集成电路先导工艺技术
CMOS器件与工艺；半导体器件与工艺

材料、化学以及电子工程相关专业学生

080903-微电子学与固体电子学
080901-物理电子学

集成电路先导工艺技术
CMOS器件与工艺；半导体器件与工艺

2006-09--2010-06   瑞典皇家工学院（KTH）   工学博士
2005-09--2006-09   复旦大学   博士在读
2002-09--2005-07   厦门大学   工学硕士
1999-09--2002-07   华中科技大学   管理学学士
1998-09--2002-07   中国地质大学（武汉）   工学学士

研究生

工学博士

   

2017-05~现在, 中国科学院微电子研究所, 研究员
2010-08~2017-04,中科院微电子所, 助理研究员/副研究员

2019-07-01-今,Wiley series on Materials for Electronics and Photonics, 编辑
2016-06-29-2019-04-28,Journal of Materials Science: Materials in Electronics, 副主编

集成电路制造工艺与研究方法
先进集成电路制造品质控制：理论与实务
半导体工艺与制造技术
半导体工艺与制造技术二班
先进半导体器件物理与工艺技术
半导体制造技术

   

（1） 魏桥国科校长奖教金, 特等奖, 院级, 2022
（2） 中国电子信息科技创新团队, 一等奖, 部委级, 2019
（3） 中国科学院“朱李月华优秀教师奖”, 院级, 2017
（4） 中国专利优秀奖, 部委级, 2017

