEW[J]. 2016, 36(3): 240-248, http://159.226.55.106/handle/172511/16117.
[113] Liu Weibing, Ming Anjie, Tan Zhenxin, Tan Qiulin, Sun Xilong, Li Chaobo, Yang Chengyue, Mao Haiyang, Wang Weibing, Xiong Jijun, Chen Dapeng, IEEE. Development of MEMS IR source by compound release process with nano-scale silicon forest radiation layer. 2016 IEEE SENSORSnull. 2016, [114] Wu, Wengang, Mao, Haiyang, Han, Xiang, Xu, Jun, Wang, Weibing. Fabrication and characterization of SiO2/Si heterogeneous nanopillar arrays. NANOTECHNOLOGY[J]. 2016, 27(30): http://159.226.55.106/handle/172511/16113.
[115] Haiyang Mao. Nanofiber Forests as A Humidity-Sensitive Material,. IEEE MEMS 2015. 2015, [116] Weibing Wang. Fabrication of Patternable Nanopillars for Microfluidic SERS Devices based on Gap-Induced Uneven Etching. IEEE MEMS 2015. 2015, [117] Wu, Meng, Ou, Yi, Mao, Haiyang, Li, Zhigang, Liu, Ruiwen, Ming, Anjie, Ou, Wen. Multi-resonant wideband energy harvester based on a folded asymmetric M-shaped cantilever. AIP ADVANCES[J]. 2015, 5(7): https://doaj.org/article/17748bb981494cda9699576c5d686a3f.
[118] Tang L C, Mao H Y, Wang Y, Ou W, Wu W G, Tan Q L, Xiong J J, IEEE. FABRICATION OF NANOWIRES FROM POLYIMIDE FOR TRANSPARENT SERS DEVICES. 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)null. 2015, 1397-1400, http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000380461400348.
[119] 毛海央. 基于双层多晶硅材料的MEMS热电偶真空度传感器研究. 微纳电子技术. 2015, [120] Haiyang Mao. Fabrication of Transparent SERS Devices for Pesticide Detection. IEEE NEMS 2015. 2015, [121] Haiyang Mao. Nanofiber Forests as A Humidity-Sensitive Material,. IEEE MEMS 2015. 2015, [122] Weibing Wang. Fabrication of Patternable Nanopillars for Microfluidic SERS Devices based on Gap-Induced Uneven Etching. IEEE MEMS 2015. 2015, [123] Wu, Meng, Ou, Yi, Mao, Haiyang, Li, Zhigang, Liu, Ruiwen, Ming, Anjie, Ou, Wen. Multi-resonant wideband energy harvester based on a folded asymmetric M-shaped cantilever. AIP ADVANCES[J]. 2015, 5(7): https://doaj.org/article/17748bb981494cda9699576c5d686a3f.
[124] Tang L C, Mao H Y, Wang Y, Ou W, Wu W G, Tan Q L, Xiong J J, IEEE. FABRICATION OF NANOWIRES FROM POLYIMIDE FOR TRANSPARENT SERS DEVICES. 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)null. 2015, 1397-1400, http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000380461400348.
[125] 毛海央. 基于双层多晶硅材料的MEMS热电偶真空度传感器研究. 微纳电子技术. 2015, [126] Haiyang Mao. Fabrication of Transparent SERS Devices for Pesticide Detection. IEEE NEMS 2015. 2015, [127] 欧文. Design of thermopile-based infrared detectors with suspended absorber-thermopile bi-layers. Chinese Journal of Sensors and Actuators. 2014, [128] Bao AiDa, Mao HaiYang, Xiong JiJun, Chen ZhuoJie, Ou Wen, Chen DaPeng. Nanopillar-forest based surface-enhanced Raman scattering substrates. SCIENCE CHINA-INFORMATION SCIENCES[J]. 2014, 57(8): https://www.webofscience.com/wos/woscc/full-record/WOS:000339365500021.
[129] 陈媛婧, 毛海央, 谭秋林, 薛晨阳, 欧文, 陈大鹏, 熊继军. 一种基于悬浮吸收层的双层结构的热电堆红外探测器. 传感技术学报[J]. 2014, 27(6): 730-735, http://lib.cqvip.com/Qikan/Article/Detail?id=662065813.
[130] 欧文. Fabrication of polyimide sacrificial layers with inclined sidewalls based on RIE technology. AIP Advances. 2014, [131] Mao, Haiyang, Wu, Wengang, She, Didi, Sun, Gongchen, Lv, Pengpeng, Xu, Jun. Microfluidic Surface-Enhanced Raman Scattering Sensors Based on Nanopillar Forests Realized by an Oxygen-Plasma-Stripping-of-Photoresist Technique. SMALL[J]. 2014, 10(1): 127-134, https://www.webofscience.com/wos/woscc/full-record/WOS:000330624400015.
[132] Haiyang Mao. Nanofiber Forests with High Infrared Absorptance. IEEEMEMS2014. 2014, [133] 欧文. Design of thermopile-based infrared detectors with suspended absorber-thermopile bi-layers. Chinese Journal of Sensors and Actuators. 2014, [134] Bao AiDa, Mao HaiYang, Xiong JiJun, Chen ZhuoJie, Ou Wen, Chen DaPeng. Nanopillar-forest based surface-enhanced Raman scattering substrates. SCIENCE CHINA-INFORMATION SCIENCES[J]. 2014, 57(8): https://www.webofscience.com/wos/woscc/full-record/WOS:000339365500021.
[135] 陈媛婧, 毛海央, 谭秋林, 薛晨阳, 欧文, 陈大鹏, 熊继军. 一种基于悬浮吸收层的双层结构的热电堆红外探测器. 传感技术学报[J]. 2014, 27(6): 730-735, http://lib.cqvip.com/Qikan/Article/Detail?id=662065813.
