基本信息
吴衍青 男 博导 中国科学院上海应用物理研究所
电子邮件: wuyanqing@sinap.ac.cn
通信地址: 浦东新区张衡路239号
邮政编码:
电子邮件: wuyanqing@sinap.ac.cn
通信地址: 浦东新区张衡路239号
邮政编码:
研究领域
软X射线干涉光刻技术及应用、X射线成像探测器、超材料应用、同步辐射光学以及X射线谱学方法研究。
招生信息
招博士生、硕士生各一名
招生专业
070207-光学
招生方向
X射线干涉光刻及应用同步辐射光学X射线成像探测器
教育背景
1994-09--2000-04 中科院上海光机所 博士1988-09--1992-07 复旦大学 学士
工作经历
工作简历
2004-07~现在, 中科院上海应物所, 组长2001-11~2004-02,韩国浦项工大, 博士后2001-01~2001-11,复旦大学, 博士后1992-07~2000-12,中科院上海光机所, 助理研究员/博士
专利与奖励
专利成果
[1] 赵俊, 梁兆峰, 杨树敏, 薛超凡, 王连升, 吴衍青, 邰仁忠. 一种多功能同步辐射干涉曝光实验平台及实验方法. CN: CN111781220A, 2020-10-16.[2] 程鑫彬, 邓晓, 刘杰, 顾振杰, 李同保, 赵俊, 杨树敏, 吴衍青, 邰仁忠. 一种精确缩短节距值的自溯源光栅标准物质制备方法. CN: CN111650680B, 2021-09-03.[3] 赵俊, 梁兆峰, 杨树敏, 薛超凡, 王连升, 吴衍青, 邰仁忠, 程鑫彬, 邓晓, 顾振杰, 唐朝辉, 李同保. 一种基于自溯源光栅的极紫外光刻胶质量检测装置和方法. CN: CN111650819A, 2020-09-11.[4] 薛超凡, 吴衍青, 王勇, 邰仁忠. 一种光栅单色器的优化方法. CN: CN109764962A, 2019-05-17.[5] 薛超凡, 胡纯, 刘平, 吴衍青, 王连升, 杨树敏, 赵俊, 郑丽芳, 邰仁忠. 一种原位光通量监测及曝光剂量补偿方法. CN: CN108549197A, 2018-09-18.[6] 薛超凡, 吴衍青, 王勇, 邰仁忠. 一种同步辐射软X射线无损实时位置分辨电离室. CN: CN106783502A, 2017-05-31.[7] 薛超凡, 吴衍青, 王勇, 邰仁忠. 一种同步辐射软X射线无损实时位置分辨电离室. CN: CN206194691U, 2017-05-24.[8] 吴衍青, 于怀娜, 陈媚, 邰仁忠, 赵俊, 荣丽媛. 一种闪烁体探测系统. CN: CN105784734A, 2016-07-20.[9] 薛超凡, 吴衍青, 刘海岗, 杨树敏, 王连升, 赵俊, 邰仁忠. 一种同步辐射X射线大面积干涉光刻系统. CN: CN105182701A, 2015-12-23.[10] 刘星, 邰仁忠, 吴衍青, 杨树敏, 赵俊, 王连升, 薛超凡. 一种制备表面增强拉曼光谱基底的方法及其基底. CN: CN104634772A, 2015-05-20.[11] 赵俊, 薛超凡, 吴衍青, 杨树敏, 王连升, 邰仁忠. 一种用于不同平面样品对准的装置. CN: CN204557050U, 2015-08-12.[12] 杨铁莹, 赵俊, 李晓龙, 高兴宇, 薛超凡, 吴衍青, 邰仁忠. p型SnO薄膜及其p-n结二极管的制备方法. CN: CN104178730A, 2014-12-03.
