软X射线干涉光刻技术及应用、X射线成像探测器、超材料应用、同步辐射光学以及X射线谱学方法研究。

招博士生、硕士生各一名

070207-光学

X射线干涉光刻及应用
同步辐射光学
X射线成像探测器

1994-09--2000-04   中科院上海光机所   博士
1988-09--1992-07   复旦大学   学士

   

2004-07~现在, 中科院上海应物所, 组长
2001-11~2004-02,韩国浦项工大, 博士后
2001-01~2001-11,复旦大学, 博士后
1992-07~2000-12,中科院上海光机所, 助理研究员/博士

   

（ 1 ） 一种闪烁体探测系统, 发明, 2016, 第 1 作者, 专利号: 授权公布号：CN105784734A

   

[1] Zhang, Lei, Sun, Yuanhe, Li, Zhenjiang, Wang, Lin, Cao, Shuqi, Yang, Shumin, Wu, Yanqing, Tai, Renzhong. Photonic crystal based on mott phase change material as all-optical bandgap switch and composite logic gate. OPTICAL MATERIALS[J]. 2021, 113: http://dx.doi.org/10.1016/j.optmat.2021.110855.
[2] Meng, Xiangyu, Yu, Huaina, Wang, Yong, Ren, Junchao, Xue, Chaofan, Yang, Shuimin, Guo, Zhi, Zhao, Jun, Wu, Yanqing, Tai, Renzhong. Analysis of partially coherent light propagation through the soft X-ray interference lithography beamline at SSRF. JOURNAL OF SYNCHROTRON RADIATION[J]. 2021, 28: 902-909, http://dx.doi.org/10.1107/S1600577521003398.
[3] Sun, Yuanhe, Zhang, Lei, Shi, Hao, Cao, Shuqi, Yang, Shumin, Wu, Yanqing. Near-infrared plasma cavity metasurface with independently tunable double Fano resonances. RESULTS IN PHYSICS[J]. 2021, 25: http://dx.doi.org/10.1016/j.rinp.2021.104204.
[4] Sun, Yuanhe, Zhang, Lei, Xia, Huijuan, Cao, Shuqi, Wang, Lin, Yang, Shumin, Wu, Yanqing, Tai, Renzhong. Integrated silicon metasurface polarization beam splitter on a standard SOI substrate. OPTIK[J]. 2021, 227: http://dx.doi.org/10.1016/j.ijleo.2020.166096.
[5] Zhang, Lei, Sun, Yuanhe, Xia, Huijuan, Wang, Lin, Cao, Shuqi, Yang, Shumin, Wu, Yanqing, Tai, Renzhong. Design of silicon-based integrated gradient index lens. JOURNAL OF NANOPHOTONICS[J]. 2020, 14(4): https://www.webofscience.com/wos/woscc/full-record/WOS:000605173200007.
[6] Zhang, Lei, Wang, Lin, Wu, Yanqing, Tai, Renzhong. Plasmonic Luneburg lens and plasmonic nano-coupler. CHINESE OPTICS LETTERS[J]. 2020, 18(9): 59-63, http://lib.cqvip.com/Qikan/Article/Detail?id=7103160419.
[7] Xia, Huijuan, Wu, Yanqing, Zhang, Lei, Sun, Yuanhe, Wang, Zhongyang, Tai, Renzhong. Great enhancement of image details with high fidelity in a scintillator imager using an optical coding method. PHOTONICS RESEARCH[J]. 2020, 8(7): 1079-1085, http://lib.cqvip.com/Qikan/Article/Detail?id=7102618625.
[8] Chen, Jinping, Hao, Qingshan, Wang, Shuangqing, Li, Shayu, Yu, Tianjun, Zeng, Yi, Zhao, Jun, Yang, Shumin, Wu, Yanqing, Xue, Chaofan, Yang, Guoqiang, Li, Yi. Molecular Glass Resists Based on 9,9 '-Spirobifluorene Derivatives: Pendant Effect and Comprehensive Evaluation in Extreme Ultraviolet Lithography. ACS APPLIED POLYMER MATERIALS[J]. 2019, 1(3): 526-534, http://dx.doi.org/10.1021/acsapm.8b00235.
[9] 夏慧娟, 杨树敏, 王连升, 赵俊, 薛超凡, 吴衍青, 邰仁忠. Nonuniform self-imaging of achromatic Talbot lithography. 中国光学快报英文版[J]. 2019, 17(6): 75-79, https://www.webofscience.com/wos/woscc/full-record/WOS:000474343800016.