[136] 欧文. Fabrication of polyimide sacrificial layers with inclined sidewalls based on RIE technology. AIP Advances. 2014, [137] Mao, Haiyang, Wu, Wengang, She, Didi, Sun, Gongchen, Lv, Pengpeng, Xu, Jun. Microfluidic Surface-Enhanced Raman Scattering Sensors Based on Nanopillar Forests Realized by an Oxygen-Plasma-Stripping-of-Photoresist Technique. SMALL[J]. 2014, 10(1): 127-134, https://www.webofscience.com/wos/woscc/full-record/WOS:000330624400015.
[138] Haiyang Mao. Nanofiber Forests with High Infrared Absorptance. IEEEMEMS2014. 2014, [139] Mao, Haiyang, Chen, Yuanjing, Ou, Yi, Ou, Wen, Xiong, Jijun, You, Chunjuan, Tan, Qiulin, Chen, Dapeng. Fabrication of nanopillar forests with high infrared absorptance based on rough poly-Si and spacer technology. JOURNAL OF MICROMECHANICS AND MICROENGINEERING[J]. 2013, 23(9): https://www.webofscience.com/wos/woscc/full-record/WOS:000323814100034.
[140] Mao, Haiyang, Chen, Yuanjing, Ou, Yi, Ou, Wen, Xiong, Jijun, You, Chunjuan, Tan, Qiulin, Chen, Dapeng. Fabrication of nanopillar forests with high infrared absorptance based on rough poly-Si and spacer technology. JOURNAL OF MICROMECHANICS AND MICROENGINEERING[J]. 2013, 23(9): https://www.webofscience.com/wos/woscc/full-record/WOS:000323814100034.
[141] Mao, Haiyang, Zhang, Yulong, Wu, Wengang, Sun, Gongchen, Xu, Jun. Realization of cylindrical submicron shell arrays by diffraction-introduced photolithography. JOURNALOFMICROMECHANICSANDMICROENGINEERING[J]. 2011, 21(8): https://www.webofscience.com/wos/woscc/full-record/WOS:000293163700004.
[142] Mao, Haiyang, Zhang, Yulong, Wu, Wengang, Sun, Gongchen, Xu, Jun. Realization of cylindrical submicron shell arrays by diffraction-introduced photolithography. JOURNALOFMICROMECHANICSANDMICROENGINEERING[J]. 2011, 21(8): https://www.webofscience.com/wos/woscc/full-record/WOS:000293163700004.
[143] Mao, Haiyang, Wu, Wengang, Zhang, Yulong, Zhai, Ge, Xu, Jun. Fabrication of high-compact nanowires using alternating photoresist ashing and spacer technology. JOURNAL OF MICROMECHANICS AND MICROENGINEERING[J]. 2010, 20(8): https://www.webofscience.com/wos/woscc/full-record/WOS:000280560600029.
[144] Mao, Haiyang, Wu, Wengang, Zhang, Yulong, Zhai, Ge, Xu, Jun. Fabrication of high-compact nanowires using alternating photoresist ashing and spacer technology. JOURNAL OF MICROMECHANICS AND MICROENGINEERING[J]. 2010, 20(8): https://www.webofscience.com/wos/woscc/full-record/WOS:000280560600029.
[145] Haiyang Mao. A novel micro- accelerometer with adjustable sensitivity based on resonant tunneling diodes. Chinese Physics B. 2009, [146] Jijun Xiong, Wendong Zhang, Haiyang Mao, Kaiqun Wang. Research on double-barrier resonant tunneling effect based stress measurement methods. SENSORS & ACTUATORS: A. PHYSICAL. 2009, 150(2): 169-174, http://dx.doi.org/10.1016/j.sna.2008.12.015.
[147] Mao, Haiyang, Wu, Di, Wu, Wengang, Xu, Jun, Hao, Yilong. The fabrication of diversiform nanostructure forests based on residue nanomasks synthesized by oxygen plasma removal of photoresist. NANOTECHNOLOGY[J]. 2009, 20(44): https://www.webofscience.com/wos/woscc/full-record/WOS:000270562900010.
[148] 熊继军, 毛海央, 张文栋, 王楷群. A novel micro-accelerometer with adjustable sensitivity based on resonant tunnelling diodes. 中国物理：英文版[J]. 2009, 1242-1247, http://lib.cqvip.com/Qikan/Article/Detail?id=29794244.
[149] Haiyang Mao. A novel micro- accelerometer with adjustable sensitivity based on resonant tunneling diodes. Chinese Physics B. 2009, [150] Jijun Xiong, Wendong Zhang, Haiyang Mao, Kaiqun Wang. Research on double-barrier resonant tunneling effect based stress measurement methods. SENSORS & ACTUATORS: A. PHYSICAL. 2009, 150(2): 169-174, http://dx.doi.org/10.1016/j.sna.2008.12.015.
[151] Mao, Haiyang, Wu, Di, Wu, Wengang, Xu, Jun, Hao, Yilong. The fabrication of diversiform nanostructure forests based on residue nanomasks synthesized by oxygen plasma removal of photoresist. NANOTECHNOLOGY[J]. 2009, 20(44): https://www.webofscience.com/wos/woscc/full-record/WOS:000270562900010.
[152] 熊继军, 毛海央, 张文栋, 王楷群. A novel micro-accelerometer with adjustable sensitivity based on resonant tunnelling diodes. 中国物理：英文版[J]. 2009, 1242-1247, http://lib.cqvip.com/Qikan/Article/Detail?id=29794244.

