General

Prof. Rong Su is currently with Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences. He received BSc from Sun Yat-sen University, and MSc in photonics and PhD in optical metrology from KTH Royal Institute of Technology in Sweden. Between 2015 and 2021 he worked at the National Physical Laboratory and University of Nottingham in the UK. He has had a long-term commitment to ultra-precision optical surface topography measuring instruments and technology, focusing on the basic theory of interferometric imaging and scattering, algorithm, calibration, industrial applications and corresponding international standards. He has published 39 peer-reviewed journal papers and 2 book chapters, and had ten-year research and management experience in EU and UK projects. His research outcomes have been adopted by world-leading optical instrument manufacturers. In 2021, he was awarded a fellowship from the Chinese Academy of Sciences and since then has secured more than 20-million funding for research. He is an editor of Light: Advanced Manufacturing and Nanomanufacturing and Metrology, a program committee member of SPIE, ASPE and EOSAM conferences, an observer of the National Professional Standardization Committee, a member of the Professional Committee of Measuring Instruments of the Chinese Society of Measurement.

Research Areas

Precision optical surface metrology, IC metrology, wavefront metrology, micro-nano scale defect detection;

Coherence scanning interferometry, phase shifting interferometry, scattering instrument, interference/holographic microscopy, Fourier optics, computational interferometric imaging, optomechanical design in precision instrumentation.

Education

2010-01--2014-06 KTH Royal Institute of Technology, PhD (Industrial Metrology and Optics)
2007-08--2009-12 KTH Royal Institute of Technology, MSc (Photonics)
2003-09--2007-06 Sun Yat-Sen University, BSc (Optical Information Science and Technology)

Experience

   
Work Experience
2021-01~present, Shanghai Institute of Optics and Fine Mechanics, CAS, Senior Researcher
2015-04~2020-11, University of Nottingham, Research Fellow
2015-01~2015-03, KTH Royal Institute of Technology, Postdoc researcher
2014-09~2014-12, National Physical Laboratory, UK, Postdoc researcher

Journal papers

1        Yisha Cao, Yunjun Lu, Peng Feng, Xiaoyue Qiao, Sotero Ordones, Rong Su*, Xiangzhao Wang. Distortion measurement of lithography projection lens based on multichannel grating lateral shearing interferometry. Applied Optics 63, 2056-2064 (2024).

2        杨俊,沈毅君*,刘嘉宇,温荣贤,任明俊*,苏榕*. 针对曲面光学元件的五轴表面形貌测量系统结构参数标定[J]. 激光与光电子学进展,接受,2024.

3        Zihan Chen, Zhenxiong Jian, Cheng Chen, Mingjun Ren, Rong Su*. Portable Angle-Resolved Scattering System to Measure High Spatial Frequency Roughness for Ultra-Smooth Surfaces. Optics and Lasers in Engineering 175 108031 (2024).

4        Zhenxiong Jian, Xi Wang, Xinquan Zhang, Rong Su, Mingjun Ren* and Limin Zhu. Task-Specific Near-Field Photometric Stereo for Measuring Metal Surface Texture. IEEE Transactions on Industrial Informatics (Early Access) (2023). doi: 10.1109/TII.2023.3342478.

5        Y. Zhu, D. Yang, J. Qiu, R. Su*, Y. Shi. Simulation-driven machine learning approach for high-speed correcting slope- and curvature-dependent errors in coherence scanning interferometry. Optics Express 31 36048-36060 (2023).

6        苏榕, 刘嘉宇, 乔潇悦, 简振雄, 张政, 温荣贤, 陈成, 任明俊, 朱利民. 用于表面形貌测量的扫描白光干涉技术进展[J]. 激光与光电子学进展, 2023, 60(3): 0312005. Rong Su, Jiayu Liu, Xiaoyue Qiao, Zhenxiong Jian, Zheng Zhang, Rongxian Wen, Cheng Chen, Mingjun Ren, Limin Zhu. Advances in Scanning White Light Interferometry for Surface Topography Measurement[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312005.

7        Z. Zhang, X. Qiao, S. Han, S. Liu, R. Su*. Quality inspection of cube beamsplitter by white light interferometric approach. Applied Optics, 62 1076-1081 (2023).

8        Y. Liu, F. Tang, S. Li, X. Wang, R. Su. Effects of illumination non-uniformity on double-Ronchi lateral shearing interference field. Applied Optics 61 10299-10308 (2022).

9        X. Qiao, Y. Bai, G. Ding, W. Wang, S. Liu, P. Cai, X. Chen, R. Su*. Measurement and correction of lateral distortion in a Fizeau interferometer based on the self-calibration technique, Optics Express 30 36134-36143 (2022).