[10] Xia, Huijuan, Yang, Shumin, Wang, Liansheng, Zhao, Jun, Xue, Chaofan, Wu, Yanqing, Tai, Renzhong. Nonuniform self-imaging of achromatic Talbot lithography. CHINESE OPTICS LETTERS[J]. 2019, 17(6): [11] Yang, Shumin, Xue, Chaofan, Zhao, Jun, Wang, Liansheng, Wu, Yanqing, Tai, Renzhong. Parallel direct writing achromatic talbot lithography: a method for large-area arbitrary sub-micron periodic nano-arrays fabrication. NANOTECHNOLOGY[J]. 2019, 30(31): https://www.webofscience.com/wos/woscc/full-record/WOS:000467284300001.
[12] Yu, HN, Tai, RZ, Meng, XY, Chen, ZH, Zhen, XJ, Zhao, J, Xue, CF, Guo, Z, Wang, Y, Wu, YQ. Significant Enhancement in Light Output of Photonic-Crystal-Based YAG:Ce Scintillator for Soft X-Ray Detectors. IEEE TRANSACTIONS ON NUCLEAR SCIENCE[J]. 2019, 66(12): 2435-2439, https://www.webofscience.com/wos/woscc/full-record/WOS:000505563800011.
[13] Xue, CF, Xue, L, Wu, YQ, Wang, Y, Yang, SM, Tai, RZ. A variable fixed-focus constant optimization method for a variable-included-angle varied-line-spacing plane-grating monochromator. JOURNAL OF SYNCHROTRON RADIATION[J]. 2019, 26: 1192-1197, http://dx.doi.org/10.1107/S1600577519004569.
[14] Yuan, Yafei, Liu, Chunmin, Su, Jing, Cheng, Ling, Fang, Jie, Zhang, Xintong, Sun, Yan, Wu, Yanqing, Zhang, Hao, Li, Jing. Structural and Optical Properties of Ti-Doped InTe Thin Films. JOURNAL OF PHYSICAL CHEMISTRY C[J]. 2018, 122(11): 6267-6272, https://www.webofscience.com/wos/woscc/full-record/WOS:000428356700048.
[15] Xue, Chaofan, Meng, Xiangyu, Wu, Yanqing, Wang, Yong, Wang, Liansheng, Yang, Shumin, Zhao, Jun, Tai, Renzhong. The wave optical whole process design of the soft X-ray interference lithography beamline at SSRF. JOURNAL OF SYNCHROTRON RADIATION[J]. 2018, 25: 1869-1876, https://www.webofscience.com/wos/woscc/full-record/WOS:000449627100033.
[16] Wu, Qiang, Liu, Bo, Zhu, Zhichao, Gu, Mu, Chen, Hong, Xue, Chaofan, Zhao, Jun, Wu, Yanqing, Tai, Renzhong, Ouyang, Xiaoping. Directional emission of plastic luminescent films using photonic crystals fabricated by soft-X-ray interference lithography and reactive ion etching. SCIENTIFIC REPORTS[J]. 2018, 8(1): https://www.webofscience.com/wos/woscc/full-record/WOS:000435447700020.
[17] Zhu, Zhichao, Liu, Bo, Cheng, Chuanwei, Zhang, Haifeng, Chen, Hong, Gu, Mu, Liu, Jinliang, Chen, Liang, Ouyang, Xiaoping, Xue, Chaofan, Wu, Yanqing. Enhancement of directional broadband luminescence from a scintillation film via guided-mode resonance in a photonic crystal structure. APPLIED PHYSICS LETTERS[J]. 2017, 110(5): [18] Yu, Liju, Wang, Yong, Li, Junqin, Zhu, Fangyuan, Meng, Xiangyu, Cao, Jiefeng, Jing, Chao, Wu, Yanqing, Tai, Renzhong. Monte Carlo simulation on a new artificial spin ice lattice consisting of hexagons and three-moment vertices. AIP ADVANCES[J]. 2017, 7(8): http://www.corc.org.cn/handle/1471x/2184330.
[19] Yang, Shumin, Zhao, Jun, Wang, Liansheng, Zhu, Fangyuan, Xue, Chaofan, Liu, Haigang, Sang, Huazheng, Wu, Yanqing, Tai, Renzhong. Influence of symmetry and duty cycles on the pattern generation in achromatic Talbot lithography. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B[J]. 2017, 35(2): https://www.webofscience.com/wos/woscc/full-record/WOS:000397858500043.