科研活动

科研项目

（ 1 ）纳米纤维森林结构制备方法及其红外吸收特性研究, 负责人, 国家任务, 2015-01--2017-12
（ 2 ）集成纳米结构的光源与多敏感元一体化的红外气体传感器, 参与, 国家任务, 2014-01--2018-12
（ 3 ）纳米森林结构制备方法及其MEMS红外传感器应用基础研究, 负责人, 地方任务, 2014-01--2016-12
（ 4 ）基于MEMS热电堆红外气体传感器的水果成熟度便携检测系统研究, 负责人, 地方任务, 2014-01--2016-12
（ 5 ）基于纳米森林结构的SERS器件技术开发, 负责人, 企业委托, 2016-01--2016-08
（ 6 ）高性能MEMS热电堆红外探测器研究, 负责人, 企业委托, 2016-01--2016-08
（ 7 ）宽光谱高吸收纳米光学材料研究, 负责人, 其他任务, 2017-06--2020-12
（ 8 ）复合纳米森林的等离激元多重杂化光吸收特性基础研究, 负责人, 国家任务, 2018-01--2021-12
（ 9 ） MEMS传感器和纳米技术, 负责人, 中国科学院计划, 2018-01--2021-12
（ 10 ）电容式单片集成MEMS传感器工艺应用验证, 负责人, 国家任务, 2019-06--2022-06
（ 11 ） MEMS热电堆的模组开发, 负责人, 地方任务, 2019-01--2022-12
（ 12 ）生物传感器, 负责人, 国家任务, 2019-01--2021-12
（ 13 ）泄漏检测, 负责人, 国家任务, 2019-06--2020-12
（ 14 ）纳米集成智能传感器, 负责人, 中国科学院计划, 2023-01--2025-12
（ 15 ） MEMS传感器研发, 负责人, 企业委托, 2022-01--2023-12