出版信息
发表论文
[1] Zhenjiang Li, Hao Shi, Beining Li, Shumin Yang, Jun Zhao, You He, Yong Wang, Yanqing Wu, Chaofan Xue, Renzhong Tai. Fabrication of large-area photonic crystal-modified X-ray scintillator imager for optical coding imaging. Optics Express[J]. 2024, 第 8 作者 通讯作者 [2] Wang Lu, Hao Shi, Chuanqi Ma, Zhenjiang Li, Shijie Zhu, Yanqing Wu, Renzhong Tai. Ultra-low loss SOI waveguide crossings designed by a hybrid global optimization based on deep learning. OPTICS COMMUNICATIONS. 2024, 第 6 作者 通讯作者 556: http://dx.doi.org/10.1016/j.optcom.2023.130189.[3] Hao Shi, Lei Zhang, Lin Wang, Zhenjiang Li, Yang Gao, Yanqing Wu. Ultra-compact integrated photonic switch using miniature phase change material inserted in a slot waveguide. Journal of the Optical Society of America B[J]. 2023, 第 6 作者 通讯作者 40: 2365-2371, [4] Li, ZhenJiang, Qi, ChengHang, Li, BeiNing, Yang, ShuMin, Zhao, Jun, Lei, ZhiDi, Zhu, ShiJie, Shi, Hao, Wang, Lu, Wu, YanQing, Tai, RenZhong. Latest developments in EUV photoresist evaluation capability at Shanghai Synchrotron Radiation Facility. NUCLEAR SCIENCE AND TECHNIQUES[J]. 2023, 第 10 作者 通讯作者 34(12): 206-215, http://dx.doi.org/10.1007/s41365-023-01351-8.[5] Shi, Hao, Sun, Yuanhe, Liang, Zhaofeng, Cao, Shuqi, Zhang, Lei, Zhu, Daming, Wu, Yanqing, Yao, Zeying, Chen, Wenqing, Li, Zhenjiang, Yang, Shumin, Zhao, Jun, Wang, Chunpeng, Tai, Renzhong. Feature-enhanced X-ray imaging using fused neural network strategy with designable metasurface. NANOPHOTONICS[J]. 2023, 第 7 作者 通讯作者 12(19): 3793-3805, http://dx.doi.org/10.1515/nanoph-2023-0402.[6] Hao Shi, Lin Wang, Lei Zhang, Yanqing Wu, Zhenjiang Li, Lu Wang, Renzhong Tai. Ultra-Compact Digital Metasurface Polarization Beam Splitter via Physics-Constrained Inverse Design. APPLIED SCIENCES[J]. 2022, 第 4 作者12: https://doaj.org/article/31d53815139644c8b8956d8a8ff7fc2a.[7] Zhang, Lei, Sun, Yuanhe, Li, Zhenjiang, Wang, Lin, Cao, Shuqi, Yang, Shumin, Wu, Yanqing, Tai, Renzhong. Photonic crystal based on mott phase change material as all-optical bandgap switch and composite logic gate. OPTICAL MATERIALS[J]. 2021, 第 7 作者 通讯作者 113: http://dx.doi.org/10.1016/j.optmat.2021.110855.[8] Meng, Xiangyu, Yu, Huaina, Wang, Yong, Ren, Junchao, Xue, Chaofan, Yang, Shuimin, Guo, Zhi, Zhao, Jun, Wu, Yanqing, Tai, Renzhong. Analysis of partially coherent light propagation through the soft X-ray interference lithography beamline at SSRF. JOURNAL OF SYNCHROTRON RADIATION[J]. 2021, 第 9 作者 通讯作者 28: 902-909, http://dx.doi.org/10.1107/S1600577521003398.[9] Sun, Yuanhe, Zhang, Lei, Shi, Hao, Cao, Shuqi, Yang, Shumin, Wu, Yanqing. Near-infrared plasma cavity metasurface with independently tunable double Fano resonances. RESULTS IN PHYSICS[J]. 