基本信息
毛海央  女  硕导  中国科学院微电子研究所
电子邮件: maohaiyang@ime.ac.cn
通信地址: 北京市朝阳区北土城西路3号
邮政编码:

研究领域

微机电系统(MEMS)技术;纳机电系统(NEMS)技术;微纳加工技术;红外传感器;表面增强拉曼散射(SERS)技术;微流控;太阳能电池;光吸收纳米结构

招生信息

硕士研究生2名,研究方向为光学纳米材料与结构

招生专业
080903-微电子学与固体电子学
085209-集成电路工程
085208-电子与通信工程
招生方向
集成电路工程
物联网和传感器技术
电子与通信工程

教育背景

2007-09--2011-07   北京大学   信息科学与技术学院微电子学系,研究生/博士学位
2004-09--2007-07   中北大学   电子科学与技术系,研究生/硕士学位
2000-09--2004-07   中北大学   电子工程系,本科/学士学位

专利与奖励

2014.01  中国科学院微电子研究所“年度十佳先进工作者”;

2014.01  中国科学院微电子器件与集成技术重点实验室“年度先进工作者”

2014.01  江苏物联网研究发展中心“年度先进工作者”

2015.01  中国科学院微电子器件与集成技术重点实验室“年度先进工作者”

2015.01  江苏物联网研究发展中心“年度先进工作者”

2016.07  中国科学院微电子研究所“优秀共产党员”

专利成果
( 1 ) 一种纳米柱森林的加工方法, 发明, 2011, 第 1 作者, 专利号: 200910080158
( 2 ) 一种多样性纳米结构的加工方法, 发明, 2012, 第 1 作者, 专利号: 200910083938
( 3 ) 一种基于表面增强拉曼散射活性基底的微流控检测器件, 发明, 2012, 第 1 作者, 专利号: 201010117672.2
( 4 ) 微流控表面增强拉曼散射检测器件及其制备方法与应用, 发明, 2015, 第 1 作者, 专利号: 2011101310321.1
( 5 ) 一种纳米柱针森林结构的加工方法, 发明, 2014, 第 1 作者, 专利号: 201210265870.2
( 6 ) 一种高性能MEMS热电堆红外探测器结构及其制备方法, 发明, 2014, 第 1 作者, 专利号: 201210303727.8
( 7 ) 基于黒硅的高性能MEMS热电堆红外探测器及其制备方法, 发明, 2014, 第 1 作者, 专利号: 201210303746.0
( 8 ) 微纳尺度材料赛贝克系数的测量机构及其制备方法, 发明, 2014, 第 1 作者, 专利号: 201310002129.1
( 9 ) 微纳尺度材料赛贝克系数测量机构的制备方法, 发明, 2015, 第 1 作者, 专利号: 201310002846.4
( 10 ) 高性能MEMS热电堆红外探测器结构及其制备方法, 发明, 2015, 第 1 作者, 专利号: 201310067012.1
( 11 ) 一种PM2.5过滤结构及其制备方法, 发明, 2014, 第 1 作者, 专利号: 201310066827.8
( 12 ) 制热型MEMS热电堆红外探测器结构及其制备方法, 发明, 2015, 第 1 作者, 专利号: 201310183551.1
( 13 ) 厨房余热收集装置, 实用新型, 2013, 第 1 作者, 专利号: 201320281936.7
( 14 ) 一种微凹面镜的制备方法, 发明, 2016, 第 1 作者, 专利号: 201310308263.4
( 15 ) PM2.5检测装置及其制造方法, 发明, 2015, 第 1 作者, 专利号: 201310400323.5
( 16 ) 基于红外气体传感器的水果成熟度检测系统, 发明, 2015, 第 1 作者, 专利号: 201310544528.0
( 17 ) 一种MEMS湿度传感器及制备方法, 发明, 2016, 第 1 作者, 专利号: 201310674068.3
( 18 ) 一种细颗粒物过滤结构及其制备方法, 发明, 2016, 第 3 作者, 专利号: 201310717668.3
( 19 ) 食用油检测装置和方法, 发明, 2014, 第 1 作者, 专利号: 201410193861.6
( 20 ) 气体检测装置及系统和气体检测方法, 发明, 2014, 第 1 作者, 专利号: 201410234613.1
( 21 ) 纳米柱/针森林结构的图形化加工方法, 发明, 2015, 第 1 作者, 专利号: 201410609901.0
( 22 ) 微流控表面增强拉曼散射透明器件结构及其制备方法, 发明, 2014, 第 1 作者, 专利号: 201410831060.8
( 23 ) 一种SERS基底及其制备方法, 发明, 2015, 第 1 作者, 专利号: 201510338662.4
( 24 ) 一种纳米结构及其制备方法, 发明, 2015, 第 1 作者, 专利号: 201510338662.4
( 25 ) 一种纳米结构及其制备方法, 发明, 2015, 第 1 作者, 专利号: 201510338283.5
( 26 ) 内嵌式纳米森林结构的图形化制备方法, 发明, 2015, 第 1 作者, 专利号: 201510808468.8
( 27 ) SERS活性液滴、制备方法及分子检测方法, 发明, 2017, 第 2 作者, 专利号: 2017011800209830
( 28 ) 一种红外吸收结构及其与红外传感器件的集成方法, 发明, 2017, 第 2 作者, 专利号: 201710032686.6
( 29 ) SERS活性液滴、制备方法及分子检测方法, 发明, 2017, 第 2 作者, 专利号: 2017011800209830
( 30 ) 一种红外吸收结构及其与红外传感器件的集成方法, 发明, 2017, 第 2 作者, 专利号: 201710032686.6
( 31 ) 一种微流道结构及其制备方法, 发明, 2017, 第 1 作者, 专利号: 201710750856.4
( 32 ) 黑硅、制备工艺及基于黑硅的MEMS器件制备方法, 发明, 2017, 第 1 作者, 专利号: 201710871041.1
( 33 ) MEMS光学器件、光吸收纳米结构及其制备方法, 发明, 2017, 第 2 作者, 专利号: 201711218812.3
( 34 ) SERS活性基底及其制备方法以及痕量被测试剂分子富集方法, 发明, 2018, 第 1 作者, 专利号: 201811120124.8
( 35 ) 一种可扩展倍比稀释微流控芯片、制备方法和稀释方法, 发明, 2018, 第 2 作者, 专利号: 201811480673.6
( 36 ) 表面增强拉曼散射基底、制备方法及3D富集与检测方法, 发明, 2019, 第 2 作者, 专利号: 201910107266.9
( 37 ) 纳米森林结构的制备方法及纳米森林结构的调控方法, 发明, 2019, 第 2 作者, 专利号: 201910304292.0