[1] 高建峰, 李俊杰, 周娜, 刘卫兵, 杨涛, 李俊峰, 罗军. 一种半导体器件及其制备方法. CN: CN116722029A, 2023-09-08.
[2] 许静, 苏雪寅, 罗军. 一种亚阈值区漏级电流的确定方法、装置及存储介质. CN: CN116609701A, 2023-08-18.
[3] 许静, 罗军, 苏雪寅, 骆堃. 一种半导体器件及其制作方法、电子设备. CN: CN116646378A, 2023-08-25.
[4] 李永亮, 刘昊炎, 罗军, 王文武. 一种半导体器件及其制造方法. CN: CN116598296A, 2023-08-15.
[5] 罗军, 李海荣, 刘晨星, 丰蜜, 李帅, 唐健博, 李俊峰. 一种SiC MOSFET器件. CN: CN116487440A, 2023-07-25.
[6] 朱慧珑, 陈卓, 刘金彪, 李俊峰, 罗军. FinFET及其制造方法及包括FinFET的电子设备. CN: CN116598360A, 2023-08-15.
[7] 朱慧珑, 陈卓, 刘金彪, 李俊峰, 罗军. 半导体器件制造方法. CN: CN116721921A, 2023-09-08.
[8] 李永亮, 刘昊炎, 罗军, 王文武. 一种环栅晶体管及其制造方法. CN: CN116469938A, 2023-07-21.
[9] 李永亮, 刘昊炎, 罗军, 王文武. 一种环栅晶体管及其制造方法. CN: CN116487439A, 2023-07-25.
[10] 朱慧珑, 叶甜春, 罗军. 存储器件及其制造方法及包括存储器件的电子设备. CN: CN116419568A, 2023-07-11.
[11] 杨美音, 罗军, 李彦如. MRAM存储单元及其写入方法、读取方法和制备方法. CN: CN116669526A, 2023-08-29.
[12] 杨美音, 舒敬坤, 罗军, 李彦如. SOT-MRAM存储单元及其制备方法. CN: CN116456807A, 2023-07-18.
[13] 罗军, 陈博涵, 许静. 一种铁电栅极叠层和铁电场效应晶体管及其制备方法. CN: CN116544270A, 2023-08-04.
[14] 李永亮, 刘昊炎, 贾晓锋, 罗军, 王文武. 一种半导体器件及其制造方法. CN: CN116454136A, 2023-07-18.
[15] 周娜, 杨华彬, 毛海央, 李俊峰, 罗军. 一种温湿度监测器. CN: CN116429173A, 2023-07-14.
[16] 崔岩, 罗军, 杨美音, 许静. 一种基于铁电/铁磁材料耦合的双模式电压调控MRAM存储单元及其调控方法、制备方法. CN: CN115884602A, 2023-03-31.
[17] 高建峰, 刘卫兵, 李俊杰, 周娜, 杨涛, 李俊峰, 罗军. 半导体器件金属互连结构及其形成方法. CN: CN115881627A, 2023-03-31.
[18] 李俊杰, 刘恩序, 周娜, 高建峰, 李俊峰, 李永亮, 罗军, 王文武. 集成电路设备和半导体器件的制备方法. CN: CN115881590A, 2023-03-31.
[19] 贺晓彬, 刘金彪, 李俊峰, 李亭亭, 李俊杰, 罗军. 涂胶方法和电子设备. CN: CN115945367A, 2023-04-11.
[20] 高建峰, 李俊杰, 周娜, 贺晓彬, 杨涛, 李俊峰, 罗军. 一种互连结构的制作方法、互连结构及半导体器件. CN: CN115588648A, 2023-01-10.
[21] 刘昊炎, 李永亮, 王晓磊, 罗军, 王文武. 一种半导体器件的制造方法. CN: CN115513142A, 2022-12-23.
[22] 李永亮, 赵飞, 殷华湘, 罗军, 王文武. 一种半导体器件及其制造方法. CN: CN115621320A, 2023-01-17.
[23] 贺晓彬, 李亭亭, 杨涛, 唐波, 刘金彪, 李俊峰, 罗军. 电子束光刻方法、浅沟槽隔离及电极接触孔的形成方法. CN: CN115639730A, 2023-01-24.
[24] 贺晓彬, 杨涛, 李亭亭, 刘金彪, 李俊峰, 罗军. 新的叠层结构及其制备方法、图形转移方法、返工方法. CN: CN115547815A, 2022-12-30.
[25] 贺晓彬, 杨涛, 李亭亭, 刘金彪, 唐波, 李俊峰, 罗军. 具有量测对准图形的晶圆. CN: CN115360173A, 2022-11-18.
[26] 许高博, 殷华湘, 罗军, 颜刚平, 田国良. 一种动态随机存储器及其制备方法. CN: CN115332252A, 2022-11-11.
[27] 许高博, 殷华湘, 罗军, 颜刚平, 田国良. 一种无电容动态随机存储器及其制备方法. CN: CN115360233A, 2022-11-18.
[28] 李永亮, 赵飞, 程晓红, 张青竹, 殷华湘, 罗军, 王文武. 一种半导体器件及其制造方法. CN: CN115172447A, 2022-10-11.
[29] 李纯, 刘昊炎, 李永亮, 殷华湘, 罗军, 王文武. 一种半导体器件的制造方法. CN: CN115116956A, 2022-09-27.
[30] 刘昊炎, 李永亮, 殷华湘, 罗军, 王文武. 一种半导体器件及其制造方法. CN: CN115117147A, 2022-09-27.
[31] 杨尚博, 许高博, 殷华湘, 罗军. 一种无电容DRAM单元结构及制造方法. CN: CN114864583A, 2022-08-05.
[32] 李永亮, 赵飞, 罗军, 王文武. 一种环栅晶体管的制造方法. CN: CN115020233A, 2022-09-06.
[33] 李永亮, 赵飞, 罗军, 王文武. 一种环栅晶体管及其制造方法. CN: CN114899236A, 2022-08-12.
[34] 李永亮, 张佳熠, 贾晓峰, 赵飞, 殷华湘, 罗军, 王文武. 一种半导体器件的制造方法. CN: CN114975282A, 2022-08-30.
[35] 李永亮, 刘昊炎, 程晓红, 罗军, 王文武. 一种鳍式场效应晶体管及其制造方法. CN: CN115050818A, 2022-09-13.
[36] 李永亮, 张佳熠, 殷华湘, 罗军, 王文武. 一种半导体器件的制造方法. CN: CN114883270A, 2022-08-09.
[37] 李永亮, 毛晓烔, 程晓红, 马雪丽, 罗军, 王文武. 一种晶体管的制造方法. CN: CN114709135A, 2022-07-05.
[38] 李永亮, 陈安澜, 赵飞, 程晓红, 殷华湘, 罗军, 王文武. 一种半导体器件及其制造方法. CN: CN114944392A, 2022-08-26.
[39] 李永亮, 赵飞, 陈安澜, 张佳熠, 殷华湘, 罗军, 王文武. 一种半导体器件及其制造方法. CN: CN114823668A, 2022-07-29.
[40] 李永亮, 贾晓锋, 殷华湘, 罗军, 王文武. 一种半导体器件的制造方法. CN: CN114709175A, 2022-07-05.
[41] 李永亮, 刘昊炎, 殷华湘, 罗军, 王文武. 一种半导体器件及其制造方法. CN: CN114613769A, 2022-06-10.
[42] 李永亮, 张佳熠, 殷华湘, 罗军, 王文武. 一种半导体器件及其制造方法. CN: CN114613770A, 2022-06-10.
[43] 李永亮, 赵飞, 罗军, 王文武. 一种半导体器件及其制造方法. CN: CN114709222A, 2022-07-05.
[44] 李永亮, 陈安澜, 程晓红, 罗军, 王文武. 一种半导体器件的制造方法. CN: CN114678329A, 2022-06-28.
[45] 李永亮, 程晓红, 赵飞, 罗军, 王文武. 具有高驱动能力和陡峭SS特性的半导体器件及制造方法. CN: CN114566549A, 2022-05-31.
[46] 陈睿, 都安彦, 韦亚一, 邵花, 杨红, 罗军, 王文武. 一种利用浅槽沟道隔离制造电源线的方法. CN: CN114464574A, 2022-05-10.
[47] 陈睿, 都安彦, 韦亚一, 邵花, 杨红, 罗军, 王文武. 一种利用浅槽沟道隔离制造电源线的方法. CN: CN114464574A, 2022-05-10.
