近期内主要开展：
（1）MEMS振荡器、滤波器
（2）MEMS衰减器

（3）扫描探针

（4）MEMS生化传感器，等

招生专业：


微电子与固体电子学

半导体器件与物理

材料科学 


研究方向：

MEMS传感器

080903-微电子学与固体电子学
085209-集成电路工程

微纳机电系统
微机电系统器件

1994-09--1997-06   中国科学院物理研究所   博士
1990-09--1993-06   中国科学院金属研究所   硕士
1986-09--1990-06   北京理工大学   学士

-- 研究生

中国科学院物理研究所理学博士学位

工作经历

1.              1993年7月—1994年8月，电子工业部磁记录研究所，助研。

2.              1998年4月—2000年3月，日本东北大学，非常勤讲师。

3.              2000年4月—2002年7月，德国Freiburg大学微系统技术研究所（IMTEK）， Research Associate。

4.              2002年8月—2004年7月，IBM Zurich Research Laboratory和Basel大学， Research Associate。

5.              2004年—至今，中国科学院半导体研究所，研究员，中国科学院大学教授。

 

主要研究成果

长期从事MEMS器件研究，发表论文100余篇，SCI总引1000余次。合著两本丛书，应邀为《Encyclopedia of Nanotechnology》和《Handbook of MEMS》撰写文章。PCT国际专利1项，申请发明专利50项，授权38项。

1.        研制了MEMS谐振器件：高成品率制作了覆盖宽频率范围（MHz-GHz）、高Q值的不同结构微纳谐振器。研制了板级MEMS振荡器，实现了高频率稳定性和低相位噪声，比肩国际报道的最好结果。

2.        研制了高灵敏、快速MEMS生化检测系统，正在推进其实用化。

3.        研制了MEMS光衰减器阵列，正在推进器件在光通讯中的应用。

4.        研制了不同功能的高空间分辨率扫描探针，已应用于不同扫描力显微镜系统中，正在推向市场。

5.        承担了国家级和省部级项目20余项。

6.        2004年中科院“****”获得者

7.        2016年中国侨界贡献创新人才奖。

2004-07~现在, 中国科学院半导体研究所, 研究员
2002-08~2004-06,瑞士巴塞尔大学/IBM苏黎士实验室, 研究助理
2000-04~2002-07,德国弗莱堡大学, 研究助理
1998-04~2000-03,日本东北大学, 非常勤讲师
1993-07~1994-08,电子工业部磁记录研究所, 助理研究员

微机电系统基础
新兴射频和生化微机电系统传感器及其应用
微电子机械系统（MEMS）

   