[20] Xue, Chaofan, Zhao, Jun, Wu, Yanqing, Yu, Huaina, Yang, Shumin, Wang, Liansheng, Zhao, Wencong, Wu, Qiang, Zhu, Zhichao, Liu, Bo, Zhang, Xia, Zhou, Wenchao, Tai, Renzhong. Fabrication of large-area high-aspect-ratio periodic nanostructures on various substrates by soft X-ray interference lithography. APPLIED SURFACE SCIENCE[J]. 2017, 425(-): 553-557, http://dx.doi.org/10.1016/j.apsusc.2017.07.010.
[21] Zhao, Jun, Wu, Yanqing, Xue, Chaofan, Yang, Shumin, Wang, Liansheng, Zhu, Fangyuan, Zhu, Zhichao, Liu, Bo, Wang, Yong, Tai, Renzhong. Fabrication of high aspect ratio nanoscale periodic structures by the soft X-ray interference lithography. MICROELECTRONIC ENGINEERING[J]. 2017, 170: 49-53, http://dx.doi.org/10.1016/j.mee.2016.12.028.
[22] Liu, Xing, Yu, Liju, Yang, Shumin, Yu, Huaina, Zhao, Jun, Wang, Liansheng, Wu, Yanqing, Tai, Renzhong. High sensitivity and homogeneity of surface enhanced Raman scattering on three-dimensional array-film hybrid platform. APPLIED PHYSICS LETTERS[J]. 2017, 110(8): http://dx.doi.org/10.1063/1.4977424.
[23] Li, Junqin, Wang, Yong, Cao, Jiefeng, Meng, Xiangyu, Zhu, Fangyuan, Wu, Yanqing, Tai, Renzhong. Independent control of the vortex chirality and polarity in a pair of magnetic nanodots. JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS[J]. 2017, 435(-): 167-172, http://dx.doi.org/10.1016/j.jmmm.2017.03.080.
[24] Xue, Chaofan, Wu, Yanqing, Zhu, Fangyuan, Yang, Shumin, Liu, Haigang, Zhao, Jun, Wang, Liansheng, Tai, Renzhong. Development of broadband X-ray interference lithography large area exposure system. REVIEW OF SCIENTIFIC INSTRUMENTS[J]. 2016, 87(4): http://ir.sinap.ac.cn/handle/331007/25683.
[25] Fan, Daniel, Buitrago, Elizabeth, Yang, Shumin, Karim, Waiz, Wu, Yanqing, Tai, Renzhong, Ekinci, Yasin. Patterning of nanodot-arrays using EUV achromatic Talbot lithography at the Swiss Light Source and Shanghai Synchrotron Radiation Facility. MICROELECTRONIC ENGINEERING[J]. 2016, 155: 55-60, http://dx.doi.org/10.1016/j.mee.2016.02.026.
[26] Cao, Jiefeng, Wang, Yong, Zou, Ying, Zhang, Xiangzhi, Wu, Yanqing, Tai, Renzhong. Optimization of the design for beamline with fast polarization switching elliptically polarized undulators. JOURNALOFSYNCHROTRONRADIATION[J]. 2016, 23(-): 436-442, http://ir.sinap.ac.cn/handle/331007/25796.
[27] 虞丽菊, 孟祥雨, 李俊琴, 曹杰峰, 王勇, 敬超, 吴衍青, 邰仁忠. 蒙特卡罗模拟人工自旋冰的退磁过程. 核技术[J]. 2016, 39(6): 75-80, http://ir.sinap.ac.cn/handle/331007/26229.
[28] Wu, Shuang, Liu, Bo, Zhu, Zhichao, Cheng, Chuanwei, Chen, Hong, Gu, Mu, Chen, Liang, Liu, Jinling, Ouyang, Xiaoping, Xue, Chaofan, Wu, Yanqing. Guided-mode resonance assisted directional emission of a wavelength-shifting film for application in scintillation detection. OPTICS EXPRESS[J]. 2016, 24(1): 231-238, http://ir.sinap.ac.cn/handle/331007/25737.
[29] Zhu, Zhichao, Wu, Shuang, Xue, Chaofan, Zhao, Jun, Wang, Liansheng, Wu, Yanqing, Liu, Bo, Cheng, Chuanwei, Gu, Mu, Chen, Hong, Tai, Renzhong. Enhanced light extraction of scintillator using large-area photonic crystal structures fabricated by soft-X-ray interference lithography. APPLIED PHYSICS LETTERS[J]. 2015, 106(24): http://ir.sinap.ac.cn/handle/331007/24454.
