基本信息
宁瑾 女 硕导 半导体研究所
电子邮件:ningjin@semi.ac.cn
通信地址:北京市清华东路甲35号集成技术中心
邮政编码:100083

招生信息

   
招生专业
080903-微电子学与固体电子学
招生方向
MEMS器件与系统

教育背景

2000-09--2003-07 中国科学院半导体研究所 博士
1997-09--2000-07 航天部兰州物理研究所 硕士
1991-09--1995-07 郑州大学 学士
学历
半导体所 --20030630 博士
学位
-- 工学博士学位

工作经历

   
工作简历
2003-07--今 中国科学院半导体研究所 任职
1995-07--1997-09 河南省民权县电信局 工作

专利与奖励

   
专利成果
[1] 杨帆, 司朝伟, 韩国威, 杨富华, 宁瑾. 谐振结构及其制作方法. CN: CN111865249A, 2020-10-30.

[2] 张萌, 韩国威, 司朝伟, 宁瑾, 杨富华. 电容式微纳超声换能器及其制备方法. CN: CN110773408A, 2020-02-11.

[3] 杨健, 韩国威, 司朝伟, 王晓东, 宁瑾, 颜伟, 刘雯, 杨富华. 压电MEMS解耦结构及MEMS陀螺仪. CN: CN109682364A, 2019-04-26.

[4] 张萌, 司朝伟, 韩国威, 宁瑾, 杨富华, 刘雯, 颜伟. 盖板结构及其制作方法、电容式传感器. CN: CN109626318A, 2019-04-16.

[5] 节俊尧, 刘文文, 魏清泉, 宁瑾, 俞育德. 一种具有温度控制功能的硅基生化检测芯片. CN: CN109234154A, 2019-01-18.

[6] 节俊尧, 魏清泉, 刘文文, 宁瑾, 俞育德. 温度控制芯片、其制备方法及包含其的温度控制芯片系统. CN: CN109189124A, 2019-01-11.

[7] 童鑫, 刘楠, 苏言, 韩国威, 司朝伟, 宁瑾, 杨富华. 一种实现指向控制功能的无线人机交互设备和方法. CN: CN107688348A, 2018-02-13.

[8] 司朝伟, 韩国威, 赵永梅, 宁瑾, 杨富华. 双自由度MEMS压电梁结构. CN: CN105823904A, 2016-08-03.

[9] 司朝伟, 韩国威, 赵永梅, 宁瑾, 杨富华. 压电执行梁结构. CN: CN105810813A, 2016-07-27.

[10] 王小青, 宁瑾, 俞育德, 魏清泉, 刘文文, 刘元杰, 蒋莉娟. 驻极体电容式超声传感器及其制备方法. CN: CN105578368A, 2016-05-11.

[11] 王小青, 宁瑾, 俞育德, 魏清泉, 刘文文, 刘元杰, 蒋莉娟. MEMS电容式超声波传感器及其制备方法. CN: CN105540528A, 2016-05-04.

[12] 张萌, 宁瑾, 司朝伟, 韩国威, 赵永梅. 环形检测电极面内伸缩谐振器设计及其制备方法. CN: CN105306003A, 2016-02-03.

[13] 王小青, 宁瑾, 徐团伟, 俞育德, 魏清泉, 刘文文, 蒋莉娟. 一种驻极体电容式超声传感器及其制作方法. CN: CN105025423A, 2015-11-04.

[14] 王小青, 宁瑾, 徐团伟, 俞育德, 魏清泉, 刘文文, 蒋莉娟. 一种超声波触觉反馈系统及其制造方法. CN: CN104866098A, 2015-08-26.

[15] 王小青, 孙英男, 宁瑾, 俞育德. 一种电容式超声传感器及其制作方法. CN: CN104655261A, 2015-05-27.

[16] 司朝伟, 韩国威, 宁瑾, 赵永梅, 杨富华. 应用在MEMS器件中的弱耦合弹性梁结构. CN: CN104482930A, 2015-04-01.

[17] 杨健, 司朝伟, 韩国威, 宁瑾, 赵永梅, 梁秀琴, 王晓东, 杨富华. 在衬底上制备多级台阶的方法. CN: CN104445051A, 2015-03-25.

[18] 司朝伟, 韩国威, 宁瑾, 赵永梅, 杨富华. 采用晶圆级封装的MEMS器件. CN: CN104401930A, 2015-03-11.