（1） 第六届中国侨界创新人才奖, 其他, 2016
（2） 中国科学院****, 院级, 2004

[1] 杨晋玲. MEMS 磁场传感器、双轴磁场传感器和多轴磁场传感器. 2023112508343, 2023-09-26.
[2] 杨晋玲, 李金潮. 变形镜的设计方法. CN: CN116520562A, 2023-08-01.
[3] 杨晋玲. 变形镜及自适应光学系统. 202310467332X, 2023-04-27.
[4] 陈泽基, 阚枭, 王天昀, 袁泉, 杨晋玲, 杨富华. 阵列化的分布式兰姆模态射频微机电谐振器. CN: CN111490740B, 2023-01-10.
[5] 魏丙坤, 王晓东, 刘文立, 朱银芳, 杨晋玲, 倪明玖. 一种检测生产工况下金属薄板微缺陷的微纳器件. CN: CN115541067A, 2022-12-30.
[6] 杨晋玲. 一种检测生产工况下金属薄板微缺陷的微纳器件. 202211012250.8, 2022-08-23.
[7] 杨晋玲. 一种低动态电阻的静电式MEMS谐振器及其阵列. 202210291742.9, 2022-03-22.
[8] 杨晋玲, 逯玉洁, 朱银芳, 刘文立, 杨富华. 一种微机械谐振器的制备方法. CN: CN113872544A, 2021-12-31.
[9] 杨晋玲, 刘文立, 朱银芳, 杨富华. 一种MEMS谐振器制备方法. CN: CN113872545A, 2021-12-31.
[10] 杨晋玲, 刘美杰, 朱银芳, 杨富华. 镀膜探针的圆片级制备方法及镀膜探针. CN: CN113504394A, 2021-10-15.
[11] 王天昀, 陈泽基, 阚枭, 袁泉, 杨晋玲, 杨富华. 基于体声波振动模态耦合的RF-MEMS谐振器. CN: CN110661506B, 2021-09-10.
[12] 刘文立, 杨晋玲, 袁泉, 陈泽基, 杨富华. 环形结构酒杯模态射频微机电谐振器. CN: CN113271080A, 2021-08-17.
[13] 刘文立, 杨晋玲, 袁泉, 陈泽基, 杨富华. 面内拉伸模态射频微机电谐振器. CN: CN113114149A, 2021-07-13.
[14] 刘文立, 杨晋玲, 袁泉, 陈泽基, 杨富华. 基于压阻检测的谐振器单元及系统. CN: CN113114106A, 2021-07-13.
[15] 陈泽基, 杨晋玲, 袁泉, 刘文立, 杨富华. 微纳射频器件及其制备方法. CN: CN113086943A, 2021-07-09.
[16] 刘美杰, 杨晋玲, 朱银芳, 杨富华. 圆片级纳米针尖及其制作方法. CN: CN112986622A, 2021-06-18.
[17] 刘文立, 杨晋玲, 袁泉, 陈泽基, 杨富华. 一种多梁耦合的微机电谐振器. CN: CN112953433A, 2021-06-11.
[18] 贾倩倩, 杨晋玲, 袁泉, 陈泽基, 刘文立, 杨富华. 基于模态重分布的MEMS谐振器及其调节方法. CN: CN112865740A, 2021-05-28.
[19] 贾倩倩, 杨晋玲, 袁泉, 陈泽基, 刘文立, 杨富华. 基于周期性弹性波反射结构的静电式谐振器. CN: CN112838841A, 2021-05-25.
[20] 邵瑾, 赵东艳, 王于波. 一种湿度传感器. CN: CN112710706A, 2021-04-27.
[21] 赵东艳. 一种温度传感器. CN: CN112710405A, 2021-04-27.
[22] 陈泽基, 王天昀, 阚枭, 袁泉, 杨晋玲, 杨富华. 多梁结构组合的射频微机电系统谐振器及应用. CN: CN112422097A, 2021-02-26.
[23] 王栎皓, 朱银芳, 付登源, 杨晋玲, 赵松庆, 吴根水, 陈海燕. 激光器阵列驱动装置及其封装方法. CN: CN110690645B, 2020-12-15.
[24] 陈泽基, 阚枭, 王天昀, 袁泉, 杨晋玲, 杨富华. 阵列化的分布式兰姆模态射频微机电谐振器. CN: CN111490740A, 2020-08-04.
[25] 陈泽基, 阚枭, 王天昀, 袁泉, 杨晋玲, 杨富华. 阵列化的平面剪切模态射频微机电谐振器. CN: CN111490741A, 2020-08-04.
[26] 王天昀, 杨晋玲, 陈泽基, 贾倩倩, 袁泉, 杨富华. 基于电化学腐蚀的MEMS谐振器频率修调方法. CN: CN111355459A, 2020-06-30.
[27] 王栎皓, 朱银芳, 赵俊元, 李金潮, 杨晋玲, 杨富华. 基于谐振式传感器的生化检测系统及检测方法. CN: CN111190022A, 2020-05-22.
[28] 刘晓晨, 朱银芳, 王栎皓, 赵俊元, 杨晋玲, 杨富华. 一种微流控芯片及其制备方法. CN: CN109847817A, 2019-06-07.
[29] 赵俊元, 朱银芳, 王栎皓, 杨晋玲, 杨富华. 一种CMOS-MEMS集成芯片的规模化制造方法. CN: CN109573941A, 2019-04-05.
[30] 陈泽基, 阚枭, 袁泉, 杨晋玲, 杨富华. 用于降低能量损耗的RF-MEMS谐振器支撑结构. CN: CN109546986A, 2019-03-29.
[31] 王栎皓, 朱银芳, 赵俊元, 杨晋玲, 杨富华. 集成CMOS-MEMS的高灵敏谐振式传感器. CN: CN109283236A, 2019-01-29.
[32] 杨晋玲, 刘晓晨, 朱银芳, 张金英, 杨富华. 自激励自检测探针及其制作方法. CN: CN108120858A, 2018-06-05.
[33] 刘晓晨, 朱银芳, 王栎皓, 赵俊元, 杨晋玲, 杨富华. 一种微流控芯片及其制备方法. CN: CN105521840B, 2017-11-03.