[48] 李恋恋, 都安彦, 田国良, 杨红, 罗军, 王文武. 半导体集成电路器件及其制作方法、电子设备. CN: CN114497028A, 2022-05-13.
[49] 李恋恋, 都安彦, 田国良, 杨红, 罗军, 王文武. 半导体集成电路器件及其制作方法、电子设备. CN: CN114497028A, 2022-05-13.
[50] 李恋恋, 都安彦, 田国良, 杨红, 罗军, 王文武. 半导体集成电路器件及其制作方法、电子设备. CN: CN114497028A, 2022-05-13.
[51] 崔岩, 罗军, 杨美音, 许静. 存算一体单元及逻辑功能可重构的存算一体电路. CN: CN114244348A, 2022-03-25.
[52] 宋智雨, 许高博, 颜刚平, 殷华湘, 罗军. 一种基于薄膜晶体管的无电容DRAM单元结构及制造方法. CN: CN114334980A, 2022-04-12.
[53] 张青竹, 殷华湘. 一种半导体器件的制备方法及半导体器件. CN: CN114005835A, 2022-02-01.
[54] 贺晓彬, 杨涛, 李亭亭, 刘金彪, 唐波, 李俊峰, 罗军. 刻蚀梯形凹槽的方法及在衬底上形成金属线条的方法. CN: CN114171374A, 2022-03-11.
[55] 高建峰, 刘卫兵, 李俊杰, 周娜, 项金娟, 杨涛, 李俊峰, 罗军. 一种半导体结构及其制备方法、三维存储器. CN: CN114023745A, 2022-02-08.
[56] 贺晓彬, 杨涛, 刘金彪, 李亭亭, 唐波, 李俊峰, 罗军. 在半导体衬底上制作交叉线的方法. CN: CN114171668A, 2022-03-11.
[57] 崔岩, 罗军, 杨美音, 许静. 自旋霍尔器件、霍尔电压的获取方法及最大池化的方法. CN: CN114184833A, 2022-03-15.
[58] 李俊杰, 罗军, 王文武, 杨涛, 李永亮, 周娜, 高建峰, 殷华湘, 张静, 洪欣. 一种半导体器件及其制备方法、电子设备. CN: CN114038911A, 2022-02-11.
[59] 刘金彪, 罗军, 杨涛, 李俊峰, 王桂磊. 绝缘体上单晶薄膜制备方法及层叠结构. CN: CN113964020A, 2022-01-21.
[60] 杨美音, 罗军, 崔岩, 许静. 一种自旋轨道转矩磁阻式随机存储器及其制造方法. CN: CN113707803A, 2021-11-26.
[61] 杨美音, 罗军. SOT-MRAM存储单元及其制备方法. CN: CN113690366A, 2021-11-23.
[62] 毛淑娟, 殷华湘, 刘战峰, 王桂磊, 罗军. 一种基带RF一体化集成结构及集成方法. CN: CN113809070A, 2021-12-17.
[63] 杨美音, 李文静, 叶力, 向清懿, 罗军, 高建峰. 存储器电路及其数据写入和读取方法、存储器、电子设备. CN: CN113744776A, 2021-12-03.
[64] 高建峰, 贺晓彬, 李俊杰, 王佳, 刘卫兵, 杨涛, 李俊峰, 罗军. 约瑟夫森结的制备方法及约瑟夫森结. CN: CN113380942A, 2021-09-10.
[65] 毛淑娟, 刘战峰, 殷华湘, 刘金彪, 王桂磊, 李永亮, 罗军. 一种半导体器件及其制造方法. CN: CN113363214A, 2021-09-07.
[66] 毛淑娟, 殷华湘, 刘战峰, 罗军, 刘金彪, 张青竹, 张亚东. 一种半导体器件及其制造方法. CN: CN113345840A, 2021-09-03.
[67] 毛淑娟, 殷华湘",null,"张亚东, 张青竹, 罗军. 一种半导体器件及其制造方法. CN: CN113345841A, 2021-09-03.
[68] 毛淑娟, 刘战峰, 殷华湘, 刘金彪, 王桂磊",null,"罗军. 一种半导体器件及其制造方法. CN: CN113363214A, 2021-09-07.
[69] 刘金彪, 罗军, 李俊峰, 贺晓彬. 一种合束装置、激光加工设备和激光退火方法. CN: CN113422296A, 2021-09-21.
[70] 刘金彪, 罗军, 李俊峰. 一种激光退火设备及激光退火方法. CN: CN113421836A, 2021-09-21.
[71] 刘金彪, 罗军, 李俊峰, 杨涛, 贺晓彬. 一种激光退火设备和激光退火方法. CN: CN113471102A, 2021-10-01.
[72] 孙祥烈, 许静, 罗军, 赵超. 键合半导体器件及其制备方法. CN: CN113380648A, 2021-09-10.
[73] 孙祥烈, 许静, 罗军, 赵超. 一种铜互连结构及其制备方法. CN: CN113380763A, 2021-09-10.
[74] 孙祥烈, 许静, 罗军, 赵超. 芯片单元、芯片组件和芯片单元的制作方法. CN: CN113380743A, 2021-09-10.
[75] 孙祥烈, 许静, 罗军, 赵超. 空气隙制作方法、空气隙和电子设备. CN: CN113380698A, 2021-09-10.
[76] 孙祥烈, 许静, 罗军. 半导体器件及其制备方法. CN: CN113380761A, 2021-09-10.
[77] 孙祥烈, 许静, 罗军, 赵超. 一种键合结构、多晶圆三维集成结构及其制备方法. CN: CN113380742A, 2021-09-10.
[78] 孙祥烈, 许静, 罗军, 赵超. 半导体器件及其制备方法. CN: CN113380699A, 2021-09-10.
[79] 李永亮, 程晓红, 赵飞, 马雪丽, 杨红, 王晓磊, 罗军, 王文武. 一种半导体器件的制造方法. CN: CN113314423A, 2021-08-27.
[80] 李永亮, 程晓红",null,null,"王文武. 一种半导体器件的制造方法. CN: CN113506774A, 2021-10-15.
[81] 张利斌, 韦亚一, 殷华湘",null,null,null,"罗军, 王文武. 一种半导体器件的制造方法. CN: CN113314423A, 2021-08-27.
[82] 罗军, 赵超. 半导体器件及其制造方法. CN: CN113948467A, 2022-01-18.
[83] 杨美音, 罗军, 崔岩, 许静. 存储单元及其数据写入和读取方法、存储器、电子设备. CN: CN113328034A, 2021-08-31.
[84] 杨美音, 罗军, 崔岩, 许静. 基于底电极垂直向电压控制的SOT-MRAM及制造、写入方法. CN: CN113224232A, 2021-08-06.
[85] 杨美音, 罗军, 崔岩, 许静. 基于底电极平行向电压控制的SOT-MRAM及制造方法. CN: CN113178518A, 2021-07-27.
[86] 刘金彪, 罗军, 李俊峰. 一种掺杂缺陷去除方法. CN: CN113130309A, 2021-07-16.
[87] 刘金彪, 罗军, 李俊峰. 一种研磨装置及方法. CN: CN113001391A, 2021-06-22.
[88] 罗军, 袁述. 一种半导体器件的制造方法. CN: CN113130298A, 2021-07-16.
[89] 罗军, 袁述. 一种半导体器件的制造方法. CN: CN113130298A, 2021-07-16.
[90] 邓坚, 罗军, 赵超. 半导体器件及其制造方法. CN: CN112802798A, 2021-05-14.
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（1） Optimization of Selective Growth of SiGe for Source/Drain in 14nm and Beyond Nodes FinFETs, World Scientific Publishing Company, 2017-06, 第 2 作者
（2） CMOS: Past, Present and Future, Woodhead Publishing, 2018-04, 第 2 作者

