140100-集成电路科学与工程
080501-材料物理与化学
080502-材料学

光刻胶材料，光刻工艺，电子束与离子束光刻
量子点材料及其在光场调控领域应用
自组装材料与工艺

2011-09--2016-07   伯明翰大学   博士
2007-09--2011-07   四川大学   学士

   

2024-04~现在, 中科院光电所, 研究员
2021-04~2024-03,中科院光电所, 副研究员
2018-06~2021-03,电子科技大学, 博士后
2016-12~2018-05,中芯国际, 研发工程师
2011-09~2016-07,伯明翰大学, 博士
2007-09~2011-07,四川大学, 学士

   

（ 1 ） 光刻胶组合物及其应用, 2022, 第 2 作者, 专利号: CN114153123A

   

（1） Self-reconstruction of a MOF-derived chromium-doped nickel disulfide in electrocatalytic water oxidation, CHEMICAL ENGINEERING JOURNAL, 2022, 第 1 作者
（2） A Fullerene-Platinum Complex for Direct Functional Patterning of Single Metal Atom-Embedded Carbon Nanostructures, JOURNAL OF PHYSICAL CHEMISTRY LETTERS, 2022, 第 1 作者
（3） Cobalt phosphide nanoparticles supported within network of N-doped carbon nanotubes as a multifunctional and scalable electrocatalyst for water splitting, JOURNAL OF ENERGY CHEMISTRY, 2021, 第 1 作者
（4） Electronic Modulation of Hierarchical Spongy Nanosheets toward Efficient and Stable Water Electrolysis, SMALL, 2021, 第 1 作者
（5） NiP2/FeP heterostructural nanoflowers interwoven by carbon nanotubes as highly efficient electrocatalyst for oxygen evolution reaction, JOURNAL OF MATERIALS SCIENCE, 2021, 第 11 作者
（6） Organic carboxylate-based MOFs and derivatives for electrocatalytic water oxidation, COORDINATION CHEMISTRY REVIEWS, 2021, 第 1 作者
（7） Carbon nanotubes-interconnected heterostructural FeP/Ni2P nanospindles as efficient and stable electrocatalysts for oxygen evolution reaction, JOURNAL OF ALLOYS AND COMPOUNDS, 2021, 第 11 作者
（8） Double-shelled hollow bimetallic phosphide nanospheres anchored on nitrogen-doped graphene for boosting water electrolysis, JOURNAL OF MATERIALS CHEMISTRY A, 2020, 第 1 作者
（9） NiSe2 nanocrystals anchored graphene nanosheets as highly efficient and stable electrocatalyst for hydrogen evolution reaction in alkaline medium, JOURNAL OF ALLOYS AND COMPOUNDS, 2019, 第 1 作者
（10） Scalable synthesis of self-assembled bimetallic phosphide/N-doped graphene nanoflakes as an efficient electrocatalyst for overall water splitting, NANOSCALE, 2019, 第 1 作者
（11） Scalable Synthesis of Bimetallic Phosphide Decorated in Carbon Nanotube Network as Multifunctional Electrocatalyst for Water Splitting, ACS SUSTAINABLE CHEMISTRY & ENGINEERING, 2019, 第 1 作者
（12） Performance of a high resolution chemically amplified electron beam resist at various beam energies, MICROELECTRONIC ENGINEERING, 2016, 
（13） Chemically amplified phenolic fullerene electron beam resist, JOURNAL OF MATERIALS CHEMISTRY C, 2014, 

Materials and Processes for Next Generation Lithography, Elsevier, 2016-01, 第 其他 作者
（ 2 ） 衍射极限附近的光刻工艺, 清华大学出版社, 2020-02, 第 其他 作者

   

（ 1 ） XXX光刻材料改性, 负责人, 国家任务, 2024-01--2025-12
（ 2 ） 先进光刻材料研究, 负责人, 中国科学院计划, 2023-01--2025-12
（ 3 ） 新型高分辨表层成像光刻技术研究, 负责人, 地方任务, 2023-01--2024-12

（1）Electron Beam and EUV Patterning with Fullerene-based Resists   2023-07-31
（2）Electron beam and EUV patterning with fullerene-based resists   2021-06-14