科研项目

（ 1 ）纳米纤维森林结构制备方法及其红外吸收特性研究, 负责人, 国家任务, 2015-01--2017-12
（ 2 ）集成纳米结构的光源与多敏感元一体化的红外气体传感器, 参与, 国家任务, 2014-01--2018-12
（ 3 ）纳米森林结构制备方法及其MEMS红外传感器应用基础研究, 负责人, 地方任务, 2014-01--2016-12
（ 4 ）基于MEMS热电堆红外气体传感器的水果成熟度便携检测系统研究, 负责人, 地方任务, 2014-01--2016-12
（ 5 ）基于纳米森林结构的SERS器件技术开发, 负责人, 企业委托, 2016-01--2016-08
（ 6 ）高性能MEMS热电堆红外探测器研究, 负责人, 企业委托, 2016-01--2016-08
（ 7 ）宽光谱高吸收纳米光学材料研究, 负责人, 其他任务, 2017-06--2020-12
（ 8 ）复合纳米森林的等离激元多重杂化光吸收特性基础研究, 负责人, 国家任务, 2018-01--2021-12
（ 9 ） MEMS传感器和纳米技术, 负责人, 中国科学院计划, 2018-01--2021-12
（ 10 ）电容式单片集成MEMS传感器工艺应用验证, 负责人, 国家任务, 2019-06--2022-06
（ 11 ） MEMS热电堆的模组开发, 负责人, 地方任务, 2019-01--2022-12
（ 12 ）生物传感器, 负责人, 国家任务, 2019-01--2021-12
（ 13 ）泄漏检测, 负责人, 国家任务, 2019-06--2020-12
（ 14 ）纳米集成智能传感器, 负责人, 中国科学院计划, 2023-01--2025-12
（ 15 ） MEMS传感器研发, 负责人, 企业委托, 2022-01--2023-12