[19] 杨健, 司朝伟, 韩国威, 宁瑾, 赵永梅, 梁秀琴. 利用相对易腐蚀的金属制备另一种金属图形的剥离方法. CN: CN104377117A, 2015-02-25.

[20] 赵永梅, 季安, 张明亮, 杨香, 宁瑾, 王晓东, 杨富华. 一种低量程高灵敏度MEMS压力传感器及其制作方法. CN: CN103644999A, 2014-03-19.

[21] 赵永梅, 杨香, 季安, 张明亮, 韩国威, 宁瑾, 王晓东, 杨富华. 一种制备图形化多孔硅结构的方法. CN: CN103641063A, 2014-03-19.

[22] 钟卫威, 司朝伟, 韩国威, 宁瑾, 杨富华. 谐振式微机电系统机翼风力传感器及其制作方法. CN: CN103115719A, 2013-05-22.

[23] 康中波, 司朝伟, 宁瑾, 韩国威. 采用压电材料制备的阵列结构微机电谐振器. CN: CN103023454A, 2013-04-03.

[24] 司朝伟, 韩国威, 宁瑾, 刘晓东. 采用窄脉冲激励MEMS谐振器的振荡器电路. CN: CN102594290A, 2012-07-18.

[25] 司朝伟, 韩国威, 宁瑾, 刘晓东. 基于寄生电容调节的高精度温度补偿MEMS振荡器. CN: CN102594260A, 2012-07-18.

[26] 王 亮, 宁瑾, 孙国胜, 王 雷, 赵万顺, 赵永梅, 刘兴昉. 多晶立方相碳化硅微机电系统谐振器件及其制作方法. CN: CN101447775B, 2011-07-20.

[27] 韩国威, 宁瑾, 孙国胜, 赵永梅, 杨富华. 基于差分方法的MEMS器件信号检测电路. CN: CN102062826A, 2011-05-18.

[28] 宁瑾, 李永梅, 韩国威, 杨富华. 基于谐振原理工作的MEMS滤波器模块. CN: CN101984557A, 2011-03-09.

[29] 纪 刚, 孙国胜, 宁瑾, 刘兴昉, 赵永梅, 王 雷, 赵万顺, 曾一平, 李晋闽. 电学测试的汞探针装置. CN: CN101644691A, 2010-02-10.

[30] 赵永梅, 宁瑾, 孙国胜, 王 亮, 刘兴昉, 赵万顺, 王 雷, 李晋闽, 曾一平. 碳化硅射频微电子机械系统滤波器的制作方法. CN: CN101471637A, 2009-07-01.

[31] 赵永梅, 孙国胜, 宁瑾, 王 亮, 刘兴昉, 赵万顺, 王 雷, 李晋闽, 曾一平. 氧化硅上制备低阻碳化硅的方法. CN: CN101440481A, 2009-05-27.