[30] Xue, Chaofan, Wu, Yanqing, Zou, Ying, Xue, Lian, Guo, Zhi, Wang, Yong, Tai, Renzhong. Applications of VUV extra-focus mechanism: high-performance dual-mode monochromator from VUV to soft X-ray. JOURNAL OF SYNCHROTRON RADIATION[J]. 2015, 22: 1353-1358, http://www.irgrid.ac.cn/handle/1471x/1034796.
[31] 陈媚, 于怀娜, 赵俊, 王连升, 杜国浩, 谢红兰, 吴衍青, 邰仁忠. 光子晶体制备方法对同步辐射闪烁体探测器成像分辨率的影响. 核技术[J]. 2015, 38(7): 42134-, http://ir.sinap.ac.cn/handle/331007/24293.
[32] Yang Xiaowei, Huang Qiushi, Kozhevnikov Igor V, Wang Zhanshan, Zhao Jun, Wu Yanqing, Hudec R, Pina L. Development of XUV multilayer gratings with high resolution and high efficiency. EUV AND X-RAY OPTICS: SYNERGY BETWEEN LABORATORY AND SPACE IVnull. 2015, 9510: http://ir.sinap.ac.cn/handle/331007/25101.
[33] Xue, Chaofan, Wu, Yanqing, Zou, Ying, Xue, Lian, Wang, Yong, Xu, Zijian, Tai, Renzhong. A new extra-focus monochromator designed for high-performance VUV beamlines. JOURNAL OF SYNCHROTRON RADIATION[J]. 2015, 22(2): 328-335, http://ir.sinap.ac.cn/handle/331007/24375.
[34] Meng, Xiangyu, Xue, Chaofan, Yu, Huaina, Wang, Yong, Wu, Yanqing, Tai, Renzhong. Numerical analysis of partially coherent radiation at soft x-ray beamline. OPTICS EXPRESS[J]. 2015, 23(23): 29675-29686, http://ir.sinap.ac.cn/handle/331007/25006.
[35] Yang, Tieying, Zhao, Jun, Li, Xiaolong, Gao, Xingyu, Xue, Chaofan, Wu, Yanqing, Tai, Renzhong. Preparation and characterization of p-type transparent conducting SnO thin films. MATERIALS LETTERS[J]. 2015, 139: 39-41, http://dx.doi.org/10.1016/j.matlet.2014.10.040.
[36] Yang ShuMin, Wang LianSheng, Zhao Jun, Xue ChaoFan, Liu HaiGang, Xu ZiJian, Wu YanQing, Tai RenZhong. Developments at SSRF in soft X-ray interference lithography. NUCLEAR SCIENCE AND TECHNIQUES[J]. 2015, 26(1): 5-11, http://ir.sinap.ac.cn/handle/331007/24428.
[37] Chen Li, Xu Jian, Yuan Hua, Yang ShuMin, Wang LianSheng, Wu YanQing, Zhao Jun, Chen Ming, Liu HaiGang, Li ShaYu, Tai RenZhong, Wang ShuangQing, Yang GuoQiang. Outgassing analysis of molecular glass photoresists under EUV irradiation. SCIENCE CHINA-CHEMISTRY[J]. 2014, 57(12): 1746-1750, https://www.webofscience.com/wos/woscc/full-record/WOS:000346047500018.
[38] Xue, L, Reininger, R, Wu, Y Q, Zou, Y, Xu, Z M, Shi, Y B, Dong, J, Ding, H, Sun, J L, Guo, F Z, Wang, Y, Tai, R Z. Design of an ultrahigh-energy-resolution and wide-energy-range soft X-ray beamline. JOURNAL OF SYNCHROTRON RADIATION[J]. 2014, 21: 273-279, http://ir.iphy.ac.cn/handle/311004/59285.
[39] Liu, Haigang, Xu, Zijian, Zhang, Xiangzhi, Wu, Yanqing, Guo, Zhi, Tai, Renzhong. Effects of missing low-frequency information on ptychographic and plane-wave coherent diffraction imaging. APPLIED OPTICS[J]. 2013, 52(11): 2416-2427, https://www.webofscience.com/wos/woscc/full-record/WOS:000317473000025.
[40] 郭春磊, 孟祥雨, 吴衍青, 王勇, 邰仁忠. 上海光源软X射线干涉光刻线站波荡器光源及束线相干性研究. 核技术[J]. 2013, 36(9): 41708-, http://ir.sinap.ac.cn/handle/331007/13546.