出版信息

发表论文
[1] Li, Mao, Shi, Meng, Wang, Bin, Zhang, Chenchen, Yang, Shuai, Yang, Yudong, Zhou, Na, Guo, Xin, Chen, Dapeng, Li, Shaojuan, Mao, Haiyang, Xiong, Jijun. Quasi-Ordered Nanoforests with Hybrid Plasmon Resonances for Broadband Absorption and Photodetection. ADVANCED FUNCTIONAL MATERIALS[J]. 2021, 31(38): http://dx.doi.org/10.1002/adfm.202102840.
[2] Chen, Guidong, Liu, Yang, Shi, Meng, Zhou, Na, Dai, Xin, Mao, Haiyang, Chen, Dapeng. Performance Enhanced Humidity Sensor by In-Situ Integration of Nanoforests. IEEE ELECTRON DEVICE LETTERS[J]. 2021, 42(4): 585-588, http://dx.doi.org/10.1109/LED.2021.3062063.
[3] Cheng, Jie, Liu, Yang, Mao, Haiyang, Zhao, Wenjie, Ye, Yifei, Zhao, Yang, Zhang, Lingqian, Li, Mingxiao, Huang, Chengjun. Wafer-level fabrication of 3D nanoparticles assembled nanopillars and click chemistry modification for sensitive SERS detection of trace carbonyl compounds. NANOTECHNOLOGY[J]. 2020, 31(26): https://www.webofscience.com/wos/woscc/full-record/WOS:000529405300001.
[4] 毛海央. 基于烛灰纳米颗粒层的高性能MEMS湿度传感器. 微纳电子技术. 2020, [5] 陈贵东, 石梦, 毛海央, 熊继军, 陈大鹏. 基于纳米森林的电容式湿度传感器. 微纳电子技术. 2020, 57(6): 462-467, http://lib.cqvip.com/Qikan/Article/Detail?id=7102102772.
[6] Li, Ruirui, Gui, Bo, Mao, Haiyang, Yang, Yudong, Chen, Dapeng, Xiong, Jijun. Self-Concentrated Surface-Enhanced Raman Scattering-Active Droplet Sensor with Three-Dimensional Hot Spots for Highly Sensitive Molecular Detection in Complex Liquid Environments. ACS SENSORS[J]. 2020, 5(11): 3420-3431, https://www.webofscience.com/wos/woscc/full-record/WOS:000595550100012.
[7] Ruirui Li, Haiyang Mao, Meng Shi, Qian Zhao, Dapeng Chen, Jijun Xiong. Parahydrophobic 3D nanohybrid substrates with two pathways of molecular enrichment and multilevel plasmon hybridization. Sensors and Actuators: B. Chemical. 2020, 320: [8] Qin, Chong, Li, Yi, Mao, Haiyang. Effect of Different PBO-Based RDL Structures on Chip-Package Interaction Reliability of Wafer Level Package. IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY[J]. 2020, 20(3): 524-529, https://www.webofscience.com/wos/woscc/full-record/WOS:000567396800008.
[9] 毛海央. 基于纳米锥森林结构的表面增强拉曼散射透明器件研. 光谱学与光谱分析. 2020, [10] Zhou, Jie, Liu, Bin, Qi, Baojin, Wei, Jinjia, Mao, Haiyang. Experimental investigations of bubble behaviors and heat transfer performance on micro/nanostructure surfaces. INTERNATIONAL JOURNAL OF THERMAL SCIENCES[J]. 2019, 135: 133-147, http://dx.doi.org/10.1016/j.ijthermalsci.2018.09.013.
[11] 刘洋, 毛海央, 范文兵, 杨潇楠, 黄成军, 王玮冰. 用于抗菌药物敏感实验的倍比稀释微流控芯片. 微纳电子技术. 2019, 279-284, http://lib.cqvip.com/Qikan/Article/Detail?id=66688481504849574852484853.
[12] Li, Ruirui, Mao, Haiyang, Zhu, Menghua, Yang, Yudong, Xiong, Jijun, Wang, Weibing. Facile preparation of broadband absorbers based on patternable candle soot for applications of optical sensors. SENSORS AND ACTUATORS A-PHYSICAL[J]. 2019, 285: 111-117, http://dx.doi.org/10.1016/j.sna.2018.10.047.
[13] 刘洋, 毛海央, 范文兵, 杨潇楠, 黄成军, 程洁, 王玮冰. 一种挡板结构被动式微混合器的设计与仿真. 微纳电子技术. 2018, 55(4): 258-264, http://lib.cqvip.com/Qikan/Article/Detail?id=674851616.
[14] Yang, Yudong, Mao, Haiyang, Xiong, Jijun, Jia, Yuncong, Li, Ruirui, Wang, Weibing. Optical Features of Nanowire Forests Prepared by a Plasma Repolymerization Technique. IEEE TRANSACTIONS ON NANOTECHNOLOGY[J]. 2018, 17(4): 719-722, https://www.webofscience.com/wos/woscc/full-record/WOS:000438087000019.
[15] 杨宇东, 毛海央, 李锐锐, 贾云丛, 熊继军, 王玮冰. 双层复合纳米森林结构的制备及其宽光谱高吸收光学特性研究. 红外与毫米波学报[J]. 2018, 37(2): 246-250, http://lib.cqvip.com/Qikan/Article/Detail?id=7000633081.