[34] 杨晋玲, 王栎皓, 廖驹, 张金英, 朱银芳, 杨富华. 用于谐振式微纳生化器件的集成系统. CN: CN106370725A, 2017-02-01.
[35] 赵继聪, 袁泉, 杨晋玲, 杨富华. 一种封装结构及其应用. CN: CN105858588A, 2016-08-17.
[36] 王晶晶, 杨晋玲, 朱银芳, 张金英, 杨富华. 用于高灵敏生化检测的微型双端固支梁传感器的制作方法. CN: CN105858593A, 2016-08-17.
[37] 杨晋玲, 吕兴东, 魏伟伟, 张金英, 杨富华. 一种基于洛伦兹力的双向串联MEMS执行器. CN: CN105129719A, 2015-12-09.
[38] 何欢, 张金英, 杨晋玲, 杨富华. 集成超声换能器的AFM探针阵列. CN: CN104965105A, 2015-10-07.
[39] 张金英, 吕兴东, 杨晋玲, 杨富华. 一种基于微机电技术的M×N光交换阵列. CN: CN104950396A, 2015-09-30.
[40] 杨晋玲, 何欢, 张金英, 杨富华. 一种扫描探针及其制作方法. CN: CN104749400A, 2015-07-01.
[41] 骆伟, 袁泉, 赵晖, 杨晋玲, 杨富华. 频率可调的MEMS滤波器. CN: CN104617360A, 2015-05-13.
[42] 刘晓晨, 朱银芳, 王栎皓, 赵俊元, 杨晋玲, 杨富华. 一种微流控芯片及其制备方法. CN: CN104588137A, 2015-05-06.
[43] 赵晖, 杨晋玲, 杨富华. 一种频率可切换的微机械谐振器及其制备方法. CN: CN103762956A, 2014-04-30.
[44] 毛旭, 吕兴东, 魏伟伟, 杨晋玲, 杨富华. 阵列型微机电可变光衰减器. CN: CN103576243A, 2014-02-12.
[45] 毛旭, 魏伟伟, 吕兴东, 杨晋玲, 杨富华. 一种挡光式微机电可变光衰减器的制作方法. CN: CN103576242A, 2014-02-12.
[46] 毛旭, 吕兴东, 魏伟伟, 杨晋玲, 杨富华. 一种挡光式微机电可变光衰减器. CN: CN103576241A, 2014-02-12.
[47] 杨晋玲, 王晶晶, 王帅鹏, 朱银芳, 杨富华, 张宁. 用于肝癌早诊的便携式传感系统及其功能化修饰方法. CN: CN103543081A, 2014-01-29.
[48] 骆伟, 赵晖, 袁泉, 杨晋玲, 杨富华. 频率可调的MEMS谐振器. CN: CN103338022A, 2013-10-02.
[49] 赵晖, 杨晋玲, 骆伟, 杨富华. 频率可切换的微机械谐振器. CN: CN103326691A, 2013-09-25.
[50] 杨晋玲, 王帅鹏, 王晶晶, 朱银芳, 杨富华. 基于谐振式微悬臂梁结构的高灵敏生化传感器的制作方法. CN: CN103303862A, 2013-09-18.
[51] 杨晋玲, 赵晖, 骆伟, 袁泉, 杨富华. 一种微机械谐振器及其制作方法. CN: CN103281048A, 2013-09-04.
[52] 赵晖, 杨晋玲",null,"杨富华. MEMS振荡器. CN: CN103227612A, 2013-07-31.
[53] 杨晋玲, 王帅鹏, 王晶晶, 杨富华. 基于谐振式微悬臂梁结构的高灵敏生化传感器. CN: CN102735564A, 2012-10-17.
[54] 朱银芳, 魏伟伟, 毛旭, 杨晋玲, 杨富华. 一种快速射频微机械开关. CN: CN102623253A, 2012-08-01.
[55] 毛旭, 方志强, 杨晋玲, 杨富华. 基于局域加热技术的圆片级低温键合系统及装置. CN: CN102502481A, 2012-06-20.
[56] 赵晖, 杨晋玲, 骆伟, 杨富华. MEMS振荡器. NL: CN102447447A, 2012-05-09.
[57] 郑海洋, 杨晋玲, 杨富华. 用于微机电系统器件的圆片级三维封装方法. CN: CN102363520A, 2012-02-29.
[58] 毛旭, 杨晋玲, 杨富华. 一种提高光刻胶曝光精度的方法. CN: CN102354087A, 2012-02-15.
[59] 张逢新, 杨晋玲, 朱银芳. 基于光压效应的红外光子探测方法. CN: CN102252753A, 2011-11-23.
[60] 毛旭, 杨晋玲, 杨富华. 基于金锡合金键合的圆片级低温封装方法. CN: CN102130026A, 2011-07-20.
[61] 杨晋玲, 解婧, 刘云飞, 杨富华. 一种防止MEMS器件结构层材料被电化学腐蚀的方法. CN: CN101905858A, 2010-12-08.
[62] 杨晋玲, 刘云飞, 解婧, 杨富华. 大规模防止MEMS器件结构层材料被电化学腐蚀的方法. CN: CN101905857A, 2010-12-08.
[63] 唐龙娟, 杨晋玲, 解婧, 李艳, 杨富华. 采用光刻和干法刻蚀制作倾斜侧壁二氧化硅结构的方法. CN: CN101863447A, 2010-10-20.
[64] 杨晋玲, 刘云飞, 解婧, 杨富华. 一种超高真空多功能综合测试系统. CN: CN101846635A, 2010-09-29.
[65] 杨晋玲, 周威, 周美强, 朱银芳, 杨富华. 微机电系统机械组元可靠性评估的测试装置及方法. CN: CN101813590A, 2010-08-25.
[66] 杨晋玲, 周美强, 周 威, 唐龙娟, 朱银芳, 杨富华. 适用于激光共聚焦测量装置的光学窗口片. CN: CN201383013Y, 2010-01-13.
[67] 杨晋玲, 周 威, 杨富华. 微机电系统薄膜材料力学性能与可靠性测试方法和装置. CN: CN101520385A, 2009-09-02.