[41] 孟祥雨, 郭春磊, 吴衍青, 吴衍青, 邰仁忠. 同步辐射光束线中部分相干光的传播研究. 光学学报[J]. 2013, 33(7): 318-325, http://ir.sinap.ac.cn/handle/331007/13564.
[42] 薛超凡, 王勇, 吴衍青, 许子健, 邰仁忠. 软X射线光束线能量分辨率测量中气体压强对谱线的影响研究. 核技术[J]. 2011, 34(8): 561-564, http://lib.cqvip.com/Qikan/Article/Detail?id=38767479.
[43] 谭兴兴, 刘海岗, 郭智, 吴衍青, 许子健, 王勇, 邰仁忠. 基于上海光源扫描透射X射线显微术的相干衍射成像模拟. 光学学报[J]. 2011, 31(4): 228-233, http://lib.cqvip.com/Qikan/Article/Detail?id=37320081.
[44] Wang Yuandong, Liu Dianwei, Song Kaishan, Zhang Bai, Wang Zongming, Jiang Guangjia, Tang Xuguang, Lei Xiaochun, Wu Yanqing. Light Absorption by Suspended Particulate Matter in Chagan Lake, Jilin. SPECTROSCOPYANDSPECTRALANALYSIS[J]. 2011, 31(1): 162-167, https://www.webofscience.com/wos/woscc/full-record/WOS:000286290900038.
[45] Xue, Chaofan, Wang, Yong, Guo, Zhi, Wu, Yanqing, Zhen, Xiangjun, Chen, Min, Chen, Jiahua, Xue, Song, Peng, Zhongqi, Lu, Qipeng, Tai, Renzhong. High-performance soft x-ray spectromicroscopy beamline at SSRF. REVIEW OF SCIENTIFIC INSTRUMENTS[J]. 2010, 81(10): http://ir.ciomp.ac.cn/handle/181722/24762.
[46] 朱伟忠, 吴衍青, 史沛熊, 郭智, 邰仁忠, 徐洪杰. 基于高级硅刻蚀和硅氧化工艺的软X射线干涉光刻分束光栅的优化设计. 核技术[J]. 2008, 31(6): 415-419, http://lib.cqvip.com/Qikan/Article/Detail?id=27561628.
[47] 陈敏, 王纳秀, 邰仁忠, 徐洪杰, 朱伟忠, 吴衍青. 13．4nm软X射线干涉光刻透射光栅的优化设计. 光学学报[J]. 2008, 28(7): 1225-1230, http://lib.cqvip.com/Qikan/Article/Detail?id=27759480.
[48] Zhu WeiZhong, Wu YanQing, Guo Zhi, Zhu XiaoLi, Ma Jie, Xie ChangQing, Shi PeiXiong, Zhou HongJun, Huo TongLin, Tai RenZhong, Xu HongJie. The design, fabrication and performance of a large area 10000 line/mm metal transmission diffraction gratings for soft X-ray. ACTA PHYSICA SINICA[J]. 2008, 57(10): 6386-6392, http://www.irgrid.ac.cn/handle/1471x/394194.
[49] Zhu WeiZhong, Wu YanQing, Guo Zhi, Zhu XiaoLi, Ma Jie, Xie ChangQing, Shi PeiXiong, Zhou HongJun, Huo TongLin, Tai RenZhong, Xu HongJie. The design, fabrication and performance of a large area 10000 line/mm metal transmission diffraction gratings for soft X-ray. ACTA PHYSICA SINICA[J]. 2008, 57(10): 6386-6392, http://dx.doi.org/10.7498/aps.57.6386.
[50] Wu YanQing, Xiao TiQiao. The effect of ion oscillation on the self-sustenance of low pressure electronegative discharge. ACTA PHYSICA SINICA[J]. 2006, 55(7): 3443-3450, http://www.irgrid.ac.cn/handle/1471x/397650.
[51] 吴衍青. 离子振荡对低压脉冲负电性放电条件的影响. 物理学报. 2006, [52] Wu YanQing, Xiao TiQiao. The effect of ion oscillation on the self-sustenance of low pressure electronegative discharge. ACTA PHYSICA SINICA[J]. 2006, 55(7): 3443-3450, http://dx.doi.org/10.7498/aps.55.3443.
[53] Wu, YQ, Han, SS, Song, XY, Xu, ZZ, Tang, YH, Bing, S. The control of laser-plasma parametric instabilities and the temperature of suprathermal electrons with ultrabroad bandwidth frequency modulated laser pulse. PLASMAPHYSICSANDCONTROLLEDFUSION[J]. 2001, 43(4): 469-482, https://www.webofscience.com/wos/woscc/full-record/WOS:000168498300009.
[54] 吴衍青, 韩申生, 沈百飞, 张令清, 宋向阳, 徐至展. Radiative cooling instability in large scale line-shaped laser plasma. CHINESE PHYSICS LETTERS[J]. 1997, 14(6): 428-431, 