[16] Li, Ruirui, Mao, Haiyang, Yang, Yudong, Jia, Yuncong, Xue, Huiqiong, Xiong, Jijun, Wang, Weibing, IEEE. CANDLE SOOT WITH BROADBAND HIGH ABSORPTANCE FOR APPLICATIONS OF INFRARED SENSORS. 2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)null. 2017, 882-885, http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000426701400218.
[17] Yang, Y D, Mao, H Y, Xiong, J J, Jia, Y C, Lp, R R, Ming, A J, Wang, W B, IEEE. Optical Features of Nanowire Forests Generated Using Plasma Repolymerization. 2017 IEEE 12TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS)null. 2017, 452-455, [18] Mao, Haiyang, Li, Ruirui, Huang, Chengjun, Jia, Yuncong, Wang, Weibing, Ming, Anjie, Xiong, Jijun, IEEE. A HIGHLY SERS-ACTIVE AND FLEXIBLE DROPLET BASED ON CARBON-METAL COMPOSITE NANOPARTICLES. 2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)null. 2017, 1344-1347, http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000426701400333.
[19] Mao, Haiyang, Huang, Chengjun, Wu, Wengang, Xue, Mei, Yang, Yudong, Xiong, Jijun, Ming, Anjie, Wang, Weibing. Wafer-level fabrication of nanocone forests by plasma repolymerization technique for surface-enhanced Raman scattering devices. APPLIED SURFACE SCIENCE[J]. 2017, 396: 1085-1091, http://dx.doi.org/10.1016/j.apsusc.2016.11.092.
[20] Yang, Yudong, Mao, Haiyang, Jia, Yuncong, Xue, Huiqiong, Xiong, Jijun, Wang, Weibing, Jiao, Binbin, IEEE. HYBRID NANOPILLAR FORESTS WITH BROADBAND HIGH ABSORPTANCE. 2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)null. 2017, 1332-1335, http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000426701400330.
[21] Anjie Ming, Weibing Wang, Haiyang Mao, Yudong Yang, Jijun Xiong. Hybrid nanocone forests with high absorption in full-solar spectrum for solar cell applications. Institute of Physics Publishing Ltd.. 2016, http://oa.las.ac.cn/oainone/service/browseall/read1?ptype=JA&workid=JA201904045532279ZK.
[22] Lei, Cheng, Mao, Haiyang, Ou, Wen, Xue, Chenyang, Tang, Licheng, Yang, Tao, Chen, Dapeng, Xiong, Jijun. A CMOS-MEMS IR device based on double-layer thermocouples. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS[J]. 2016, 22(5): 1163-1171, https://www.webofscience.com/wos/woscc/full-record/WOS:000374570300026.
[23] 毛海央, 欧文. Fabrication of Nanocone Forests with High Optical Absorption based on A Plasma Repolymerization Technique. 2016 IEEE 29th international conference on micro electro mechanical systems: MEMS 2016, Shanghai, China, 24-28 January 2016, pages 617-1267, v.2null. 2016, 1185-1188, http://159.226.55.106/handle/172511/16306.
[24] 毛海央, 欧文. 基于纳米化聚酰亚胺材料的MEMS湿度传感器的研究. 仪表技术与传感器. 2016, 7-8,36, http://lib.cqvip.com/Qikan/Article/Detail?id=668373735.
[25] Haiyang Mao. Diversiform nanoforests: fabrication and applications. 2016 IEEE International Nanoelectronics Conference (INEC 2016). 2016, [26] Lei, Cheng, Mao, Haiyang, Yang, Yudong, Ou, Wen, Xue, Chenyang, Yao, Zong, Ming, Anjie, Wang, Weibing, Wang, Ling, Hu, Jiandong, Xiong, Jijun. A double-end-beam based infrared device fabricated using CMOS-MEMS process. SENSOR REVIEW[J]. 2016, 36(3): 240-248, http://159.226.55.106/handle/172511/16117.
[27] Wu, Wengang, Mao, Haiyang, Han, Xiang, Xu, Jun, Wang, Weibing. Fabrication and characterization of SiO2/Si heterogeneous nanopillar arrays. NANOTECHNOLOGY[J]. 2016, 27(30): http://159.226.55.106/handle/172511/16113.