近年来代表性文章：
（1） Distinct Akhiezer Damping Effects on Multi-Frequency Whispering Gallery Mode Resonators, 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), 2021, 通讯作者
（2） Gold nanoparticles amplified microcantilever biosensor for detecting protein biomarkers with high sensitivity, Sensors and Actuators a-Physical, 2021, 通讯作者
（3） A Novel Lamé Mode RF-MEMS Resonator with High Quality Factor, International Journal of Mechanical Sciences, 2021, 通讯作者
（4） Highly sensitive biosensor based on a microcantilever and alternating current electrothermal technology, J. Micromech. and Microeng., 2021, 通讯作者
（5） A Switchable High-performance Rf-MeMS Resonator with flexible frequency Generations, Scientific Reports, 2020, 通讯作者
（6） Batch Fabrication of Silicon Nanometer Tip Using Isotropic ICP Etch, Micromachines, 2020, 通讯作者
（7） Novel Narrowband RF MEMS Filters, J. Micromech. and Microeng., 2020, 通讯作者
（8） A Novel High Q Lamé-Mode Bulk Resonator with Low Bias Voltage, Micromachines, 2020, 通讯作者
（9） Distinct Akhiezer Damping Effects on Multi-Frequency Whispering Gallery Mode Resonators, The 34th International Conference on Micro Electro Mechanical Systems, 2020, 通讯作者
（10） a novel multiple-frequency rf-mems resonator based on the whispering gallery modes, IEEE Trans. Electr. Dev.., 2019, 通讯作者
（11） 3D-encapsulated VHF MEMS resonator with high frequency stability and low vibration sensitivity, Sensors and Actuators A: Physical, 2019, 通讯作者
（12） Enhanced Binding Efficiency of Microcantilever Biosensor for the Detection of Yersinia, Sensors, 2019, 通讯作者
（13） a novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing, J. Micromech. Microeng., 2018, 通讯作者
（14） Frequency stability of 3D encapsulated VHF MEMS resonator, IEEE IFCS（International Frequency Control Symposium）, 2018, 通讯作者
（15） A Novel multiple-frequency RF-MEMS resonator with optimized electrode design, IEEE IFCS（International Frequency Control Symposium）, 2018, 通讯作者
（16） RF MEMS Resonant Devices for Wireless Communication, China Semiconductor Technology International Conference 2018， CSTIC 2018, 2018, 通讯作者
（17） Reliability testing of a 3D encapsulated VHF MEMS resonator, Journal of Semiconductors, 2018, 通讯作者
（18） A low feed-through 3D vacuum packaging technique with silicon vias for RF MEMS resonators, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2017, 通讯作者
（19） design and characterization of a 3D encapsulation with silicon vias for radio frequency micro-electromechanical system resonator, Chin. Phys. B, 2017, 通讯作者
（20） A High Accuracy Cantilever Array Sensor for Early Liver Cancer Diagnosis, Biomedical Microdevices, 2016, 通讯作者
（21） A zero-level vacuum encapsulation technique with less parasitic effect for VHF MEMS resonators, Sensors & Actuators: A, 2016, 通讯作者