参与会议

（1）BIO-INSPIRED SUPERHYDROPHILIC MICROPATTERNS FOR DETECTION OF TRACE MOLECULES IN FOG   李锐锐等   2020-01-18
（2）Broadband antireflective quartz glasses with double-side nanocone forests   杨宇东等   2020-01-18
（3）A fiber-Si3N4 composite nanoforest with high 7.6 to 11.6um absorption for MEMS infrared sensors   张琛琛等   2020-01-18
（4）A droplet platform based on parahydrophobic nanoforests for on-site ion detections   桂博，石梦等   2020-01-18
（5）A flexible humidity sensor using candle soot as sensitive material   陈贵东等   2019-06-23
（6）Fabrication and morphology regulation of nanowire forests for transparent self-driving bio-detection devices   杨宇东等   2019-06-23
（7）Fabrication of quartz nanocone forests for transparent surface-enhanced raman scattering devices   赵倩等   2019-06-23
（8）A Crystal-clear SERS-droplet with Evenly Distributed 3D hot-spots   2019-01-27
（9）A Highly Sensitive SERS Device Based on A PDMS-CVD Prepared Substrate   2018-08-05
（10）A highly SERS-active and flexible droplet based on carbon-metal composite nanoparticles   2017-06-18
（11）Candle soot with broadband high absorptance for applications of infrared sensors   2017-06-18
（12）Hybrid nanopillar forests with broadband high absorptance   2017-06-18
（13）Optical Features of Nanowire Forests Generated Using Plasma Repolymerization   2017-04-09
（14）Hybrid nanocone forests with high absorption in full-solar spectrum for solar cell applications   2016-12-06
（15）Fabrication of Nanocone Forests with High Optical Absorption based on A Plasma Repolymerization Technique   26. Y. Wang, L.C. Tang, H.Y. Mao*, C. Lei, W. Ou, J.J. Xiong   2016-05-13
（16）Fabrication of Nanowires from Polyimide for Transparent SERS Devices   27. L.C. Tang, H.Y. Mao*, Y. Wang, W. Ou, W.G. Wu, J. J. Xiong, Q. L. Tan   2016-05-13
（17）Fabrication of Transparent SERS Devices for Pesticide Detection   28. L.C. Tang, Q. L. Tan, J. J. Xiong, H.Y. Mao*,W. Ou, A. D. Bao   2016-05-13
（18）Nanofiber Forests as A Humidity-Sensitive Material   29. C. Lei, L.C. Tang, H.Y. Mao*, Y. Wang, J.J. Xiong , W. Ou, W.B. Wang, A.J. Ming, Q.L. Tan, D.P. Chen and D. Li   2016-05-13
（19）Fabrication of Patternable Nanopillars for Microfluidic SERS Devices based on Gap-Induced Uneven Etching   30. Y. Wang, L.C. Tang, H.Y. Mao*, C. Lei, W. Ou, J.J. Xiong , W.B. Wang, A.J. Ming, Q.L. Tan, D.P. Chen and D. Li   2016-05-13
（20）Nanofiber Forests with High Infrared Absorptance   31. H.Y. Mao*, C. Lei, Y. J. Chen, Z. J. Chen, W. Ou, W. G. Wu, A. J. Ming, and D. P. Chen   2016-05-13
（21）Microfluidic Surface-enhanced Raman Scattering Sensors for Online Monitoring Trace Chemical Mixing and Reaction   34. H.Y. Mao, P.P. Lv and W.G. Wu   2016-05-13
（22）Silicon Nanopillar-Forest Based Microfluidic Surface-Enhanced Raman Scattering Devices   35. H.Y. Mao, W.G. Wu, Y.L. Zhang, P.P. Lv, C. Qian, and J. Xu   2016-05-13
（23）SERS-active substrates based on metallic nanocracks on PDMS   36. Haiyang Mao, Chuang Qian, Pengpeng Lv, and Wengang Wu   2016-05-13
（24）Dualfunctional MEMS Optical Device with Compound Electrostatic Actuators for Compact and Flexible Photonic Networks   38. Qinghua Chen, Wengang Wu, Haiyang Mao, Bochao Du, Li Li, Yilong Hao   2016-05-13
（25）Nanofiber-based Surface Microfluidic Structures for Cell and Nanoparticle Patterning   39. Haiyang Mao, Wengang Wu, Qinghai Liu, Yulong Zhang, Yan Li   2016-05-13
（26）Fabrication of nanofiber-based SERS-active substrates by oxygen plasma removal of SU-8 photoresist   40. Haiyang Mao, Yulong Zhang, Wengang Wu, Chenyang Xue   2016-05-13
（27）Diversiform nanoforests: fabrication and applications   H. Y. Mao*, Y. D. Yang, Y. Wang, L. C. Tang, C. Lei1, J. J. Xiong, W. B. Wang   2016-05-13
（28）Fabrication of Compact Collateral Silicon Nanowires Based on Continuously Alternating Deposition   D. Wu, H.Y. Mao, W.G. Wu   2016-05-10
（29）Fabrication of orderly and uniform nanotip arrays based on oxygen plasma etching of photoresist   Y.L. Zhang, H.Y. Mao, and W.G. Wu   2016-05-04
（30）Fabrication of Nanopillars Based on Silicon Oxide Nanopatterns Synthesized in Oxygen Plasma Removal of Photoresist   H.Y. Mao, D. Wu, W.G. Wu, J. Xu, H.X. Zhang and Y.L. Hao   2016-05-02

指导学生

已指导学生

朱梦华硕士研究生 085209-集成电路工程

石梦硕士研究生 085208-电子与通信工程

刘城硕士研究生 085209-集成电路工程

赵倩硕士研究生 080903-微电子学与固体电子学

桂博硕士研究生 085209-集成电路工程

王新泽硕士研究生 085208-电子与通信工程

秦冲硕士研究生 085208-电子与通信工程

巩晨硕士研究生 085208-电子与通信工程

李宏博博士研究生 080903-微电子学与固体电子学

刘洋博士研究生 080903-微电子学与固体电子学

现指导学生

陈贵东博士研究生 080903-微电子学与固体电子学

闻静博士研究生 080903-微电子学与固体电子学

黄若杨硕士研究生 085400-电子信息

赵亚谦硕士研究生 085400-电子信息

向泽清硕士研究生 085400-电子信息

许韶行博士研究生 080903-微电子学与固体电子学

赵越芳博士研究生 080903-微电子学与固体电子学

蒲永龙硕士研究生 085400-电子信息

刘凤宇硕士研究生 085400-电子信息

李茂博士研究生 080903-微电子学与固体电子学

郭启明硕士研究生 080903-微电子学与固体电子学

张起睿硕士研究生 080903-微电子学与固体电子学