2021, 第 6 作者 通讯作者 25: http://dx.doi.org/10.1016/j.rinp.2021.104204.[10] Sun, Yuanhe, Zhang, Lei, Xia, Huijuan, Cao, Shuqi, Wang, Lin, Yang, Shumin, Wu, Yanqing, Tai, Renzhong. Integrated silicon metasurface polarization beam splitter on a standard SOI substrate. OPTIK[J]. 2021, 第 7 作者 通讯作者 227: http://dx.doi.org/10.1016/j.ijleo.2020.166096.[11] 赵俊, 杨树敏, 薛超凡, 吴衍青, 陈宜方, 邰仁忠. 上海光源极紫外光刻胶检测平台. 应用化学[J]. 2021, 第 4 作者 通讯作者 38(9): 1168-1174, http://lib.cqvip.com/Qikan/Article/Detail?id=7105773257.[12] Zhao, Jun, Yang, Shumin, Xue, Chaofan, Wang, Liansheng, Liang, Zhaofeng, Zhang, Lei, Wang, Yong, Wu, Yanqing, Tai, Renzhong. The recent development of soft x-ray interference lithography in SSRF. INTERNATIONAL JOURNAL OF EXTREME MANUFACTURING[J]. 2020, 第 8 作者 通讯作者 2(1): 101-107, http://dx.doi.org/10.1088/2631-7990/ab70ae.[13] Zhang, Lei, Sun, Yuanhe, Xia, Huijuan, Wang, Lin, Cao, Shuqi, Yang, Shumin, Wu, Yanqing, Tai, Renzhong. Design of silicon-based integrated gradient index lens. JOURNAL OF NANOPHOTONICS[J]. 2020, 第 7 作者 通讯作者 14(4): https://www.webofscience.com/wos/woscc/full-record/WOS:000605173200007.[14] Zhang, Lei, Wang, Lin, Wu, Yanqing, Tai, Renzhong. Plasmonic Luneburg lens and plasmonic nano-coupler. CHINESE OPTICS LETTERS[J]. 2020, 第 3 作者 通讯作者 18(9): 59-63, http://lib.cqvip.com/Qikan/Article/Detail?id=7103160419.[15] Xia, Huijuan, Wu, Yanqing, Zhang, Lei, Sun, Yuanhe, Wang, Zhongyang, Tai, Renzhong. Great enhancement of image details with high fidelity in a scintillator imager using an optical coding method. PHOTONICS RESEARCH[J]. 2020, 第 2 作者 通讯作者 8(7): 1079-1085, http://lib.cqvip.com/Qikan/Article/Detail?id=7102618625.[16] Chen, Jinping, Hao, Qingshan, Wang, Shuangqing, Li, Shayu, Yu, Tianjun, Zeng, Yi, Zhao, Jun, Yang, Shumin, Wu, Yanqing, Xue, Chaofan, Yang, Guoqiang, Li, Yi. Molecular Glass Resists Based on 9,9 '-Spirobifluorene Derivatives: Pendant Effect and Comprehensive Evaluation in Extreme Ultraviolet Lithography. ACS APPLIED POLYMER MATERIALS[J]. 2019, 第 9 作者1(3): 526-534, http://dx.doi.org/10.1021/acsapm.8b00235.[17] 夏慧娟, 杨树敏, 王连升, 赵俊, 薛超凡, 吴衍青, 邰仁忠. Nonuniform self-imaging of achromatic Talbot lithography. 中国光学快报英文版[J]. 2019, 第 6 作者17(6): 75-79, https://www.webofscience.com/wos/woscc/full-record/WOS:000474343800016.[18] Xia, Huijuan, Yang, Shumin, Wang, Liansheng, Zhao, Jun, Xue, Chaofan, Wu, Yanqing, Tai, Renzhong. Nonuniform self-imaging of achromatic Talbot lithography. CHINESE OPTICS LETTERS[J]. 2019, 第 6 作者 通讯作者 17(6): [19] Yang, Shumin, Xue, Chaofan, Zhao, Jun, Wang, Liansheng, Wu, Yanqing, Tai, Renzhong. Parallel direct writing achromatic talbot lithography: a method for large-area arbitrary sub-micron periodic nano-arrays fabrication. NANOTECHNOLOGY[J]. 