[1] Wenli Liu, Yujie Lu, Zeji Chen, Qianqian Jia, Junyuan Zhao, Bo Niu, Wei Wang, Yalu Hao, Yinfang Zhu, Jinling Yang, Fuhua Yang, Fabio Di Pietrantonio, Lanju Mei. A GHz Silicon-Based Width Extensional Mode MEMS Resonator with Q over 10,000. SENSORS (BASEL, SWITZERLAND). 2023, 23(8): https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10143676/.
[2] 杨晋玲. A Novel Defect Detection Sensor Based on Lorentz Force. JOURNAL OF ELECTRICAL ENGINEERING & TECHNOLOGY[J]. 2023, [3] Jia, Qianqian, Chen, Zeji, Liu, Wenli, Yang, Jinling, Zhu, Yinfang, Yang, Fuhua. A Novel Extensional Bulk Mode Resonator with Low Bias Voltages. ELECTRONICS[J]. 2022, 11(6): http://apps.webofknowledge.com/CitedFullRecord.do?product=UA&colName=WOS&SID=5CCFccWmJJRAuMzNPjj&search_mode=CitedFullRecord&isickref=WOS:000776811500001.
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（1） 纳米生物医学光电子学前沿, study on nano-biological-medical and optoelectronics, 科学出版社, 2013-05, 第 2 作者
（2） 纳米技术百科全书, Encyclopedia of Nanotechnology, Springer, 2016-05, 第 1 作者
（3） mems actuators driven by lorentz force, Springer Nature Singapore Pte Ltd., 2017-06, 第 1 作者
（4） MEMS handbook, Springer Nature Singapore Pte Ltd., 2017-10, 第 1 作者
（5） 无线网络微传感器芯片系统及其在水环境监测中的应用, wireless sensors internet and its application in water enviroment, 微纳米技术系列丛书, 2018-08, 第 1 作者