10     Y. Lu, F. Tang, R. Su*, Z. Li, F. Guo, P. Feng, X. Wang. (3N+1)-frame phase retrieval for double-grating Ronchi lateral shearing interferometry. Optics and Lasers in Engineering 158 107139 (2022).

11     M. Liu, N. Senin, R. Su, R. K. Leach. Measurement of laser powder bed fusion surfaces with light scattering and unsupervised machine learning. Measurement Science and Technology 33 074006 (2022).

12     P. de Groot, L. L. Deck, R. Su, W. Osten. Contributions of holography to the advancement of interferometric measurements of surface topography. Light: Advanced Manufacturing 3 7 (2022).

13     P. de Groot, X. Colonna de Lega, R. Su, J. M. Coupland, R. K. Leach. Modeling of coherence scanning interferometry using classical Fourier optics. Optical Engineering 6 104106 (2021).

14     M. Thomas, R. Su*, P. de Groot, J. M. Coupland, R. K. Leach. Surface measuring coherence scanning interferometry beyond the specular reflection limit. Optics Express 29 36121-36131 (2021).

15     S. Shabbir, S. Garvey, S. Dakka, B. Rothwell, R. Su, R. K. Leach, N. Weston. Analysis of the tribological interaction of a polytetrafluoroethylene-lined radial lip oil seal, shaft and lubricant sample. Journal of Engineering Tribology, March (2021). https://doi.org/10.1177/13506501211005876

16     R. Su*, R. K. Leach. Physics-based virtual coherence scanning interferometer for surface measurement. Light: Advanced Manufacturing 2 120-135 (2021).

17     R. Su*, J. M. Coupland, C. J. R. Sheppard, R. K. Leach. Scattering and three-dimensional imaging in surface topography measuring interference microscopy. Journal of the Optical Society of America A 38 A27-A42 (2021).

18     Y. Arezki, R. Su, V. Heikkinen, F. Leprete, P. Posta, Y. Bitou, C. Schober, C. Mehdi-Souzani, B. A. M. Alzahrani, X. Zhang, Y. Kondo, C. Pruss, V. Ledl, N. Anwer, M. L. Bouazizi, R. K. Leach, H. Nouira. Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level. Sensors 21 1103 (2021).

19     D. Mabwa, T. Kubiena, H. Parnell, R. Su, D. Furniss, Z. Tang, R. K. Leach, T. M. Benson, C. A. Scotchford, A. B. Seddon. Evaluating the cytotoxicity of Ge-Sb-Se chalcogenide glass optical fibres on 3T3 mouse fibroblasts. RSC Advances 11 8682-8693 (2021).

20     N. Flay, S. Brown, W. Sun, T. Blumensath, R. Su. Effects of off-focal radiation on dimensional measurements in industrial cone-beam micro-focus X-ray computed tomography systems. Precision Engineering 66 472-481 (2020).

21     C. Gomez, C. Campanelli, R. Su, R. K. Leach. Surface-process correlation for an ink-jet printed transparent fluoroplastic. Surface Topography: Metrology and Properties 8 034002 (2020).

22     R. Leach, H. Haitjema, R. Su, A. Thompson. Metrological characteristics for the calibration of surface topography measuring instruments: a review. Measurement Science and Technology, 32 032001 (2020).

23     M. Liu, C. Cheung, N. Senin, S. Wang, R. Su, R. K. Leach. On-machine surface defect detection using light scattering and deep learning. Journal of the Optical Society of America A 37 B53-B59 (2020).

24     I. Zorin, R. Su, B. Heise, B. Lendl, M. Brandstetter. Correlative infrared optical coherence tomography and hyperspectral chemical imaging. Journal of the Optical Society of America A 37 B19-B26 (2020).

25     M. Thomas, R. Su*, N. Nikolaev, J. M. Coupland, R. K. Leach. Modelling of interference microscopy beyond the linear regime. Optical Engineering, 59 034110 (2020).

26     C. Gomez, R. Su*, P. de Groot, R. K. Leach. Noise reduction in coherence scanning interferometry for surface topography measurement. Nanomanufacturing and Metrology, 3 68-76 (2020).

27     R. Su*, M. Thomas, M. Liu, S. Benketaf, J. Drs, Y. Bellouard, C. Pruss, J. M. Coupland, R. K. Leach. Lens aberration compensation in interference microscopy. Optics and Lasers in Engineering 128 106015 (2020).