2019, 第 5 作者 通讯作者 30(31): https://www.webofscience.com/wos/woscc/full-record/WOS:000467284300001.[20] Yu, HN, Tai, RZ, Meng, XY, Chen, ZH, Zhen, XJ, Zhao, J, Xue, CF, Guo, Z, Wang, Y, Wu, YQ. Significant Enhancement in Light Output of Photonic-Crystal-Based YAG:Ce Scintillator for Soft X-Ray Detectors. IEEE TRANSACTIONS ON NUCLEAR SCIENCE[J]. 2019, 66(12): 2435-2439, https://www.webofscience.com/wos/woscc/full-record/WOS:000505563800011.[21] Xue, CF, Xue, L, Wu, YQ, Wang, Y, Yang, SM, Tai, RZ. A variable fixed-focus constant optimization method for a variable-included-angle varied-line-spacing plane-grating monochromator. JOURNAL OF SYNCHROTRON RADIATION[J]. 2019, 26: 1192-1197, http://dx.doi.org/10.1107/S1600577519004569.[22] Yuan, Yafei, Liu, Chunmin, Su, Jing, Cheng, Ling, Fang, Jie, Zhang, Xintong, Sun, Yan, Wu, Yanqing, Zhang, Hao, Li, Jing. Structural and Optical Properties of Ti-Doped InTe Thin Films. JOURNAL OF PHYSICAL CHEMISTRY C[J]. 2018, 第 8 作者122(11): 6267-6272, https://www.webofscience.com/wos/woscc/full-record/WOS:000428356700048.[23] Xue, Chaofan, Meng, Xiangyu, Wu, Yanqing, Wang, Yong, Wang, Liansheng, Yang, Shumin, Zhao, Jun, Tai, Renzhong. The wave optical whole process design of the soft X-ray interference lithography beamline at SSRF. JOURNAL OF SYNCHROTRON RADIATION[J]. 2018, 第 3 作者 通讯作者 25: 1869-1876, https://www.webofscience.com/wos/woscc/full-record/WOS:000449627100033.[24] Wu, Qiang, Liu, Bo, Zhu, Zhichao, Gu, Mu, Chen, Hong, Xue, Chaofan, Zhao, Jun, Wu, Yanqing, Tai, Renzhong, Ouyang, Xiaoping. Directional emission of plastic luminescent films using photonic crystals fabricated by soft-X-ray interference lithography and reactive ion etching. SCIENTIFIC REPORTS[J]. 2018, 第 8 作者8(1): https://www.webofscience.com/wos/woscc/full-record/WOS:000435447700020.[25] Zhu, Zhichao, Liu, Bo, Cheng, Chuanwei, Zhang, Haifeng, Chen, Hong, Gu, Mu, Liu, Jinliang, Chen, Liang, Ouyang, Xiaoping, Xue, Chaofan, Wu, Yanqing. Enhancement of directional broadband luminescence from a scintillation film via guided-mode resonance in a photonic crystal structure. APPLIED PHYSICS LETTERS[J]. 2017, 第 11 作者110(5): [26] Yu, Liju, Wang, Yong, Li, Junqin, Zhu, Fangyuan, Meng, Xiangyu, Cao, Jiefeng, Jing, Chao, Wu, Yanqing, Tai, Renzhong. Monte Carlo simulation on a new artificial spin ice lattice consisting of hexagons and three-moment vertices. AIP ADVANCES[J]. 2017, 第 8 作者7(8): http://www.corc.org.cn/handle/1471x/2184330.