[28] Haiyang Mao. Nanofiber Forests as A Humidity-Sensitive Material,. IEEE MEMS 2015. 2015, [29] Weibing Wang. Fabrication of Patternable Nanopillars for Microfluidic SERS Devices based on Gap-Induced Uneven Etching. IEEE MEMS 2015. 2015, [30] Wu, Meng, Ou, Yi, Mao, Haiyang, Li, Zhigang, Liu, Ruiwen, Ming, Anjie, Ou, Wen. Multi-resonant wideband energy harvester based on a folded asymmetric M-shaped cantilever. AIP ADVANCES[J]. 2015, 5(7): https://doaj.org/article/17748bb981494cda9699576c5d686a3f.
[31] Tang L C, Mao H Y, Wang Y, Ou W, Wu W G, Tan Q L, Xiong J J, IEEE. FABRICATION OF NANOWIRES FROM POLYIMIDE FOR TRANSPARENT SERS DEVICES. 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)null. 2015, 1397-1400, http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000380461400348.
[32] 毛海央. 基于双层多晶硅材料的MEMS热电偶真空度传感器研究. 微纳电子技术. 2015, [33] Haiyang Mao. Fabrication of Transparent SERS Devices for Pesticide Detection. IEEE NEMS 2015. 2015, [34] 欧文. Design of thermopile-based infrared detectors with suspended absorber-thermopile bi-layers. Chinese Journal of Sensors and Actuators. 2014, [35] Bao AiDa, Mao HaiYang, Xiong JiJun, Chen ZhuoJie, Ou Wen, Chen DaPeng. Nanopillar-forest based surface-enhanced Raman scattering substrates. SCIENCE CHINA-INFORMATION SCIENCES[J]. 2014, 57(8): https://www.webofscience.com/wos/woscc/full-record/WOS:000339365500021.
[36] Mao, Haiyang, Wu, Wengang, She, Didi, Sun, Gongchen, Lv, Pengpeng, Xu, Jun. Microfluidic Surface-Enhanced Raman Scattering Sensors Based on Nanopillar Forests Realized by an Oxygen-Plasma-Stripping-of-Photoresist Technique. SMALL[J]. 2014, 10(1): 127-134, https://www.webofscience.com/wos/woscc/full-record/WOS:000330624400015.
[37] 欧文. Fabrication of polyimide sacrificial layers with inclined sidewalls based on RIE technology. AIP Advances. 2014, [38] Haiyang Mao. Nanofiber Forests with High Infrared Absorptance. IEEE MEMS 2014. 2014, [39] Mao, Haiyang, Chen, Yuanjing, Ou, Yi, Ou, Wen, Xiong, Jijun, You, Chunjuan, Tan, Qiulin, Chen, Dapeng. Fabrication of nanopillar forests with high infrared absorptance based on rough poly-Si and spacer technology. JOURNAL OF MICROMECHANICS AND MICROENGINEERING[J]. 2013, 23(9): https://www.webofscience.com/wos/woscc/full-record/WOS:000323814100034.
[40] Mao, Haiyang, Zhang, Yulong, Wu, Wengang, Sun, Gongchen, Xu, Jun. Realization of cylindrical submicron shell arrays by diffraction-introduced photolithography. JOURNAL OF MICROMECHANICS AND MICROENGINEERING[J]. 2011, 21(8): https://www.webofscience.com/wos/woscc/full-record/WOS:000293163700004.
[41] Mao, Haiyang, Wu, Wengang, Zhang, Yulong, Zhai, Ge, Xu, Jun. Fabrication of high-compact nanowires using alternating photoresist ashing and spacer technology. JOURNAL OF MICROMECHANICS AND MICROENGINEERING[J]. 2010, 20(8): https://www.webofscience.com/wos/woscc/full-record/WOS:000280560600029.
[42] Haiyang Mao. A novel micro- accelerometer with adjustable sensitivity based on resonant tunneling diodes. Chinese Physics B. 2009, [43] Jijun Xiong, Wendong Zhang, Haiyang Mao, Kaiqun Wang. Research on double-barrier resonant tunneling effect based stress measurement methods. Sensors & Actuators: A. Physical. 2009, 150(2): 169-174, http://dx.doi.org/10.1016/j.sna.2008.12.015.
[44] Mao, Haiyang, Wu, Di, Wu, Wengang, Xu, Jun, Hao, Yilong. The fabrication of diversiform nanostructure forests based on residue nanomasks synthesized by oxygen plasma removal of photoresist. NANOTECHNOLOGY[J]. 2009, 20(44): https://www.webofscience.com/wos/woscc/full-record/WOS:000270562900010.