出版信息

   
发表论文
[1] Hou, Zhongxuan, Zhang, Yongkang, Si, Chaowei, Han, Guowei, Zhao, Yongmei, Lu, Xiaorui, Liu, Jiahui, Ning, Jin, Wei, Tongbo. A High-Reliability RF MEMS Metal-Contact Switch Based on Al-Sc Alloy. MICROMACHINES[J]. 2023, 14(6): http://dx.doi.org/10.3390/mi14061098.
[2] Zhang, Yongkang, Hou, Zhongxuan, Si, Chaowei, Han, Guowei, Zhao, Yongmei, Lu, Xiaorui, Liu, Jiahui, Ning, Jin, Yang, Fuhua. Effects of Mask Material on Lateral Undercut of Silicon Dry Etching. MICROMACHINES[J]. 2023, 14(2): http://dx.doi.org/10.3390/mi14020306.
[3] Chaowei Si, Yingchun Fu, Guowei Han, Yongmei Zhao, Jin Ning, Zhenyu Wei, Fuhua Yang. A new DRIE cut-off material in SOG MEMS process. 半导体学报:英文版[J]. 2023, 44(4): 98-102, http://lib.cqvip.com/Qikan/Article/Detail?id=7109308542.
[4] 刘佳慧, 宁瑾. Mo2C/MoO3@rGO Ternary Nanocomposites as High-Performance Gas Sensor for Trace NH3 Detection at Room Temperature. ACS Appl. Electron. Mater[J]. 2023, 5(9): 5061-5073, [5] Wei, Zhenyu, Si, Chaowei, Han, Guowei, Zhao, Yongmei, Ning, Jin, Jia, Lu, Zeng, Yanping, Yang, Fuhua. A novel multi-axis pendulum sandwich structure accelerometer. JOURNAL OF MICROMECHANICS AND MICROENGINEERING[J]. 2023, 33(10): http://dx.doi.org/10.1088/1361-6439/acec7e.
[6] Fu, Yingchun, Han, Guowei, Gu, Jiebin, Zhao, Yongmei, Ning, Jin, Wei, Zhenyu, Yang, Fuhua, Si, Chaowei. A High-Performance MEMS Accelerometer with an Improved TGV Process of Low Cost. MICROMACHINES[J]. 2022, 13(7): [7] lu xiaorui, Jiahui Liu, Guowei Han, Chaowei Si, Yongmei Zhao, Zhongxuan Hou, Yongkang Zhang, 宁瑾, Fuhua Yang. Design and Fabrication of a Novel Poly-Si Microhotplate with Heat Compensation Structure. Micromachines[J]. 2022, 13(11): [8] Xu, Pengfei, Wei, Zhenyu, Guo, Zhiyu, Jia, Lu, Han, Guowei, Si, Chaowei, Ning, Jin, Yang, Fuhua. A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes. MICROMACHINES[J]. 2021, 12(5): http://dx.doi.org/10.3390/mi12050506.
[9] He, Yurong, Si, Chaowei, Han, Guowei, Zhao, Yongmei, Ning, Jin, Yang, Fuhua. A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass-Silicon Composite Wafers. MICROMACHINES[J]. 2021, 12(2): https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7911678/.
[10] Tong, Xin, Su, Yan, Li, Zhaofeng, Si, Chaowei, Han, Guowei, Ning, Jin, Yang, Fuhua. A Double-Step Unscented Kalman Filter and HMM-Based Zero-Velocity Update for Pedestrian Dead Reckoning Using MEMS Sensors. IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS[J]. 2020, 67(1): 581-591, http://dx.doi.org/10.1109/TIE.2019.2897550.
[11] Yan Su, Pengfei Xu, Guowei Han, Chaowei Si, Jin Ning, Fuhua Yang. The Characteristics and Locking Process of Nonlinear MEMS Gyroscopes. MICROMACHINES[J]. 2020, 11(2): 233-, https://doaj.org/article/6f2b7bd1fc2d4168ab81d4459c0fe20a.
[12] 蔡萌, 司朝伟, 韩国威, 宁瑾, 杨富华. 基于ITO掩膜的键合片深硅刻蚀. 微纳电子技术[J]. 2020, 57(11): 905-910, http://lib.cqvip.com/Qikan/Article/Detail?id=7103234546.
[13] Meng Zhang, Jian Yang, Yurong He, Fan Yang, Fuhua Yang, Guowei Han, Chaowei Si, Jin Ning. Research on a 3D Encapsulation Technique for Capacitive MEMS Sensors Based on Through Silicon Via. SENSORS[J]. 2019, 19(1): 93-, http://dx.doi.org/10.3390/s19010093.
[14] Jian Yang, Meng Zhang, Chaowei Si, Guowei Han, Jin Ning, Fuhua Yang, Xiaodong Wang. A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS[J]. 2019, 28(5): 776-781, https://www.webofscience.com/wos/woscc/full-record/WOS:000489837100005.