[27] Yang, Shumin, Zhao, Jun, Wang, Liansheng, Zhu, Fangyuan, Xue, Chaofan, Liu, Haigang, Sang, Huazheng, Wu, Yanqing, Tai, Renzhong. Influence of symmetry and duty cycles on the pattern generation in achromatic Talbot lithography. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B[J]. 2017, 第 8 作者 通讯作者 35(2): https://www.webofscience.com/wos/woscc/full-record/WOS:000397858500043.[28] Xue, Chaofan, Zhao, Jun, Wu, Yanqing, Yu, Huaina, Yang, Shumin, Wang, Liansheng, Zhao, Wencong, Wu, Qiang, Zhu, Zhichao, Liu, Bo, Zhang, Xia, Zhou, Wenchao, Tai, Renzhong. Fabrication of large-area high-aspect-ratio periodic nanostructures on various substrates by soft X-ray interference lithography. APPLIED SURFACE SCIENCE[J]. 2017, 第 3 作者 通讯作者 425(-): 553-557, http://dx.doi.org/10.1016/j.apsusc.2017.07.010.[29] Liu, Xing, Yu, Liju, Yang, Shumin, Yu, Huaina, Zhao, Jun, Wang, Liansheng, Wu, Yanqing, Tai, Renzhong. High sensitivity and homogeneity of surface enhanced Raman scattering on three-dimensional array-film hybrid platform. APPLIED PHYSICS LETTERS[J]. 2017, 第 7 作者110(8): http://dx.doi.org/10.1063/1.4977424.[30] Zhao, Jun, Wu, Yanqing, Xue, Chaofan, Yang, Shumin, Wang, Liansheng, Zhu, Fangyuan, Zhu, Zhichao, Liu, Bo, Wang, Yong, Tai, Renzhong. Fabrication of high aspect ratio nanoscale periodic structures by the soft X-ray interference lithography. MICROELECTRONIC ENGINEERING[J]. 2017, 第 2 作者 通讯作者 170: 49-53, http://dx.doi.org/10.1016/j.mee.2016.12.028.[31] Li, Junqin, Wang, Yong, Cao, Jiefeng, Meng, Xiangyu, Zhu, Fangyuan, Wu, Yanqing, Tai, Renzhong. Independent control of the vortex chirality and polarity in a pair of magnetic nanodots. JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS[J]. 2017, 第 6 作者 通讯作者 435(-): 167-172, http://dx.doi.org/10.1016/j.jmmm.2017.03.080.[32] Xue, Chaofan, Wu, Yanqing, Zhu, Fangyuan, Yang, Shumin, Liu, Haigang, Zhao, Jun, Wang, Liansheng, Tai, Renzhong. Development of broadband X-ray interference lithography large area exposure system. REVIEW OF SCIENTIFIC INSTRUMENTS[J]. 2016, 第 2 作者 通讯作者 87(4): http://ir.sinap.ac.cn/handle/331007/25683.[33] Fan, Daniel, Buitrago, Elizabeth, Yang, Shumin, Karim, Waiz, Wu, Yanqing, Tai, Renzhong, Ekinci, Yasin. Patterning of nanodot-arrays using EUV achromatic Talbot lithography at the Swiss Light Source and Shanghai Synchrotron Radiation Facility. MICROELECTRONIC ENGINEERING[J]. 2016, 第 5 作者155: 55-60, http://dx.doi.org/10.1016/j.mee.2016.02.026.[34] Cao, Jiefeng, Wang, Yong, Zou, Ying, Zhang, Xiangzhi, Wu, Yanqing, Tai, Renzhong. Optimization of the design for beamline with fast polarization switching elliptically polarized undulators. JOURNALOFSYNCHROTRONRADIATION[J]. 2016, 第 5 作者 通讯作者 23(-): 436-442, http://ir.sinap.ac.cn/handle/331007/25796.