出版信息

   
发表论文
[1] Li, Mao, Shi, Meng, Wang, Bin, Zhang, Chenchen, Yang, Shuai, Yang, Yudong, Zhou, Na, Guo, Xin, Chen, Dapeng, Li, Shaojuan, Mao, Haiyang, Xiong, Jijun. Quasi-Ordered Nanoforests with Hybrid Plasmon Resonances for Broadband Absorption and Photodetection. ADVANCED FUNCTIONAL MATERIALS[J]. 2021, 31(38): http://dx.doi.org/10.1002/adfm.202102840.
[2] Chen, Guidong, Liu, Yang, Shi, Meng, Zhou, Na, Dai, Xin, Mao, Haiyang, Chen, Dapeng. Performance Enhanced Humidity Sensor by In-Situ Integration of Nanoforests. IEEE ELECTRON DEVICE LETTERS[J]. 2021, 42(4): 585-588, http://dx.doi.org/10.1109/LED.2021.3062063.
[3] Cheng, Jie, Liu, Yang, Mao, Haiyang, Zhao, Wenjie, Ye, Yifei, Zhao, Yang, Zhang, Lingqian, Li, Mingxiao, Huang, Chengjun. Wafer-level fabrication of 3D nanoparticles assembled nanopillars and click chemistry modification for sensitive SERS detection of trace carbonyl compounds. NANOTECHNOLOGY[J]. 2020, 31(26): https://www.webofscience.com/wos/woscc/full-record/WOS:000529405300001.
[4] 毛海央. 基于烛灰纳米颗粒层的高性能MEMS湿度传感器. 微纳电子技术. 2020, [5] 陈贵东, 石梦, 毛海央, 熊继军, 陈大鹏. 基于纳米森林的电容式湿度传感器. 微纳电子技术. 2020, 57(6): 462-467, http://lib.cqvip.com/Qikan/Article/Detail?id=7102102772.
[6] Li, Ruirui, Gui, Bo, Mao, Haiyang, Yang, Yudong, Chen, Dapeng, Xiong, Jijun. Self-Concentrated Surface-Enhanced Raman Scattering-Active Droplet Sensor with Three-Dimensional Hot Spots for Highly Sensitive Molecular Detection in Complex Liquid Environments. ACS SENSORS[J]. 2020, 5(11): 3420-3431, https://www.webofscience.com/wos/woscc/full-record/WOS:000595550100012.
[7] Ruirui Li, Haiyang Mao, Meng Shi, Qian Zhao, Dapeng Chen, Jijun Xiong. Parahydrophobic 3D nanohybrid substrates with two pathways of molecular enrichment and multilevel plasmon hybridization. Sensors and Actuators: B. Chemical. 2020, 320: [8] Qin, Chong, Li, Yi, Mao, Haiyang. Effect of Different PBO-Based RDL Structures on Chip-Package Interaction Reliability of Wafer Level Package. IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY[J]. 2020, 20(3): 524-529, https://www.webofscience.com/wos/woscc/full-record/WOS:000567396800008.
[9] 毛海央. 基于纳米锥森林结构的表面增强拉曼散射透明器件研. 光谱学与光谱分析. 2020, [10] Zhou, Jie, Liu, Bin, Qi, Baojin, Wei, Jinjia, Mao, Haiyang. Experimental investigations of bubble behaviors and heat transfer performance on micro/nanostructure surfaces. INTERNATIONAL JOURNAL OF THERMAL SCIENCES[J]. 2019, 135: 133-147, http://dx.doi.org/10.1016/j.ijthermalsci.2018.09.013.
[11] 刘洋, 毛海央, 范文兵, 杨潇楠, 黄成军, 王玮冰. 用于抗菌药物敏感实验的倍比稀释微流控芯片. 微纳电子技术. 2019, 279-284, http://lib.cqvip.com/Qikan/Article/Detail?id=66688481504849574852484853.
[12] Li, Ruirui, Mao, Haiyang, Zhu, Menghua, Yang, Yudong, Xiong, Jijun, Wang, Weibing. Facile preparation of broadband absorbers based on patternable candle soot for applications of optical sensors. SENSORS AND ACTUATORS A-PHYSICAL[J]. 2019, 285: 111-117, http://dx.doi.org/10.1016/j.sna.2018.10.047.
[13] 刘洋, 毛海央, 范文兵, 杨潇楠, 黄成军, 程洁, 王玮冰. 一种挡板结构被动式微混合器的设计与仿真. 微纳电子技术. 2018, 55(4): 258-264, http://lib.cqvip.com/Qikan/Article/Detail?id=674851616.
[14] Yang, Yudong, Mao, Haiyang, Xiong, Jijun, Jia, Yuncong, Li, Ruirui, Wang, Weibing. Optical Features of Nanowire Forests Prepared by a Plasma Repolymerization Technique. IEEE TRANSACTIONS ON NANOTECHNOLOGY[J]. 2018, 17(4): 719-722, https://www.webofscience.com/wos/woscc/full-record/WOS:000438087000019.
[15] 杨宇东, 毛海央, 李锐锐, 贾云丛, 熊继军, 王玮冰. 双层复合纳米森林结构的制备及其宽光谱高吸收光学特性研究. 红外与毫米波学报[J]. 2018, 37(2): 246-250, http://lib.cqvip.com/Qikan/Article/Detail?id=7000633081.