[15] Yang, Jian, Si, Chaowei, Han, Guowei, Zhang, Meng, Ning, Jin, Zhao, Yongmei, Yang, Fuhua, Wang, Xiaodong. A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope. MICROMACHINES[J]. 2019, 10(4): https://doaj.org/article/dd019418f58043d6ab2c981f59ae68ae.
[16] Zhang, Meng, Yang, Jian, He, Yurong, Yang, Fan, Zhao, Yongmei, Xue, Fen, Han, Guowei, Si, Chaowei, Ning, Jin. Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication. MICROMACHINES[J]. 2019, 10(6): https://doaj.org/article/2e29fd17e7e54fac99a7fc415ef50e18.
[17] Yang, Jian, Zhang, Meng, He, Yurong, Su, Yan, Han, Guowei, Si, Chaowei, Ning, Jin, Yang, Fuhua, Wang, Xiaodong. A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer. MICROMACHINES[J]. 2019, 10(9): https://doaj.org/article/e410aaefa6f5426aa4bd87b33d9bc3f8.
[18] Su, Yan, Tong, Xin, Liu, Nan, Han, Guowei, Si, Chaowei, Ning, Jin, Li, Zhaofeng, Yang, Fuhua. PSPICE Hybrid Modeling and Simulation of Capacitive Micro-Gyroscopes. SENSORS[J]. 2018, 18(4): https://doaj.org/article/3a3c644075e94cc3ada5b133add9b49d.
[19] Nan Liu, Yan Su, Xin Tong, Guowei Han, Chaowei Si, Zhaofeng Li, Jin Ning. The effect of parasitic charge on the output stability of MEMS gyroscopes. JOURNAL OF SEMICONDUCTORS[J]. 2018, 39(8): 47-52, http://lib.cqvip.com/Qikan/Article/Detail?id=675938423.
[20] Tong, Xin, Li, Zhaofeng, Han, Guowei, Liu, Nan, Su, Yan, Ning, Jin, Yang, Fuhua. Adaptive EKF Based on HMM Recognizer for Attitude Estimation Using MEMS MARG Sensors. IEEE SENSORS JOURNAL[J]. 2018, 18(8): 3299-3310, https://www.webofscience.com/wos/woscc/full-record/WOS:000428585900027.
[21] 宋培帅, 马静, 马哲, 张淑媛, 司朝伟, 韩国威, 宁瑾, 杨富华, 王晓东. 量子定位导航技术研究与发展现状. 激光与光电子学进展[J]. 2018, 55(9): 090003-1, http://lib.cqvip.com/Qikan/Article/Detail?id=676432093.
[22] Yan Su, Xin Tong, Nan Liu, Guowei Han, Chaowei Si, Jin Ning, Zhaofeng Li, Fuhua Yang. PSPICE Hybrid Modeling and Simulation of Capacitive Micro-Gyroscopes. SENSORS (BASEL, SWITZERLAND). 2018, 18(4): https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5948506/.
[23] Meng Zhang, Jian Yang, Yurong He, Fan Yang, Fuhua Yang, Guowei Han, Chaowei Si, Jin Ning. Research on a 3D Encapsulation Technique for Capacitive MEMS Sensors Based on Through Silicon Via †. SENSORS (BASEL, SWITZERLAND). 2018, 19(1): https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6339255/.
[24] Yang, Jian, Si, Chaowei, Yang, Fan, Han, Guowei, Ning, Jin, Yang, Fuhua, Wang, Xiaodong. Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope. MICROMACHINES[J]. 2018, 9(2): https://doaj.org/article/c6c3d859cffe463a834d9858071dfdd5.
[25] 宁瑾. 寄生电荷对MEMS陀螺仪输出稳定性的影响. Journal of Semiconductors. 2018, [26] 宁瑾. Research on wafer-level MEMS packaging with through-glass visa. Micromachines. 2018, [27] 宁瑾. 硅微机械陀螺仪温度补偿方法的研究现状. 微纳电子技术. 2017, [28] Zheng, Zhongshan, Ning, Jin, Zhang, Baiqiang, Liu, Zhongli, Luo, Jiajun, Han, Zhengsheng. The radiation hardness of the nitrogen-fluorine implanted buried oxide layer in silicon-on-insulator materials against higher total dose irradiation. SCIENCE CHINA-MATERIALS[J]. 2016, 59(8): 657-664, http://159.226.55.106/handle/172511/16154.
[29] Hou Yunhong, Zhang Meng, Han Guowei, Si Chaowei, Zhao Yongmei, Ning Jin. A review: aluminum nitride MEMS contour-mode resonator. JOURNAL OF SEMICONDUCTORS[J]. 2016, 37(10): [30] Ning Jin, Bo Tao, Wei Ren, Meichen Feng, Rui Sun, Liang He, Wei Zhuang, Qiang Yu. Mapping Irrigated and Rainfed Wheat Areas Using Multi-Temporal Satellite Data. REMOTE SENSING[J]. 2016, 8(3): https://doaj.org/article/1e7656de3e8e413a80275bc36d2e31b4.