[35] 虞丽菊, 孟祥雨, 李俊琴, 曹杰峰, 王勇, 敬超, 吴衍青, 邰仁忠. 蒙特卡罗模拟人工自旋冰的退磁过程. 核技术[J]. 2016, 第 7 作者39(6): 75-80, http://www.hjs.sinap.ac.cn/thesisDetails#10.11889/j.0253-3219.2016.hjs.39.060502.[36] Wu, Shuang, Liu, Bo, Zhu, Zhichao, Cheng, Chuanwei, Chen, Hong, Gu, Mu, Chen, Liang, Liu, Jinling, Ouyang, Xiaoping, Xue, Chaofan, Wu, Yanqing. Guided-mode resonance assisted directional emission of a wavelength-shifting film for application in scintillation detection. OPTICS EXPRESS[J]. 2016, 第 11 作者24(1): 231-238, http://ir.sinap.ac.cn/handle/331007/25737.[37] Xue, Chaofan, Wu, Yanqing, Zou, Ying, Xue, Lian, Guo, Zhi, Wang, Yong, Tai, Renzhong. Applications of VUV extra-focus mechanism: high-performance dual-mode monochromator from VUV to soft X-ray. JOURNAL OF SYNCHROTRON RADIATION[J]. 2015, 第 2 作者 通讯作者 22: 1353-1358, http://www.irgrid.ac.cn/handle/1471x/1034796.[38] 陈媚, 于怀娜, 赵俊, 王连升, 杜国浩, 谢红兰, 吴衍青, 邰仁忠. 光子晶体制备方法对同步辐射闪烁体探测器成像分辨率的影响. 核技术[J]. 2015, 第 7 作者38(7): 42134, http://www.hjs.sinap.ac.cn/thesisDetails#10.11889/j.0253-3219.2015.hjs.38.070101.[39] Xue, Chaofan, Wu, Yanqing, Zou, Ying, Xue, Lian, Wang, Yong, Xu, Zijian, Tai, Renzhong. A new extra-focus monochromator designed for high-performance VUV beamlines. JOURNAL OF SYNCHROTRON RADIATION[J]. 2015, 第 2 作者 通讯作者 22(2): 328-335, http://ir.sinap.ac.cn/handle/331007/24375.[40] Yang Xiaowei, Huang Qiushi, Kozhevnikov Igor V, Wang Zhanshan, Zhao Jun, Wu Yanqing, Hudec R, Pina L. Development of XUV multilayer gratings with high resolution and high efficiency. EUV AND X-RAY OPTICS: SYNERGY BETWEEN LABORATORY AND SPACE IV. 2015, 第 6 作者9510: http://ir.sinap.ac.cn/handle/331007/25101.[41] Meng, Xiangyu, Xue, Chaofan, Yu, Huaina, Wang, Yong, Wu, Yanqing, Tai, Renzhong. Numerical analysis of partially coherent radiation at soft x-ray beamline. OPTICS EXPRESS[J]. 2015, 第 5 作者23(23): 29675-29686, http://ir.sinap.ac.cn/handle/331007/25006.[42] Yang, Tieying, Zhao, Jun, Li, Xiaolong, Gao, Xingyu, Xue, Chaofan, Wu, Yanqing, Tai, Renzhong. Preparation and characterization of p-type transparent conducting SnO thin films. MATERIALS LETTERS[J]. 2015, 第 6 作者139: 39-41, http://dx.doi.org/10.1016/j.matlet.2014.10.040.[43] Yang ShuMin, Wang LianSheng, Zhao Jun, Xue ChaoFan, Liu HaiGang, Xu ZiJian, Wu YanQing, Tai RenZhong. Developments at SSRF in soft X-ray interference lithography. NUCLEAR SCIENCE AND TECHNIQUES[J]. 2015, 第 7 作者 通讯作者 26(1): 5-11, http://ir.sinap.ac.cn/handle/331007/24428.[44] Zhu, Zhichao, Wu, Shuang, Xue, Chaofan, Zhao, Jun, Wang, Liansheng, Wu, Yanqing, Liu, Bo, Cheng, Chuanwei, Gu, Mu, Chen, Hong, Tai, Renzhong. Enhanced light extraction of scintillator using large-area photonic crystal structures fabricated by soft-X-ray interference lithography. APPLIED PHYSICS LETTERS[J]. 