[16] Li, Ruirui, Mao, Haiyang, Yang, Yudong, Jia, Yuncong, Xue, Huiqiong, Xiong, Jijun, Wang, Weibing, IEEE. CANDLE SOOT WITH BROADBAND HIGH ABSORPTANCE FOR APPLICATIONS OF INFRARED SENSORS. 2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)null. 2017, 882-885, http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000426701400218.
[17] Yang, Y D, Mao, H Y, Xiong, J J, Jia, Y C, Lp, R R, Ming, A J, Wang, W B, IEEE. Optical Features of Nanowire Forests Generated Using Plasma Repolymerization. 2017 IEEE 12TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS)null. 2017, 452-455, [18] Mao, Haiyang, Li, Ruirui, Huang, Chengjun, Jia, Yuncong, Wang, Weibing, Ming, Anjie, Xiong, Jijun, IEEE. A HIGHLY SERS-ACTIVE AND FLEXIBLE DROPLET BASED ON CARBON-METAL COMPOSITE NANOPARTICLES. 2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)null. 2017, 1344-1347, http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000426701400333.
[19] Mao, Haiyang, Huang, Chengjun, Wu, Wengang, Xue, Mei, Yang, Yudong, Xiong, Jijun, Ming, Anjie, Wang, Weibing. Wafer-level fabrication of nanocone forests by plasma repolymerization technique for surface-enhanced Raman scattering devices. APPLIED SURFACE SCIENCE[J]. 2017, 396: 1085-1091, http://dx.doi.org/10.1016/j.apsusc.2016.11.092.
[20] Yang, Yudong, Mao, Haiyang, Jia, Yuncong, Xue, Huiqiong, Xiong, Jijun, Wang, Weibing, Jiao, Binbin, IEEE. HYBRID NANOPILLAR FORESTS WITH BROADBAND HIGH ABSORPTANCE. 2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)null. 2017, 1332-1335, http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000426701400330.
[21] Anjie Ming, Weibing Wang, Haiyang Mao, Yudong Yang, Jijun Xiong. Hybrid nanocone forests with high absorption in full-solar spectrum for solar cell applications. Institute of Physics Publishing Ltd.. 2016, http://oa.las.ac.cn/oainone/service/browseall/read1?ptype=JA&workid=JA201904045532279ZK.
[22] Lei, Cheng, Mao, Haiyang, Ou, Wen, Xue, Chenyang, Tang, Licheng, Yang, Tao, Chen, Dapeng, Xiong, Jijun. A CMOS-MEMS IR device based on double-layer thermocouples. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS[J]. 2016, 22(5): 1163-1171, https://www.webofscience.com/wos/woscc/full-record/WOS:000374570300026.
[23] 毛海央, 欧文. Fabrication of Nanocone Forests with High Optical Absorption based on A Plasma Repolymerization Technique. 2016 IEEE 29th international conference on micro electro mechanical systems: MEMS 2016, Shanghai, China, 24-28 January 2016, pages 617-1267, v.2null. 2016, 1185-1188, http://159.226.55.106/handle/172511/16306.
[24] 毛海央, 欧文. 基于纳米化聚酰亚胺材料的MEMS湿度传感器的研究. 仪表技术与传感器. 2016, 7-8,36, http://lib.cqvip.com/Qikan/Article/Detail?id=668373735.
[25] Haiyang Mao. Diversiform nanoforests: fabrication and applications. 2016 IEEE International Nanoelectronics Conference (INEC 2016). 2016, [26] Lei, Cheng, Mao, Haiyang, Yang, Yudong, Ou, Wen, Xue, Chenyang, Yao, Zong, Ming, Anjie, Wang, Weibing, Wang, Ling, Hu, Jiandong, Xiong, Jijun. A double-end-beam based infrared device fabricated using CMOS-MEMS process. SENSOR REVIEW[J]. 2016, 36(3): 240-248, http://159.226.55.106/handle/172511/16117.
[27] Wu, Wengang, Mao, Haiyang, Han, Xiang, Xu, Jun, Wang, Weibing. Fabrication and characterization of SiO2/Si heterogeneous nanopillar arrays. NANOTECHNOLOGY[J]. 2016, 27(30): http://159.226.55.106/handle/172511/16113.