   

（ 1 ） 中科院大科学装置维修改造项目-软X射线干涉光刻分支线站的建设, 参与, 部委级, 2009-05--2011-10
（ 2 ） 基于新型宽带相干光学技术的软X射线干涉光刻, 主持, 国家级, 2013-01--2016-12
（ 3 ） 中国科学院大科学装置开放研究项目, 参与, 研究所（学校）, 2011-01--2015-06
（ 4 ） 小像素探测器子课题：高分辨成像探测器, 主持, 国家级, 2016-07--2020-12
（ 5 ） 大科学中心重点研发项目 - 高效率新原理面探测器研究, 主持, 部委级, 2015-08--2018-08
（ 6 ） 成像闪烁体表面修饰的物理机制和制备方法研究, 主持, 国家级, 2018-01--2021-12
（ 7 ） X 射线衍射光谱与成像纳米器件集成制造, 参与, 国家级, 2017-06--2022-06

（1）High efficient scintillant imagers covered with 2D photonic crystals   2017-08-17
（2）VUV Extra-focus Principle and its Application to High-performance Grating Monochromators   Chaofan Xue, Yanqing Wu,* Ying Zou, Lian Xue, Yong Wang, Renzhong Tai   2015-07-06
（3）Current Status of SSRF Dreamline   Yanqing Wu, yong Wang, Tairenzhong, et al   2012-08-10

已指导学生

郭春磊  硕士研究生  080300-光学工程  

现指导学生

张磊  博士研究生  070207-光学  

石昊  硕士研究生  085202-光学工程