2015, 第 6 作者106(24): http://ir.sinap.ac.cn/handle/331007/24454.[45] Chen Li, Xu Jian, Yuan Hua, Yang ShuMin, Wang LianSheng, Wu YanQing, Zhao Jun, Chen Ming, Liu HaiGang, Li ShaYu, Tai RenZhong, Wang ShuangQing, Yang GuoQiang. Outgassing analysis of molecular glass photoresists under EUV irradiation. SCIENCE CHINA-CHEMISTRY[J]. 2014, 第 6 作者57(12): 1746-1750, [46] Xue, L, Reininger, R, Wu, Y Q, Zou, Y, Xu, Z M, Shi, Y B, Dong, J, Ding, H, Sun, J L, Guo, F Z, Wang, Y, Tai, R Z. Design of an ultrahigh-energy-resolution and wide-energy-range soft X-ray beamline. JOURNAL OF SYNCHROTRON RADIATION[J]. 2014, 21: 273-279, http://dx.doi.org/10.1107/S1600577513029093.[47] Liu, Haigang, Xu, Zijian, Zhang, Xiangzhi, Wu, Yanqing, Guo, Zhi, Tai, Renzhong. Effects of missing low-frequency information on ptychographic and plane-wave coherent diffraction imaging. APPLIED OPTICS[J]. 2013, 第 4 作者52(11): 2416-2427, https://www.webofscience.com/wos/woscc/full-record/WOS:000317473000025.[48] 郭春磊, 孟祥雨, 吴衍青, 王勇, 邰仁忠. 上海光源软X射线干涉光刻线站波荡器光源及束线相干性研究. 核技术[J]. 2013, 第 3 作者36(9): 41708, http://www.hjs.sinap.ac.cn/thesisDetails#10.11889/j.0253-3219.2013.hjs.36.090101.[49] 孟祥雨, 郭春磊, 吴衍青, 吴衍青, 邰仁忠. 同步辐射光束线中部分相干光的传播研究. 光学学报[J]. 2013, 第 3 作者33(7): 318-325, http://ir.sinap.ac.cn/handle/331007/13564.[50] 薛超凡, 王勇, 吴衍青, 许子健, 邰仁忠. 软X射线光束线能量分辨率测量中气体压强对谱线的影响研究. 核技术[J]. 2011, 第 3 作者34(8): 561-564, http://lib.cqvip.com/Qikan/Article/Detail?id=38767479.[51] 谭兴兴, 刘海岗, 郭智, 吴衍青, 许子健, 王勇, 邰仁忠. 基于上海光源扫描透射X射线显微术的相干衍射成像模拟. 光学学报[J]. 2011, 第 4 作者31(4): 228-233, http://lib.cqvip.com/Qikan/Article/Detail?id=37320081.[52] Wang Yuandong, Liu Dianwei, Song Kaishan, Zhang Bai, Wang Zongming, Jiang Guangjia, Tang Xuguang, Lei Xiaochun, Wu Yanqing. Light Absorption by Suspended Particulate Matter in Chagan Lake, Jilin. SPECTROSCOPYANDSPECTRALANALYSIS[J]. 2011, 第 9 作者31(1): 162-167, https://www.webofscience.com/wos/woscc/full-record/WOS:000286290900038.[53] Xue, Chaofan, Wang, Yong, Guo, Zhi, Wu, Yanqing, Zhen, Xiangjun, Chen, Min, Chen, Jiahua, Xue, Song, Peng, Zhongqi, Lu, Qipeng, Tai, Renzhong. High-performance soft x-ray spectromicroscopy beamline at SSRF. REVIEW OF SCIENTIFIC INSTRUMENTS[J]. 2010, 第 4 作者81(10): http://ir.ciomp.ac.cn/handle/181722/24762.[54] 朱伟忠, 吴衍青, 史沛熊, 郭智, 邰仁忠, 徐洪杰. 基于高级硅刻蚀和硅氧化工艺的软X射线干涉光刻分束光栅的优化设计. 核技术[J]. 2008, 第 2 作者31(6): 415-419, http://lib.cqvip.com/Qikan/Article/Detail?id=27561628.[55] 陈敏, 王纳秀, 邰仁忠, 徐洪杰, 朱伟忠, 吴衍青. 13.4nm软X射线干涉光刻透射光栅的优化设计. 光学学报[J]. 2008, 第 6 作者28(7): 1225-1230, http://lib.cqvip.com/Qikan/Article/Detail?id=27759480.