28     X. Feng, N. Senin, R. Su, S. Ramasamy, R. K. Leach. Optical measurement of surface topographies with transparent coatings. Optics and Lasers in Engineering 121 261-270 (2019).

29     G. Maculotti, X. Feng, R. Su, M. Galetto, R. K. Leach. Residual flatness and scale calibration for a point autofocus surface topography measuring instrument. Measurement Science and Technology 30 075005 (2019).

30     J. Wang, R. Su, R. K. Leach, W. Lu, L. Zhou, X. Jiang. Resolution enhancement for topography measurement of high-dynamic-range surfaces via image fusion. Optics Express 26(26) 34805-34819 (2018).

31     I. Zorin, R. Su, A. Prylepa, J. Kilgus, M. Brandstetter, B. Heise. Mid-infrared Fourier-domain optical coherence tomography with a pyroelectric linear array. Optics Express 26(25) 33428-33439 (2018).

32     A. Speidel, R. Su, J. Mitchell-Smith, P. Dryburgh, I. Bisterov, D. Pieris, W. Li, M. Clark, A. T. Clare. Crystallographic texture can be rapidly determined by electrochemical surface analytics. Acta Materialia 159 89-101 (2018).

33     X. Feng, R. Su*, T. Happonen, J. Liu, R. K. Leach. Fast and cost-effective in-process defect inspection for printed electronics based on coherent optical processing. Optics Express 26(11) 13927-13937 (2018). (Co-first author)

34     R. K. Leach, D. Sims-Waterhouse, F. Medeossi, E. Savio, S. Carmignato, R. Su. Fusion of photogrammetry and coherence scanning interferometry data for all-optical coordinate measurement. CIRP Annals Manufacturing Technology, 67(1) 599-602 (2018).

35     R. Su*, M. Thomas, J. M. Coupland, R. K. Leach. Effects of defocus on transfer function of coherence scanning interferometry. Optics Letters 43(1) 82-85 (2018).

36     P. Ekberg, R. Su*, R. K. Leach. High-precision lateral distortion measurement and correction in coherence scanning interferometry using an arbitrary surface. Optics Express 25(16) 18703-18712 (2017).

37     C. Gomez, R. Su*, A. Thompson, J. DiSciacca, S. Lawes, R. Leach. Optimisation of surface measurement for metal additive manufacturing using coherence scanning interferometry. Optical Engineering 56(11) 111714 (2017).

38     M. Liu, C. Cheung, C. Cheng, R. Su, R. K. Leach. A Gaussian process and image registration based stitching method for high dynamic range measurement of precision surfaces. Precision Engineering 50 99-106 (2017).

39     R. Su*, Y. Wang, J. M. Coupland, R. K. Leach. On tilt and curvature dependent errors and the calibration of coherence scanning interferometry. Optics Express 25(4) 3297-3310 (2017).

40     R. Su*, M. Kirillin, E. W. Chang, E. Sergeeva, S. H Yun, L. Mattsson. Perspectives of mid-infrared optical coherence tomography for inspection and micrometrology of industrial ceramics. Optics Express 22 15804-15819 (2014).

41     R. Su*, P. Ekberg, M. Leitner, L. Mattsson. Accurate and automated image segmentation of 3D optical coherence tomography data suffering from low signal-to-noise levels. Journal of the Optical Society of America A 31(12) 2551-2560 (2014).

42     P. Ekberg, R. Su*, E. W. Chang, S. H. Yun, L. Mattsson. Fast and accurate metrology of multi-layered ceramic materials by an automated boundary detection algorithm developed for optical coherence tomography data. Journal of the Optical Society of America A 31 217-226 (2014).

43     Y. Li, R. Su, M. Hedlind, P. Ekberg, T. Kjellberg, L. Mattsson. Model based in-process monitoring with optical coherence tomography. Procedia CIRP 2 70-73 (2012).

44     R. Su*, M. Kirillin, P. Ekberg, A. Roos, E. Sergeeva, L. Mattsson. Optical coherence tomography for quality assessment of embedded microchannels in alumina ceramic. Optics Express 20 4603-4618 (2012). 


Book chapters

1        R. Su. Coherence scanning interferometry. In: R. K. Leach ed., Advances in Optical Surface Texture Metrology (IOP Publishing 2020).

2        S. Piano, R. Su, R. K. Leach. Chapter 8. Micro-scale geometry measurement. In: I. Fassi and D. Shipley, eds., Micro-Manufacturing Technologies and Their Applications: A Theoretical and Practical Guide (Springer 2017).

Collaboration

     ZYGO | Precision Optical Metrology | Optical Components       Loughborough University - Rankings, Courses, Acceptance Rate