   

（ 1 ） 高k金属栅与全硅化物Fin源漏, 参与, 国家任务, 2015-01--2018-12
（ 2 ） 场发射枪扫描电子显微镜, 参与, 国家任务, 2013-09--2018-09
（ 3 ） 基于微纳电子技术, 参与, 中国科学院计划, 2015-08--2019-09
（ 4 ） 先导集成电路器件及电路, 参与, 中国科学院计划, 2012-12--2016-12
（ 5 ） 青年创新促进会, 负责人, 中国科学院计划, 2011-01--2020-12
（ 6 ） 体硅FinFET 与关键工艺研究, 参与, 国家任务, 2013-01--2016-12
（ 7 ） 新型低温MRAM器件研究, 负责人, 中国科学院计划, 2018-01--2023-01
（ 8 ） 自旋逻辑器件结构设计、磁隧道结制备及性能优化, 负责人, 其他任务, 2018-01--2018-12
（ 9 ） 1X纳米FDSOI先导工艺研究, 负责人, 研究所自选, 2020-05--2022-05
（ 10 ） 自旋轨道矩随机存取存储器研究, 负责人, 企业委托, 2020-05--2022-05
（ 11 ） 自旋逻辑器件结构设计、磁隧道结制备及性能优化, 负责人, 其他任务, 2020-05--2021-05
（ 12 ） 青促会优秀会员, 负责人, 中国科学院计划, 2020-01--2023-01
（ 13 ） 基于FDSOI工艺的物联网智能感知与 嵌入式存储电路的核心技术研究, 负责人, 地方任务, 2021-05--2024-05
（ 14 ） 基于2X纳米及以下FDSOI技术的先导工艺研究及低功耗物联网特色引导芯片研发, 负责人, 地方任务, 2021-09--2024-09
（ 15 ） 面向先进逻辑制程的STT-eMRAM存储单元设计和工艺技术研究, 负责人, 其他任务, 2021-05--2023-12
（ 16 ） GAA和FDSOI器件与先进制造核心技术, 负责人, 中国科学院计划, 2022-11--2025-10