   

（1）High Quality Factor Aluminum Nitride MEMS Resonator   2021-07-12
（2）A Novel Ring-shaped Extensional Wine-glass Mode RF-MEMS Resonator with High Quality   2021-07-12
（3）A Capacitively Transduced Bulk Acoustic Wave MEMS Resonator with Low Bias Voltages   2021-04-25
（4）Distinct Akhiezer Damping Effects on Multi-Frequency Whispering Gallery Mode Resonators   2021-01-25
（5）A Novel High-performance RF-MEMS Resonator with Multiple Mode Generations   2019-09-23
（6）新型高性能RF MEMS谐振器   第三届微米纳米技术应用创新大会   2019-07-07
（7）面向无线通信的RF MEMS谐振器件    中国微米纳米技术学会第二十届学术年会暨第九届国际会议   2018-10-19
（8）A Novel Scanning Force Microscopy Probe with Self-Actuation and Piezo-Resistive Sensing   2018-09-24
（9）A Novel Multiple-Frequency RF-MEMS Resonator With Optimized Electrode Design   2018-05-22
（10）Frequency stability of 3D encapsulated VHF MEMS resonator   2018-05-22
（11）RF MEMS resonant devices for wireless communication   2018-03-11
（12）High Sensitive Cantilever Sensor With Branched DNA Probes for multi-DNA Detection   2017-07-17
（13）A vacuum encapsulation technique with novel parasitic optimization methods for vhf mems resonators   MEMS国际会议   1. J. C. Zhao, Q. Yuan, W. Luo, X. Kan, J. Y. Zhang, J. L. Yang, and F. H. Yang   2016-01-24
（14）A linear low driving voltage MEMS actuator with large lateral stroke driven by Lorentz force   2. X. D. Lv, W. W. Wei, J. Y. Zhang, J. L. Yang, and F. H. Yang   2015-06-21
（15）Frequency Stability of RF Oscillator with MEMS–Based Encapsulated Resonator   2015-06-21
（16）Cantilever-based Sensors for Biomedical Applications   2015-03-13
（17）Nonlinearity Characteristic of Disk Resonator   2014-11-02
（18）Cantilever Array Sensor for Multiple Liver Cancer Biomarkers Detection   2014-11-02
（19）Sn-rich Au-Sn hermetic packatging at wafer-level and its application in SPR sensor   2013-04-07
（20）A Novel Analytical Method for Designing Microelectromechanical Filters   2012-11-04
（21）A new scheme for detecting infrared photon with high sensitivity using microcantilever   2012-07-08
（22）Two new methods to improve the lithography precision for SU-8 photoresist on glass substrate   2012-01-29
（23）Reliable low-cost fabrication and characterization methods for micromechanical disk resonators   2011-06-06
（24）A simple method to effectively restrain electrochemical corrosion of polycrystalline silicon layers by HF-based solutions   2011-01-23

已指导学生

周威  博士研究生  080903-微电子学与固体电子学  

唐龙娟  硕士研究生  080903-微电子学与固体电子学  

张逢新  硕士研究生  080903-微电子学与固体电子学  

刘云飞  博士研究生  080903-微电子学与固体电子学  

解婧  博士研究生  080903-微电子学与固体电子学  

现指导学生

郑海洋  硕士研究生  430110-集成电路工程  

朱银芳  博士研究生  080903-微电子学与固体电子学  

魏伟伟  硕士研究生  080903-微电子学与固体电子学  

骆伟  硕士研究生  080903-微电子学与固体电子学  

方志强  硕士研究生  080903-微电子学与固体电子学  

王晶晶  硕士研究生  080903-微电子学与固体电子学  

吕兴东  硕士研究生  080903-微电子学与固体电子学  

赵晖  博士研究生  080903-微电子学与固体电子学  

王帅鹏  博士研究生  080903-微电子学与固体电子学