[28] Haiyang Mao. Nanofiber Forests as A Humidity-Sensitive Material,. IEEE MEMS 2015. 2015, [29] Weibing Wang. Fabrication of Patternable Nanopillars for Microfluidic SERS Devices based on Gap-Induced Uneven Etching. IEEE MEMS 2015. 2015, [30] Wu, Meng, Ou, Yi, Mao, Haiyang, Li, Zhigang, Liu, Ruiwen, Ming, Anjie, Ou, Wen. Multi-resonant wideband energy harvester based on a folded asymmetric M-shaped cantilever. AIP ADVANCES[J]. 2015, 5(7): https://doaj.org/article/17748bb981494cda9699576c5d686a3f.
[31] Tang L C, Mao H Y, Wang Y, Ou W, Wu W G, Tan Q L, Xiong J J, IEEE. FABRICATION OF NANOWIRES FROM POLYIMIDE FOR TRANSPARENT SERS DEVICES. 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)null. 2015, 1397-1400, http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000380461400348.
[32] 毛海央. 基于双层多晶硅材料的MEMS热电偶真空度传感器研究. 微纳电子技术. 2015, [33] Haiyang Mao. Fabrication of Transparent SERS Devices for Pesticide Detection. IEEE NEMS 2015. 2015, [34] 欧文. Design of thermopile-based infrared detectors with suspended absorber-thermopile bi-layers. Chinese Journal of Sensors and Actuators. 2014, [35] Bao AiDa, Mao HaiYang, Xiong JiJun, Chen ZhuoJie, Ou Wen, Chen DaPeng. Nanopillar-forest based surface-enhanced Raman scattering substrates. SCIENCE CHINA-INFORMATION SCIENCES[J]. 2014, 57(8): https://www.webofscience.com/wos/woscc/full-record/WOS:000339365500021.
[36] Mao, Haiyang, Wu, Wengang, She, Didi, Sun, Gongchen, Lv, Pengpeng, Xu, Jun. Microfluidic Surface-Enhanced Raman Scattering Sensors Based on Nanopillar Forests Realized by an Oxygen-Plasma-Stripping-of-Photoresist Technique. SMALL[J]. 2014, 10(1): 127-134, https://www.webofscience.com/wos/woscc/full-record/WOS:000330624400015.
[37] 欧文. Fabrication of polyimide sacrificial layers with inclined sidewalls based on RIE technology. AIP Advances. 2014, [38] Haiyang Mao. Nanofiber Forests with High Infrared Absorptance. IEEE MEMS 2014. 2014, [39] Mao, Haiyang, Chen, Yuanjing, Ou, Yi, Ou, Wen, Xiong, Jijun, You, Chunjuan, Tan, Qiulin, Chen, Dapeng. Fabrication of nanopillar forests with high infrared absorptance based on rough poly-Si and spacer technology. JOURNAL OF MICROMECHANICS AND MICROENGINEERING[J]. 2013, 23(9): https://www.webofscience.com/wos/woscc/full-record/WOS:000323814100034.
[40] Mao, Haiyang, Zhang, Yulong, Wu, Wengang, Sun, Gongchen, Xu, Jun. Realization of cylindrical submicron shell arrays by diffraction-introduced photolithography. JOURNAL OF MICROMECHANICS AND MICROENGINEERING[J]. 2011, 21(8): https://www.webofscience.com/wos/woscc/full-record/WOS:000293163700004.
[41] Mao, Haiyang, Wu, Wengang, Zhang, Yulong, Zhai, Ge, Xu, Jun. Fabrication of high-compact nanowires using alternating photoresist ashing and spacer technology. JOURNAL OF MICROMECHANICS AND MICROENGINEERING[J]. 2010, 20(8): https://www.webofscience.com/wos/woscc/full-record/WOS:000280560600029.
[42] Haiyang Mao. A novel micro- accelerometer with adjustable sensitivity based on resonant tunneling diodes. Chinese Physics B. 2009, [43] Jijun Xiong, Wendong Zhang, Haiyang Mao, Kaiqun Wang. Research on double-barrier resonant tunneling effect based stress measurement methods. Sensors & Actuators: A. Physical. 2009, 150(2): 169-174, http://dx.doi.org/10.1016/j.sna.2008.12.015.
[44] Mao, Haiyang, Wu, Di, Wu, Wengang, Xu, Jun, Hao, Yilong. The fabrication of diversiform nanostructure forests based on residue nanomasks synthesized by oxygen plasma removal of photoresist. NANOTECHNOLOGY[J]. 2009, 20(44): https://www.webofscience.com/wos/woscc/full-record/WOS:000270562900010.