（1）先进CMOS接触工艺技术   全国半导体物理学术会议   Jun Luo   2021-07-09
（2）Impact of Ge Pre-amorphization Implantation (PAI) on Both the Formation of Ultrathin TiSix and the Specific Contact Resistivity (c) in TiSix/n+-Si Contacts   Jun Luo   2018-06-18
（3）Improved Ti Germanosilicidation by Ge Pre-Amorphization Implantation (PAI) for Advanced Contact Technology   Jun Luo   2018-03-18
（4）Improved Ti Silicidation by Ge Pre-amorphization Implantation (PAI) for Advanced Contact Technologies   Jun Luo   2018-03-08
（5）Advanced Silicide/Germanide technology for sub­16/14 nm node devices   Jun Luo   2017-10-18
（6）On the Manipulation of Phosphorus Diffusion As Well As the Reduction of Specific Contact Resistivity in Ge By Carbon Co-Doping   2016-10-02

已指导学生

李昱东  博士研究生  080903-微电子学与固体电子学  

张韫韬  硕士研究生  085209-集成电路工程  

王文  硕士研究生  085209-集成电路工程  

田阳雨  硕士研究生  085209-集成电路工程  

盛捷  硕士研究生  085208-电子与通信工程  

张国栋  硕士研究生  085208-电子与通信工程  

孙祥烈  硕士研究生  085208-电子与通信工程  

马浩东  硕士研究生  085208-电子与通信工程  

何国伟  硕士研究生  085208-电子与通信工程  

侯西亮  硕士研究生  080903-微电子学与固体电子学  

李梦华  硕士研究生  085209-集成电路工程  

谭鑫广  硕士研究生  085209-集成电路工程  

周雪冰  硕士研究生  080903-微电子学与固体电子学  

杨腾智  博士研究生  080903-微电子学与固体电子学  

张丹  博士研究生  080903-微电子学与固体电子学  

刘耀东  博士研究生  080903-微电子学与固体电子学  

李彦如  博士研究生  080903-微电子学与固体电子学  

徐步青  博士研究生  080903-微电子学与固体电子学  

熊文娟  博士研究生  080903-微电子学与固体电子学  

现指导学生

陈佳  博士研究生  080903-微电子学与固体电子学  

孔梦娟  硕士研究生  085400-电子信息  

孙祥烈  博士研究生  080903-微电子学与固体电子学  

邹思楠  硕士研究生  080903-微电子学与固体电子学  

曹纬  博士研究生  080903-微电子学与固体电子学  

赵磊  博士研究生  080903-微电子学与固体电子学  

王欣哲  硕士研究生  085400-电子信息  

何燕萍  博士研究生  080903-微电子学与固体电子学  

高海粟  硕士研究生  085400-电子信息  

杨博文  硕士研究生  085400-电子信息  

陈博涵  硕士研究生  085400-电子信息  

陈旭  博士研究生  080903-微电子学与固体电子学  

黄真  博士研究生  080903-微电子学与固体电子学  

童克友  硕士研究生  080903-微电子学与固体电子学  

刘超  博士研究生  080903-微电子学与固体电子学