[31] Wang Xiaoqing, Yu Yude, Ning Jin. Researching the silicon direct wafer bonding with interfacial SiO2 layer. JOURNAL OF SEMICONDUCTORS[J]. 2016, 37(5): 56001-1-56001-4, http://ir.semi.ac.cn/handle/172111/27853.
[32] 宁瑾. 综述:氮化铝MEMS伸缩模态谐振器. Journal of Semiconductors. 2016, [33] Wang, Xiaoqing, Yu, Yude, Ning, Jin. Fabrication and Characterization of Capacitive Micromachined Ultrasonic Transducers with Low-Temperature Wafer Direct Bonding. MICROMACHINES[J]. 2016, 7(12): https://doaj.org/article/2b76c110171d4145bf4e80a4cf9940d1.
[34] 宁瑾. Research on the piezoelectric properties of AlN thin films for MEMS application. Micromachines. 2015, [35] Xiaodong Wang, Shengcheng Mao, Peng Chen, Yinong Liu, Jin Ning, Haixin Li, Ketao Zang, Ze Zhang, Xiaodong Han. Evolution of microstructure and mechanical properties of a dissimilar aluminum alloy weldment. MATERIALS AND DESIGN[J]. 2015, 90: 230-237, http://ir.semi.ac.cn/handle/172111/26999.
[36] Yang, Jian, Si, Chaowei, Han, Guowei, Zhang, Meng, Ma, Liuhong, Zhao, Yongmei, Ning, Jin. Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators. MICROMACHINES[J]. 2015, 6(2): 281-290, https://doaj.org/article/94c1d8df237e4a97a00ca16d322f1119.
[37] Si, Chaowei, Han, Guowei, Ning, Jin, Yang, Fuhua. Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope. SENSORS[J]. 2013, 13(8): 10550-10560, http://ir.semi.ac.cn/handle/172111/24729.
[38] 宁瑾. Fabrication and Characterization of a SOI MEMS Gyroscope. Jounal of semiconductors. 2013, [39] Han Guowei, Si Chaowei, Ning Jin, Zhong Weiwei, Sun Guosheng, Zhao Yongmei, Yang Fuhua. Feed-through cancellation of a MEMS filter using the difference method and analysis of the induced notch. JOURNAL OF SEMICONDUCTORS[J]. 2013, 34(4): 045006-, http://ir.semi.ac.cn/handle/172111/24810.
[40] 张百强, 郑中山, 于芳, 宁瑾, 唐海马, 杨志安. 氮氟复合注入对注氧隔离 SOI 材料埋氧层内固定正电荷密度的影响. 物理学报[J]. 2013, 62(11): 117303-1, http://www.irgrid.ac.cn/handle/1471x/1089302.
[41] Han, Guowei, Si, Chaowei, Ning, Jing, Zhao, Yongmei, Sun, Guosheng, Yang, Fuhua. Optimization for MEMS filter to reduce feed-through and an analysis method based on polar diagram. ADVANCED MATERIALS RESEARCH[J]. 2013, 677: 74-78, http://ir.semi.ac.cn/handle/172111/24886.
[42] Zhang BaiQiang, Zheng ZhongShan, Yu Fang, Ning Jin, Tang HaiMa, Yang ZhiAn. Effect of co-implantation of nitrogen and fluorine on the fixed positive charge density of the buried oxide layer in SIMOX SOI materials. ACTA PHYSICA SINICA[J]. 2013, 62(11): http://ir.semi.ac.cn/handle/172111/24714.
[43] Zhong Weiwei, Han Guowei, Si Chaowei, Ning Jin, Yang Fuhua. Fabrication and characterization of an SOI MEMS gyroscope. JOURNAL OF SEMICONDUCTORS[J]. 2013, 34(6): 064004-, http://ir.semi.ac.cn/handle/172111/24981.
[44] 宁瑾. 多自由度MEMS陀螺的带宽优化设计. Sensors (Switzerland). 2013, [45] 宁瑾. Quality factor optimization techniques for MEMS gyroscopes of frame structures. Advanced Materials Research. 2012, [46] 宁瑾. Design of a MEMS resonant wind sensor on airplane wing. CSMNT 2012. 2012, [47] 康中波, 韩国威, 司朝伟, 钟卫威, 赵永梅, 宁瑾. 基于谐振原理的RF MEMS滤波器的研制. 微纳电子技术[J]. 2012, 49(7): 467-470, http://lib.cqvip.com/Qikan/Article/Detail?id=42529359.
[48] Zhao, Yongmei, Ning, Jin, Han, Guowei, Si, Chaowei. Fabrication and characterisation of polysilicon-based clamped-clamped filter. KEY ENGINEERING MATERIALS[J]. 2011, 483: 112-116, http://ir.semi.ac.cn/handle/172111/23067.
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指导学生

现指导学生

康中波  硕士研究生  080903-微电子学与固体电子学  

钟卫威  硕士研究生  080903-微电子学与固体电子学