科研活动

   
科研项目
( 1 ) 纳米纤维森林结构制备方法及其红外吸收特性研究, 主持, 国家级, 2015-01--2017-12
( 2 ) 集成纳米结构的光源与多敏感元一体化的红外气体传感器, 参与, 国家级, 2014-01--2018-12
( 3 ) 纳米森林结构制备方法及其MEMS红外传感器应用基础研究, 主持, 省级, 2014-01--2016-12
( 4 ) 基于MEMS热电堆红外气体传感器的水果成熟度便携检测系统研究, 主持, 省级, 2014-01--2016-12
( 5 ) 基于纳米森林结构的SERS器件技术开发, 主持, 院级, 2016-01--2016-08
( 6 ) 高性能MEMS热电堆红外探测器研究, 主持, 院级, 2016-01--2016-08
( 7 ) 宽光谱高吸收纳米光学材料研究, 主持, 研究所(学校), 2017-06--2020-05
( 8 ) 复合纳米森林的等离激元多重杂化光吸收特性基础研究, 主持, 国家级, 2018-01--2021-12
( 9 ) MEMS传感器和纳米技术, 主持, 部委级, 2018-01--2021-12
科研项目
( 1 ) 纳米纤维森林结构制备方法及其红外吸收特性研究, 主持, 国家级, 2015-01--2017-12
( 2 ) 集成纳米结构的光源与多敏感元一体化的红外气体传感器, 参与, 国家级, 2014-01--2018-12
( 3 ) 纳米森林结构制备方法及其MEMS红外传感器应用基础研究, 主持, 省级, 2014-01--2016-12
( 4 ) 基于MEMS热电堆红外气体传感器的水果成熟度便携检测系统研究, 主持, 省级, 2014-01--2016-12
( 5 ) 基于纳米森林结构的SERS器件技术开发, 主持, 院级, 2016-01--2016-08
( 6 ) 高性能MEMS热电堆红外探测器研究, 主持, 院级, 2016-01--2016-08
( 7 ) 宽光谱高吸收纳米光学材料研究, 主持, 研究所(学校), 2017-06--2020-05
( 8 ) 复合纳米森林的等离激元多重杂化光吸收特性基础研究, 主持, 国家级, 2018-01--2021-12
( 9 ) MEMS传感器和纳米技术, 主持, 部委级, 2018-01--2021-12
参与会议
(1)Fabrication of Nanocone Forests with High Optical Absorption based on A Plasma Repolymerization Technique   26. Y. Wang, L.C. Tang, H.Y. Mao*, C. Lei, W. Ou, J.J. Xiong   2016-05-13
(2)Fabrication of Nanowires from Polyimide for Transparent SERS Devices   27. L.C. Tang, H.Y. Mao*, Y. Wang, W. Ou, W.G. Wu, J. J. Xiong, Q. L. Tan   2016-05-13
(3)Fabrication of Transparent SERS Devices for Pesticide Detection   28. L.C. Tang, Q. L. Tan, J. J. Xiong, H.Y. Mao*,W. Ou, A. D. Bao   2016-05-13
(4)Nanofiber Forests as A Humidity-Sensitive Material   29. C. Lei, L.C. Tang, H.Y. Mao*, Y. Wang, J.J. Xiong , W. Ou, W.B. Wang, A.J. Ming, Q.L. Tan, D.P. Chen and D. Li   2016-05-13
(5)Fabrication of Patternable Nanopillars for Microfluidic SERS Devices based on Gap-Induced Uneven Etching   30. Y. Wang, L.C. Tang, H.Y. Mao*, C. Lei, W. Ou, J.J. Xiong , W.B. Wang, A.J. Ming, Q.L. Tan, D.P. Chen and D. Li   2016-05-13
(6)Nanofiber Forests with High Infrared Absorptance   31. H.Y. Mao*, C. Lei, Y. J. Chen, Z. J. Chen, W. Ou, W. G. Wu, A. J. Ming, and D. P. Chen   2016-05-13
(7)Microfluidic Surface-enhanced Raman Scattering Sensors for Online Monitoring Trace Chemical Mixing and Reaction   34. H.Y. Mao, P.P. Lv and W.G. Wu   2016-05-13
(8)Silicon Nanopillar-Forest Based Microfluidic Surface-Enhanced Raman Scattering Devices   35. H.Y. Mao, W.G. Wu, Y.L. Zhang, P.P. Lv, C. Qian, and J. Xu   2016-05-13
(9)SERS-active substrates based on metallic nanocracks on PDMS   36. Haiyang Mao, Chuang Qian, Pengpeng Lv, and Wengang Wu   2016-05-13
(10)Dualfunctional MEMS Optical Device with Compound Electrostatic Actuators for Compact and Flexible Photonic Networks   38. Qinghua Chen, Wengang Wu, Haiyang Mao, Bochao Du, Li Li, Yilong Hao   2016-05-13
(11)Nanofiber-based Surface Microfluidic Structures for Cell and Nanoparticle Patterning   39. Haiyang Mao, Wengang Wu, Qinghai Liu, Yulong Zhang, Yan Li   2016-05-13
(12)Fabrication of nanofiber-based SERS-active substrates by oxygen plasma removal of SU-8 photoresist   40. Haiyang Mao, Yulong Zhang, Wengang Wu, Chenyang Xue   2016-05-13
(13)Diversiform nanoforests: fabrication and applications   H. Y. Mao*, Y. D. Yang, Y. Wang, L. C. Tang, C. Lei1, J. J. Xiong, W. B. Wang   2016-05-13
(14)Fabrication of Compact Collateral Silicon Nanowires Based on Continuously Alternating Deposition   D. Wu, H.Y. Mao, W.G. Wu   2016-05-10
(15)Fabrication of orderly and uniform nanotip arrays based on oxygen plasma etching of photoresist   Y.L. Zhang, H.Y. Mao, and W.G. Wu   2016-05-04
(16)Fabrication of Nanopillars Based on Silicon Oxide Nanopatterns Synthesized in Oxygen Plasma Removal of Photoresist   H.Y. Mao, D. Wu, W.G. Wu, J. Xu, H.X. Zhang and Y.L. Hao   2016-05-02

指导学生

现指导学生

朱梦华  硕士研究生  085209-集成电路工程  

石梦  硕士研究生  085208-电子与通信工程  

刘城  硕士研究生  085209-集成电路工程  

赵倩  硕士研究生  080903-微电子学与固体电子学  

桂博  硕士研究生  085209-集成电路工程  

王新泽  硕士研究生  085208-电子与通信工程  

秦冲  硕士研究生  085208-电子与通信工程  

巩晨  硕士研究生  085208-电子与通信工程  

丁浩  硕士研究生  080903-微电子学与固体电子学