[56] Zhu WeiZhong, Wu YanQing, Guo Zhi, Zhu XiaoLi, Ma Jie, Xie ChangQing, Shi PeiXiong, Zhou HongJun, Huo TongLin, Tai RenZhong, Xu HongJie. The design, fabrication and performance of a large area 10000 line/mm metal transmission diffraction gratings for soft X-ray. ACTA PHYSICA SINICA[J]. 2008, 第 2 作者57(10): 6386-6392, http://www.irgrid.ac.cn/handle/1471x/394194.[57] Zhu WeiZhong, Wu YanQing, Guo Zhi, Zhu XiaoLi, Ma Jie, Xie ChangQing, Shi PeiXiong, Zhou HongJun, Huo TongLin, Tai RenZhong, Xu HongJie. The design, fabrication and performance of a large area 10000 line/mm metal transmission diffraction gratings for soft X-ray. ACTA PHYSICA SINICA[J]. 2008, 第 2 作者57(10): 6386-6392, http://dx.doi.org/10.7498/aps.57.6386.[58] Wu YanQing, Xiao TiQiao. The effect of ion oscillation on the self-sustenance of low pressure electronegative discharge. ACTA PHYSICA SINICA[J]. 2006, 第 1 作者 通讯作者 55(7): 3443-3450, http://www.irgrid.ac.cn/handle/1471x/397650.[59] 吴衍青. 离子振荡对低压脉冲负电性放电条件的影响. 物理学报. 2006, 第 1 作者[60] Wu YanQing, Xiao TiQiao. The effect of ion oscillation on the self-sustenance of low pressure electronegative discharge. ACTA PHYSICA SINICA[J]. 2006, 第 1 作者 通讯作者 55(7): 3443-3450, http://dx.doi.org/10.7498/aps.55.3443.[61] Wu, YQ, Han, SS, Song, XY, Xu, ZZ, Tang, YH, Bing, S. The control of laser-plasma parametric instabilities and the temperature of suprathermal electrons with ultrabroad bandwidth frequency modulated laser pulse. PLASMAPHYSICSANDCONTROLLEDFUSION[J]. 2001, 43(4): 469-482, https://www.webofscience.com/wos/woscc/full-record/WOS:000168498300009.[62] WUYanqing, HANShensheng, SHENBaifei, ZHANGLingqing, SONGXiangyang, XUZhizhan. Radiative Cooling Instability in Large Scale Line-shaped Laser Plasma. Chinese Physics Letters[J]. 1997, 第 1 作者 通讯作者 14(6): 428-431, https://cpl.iphy.ac.cn/Y1997/V14/I6/428.
科研活动
科研项目
( 1 ) 中科院大科学装置维修改造项目-软X射线干涉光刻分支线站的建设, 参与, 部委级, 2009-05--2011-10( 2 ) 基于新型宽带相干光学技术的软X射线干涉光刻, 主持, 国家级, 2013-01--2016-12( 3 ) 中国科学院大科学装置开放研究项目, 参与, 研究所(学校), 2011-01--2015-06( 4 ) 小像素探测器子课题:高分辨成像探测器, 主持, 国家级, 2016-07--2020-12( 5 ) 大科学中心重点研发项目 - 高效率新原理面探测器研究, 主持, 部委级, 2015-08--2018-08( 6 ) 成像闪烁体表面修饰的物理机制和制备方法研究, 主持, 国家级, 2018-01--2021-12( 7 ) X 射线衍射光谱与成像纳米器件集成制造, 参与, 国家级, 2017-06--2022-06
参与会议
(1)High efficient scintillant imagers covered with 2D photonic crystals 2017-08-17(2)VUV Extra-focus Principle and its Application to High-performance Grating Monochromators Chaofan Xue, Yanqing Wu,* Ying Zou, Lian Xue, Yong Wang, Renzhong Tai 2015-07-06(3)Current Status of SSRF Dreamline Yanqing Wu, yong Wang, Tairenzhong, et al 2012-08-10
指导学生
已指导学生
郭春磊 硕士研究生 080300-光学工程
现指导学生
张磊 博士研究生 070207-光学
石昊 硕士研究生 085202-光学工程